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    • 2. 发明授权
    • Static relay and communication device using static relay
    • 静态继电器和通讯装置采用静态继电器
    • US06753487B2
    • 2004-06-22
    • US10030493
    • 2002-05-20
    • Mitsuru FujiiMinoru SakataTomonori SekiShobu Sato
    • Mitsuru FujiiMinoru SakataTomonori SekiShobu Sato
    • H01H5700
    • H01H59/0009H01H1/20
    • Fixed contacts (23A, 24A) are provided on the upper surface of a silicon substrate (21). Signal lines (23, 24) electrically continuous with the fixed contacts (23A, 24A) are provided so as to pass through a silicon substrate (21) from the obverse surface to the reverse surface thereof. Bumps (32, 33) electrically continuous with the signal lines (23, 24) are provided on the reverse surface of the silicon substrate (21). A fixed electrode (22) is provided on both sides of the fixed contacts (23A, 24A). Wiring conductors (30, 31) electrically continuous with the fixed electrode (22) are provided so as to pass through the silicon substrate (21) from the obverse surface to the reverse surface thereof. Bumps (34, 35) electrically continuous with the wiring conductors (30, 31) are provided on the reverse surface of the silicon substrate (21). Through holes (26, 27) of the silicon substrate (21) through which the signal lines (23, 24) are passed and through holes (28, 29) of the silicon substrate (21) through which the wiring conductors (30, 31) are passed are hermetically sealed by a movable substrate (40) or a cap (50).
    • 固定触点(23A,24A)设置在硅衬底(21)的上表面上。 提供与固定触点(23A,24A)电连续的信号线(23,24),以从其正面穿过硅基板(21)到其背面。 在硅衬底(21)的背面设有与信号线(23,24)电连续的凸起(32,33)。 固定电极(22)设置在固定触点(23A,24A)的两侧。 提供与固定电极(22)电连续的接线导体(30,31),以从其正面穿过硅衬底(21)到其反面。 在硅基板(21)的背面上设有与布线导体(30,31)电连续的凸起(34,35)。 信号线(23,24)通过的硅衬底(21)的通孔(26,27)和硅衬底(21)的通孔(28,29),布线导体(30,31) )通过可动基板(40)或盖(50)气密密封。