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    • 10. 发明授权
    • Apparatus for evaluating a sample including a self-supporting thin film
    • 用于评估样品薄膜的装置和方法,包括支柱的格子,同时防止支柱的偏转
    • US06563570B1
    • 2003-05-13
    • US09570161
    • 2000-05-11
    • Masashi Okada
    • Masashi Okada
    • G01B902
    • G01B11/16
    • Apparatus are disclosed for evaluating a thin film of a sample such as a reticle blank. A representative embodiment includes a chamber defining an opening over which the sample, mounted in the sample-support mechanism, is placed such that a pneumatic pressure established in the chamber is transmitted to the thin film of the sample. A deflection-measuring device measures an amount of deflection exhibited by the thin film whenever the pressure is being applied from the chamber to the sample. An optical system irradiates the thin film of the sample, mounted to the chamber, with light to cause light reflected from the thin film to be incident on the deflection-measuring device. The sample-support mechanism includes a substrate that contacts the sample in a manner allowing access of a desired region of the thin film to the pressure, and a retainer that secures the sample and substrate to the opening in the chamber in a manner such that substrate and sample are sandwiched between the retainer and the chamber.
    • 公开了用于评估样品(例如掩模版坯料)的薄膜的装置。 代表性的实施例包括限定开口的室,安装在样品支撑机构中的样品置于其上,使得建立在室中的气动压力传递到样品的薄膜。 每当压力从室施加到样品时,偏转测量装置测量薄膜所呈现的偏转量。 光学系统用光照射安装到室上的样品的薄膜,使得从薄膜反射的光入射到偏转测量装置上。 样品支撑机构包括以允许薄膜的期望区域进入压力的方式接触样品的基底,以及将样品和基底固定到腔室中的开口的保持器,使得基底 并且样品夹在保持器和腔室之间。