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    • 6. 发明授权
    • Polishing apparatus
    • 抛光设备
    • US5655954A
    • 1997-08-12
    • US564520
    • 1995-11-29
    • Toshio OishiShoichi ShinMasafumi TsunadaMasahiro IshidaYasukazu Mase
    • Toshio OishiShoichi ShinMasafumi TsunadaMasahiro IshidaYasukazu Mase
    • B08B1/04B24B37/10B24B37/34B24B53/007B24B53/017B24B55/06H01L21/00B24B7/00B24B9/00
    • B24B37/107B08B1/04B24B37/345B24B53/017B24B55/06H01L21/67028
    • Provided is a polishing apparatus which comprises a polishing mechanism for polishing a wafer taken out from a cassette, an attaching-detaching device for attaching to and detaching the wafer from the polishing mechanism, a device for cleaning the polished wafer, and a transportation device for transporting the wafer between the cassette, polishing mechanism, attaching-detaching device, and cleaning device. These devices are arranged individually in compartments. A working chamber is divided into a plurality of compartments by means of partitioning devices. A device for polishing a workpiece is set in one of the compartments. The apparatus is also provided with communication devices for internally connecting the adjacent compartments which are divided by the partitioning devices. The apparatus may further comprise devices for individually controlling the respective internal pressures of the compartments or a device for generating an air flow in the form of a laminar flow in each of the compartments.
    • 本发明提供一种研磨装置,其特征在于,包括:研磨从盒取出的晶片的研磨机构,将所述晶片与所述研磨机构连接并从所述研磨机构拆下的安装拆卸装置, 在盒,抛光机构,安装拆卸装置和清洁装置之间传送晶片。 这些设备分别安装在隔间中。 工作室通过分隔装置分成多个隔间。 用于抛光工件的装置设置在隔室中的一个中。 该装置还设置有用于内部连接由分隔装置划分的相邻隔室的通信装置。 该装置还可以包括用于单独控制隔室的相应内部压力的装置或用于在每个隔间中产生层流形式的空气流的装置。
    • 7. 发明授权
    • Grinding apparatus
    • 研磨机
    • US5660581A
    • 1997-08-26
    • US620335
    • 1996-03-22
    • Shoichi ShinMasafumi TsunadaYasuhiko Nagakura
    • Shoichi ShinMasafumi TsunadaYasuhiko Nagakura
    • B24B37/12B24B45/00B24B55/00H01L21/304B24B7/22
    • B24B37/12B24B27/0023B24B45/006
    • There is provided a grinding apparatus which assures that a polishing cloth is automatically exchanged with a new one for a short time while suppressing the generation of abrasive grain and cut chips.The grinding apparatus includes a lower turn table rotatably supported about a vertical shaft, an upper turn table detachably disposed on the lower disc and having an abrasive cloth adhesively attached to the surface thereof, a first turn table holder for holding an unused upper turn table having a new abrasive cloth preliminary adhesively attached thereto, a second turn table holder for holding used upper turn table disconnected from the lower turn table, a turn table exchanging device including chucking means capable of seizing the turn table, serving to convey the turn table to the second turn table holder, and moreover, to take the an upper turn table from first turn table holder and place it on the lower turn table, and position determining and stopping means for stopping the turn table at the rotational angular position where the chucking means of the turn table exchanging device is engageable.
    • 提供了一种磨削装置,其确保在抑制磨粒和切屑的产生的同时,在短时间内自动更换抛光布。 该研磨装置包括:可旋转地支承在垂直轴上的下转台,可拆卸地设置在下盘上并具有粘附在其表面上的研磨布的上转台;第一转台保持器,用于保持未使用的上转台, 预先附着在其上的新的研磨布,用于保持与下转台分离的使用的上转台的第二转台支架,具有能够卡住转台的夹持装置的转台交换装置,用于将转台传送到 第二转台支架,此外,从第一转台架上取下上转台并将其放置在下转台上,以及位置确定和停止装置,用于在转盘的止动装置的旋转角位置处停止转台 转台交换装置可接合。