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    • 5. 发明授权
    • Method of designing a semiconductor device
    • 设计半导体器件的方法
    • US06949387B2
    • 2005-09-27
    • US10626718
    • 2003-07-25
    • Hideo MiuraMakoto OgasawaraHiroo MasudaJun MurataNoriaki Okamoto
    • Hideo MiuraMakoto OgasawaraHiroo MasudaJun MurataNoriaki Okamoto
    • H01L21/762H01L27/08H01L21/66
    • H01L21/76205H01L21/76202H01L27/0802
    • A technique for a semiconductor device is provided that includes forming circuit regions on a device formation region and device isolation regions on a semiconductor substrate, a ratio of the width of a device isolation region to the width of adjacent circuit regions thereto is set at 2 to 50. A design method is also provided and includes conducting measurements such as of thicknesses of a pad oxide film and a nitride film, the internal stress of the nitride film, the width of both device formation and isolation regions, the depth of the etched portion of the nitride film for forming the groove in a device isolation region, conducting stress analysis in the proximity of the groove due to thermal oxidation, and setting values pertaining to the width of the device formation region and of the device isolation region which do not lead to occurrence of dislocation.
    • 提供了一种半导体器件的技术,其包括在器件形成区域上形成电路区域和半导体衬底上的器件隔离区域,器件隔离区域的宽度与其相邻电路区域的宽度的比率被设置为2至 还提供了一种设计方法,包括进行测量,例如衬垫氧化膜和氮化物膜的厚度,氮化物膜的内部应力,器件形成和隔离区域的宽度,蚀刻部分的深度 的用于在器件隔离区域中形成沟槽的氮化物膜,由于热氧化而在沟槽附近进行导电应力分析,以及与器件形成区域的宽度和不引导的器件隔离区域的设定值 发生脱位。