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    • 1. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20100237438A1
    • 2010-09-23
    • US12706056
    • 2010-02-16
    • Takafumi IKEDATakahito NakazawaHideaki MaekawaYuuichi TatsumiToshifumi Minami
    • Takafumi IKEDATakahito NakazawaHideaki MaekawaYuuichi TatsumiToshifumi Minami
    • H01L29/06
    • H01L23/585H01L2924/0002H01L2924/00
    • A semiconductor device has a circuit element region formed on a semiconductor substrate, and a protective pattern formed so as to surround the circuit element region. The protective pattern comprises a first element separation region formed on the semiconductor substrate, a second element separation region formed on the semiconductor substrate and having a width smaller than that of the first element separation region, a first element region formed between the first element separation region and the second element separation region, a first gate layer formed on the first element separation region, a wiring layer formed on the first gate layer, a passivation layer formed above the wiring layer, a second element region, an insulation film formed on the second element region, and a second gate layer formed on the insulation film, the first element separation region, the first element region, the second element separation region and the second element region being located in this order from the nearer side of the circuit element region.
    • 半导体器件具有形成在半导体衬底上的电路元件区域和形成为围绕电路元件区域的保护图案。 保护图案包括形成在半导体衬底上的第一元件分离区域,形成在半导体衬底上的第二元件分离区域,其宽度小于第一元件分离区域的宽度;第一元素区域,形成在第一元素分离区域 和第二元件分离区域,形成在第一元件分离区域上的第一栅极层,形成在第一栅极层上的布线层,形成在布线层上方的钝化层,第二元素区域,形成在第二栅极层上的绝缘膜 元件区域和形成在绝缘膜上的第二栅极层,第一元件分离区域,第一元件区域,第二元件分离区域和第二元件区域从电路元件区域的更靠近的方向定位。
    • 3. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20110204426A1
    • 2011-08-25
    • US12871362
    • 2010-08-30
    • Shoko KIKUCHITakafumi IKEDAKazuhiro SHIMIZU
    • Shoko KIKUCHITakafumi IKEDAKazuhiro SHIMIZU
    • H01L27/105
    • H01L29/42324H01L21/28273H01L29/7881
    • According to one embodiment, a semiconductor device includes a stacked structure that is formed by laminating a first insulating film, first conductive layer, second insulating film and second conductive layer on a semiconductor substrate and in which the first and second conductive layers are connected with a via electrically, an interlayer insulating film formed to electrically separate the second conductive layer into a first region including a connecting portion with the first conductive layer and a second region that does not include the connecting portion, a first contact plug formed on the first region and a second contact plug formed on the second region. An isolation insulating film is buried in portions of the substrate, first insulating film and first conductive layer in one peripheral portion on the second region side of the stacked structure and the second contact plug is formed above the isolation insulating film.
    • 根据一个实施例,半导体器件包括通过在半导体衬底上层叠第一绝缘膜,第一导电层,第二绝缘膜和第二导电层而形成的层叠结构,其中第一和第二导电层与 通过电连接,形成为将第二导电层电分离成包括与第一导电层的连接部分的第一区域和不包括连接部分的第二区域的层间绝缘膜,形成在第一区域上的第一接触插塞和 形成在第二区域上的第二接触塞。 隔离绝缘膜被埋置在层叠结构的第二区域侧的一个周边部分中的基板,第一绝缘膜和第一导电层的部分中,并且第二接触插塞形成在隔离绝缘膜上方。