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    • 5. 发明授权
    • Capacitance type vibration sensor
    • 电容式振动传感器
    • US08627725B2
    • 2014-01-14
    • US13055514
    • 2009-02-19
    • Takashi KasaiYoshitaka Tsurukame
    • Takashi KasaiYoshitaka Tsurukame
    • H04R19/00
    • H04R19/04H04R19/005H04R31/006
    • A capacitance type vibration sensor has a substrate including a hollow portion, a vibration electrode plate, which is arranged facing the hollow portion at an upper surface side of the substrate and which vibrates by sound pressure, and a fixed electrode plate which is arranged facing the vibration electrode plate and which is opened with a plurality of acoustic perforations passing therethrough in a thickness direction. The capacitance type vibration sensor has an air path, which communicates a space between the vibration electrode plate and the fixed electrode plate to the hollow portion, between an upper surface of the substrate and a lower surface of the vibration electrode plate in at least one part of a periphery of the hollow portion. The capacitance type vibration sensor also has an air escape portion, which is a perforation or a groove formed in the substrate.
    • 电容式振动传感器具有包括中空部的基板,在基板的上表面侧面对中空部并且通过声压而振动的振动电极板;以及固定电极板, 振动电极板,并且在厚度方向上开有多个穿过其的声孔。 电容型振动传感器具有将基板的上表面与振动电极板的下表面之间的至少一部分的振动电极板和固定电极板之间的空间连通到空心部的空气路径 的中空部分的周边。 电容式振动传感器还具有排气部,该空气排出部是在基板上形成的穿孔或槽。
    • 6. 发明授权
    • Acoustic sensor and microphone
    • 声传感器和麦克风
    • US08542851B2
    • 2013-09-24
    • US13105440
    • 2011-05-11
    • Takashi Kasai
    • Takashi Kasai
    • H04R25/00
    • H04R19/005H04R1/06
    • An acoustic sensor includes a semiconductor substrate with a back chamber, a conductive diaphragm arranged on an upper side of the semiconductor substrate, an insulating fixed film fixed on an upper surface of the semiconductor substrate covering the conductive diaphragm with a gap, a conductive fixed electrode film arranged on the insulating fixed film facing the diaphragm, an extraction wiring extracted from the conductive fixed electrode film, and an electrode pad to which the extraction wiring is connected. The acoustic sensor converts an acoustic vibration to change electrostatic capacitance between the conductive diaphragm and the conductive fixed electrode film. A plurality of acoustic perforations are opened in a back plate including the insulating fixed film and the conductive fixed electrode film. An opening rate of the plurality of acoustic perforations is smaller in the extraction wiring and a region in the vicinity thereof than in other regions.
    • 声传感器包括具有后室的半导体衬底,布置在半导体衬底的上侧的导电膜,固定在覆盖导电膜的半导体衬底的上表面上的间隔的绝缘固定膜,导电固定电极 布置在面向隔膜的绝缘固定膜上的膜,从导电固定电极膜提取的引出布线和连接引出布线的电极焊盘。 声传感器转换声振动以改变导电隔膜和导电固定电极膜之间的静电电容。 在包括绝缘固定膜和导电固定电极膜的背板中打开多个声孔。 多个声孔的开口率在提取布线及其附近的区域比其他区域小。
    • 7. 发明授权
    • Plant operation data monitoring apparatus
    • 工厂运行数据监控装置
    • US07680627B2
    • 2010-03-16
    • US12060609
    • 2008-04-01
    • Takashi KasaiTsuneo WatanabeKensuke KawaiKeiko Ootani
    • Takashi KasaiTsuneo WatanabeKensuke KawaiKeiko Ootani
    • G06F11/30G21C17/00
    • G05B23/0235G05B2219/31356Y02P90/14
    • A most recent value of data fetched from a plant facility is temporarily stored and extracted and then stored in a plant history data table. On another front, a monitoring point for monitoring a plant error is registered in response to an operator request. A monitoring point is used as a key to select and register a main variable point having a strong correlation from the plant history data table. A statistical upper/lower limit function is defined on the basis of time-series plant data of monitoring points and main variable points. By referring to information in a table in which a limit value function is stored, the limit value is periodically matched with the content of a plant-data most-recent-value table. If the most recent value is outside the limit range, deviation information is stored in a determination result table. If a new plant error occurs, an error signal and the content of the determination result table is outputted and displayed.
    • 临时存储和提取从工厂设备获取的最新数据值,然后将其存储在工厂历史数据表中。 在另一方面,响应于操作者的请求登记了用于监视工厂错误的监视点。 监视点被用作从工厂历史数据表中选择和注册具有强相关性的主变量点的关键点。 根据监测点和主要变量点的时间序列工厂数据定义统计上下限函数。 通过参照其中存储限值函数的表中的信息,极限值与工厂数据最近值表的内容周期性匹配。 如果最近的值超出限制范围,则偏差信息被存储在确定结果表中。 如果发生新的工厂错误,则输出并显示错误信号和确定结果表的内容。
    • 8. 发明申请
    • PLANT OPERATION DATA MONITORING APPARATUS
    • 工厂操作数据监控装置
    • US20090248179A1
    • 2009-10-01
    • US12060609
    • 2008-04-01
    • Takashi KasaiTsuneo WatanabeKensuke KawaiKeiko Ootani
    • Takashi KasaiTsuneo WatanabeKensuke KawaiKeiko Ootani
    • G05B19/048
    • G05B23/0235G05B2219/31356Y02P90/14
    • To provide a plant operation data monitoring apparatus capable of monitoring a plant error with high accuracy without requiring a skilled plant operator.A most recent value of data fetched from each sensor in a plant facility is temporarily stored and extracted and then stored in a plant history data table A5. On another front, a monitoring point for monitoring a plant error is registered in response to an operator request. A monitoring point is used as a key to select and register a main variable point having a strong correlation from the plant history data table. A statistical upper/lower limit function is defined on the basis of time-series plant data of monitoring points and main variable points. By referring to information in a table in which a limit value function is stored, the limit value is periodically matched with the content of a plant-data most-recent-value table A3. If the most recent value is outside the limit range, deviation information is stored in a determination result table A13. If a new plant error occurs, an error signal and the content of the determination result table is outputted and displayed.
    • 提供能够高精度地监视工厂误差的工厂操作数据监视装置,而不需要熟练的工厂操作员。 临时存储并提取从工厂设备中的每个传感器获取的数据的最新值,然后将其存储在工厂历史数据表A5中。 在另一方面,响应于操作者的请求登记了用于监视工厂错误的监视点。 监视点被用作从工厂历史数据表中选择和注册具有强相关性的主变量点的关键点。 根据监测点和主要变量点的时间序列工厂数据定义统计上下限函数。 通过参照其中存储限制值函数的表中的信息,极限值与工厂数据最近值表A3的内容周期性匹配。 如果最近的值超出限制范围,则偏差信息被存储在确定结果表A13中。 如果发生新的工厂错误,则输出并显示错误信号和确定结果表的内容。