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    • 1. 发明申请
    • Chemical Supply System
    • 化学供应系统
    • US20080295871A1
    • 2008-12-04
    • US11691220
    • 2007-03-26
    • Takahisa NittaNobuhiro MikiYoshiaki Yamaguchi
    • Takahisa NittaNobuhiro MikiYoshiaki Yamaguchi
    • B08B3/08
    • B01F15/042B01F5/0471B01F5/0475B01F15/0203B01F15/024B01F15/0244B01F2215/0096F04B43/0054F04B43/02F04B43/046F04F7/00F16K7/123G05D11/138H01L21/67051
    • A chemical supply system comprises, as principal elements, a chemical storage tank in which a liquid chemical for cleaning is stored in the state of its formulated concentrate, a chemical supply apparatus connected to the chemical storage tank for positively performing chemical supply, a piping system connected to the chemical supply apparatus to form a supply flow passage that is a passage for ultrapure water which the liquid chemical is to be mixed with, a pair of discharge nozzles disposed at end portions of the piping system so as to oppose surfaces of a wafer set in a cleaning chamber to supply a cleaning liquid onto the surfaces. Thereby, remarkable miniaturization/simplification of a cleaning liquid supply system including chemical tanks is intended, it is made possible easily and rapidly to compound and supply a cleaning liquid at an accurate chemical concentration, and particles or the like being generated and mixing in a cleaning liquid, are suppressed to the extremity.
    • 作为主要要素的化学品供给系统包括:化学品储罐,其中用于清洗的液体化学品以其配制的浓缩物的状态储存;化学品供应装置,连接到化学品储存罐用于积极地进行化学品供应;管道系统 连接到化学物质供给装置,形成作为液体化学品混合的超纯水通道的供给流路,配置在管道系统的端部的一对排出喷嘴,以与晶片的表面相对 设置在清洁室中以将清洁液体供应到表面上。 因此,旨在使包含化学池的清洗液供给系统显着的小型化/简化,可以容易且快速地将化学浓度精确化合并提供清洗液,并在清洁中产生和混合 液体,被压制到肢体。
    • 2. 发明申请
    • Chemical supply system
    • 化学供应系统
    • US20070127309A1
    • 2007-06-07
    • US11586500
    • 2006-10-26
    • Takahisa NittaNobuhiro MikiYoshiaki Yamaguchi
    • Takahisa NittaNobuhiro MikiYoshiaki Yamaguchi
    • B01F11/00B01F15/02B01F15/06
    • B01F15/042B01F5/0471B01F5/0475B01F15/0203B01F15/024B01F15/0244B01F2215/0096F04B43/0054F04B43/02F04B43/046F04F7/00F16K7/123G05D11/138H01L21/67051
    • A chemical supply system comprises, as principal elements, a chemical storage tank in which a liquid chemical for cleaning is stored in the state of its formulated concentrate, a chemical supply apparatus connected to the chemical storage tank for positively performing chemical supply, a piping system connected to the chemical supply apparatus to form a supply flow passage that is a passage for ultrapure water which the liquid chemical is to be mixed with, a pair of discharge nozzles disposed at end portions of the piping system so as to oppose surfaces of a wafer set in a cleaning chamber to supply a cleaning liquid onto the surfaces. Thereby, remarkable miniaturization/simplification of a cleaning liquid supply system including chemical tanks is intended, it is made possible easily and rapidly to compound and supply a cleaning liquid at an accurate chemical concentration, and particles or the like being generated and mixing in a cleaning liquid, are suppressed to the extremity.
    • 作为主要要素的化学品供给系统包括:化学品储罐,其中用于清洗的液体化学品以其配制的浓缩物的状态储存;化学品供应装置,连接到化学品储存罐用于积极地进行化学品供应;管道系统 连接到化学物质供给装置,形成作为液体化学品混合的超纯水通道的供给流路,配置在管道系统的端部的一对排出喷嘴,以与晶片的表面相对 设置在清洁室中以将清洁液体供应到表面上。 因此,旨在使包含化学池的清洗液供给系统显着的小型化/简化,可以容易且快速地将化学浓度精确化合并提供清洗液,并在清洁中产生和混合 液体,被压制到肢体。
    • 5. 发明授权
    • Chemical supply system
    • 化学供应系统
    • US06764212B1
    • 2004-07-20
    • US09436637
    • 1999-11-09
    • Takahisa NittaNobuhiro MikiYoshiaki Yamaguchi
    • Takahisa NittaNobuhiro MikiYoshiaki Yamaguchi
    • B01F1504
    • B01F15/042B01F5/0471B01F5/0475B01F15/0203B01F15/024B01F15/0244B01F2215/0096F04B43/0054F04B43/02F04B43/046F04F7/00F16K7/123G05D11/138H01L21/67051
    • A chemical supply system comprises, as principal elements, a chemical storage tank in which a liquid chemical for cleaning is stored in the state of its formulated concentrate, a chemical supply apparatus connected to the chemical storage tank for positively performing chemical supply, a piping system connected to the chemical supply apparatus to form a supply flow passage that is a passage for ultrapure water which the liquid chemical is to be mixed with, a pair of discharge nozzles disposed at end portions of the piping system so as to oppose surfaces of a wafer set in a cleaning chamber to supply a cleaning liquid onto the surfaces. Thereby, remarkable miniaturization/simplification of a cleaning liquid supply system including chemical tanks is intended, it is made possible easily and rapidly to compound and supply a cleaning liquid at an accurate chemical concentration, and particles or the like being generated and mixing in a cleaning liquid, are suppressed to the extremity.
    • 作为主要要素的化学品供给系统包括:化学品储罐,其中用于清洗的液体化学品以其配制的浓缩物的状态储存;化学品供应装置,连接到化学品储存罐用于积极地进行化学品供应;管道系统 连接到化学物质供给装置,形成作为液体化学品混合的超纯水通道的供给流路,配置在管道系统的端部的一对排出喷嘴,以与晶片的表面相对 设置在清洁室中以将清洁液体供应到表面上。 因此,旨在使包含化学池的清洗液供给系统显着的小型化/简化,可以容易且快速地将化学浓度精确化合并提供清洗液,并在清洁中产生和混合 液体,被压制到肢体。
    • 6. 发明授权
    • Tablet apparatus
    • 平板电脑
    • US07400319B2
    • 2008-07-15
    • US11051289
    • 2005-02-04
    • Naomi NakayamaKazuo ImaiYoshiaki YamaguchiIsamu Saito
    • Naomi NakayamaKazuo ImaiYoshiaki YamaguchiIsamu Saito
    • G06F3/043
    • G06F3/016G06F3/045
    • A pair of piezoelectric substrates, the length of which is shorter than the length of one side in the longitudinal direction of the operation panel or the supporting board, is respectively fixed to one side from the diagonal position along the longitudinal direction. At the time of detecting an inputting operation, a drive voltage is applied and the entire operation panel or the supporting board is vibrated. Even when the four corners of the operation panel or the supporting board are supported by the housing for accommodating the tablet apparatus or supported by the display device so that the vibration of the four corners is restricted, since either of the pair of piezoelectric substrates, which becomes a vibration source, a feeling of inputting operation can be transmitted to an operator by the vibration, the amplitude of which is not less than a predetermined value, irrespective of the inputting operation position.
    • 长度比操作面板或支撑板的长度方向上的一侧的长度短的一对压电基板分别从纵向的对角线位置固定在一侧。 在检测到输入操作时,施加驱动电压,整个操作面板或支撑板振动。 即使当操作面板或支撑板的四个角由用于容纳平板设备的壳体或由显示装置支撑的壳体支撑,使得四个角的振动受到限制时,由于一对压电基板中的任一个 成为振动源,不管输入操作位置如何,可以通过振幅不小于预定值的振动将操作感觉发送给操作者。
    • 9. 发明授权
    • Screen-printing metal mask plate and method of resin-sealing vibrating part
    • 丝网印刷金属掩模板和树脂密封振动部分的方法
    • US07026180B2
    • 2006-04-11
    • US11083253
    • 2005-03-17
    • Kazuo ImaiIsamu SaitoYoshiaki YamaguchiNaomi Nakayama
    • Kazuo ImaiIsamu SaitoYoshiaki YamaguchiNaomi Nakayama
    • H01L21/00B28B1/00
    • G06F3/016G06F3/041H05K3/1225H05K3/284
    • A squeegee is slid over a metal mask plate so as to fill a sealing resin in a resin inflow space through a through hole, and the sealing resin, deposited on an outer surface of an electronic part that includes a vibrating part, is thermally set. A through hole that corresponds to an electronic part is formed in a metal mask plate. The through hole includes a lower smaller through hole and an upper larger through hole communicating with an upper side of the lower smaller through hole, and a step portion is formed within the through hole. A relief recess is provided in a region of a metal mask plate including at least a projected region in which an operating area is projected onto a surface of the metal mask plate opposing the touch panel in a state in which the metal mask plate covers the touch panel.
    • 将刮板滑过金属掩模板,以通过通孔填充树脂流入空间中的密封树脂,并且将热沉积在包括振动部件的电子部件的外表面上的密封树脂。 在金属掩模板中形成对应于电子部件的通孔。 通孔包括下部较小通孔和与较小通孔的上侧连通的上部较大通孔,并且在通孔内形成台阶部。 在金属掩模板的区域中,在金属掩模板的至少一个突出区域中设置有一个凸起凹槽,在该区域中,在金属掩模板覆盖触摸的状态下操作区域投射到与触摸面板相对的金属掩模板的表面上 面板。
    • 10. 发明授权
    • Styrene-based resin compositions and molded articles thereof
    • 苯乙烯类树脂组合物及其成型体
    • US6153698A
    • 2000-11-28
    • US100498
    • 1998-06-19
    • Tatsuya KannoShigeyuki YoshidaTakashi AraiYoshiaki Yamaguchi
    • Tatsuya KannoShigeyuki YoshidaTakashi AraiYoshiaki Yamaguchi
    • C08L25/06C08L83/04C08F8/00C08L47/00C08L83/00
    • C08L25/06C08L83/04
    • A modified styrene-based resin composition in which silicone powder is added to styrene-based resin.One can obtain styrene-based resin compositions remarkably improved in impact resistance and sliding properties, particularly in permanence during sliding. In particular, when the base material is transparent polystyrene-based resin, it was found that the present invention can provide styrene-based resin compositions having excellent impact strength, sliding properties, and transparency without spoiling their fluidity and thermostability. In addition, use of rubber modified polystyrene as styrene-based resin permits styrene-based resin compositions exhibiting well-balanced impact resistance, sliding properties, heat distortion resistance, molding properties, workability, and surface appearance of molded articles. Thus, the present invention enables general-purpose styrene-based rigid thermoplastics to be used for various applications, that is, it allows improvement of such thermoplastics particularly in adaptability to injection molding, extrusion molding and the like, and thereby will contributes to extension of the range of their application.
    • 将苯乙烯类树脂中加入硅酮粉末的改性苯乙烯类树脂组合物。 可以获得显着提高抗冲击性和滑动性的苯乙烯类树脂组合物,特别是在滑动时的耐久性。 特别地,当基材为透明聚苯乙烯类树脂时,发现本发明可以提供具有优异冲击强度,滑动性能和透明性的苯乙烯类树脂组合物,而不会破坏它们的流动性和热稳定性。 此外,使用橡胶改性聚苯乙烯作为苯乙烯类树脂,可以使成型品的耐冲击性,滑动性,耐热变形性,成型性,加工性,表面外观均匀的苯乙烯类树脂组合物。 因此,本发明使通用的基于苯乙烯的刚性热塑性塑料能够用于各种应用,即,可以改进这种热塑性塑料,特别是在注射成型,挤出成型等的适应性方面,从而有助于延长 其应用范围。