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1. 发明专利

JP2012015300A Vacuum adsorption apparatus and method of manufacturing the same 有权
标题翻译：真空吸附装置及其制造方法
公开(公告)号：JP2012015300A
公开(公告)日：2012-01-19
申请号：JP2010150019
申请日：2010-06-30
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社
发明人： UMETSU MOTOHIRO , SATO SHINYA , OGURA TOMOYUKI
IPC分类号： H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a vacuum adsorption apparatus that can enhance the processing precision of a substrate with securing a space for an air intake groove.SOLUTION: A vacuum adsorption apparatus has a support portion formed of a ceramic dense sintered body having an air intake groove formed in a recess portion, and a porous mount portion for a porous body formed of ceramic powder and binding material. The ceramic powder is bound by the binding material to achieve the porous body, and the porous body and the support portion are joined to each other by the porous binding material to form the porous mount portion in the recess portion. The mount portion and a part of at least the side wall surface of the recess portion and the air intake groove are joined to each other through no gap therebetween.
摘要翻译：要解决的问题：提供一种能够通过确保进气槽的空间来提高基板的加工精度的真空吸附装置。解决方案：真空吸附装置具有由陶瓷致密烧结体形成的支撑部分，该陶瓷致密烧结体具有形成在凹部中的进气槽，以及由陶瓷粉末和粘合材料形成的多孔体的多孔安装部分。陶瓷粉末通过粘合材料结合以实现多孔体，并且多孔体和支撑部分通过多孔粘合材料彼此接合以在凹部中形成多孔安装部分。凹部和吸气槽的至少侧壁面的安装部分和一部分通过其间没有间隙而彼此接合。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2009224402A Vacuum suction device 有权
标题翻译：真空吸尘装置
公开(公告)号：JP2009224402A
公开(公告)日：2009-10-01
申请号：JP2008064669
申请日：2008-03-13
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社
发明人： UMETSU MOTOHIRO , SATO SHINYA , SHIOGAI TATSUYA
IPC分类号： H01L21/683
摘要： PROBLEM TO BE SOLVED: To prevent clogging of a porous material in a placement portion to enhance uniform suction force, and to obtain a long service life for a device. SOLUTION: The vacuum suction device is provided with: a placement portion made of a ceramics porous material for sucking and holding a substrate; a recessed suction portion made of a ceramics porous material surrounding the periphery of the placement portion; and a support portion which includes suction holes, communicating with blow holes of the recessed suction portion and supports the recessed suction portion. The placement portion and the support portion are connected to the recessed suction portion substantially and directly without clearance, and the average diameter of the blow holes in the recessed suction portion is larger than that in the placement portion. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了防止多孔材料在放置部分中的堵塞以增强均匀的抽吸力，并且为了获得用于装置的长的使用寿命。解决方案：真空吸附装置设有：用于吸附和保持基板的由陶瓷多孔材料制成的放置部分; 由包围所述放置部的周边的陶瓷多孔质体构成的凹部吸入部; 以及支撑部，其包括与所述凹入的吸入部的吹出孔连通并支撑所述凹部的吸入部的吸引孔。放置部分和支撑部分基本直接地没有间隙地连接到凹入的吸入部分，并且凹入的吸入部分中的气孔的平均直径大于放置部分中的平均直径。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2008211098A Vacuum suction apparatus, manufacturing method thereof and method of sucking object to be sucked 有权
标题翻译：真空吸尘装置，其制造方法及取消对象的方法
公开(公告)号：JP2008211098A
公开(公告)日：2008-09-11
申请号：JP2007048115
申请日：2007-02-27
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社
发明人： UMETSU MOTOHIRO , SATO SHINYA
IPC分类号： H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a vacuum suction apparatus capable of reducing step difference of a portion where the external circumferential end of a wafer is placed, placing the wafer with a sufficient suction force in carrying or processing the wafer, and being used for a long time. SOLUTION: The vacuum suction apparatus is provided with: a supporting portion 1 made of dense ceramic; a placing section 2 made of a ceramic/glass composite material integrally bonded to the supporting portion 1 without substantially causing gap; and a circular coating portion 3 provided on the surface of the external circumferential portion of the placing portion 2 and made of frame-sprayed ceramic of porous rate 3-10%. In the vacuum suction apparatus, the frame-sprayed ceramic of the circular coating portion 3 enters into the pores of the placing portion 2 so as to exhibit an anchor effect. The depth of the placing portion 2 of the frame-sprayed ceramic into the pores is 50 μm or more. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种真空抽吸装置，其能够减小放置晶片的外周端的部分的台阶差，将晶片以足够的吸力放置在承载或加工晶片中，并且使用了很长时间。解决方案：真空抽吸装置设有：由致密陶瓷制成的支撑部分1; 由陶瓷/玻璃复合材料制成的放置部分2，其一体地结合到支撑部分1上而基本上不产生间隙; 以及设置在放置部2的外周部的表面上并由多孔率为3-10％的框架喷涂陶瓷制成的圆形涂覆部分3。在真空抽吸装置中，圆形涂覆部分3的框架喷涂陶瓷进入放置部分2的孔隙中以显示锚定效果。框架喷涂陶瓷的放置部2的深度为50μm以上。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2008028169A Vacuum suction device 有权
标题翻译：真空吸尘装置
公开(公告)号：JP2008028169A
公开(公告)日：2008-02-07
申请号：JP2006199432
申请日：2006-07-21
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社
发明人： UMETSU MOTOHIRO , SATO SHINYA
IPC分类号： H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a vacuum suction device capable of grinding a wafer into a very flat surface. SOLUTION: The device is provided with a placing section 11 consisting of a ceramic/glass porous composite having a placing surface 11a for vacuum-sucking a workpiece W to be sucked; a peripheral edge portion 12 consisting of a circular ceramic/glass porous composite surrounding the outer circumference of the placing portion; and a supporting section 13 provided with air inlet ports 14 communicating to air pores of the placing section and supporting the placing section and the peripheral edge portion. The vacuum suction device vacuum-sucks the workpiece to be sucked on substantially the same plane of the placing surface 11a and the peripheral edge surface 12a to grind the workpiece. The peripheral edge portion 12 has a structure in which air closing pores are substantially uniformly distributed. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够将晶片研磨成非常平坦的表面的真空吸附装置。解决方案：该装置设置有由陶瓷/玻璃多孔复合材料组成的放置部分11，该复合材料具有用于真空吸附要被吸收的工件W的放置表面11a; 外围边缘部分12，其由围绕放置部分的外圆周的圆形陶瓷/玻璃多孔复合材料组成; 以及支撑部13，其设置有与放置部的空气孔连通并支撑放置部和周边部的空气吸入口14。真空吸附装置将被吸附在被放置面11a和周缘面12a的大致同一平面上的工件进行真空吸附，研磨工件。周缘部12具有大致均匀分布有空气闭孔的结构。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2007246321A Low thermal expansion ceramic joined body having hollow structure 有权
标题翻译：具有中空结构的低热膨胀陶瓷加固体
公开(公告)号：JP2007246321A
公开(公告)日：2007-09-27
申请号：JP2006070678
申请日：2006-03-15
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社
发明人： UMETSU MOTOHIRO , SATO SHINYA , MIYATA NOBORU
IPC分类号： C04B37/00 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a low thermal expansion ceramic joined body having hollow structure excellent airtightness in which the joining defect of low thermal expansion ceramic members is eliminated. SOLUTION: The low thermal expansion ceramic joined body having the hollow structure is formed by joining the joining surfaces of the low thermal expansion ceramic members to each other with a joining layer comprising a low thermal expansion ceramic joining material having a melting temperature lower than that of the ceramic members. The joining layer has 5-60 μm thickness (t) in a direction vertical to the joining surface, a corner part formed from a side wall surface adjacent to one joining surface and a planar surface adjacent to another joining surface and facing the hollow part is covered with a joining material meniscus having a recessed curved surface and a ratio δ/t of the distance (δ) between the corner part of the side wall surface and the shortest part on the joining material meniscus surface to the thickness (t) of the joining material is ≥0.5 and ≤5.0. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种中空结构的低热膨胀陶瓷接合体，其中消除了低热膨胀陶瓷构件的接合缺陷，具有优异的气密性。解决方案：具有中空结构的低热膨胀陶瓷接合体通过将低热膨胀陶瓷构件的接合表面彼此接合而形成，接合层包括熔融温度较低的低热膨胀陶瓷接合材料比陶瓷件高。接合层在垂直于接合面的方向上具有5-60μm的厚度（t），从与一个接合表面相邻的侧壁表面形成的角部和与另一个接合表面相邻并面向中空部的平面表面是覆盖有具有凹陷曲面的接合材料弯月面和侧壁表面的拐角部分与接合材料弯月面之间的最短部分之间的距离（δ）的比δ/ t相对于接合材料≥0.5和≤5.0。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2005212000A Vacuum suction device 审中-公开
标题翻译：真空吸尘装置
公开(公告)号：JP2005212000A
公开(公告)日：2005-08-11
申请号：JP2004019205
申请日：2004-01-28
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社
发明人： SATO SHINYA , OGURA TOMOYUKI , UMEKI AKIKO , SHIOGAI TATSUYA
IPC分类号： B25J15/06
摘要： PROBLEM TO BE SOLVED: To largely improve flat processing accuracy of a wafer, by eliminating a level difference and clearance of a joining part of a placing part and a support part by forming an eaves-shaped thin part overhanging to the placing part side in an upper surface inner peripheral part of the support part of a vacuum suction device.
SOLUTION: This vacuum suction device has the placing part composed of a porous body having an opening air hole and the support part composed of a dense body. The device is constituted so that the placing part and the support part are substantially closely and directly joined, and the eaves-shaped thin part overhanging to the placing part side is formed in the upper surface inner peripheral part of the support part.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了大大提高晶片的平面加工精度，通过形成向配置部件伸出的檐形薄部件，消除了放置部件和支撑部件的接合部分的水平差和间隙在真空抽吸装置的支撑部分的上表面内周部分中。该真空抽吸装置具有由具有开口孔的多孔体和由致密体构成的支撑部构成的放置部。该装置构造成使得放置部分和支撑部分基本上紧密且直接地接合，并且在支撑部分的上表面内周部分中形成悬垂到放置部分侧的檐形薄部分。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2005205507A Vacuum-sucking device and its manufacturing method 审中-公开
标题翻译：真空吸收装置及其制造方法
公开(公告)号：JP2005205507A
公开(公告)日：2005-08-04
申请号：JP2004012057
申请日：2004-01-20
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社
发明人： SATO SHINYA , OGURA TOMOYUKI , UMEKI AKIKO , SHIOGAI TATSUYA
IPC分类号： B25J15/06 , B23Q3/08 , B24B37/30 , H01L21/304 , H01L21/677 , H01L21/68 , H01L21/683 , B24B37/04
摘要： PROBLEM TO BE SOLVED: To provide a vacuum sucking device and its manufacturing method for maintaining the flatness of a sucking surface even in use, by having the sucking surface superior in the flatness. SOLUTION: This vacuum-sucking device 10 is composed of a placing part 11 having a porous structure having an opening air hole and sucking and holding a wafer W by its surface, and a support part 12 for supporting the placing part 11. A recess-projection part 18 is formed at the inside bottom of the support part 12, and a recess-projection part 19 fitted to this recess-projection part 18, is formed on an under surface of the placing part 11, and the placing part 11 and the support part 12 are substantially closely and directly joined. A groove part 13a communicating with the opening air hole possessed by the placing part 11 is arranged on a projecting wall 18a of the recess-projection part 18 as a sucking air hole for generating vacuum suction force in the placing part 11. A first through-hole 13b is arranged in the support part 12 so as to communicate with this groove part 13a. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种真空吸附装置及其制造方法，其特征在于，即使在使用中也能够使吸附面的平坦度维持在平坦度以上。该真空吸引装置10由具有开放空气孔的多孔结构的放置部11及其表面吸附保持晶片W构成，以及用于支撑放置部11的支撑部12。凹部突起部18形成在支撑部12的内侧底部，并且嵌合在该凹凸部18上的凹凸部19形成在放置部11的下表面上， 11和支撑部分12基本上紧密地并且直接接合。与放置部11所具有的开口孔连通的槽部13a配置在凹凸部18的突出壁18a上，作为在放置部11中产生真空吸引力的吸气孔。孔13b布置在支撑部分12中以便与该沟槽部分13a连通。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2005046969A Tool for vacuum suction 有权
标题翻译：真空吸尘器工具
公开(公告)号：JP2005046969A
公开(公告)日：2005-02-24
申请号：JP2003283053
申请日：2003-07-30
申请人： Nihon Ceratec Co Ltd , Taiheiyo Cement Corp , 太平洋セメント株式会社 , 株式会社日本セラテック
发明人： MORI MASAHIRO , SASAKI SHUNICHI , ISHINO TOMOHIRO , OGURA TOMOYUKI , SATO SHINYA , UMEKI AKIKO , SHIOGAI TATSUYA
IPC分类号： B23Q3/08 , H01L21/304 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To sufficiently wash the inside of a placement member by preventing a cleaning solvent from leaking out from a boundary portion between the placement member and a support member in washing. SOLUTION: This tool for vacuum suction comprises the placement member 1 formed of a porous body for placing a sucked matter F thereon, the support member 2 having a recessed part 2a for storing the placement member 1 formed on one principal plane side thereof and supporting the placement member in the state of storing the placement member in the recessed part 2a, and an adhering layer 3 for joining the placement member 1 to the support member 2 which is interposed between a lower surface opposed to an upper surface in contact with the sucked matter F on the placement member 1 and the bottom surface of the recessed part 2a in the support member 2. The tool also comprises an annular sealing layer 4 obtained by fusing and solidifying a glass powder containing at least an organic adhesive agent on the bottom surface of the recessed part 2a in the support member 2 so as to surround a boundary area between the placement member and the adhesive layer 3 along the peripheral wall surface of the recessed part 2a. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过在洗涤中防止清洁溶剂从放置构件和支撑构件之间的边界部分泄漏而充分地清洗放置构件的内部。解决方案：该真空抽吸用工具包括：由多孔体形成的放置构件1，用于在其上放置吸附物F，支撑构件2具有用于容纳形成在其一个主平面侧上的放置构件1的凹部2a 并且在将放置构件保存在凹部2a的状态下支撑放置构件，以及用于将配置构件1接合到支撑构件2的粘合层3，支撑构件2插入在与上表面相对的下表面之间，载置构件1上的吸附物F和支撑构件2的凹部2a的底面。该工具还包括环状密封层4，其通过将至少含有有机粘合剂的玻璃粉末熔融固化在支撑构件2中的凹部2a的底面，以围绕放置构件和粘合剂层3之间的边界区域沿着周边壁面凹部2a。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2004358598A Vacuum suction device 审中-公开
公开(公告)号：JP2004358598A
公开(公告)日：2004-12-24
申请号：JP2003159138
申请日：2003-06-04
申请人： Nihon Ceratec Co Ltd , Taiheiyo Cement Corp , 太平洋セメント株式会社 , 株式会社日本セラテック
发明人： MORI MASAHIRO , SASAKI SHUNICHI , ISHINO TOSHIHIRO , SATO SHINYA , OGURA TOMOYUKI , SHIOGAI TATSUYA
IPC分类号： B25J15/06 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a vacuum suction device which prevents leakage of washing liquid from a clearance in cleaning, and sufficiently removes and cleans contaminants such as grinding chips, falling abrasive grains, etc. residing in a porous body on a placing part. SOLUTION: This suction device 1 is furnished with: the placing part 2 made of the porous body to place a sucked article 5; a supporting part 3 to surround and support an outer edge of the placing part 2; and a suction part 4 formed on the supporting part 3. At least an outer edge side surface of the placing part 2 is previously treated to seal pores on it, and, thereafter, the placing part 2 is connected to the supporting part 3. COPYRIGHT: (C)2005,JPO&NCIPI

10. 发明专利

JP2011011929A Ceramic porous sintered compact, component for semiconductor manufacturing apparatus and shower plate, and method of producing porous sintered compact 有权
标题翻译：陶瓷多孔烧结紧固件，半导体制造装置和淋浴板的组件以及生产多孔烧结紧固件的方法
公开(公告)号：JP2011011929A
公开(公告)日：2011-01-20
申请号：JP2009155813
申请日：2009-06-30
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社
发明人： UMETSU MOTOHIRO , SATO SHINYA
IPC分类号： C04B38/00 , C04B35/10 , C04B35/50 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a ceramic porous sintered compact having excellent corrosion resistance in which the occurrence of particles is little.SOLUTION: The ceramic porous sintered compact is formed by the bonding of ceramic powder molded particles having ≥5 MPa collapse strength and containing rare earth element oxide. The ceramic powder molded particle has ≥10 μm average particle diameter and contains ≥10 mass% rare earth element oxide. The ceramic porous sintered compact has 10-40% porosity, ≥20 GPa Young's modulus and ≥15 MPa bending strength.
摘要翻译：要解决的问题：提供一种具有优异的耐腐蚀性的陶瓷多孔烧结体，其中颗粒的出现少。溶液：陶瓷多孔烧结体通过粘结具有≥5MPa塌陷强度的陶瓷粉末模制颗粒形成，并含有稀土元素氧化物。陶瓷粉末成型粒子的平均粒径≥10μm，含有≥10质量％的稀土元素氧化物。陶瓷多孔烧结体具有10-40％的孔隙率，≥20GPa的杨氏模量和≥15MPa的弯曲强度。

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