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    • 1. 发明授权
    • Optical waveguide device for loss absorption and fabrication method
thereof
    • 用于损耗吸收的光波导器件及其制造方法
    • US6160945A
    • 2000-12-12
    • US153147
    • 1998-09-14
    • Tae-hyung RheeWoo-hyuk JangEun-ji KimYong-woo Lee
    • Tae-hyung RheeWoo-hyuk JangEun-ji KimYong-woo Lee
    • G02B6/10C03C17/32C03C17/34G02B6/122G02B6/13G02B6/136C03B37/023
    • C03C17/3405C03C17/32G02B6/122G02B6/136
    • An optical waveguide device for loss absorption, and a fabrication method thereof, are provided. The optical waveguide device for loss absorption includes: a substrate of a predetermined material; a lower cladding formed on the substrate; an optical waveguide formed on the lower cladding, and formed of a material having a refractive index greater than a refractive index of the lower cladding; an upper cladding formed so as to completely cover the optical waveguide; and an absorption layer formed of a material having refractive index greater than a refractive index of the upper cladding, and formed on the upper cladding to a thickness which can absorb a reflected or radiated optical signal. As described above, an absorption layer capable of absorbing light is formed in the waveguide device upon fabricating the optical waveguide, thus minimizing or removing loss due to reflection and radiation of an optical signal.
    • 提供了一种用于损耗吸收的光波导器件及其制造方法。 用于损耗吸收的光波导装置包括:预定材料的基板; 形成在基板上的下包层; 形成在所述下包层上的光波导,并且由折射率大于所述下包层的折射率的材料形成; 形成为完全覆盖光波导的上包层; 以及由折射率大于上部包层的折射率的材料形成的吸收层,并且形成在上部包层上至可以吸收反射或辐射光学信号的厚度。 如上所述,在制造光波导时,在波导器件中形成能够吸收光的吸收层,从而最小化或去除由于光信号的反射和辐射引起的损耗。
    • 3. 发明授权
    • Optical power divider and fabrication method thereof
    • 光功率分配器及其制造方法
    • US06404957B1
    • 2002-06-11
    • US09186358
    • 1998-11-05
    • Sang-yung ShinHyun-chae SongSang-yun YiWoo-hyuk JangTae-hyung Rhee
    • Sang-yung ShinHyun-chae SongSang-yun YiWoo-hyuk JangTae-hyung Rhee
    • G02B626
    • G02B6/125G02B2006/1215
    • An optical power divider using a beam separator and a beam expander, and a fabrication method therefor. The optical power divider includes an input optical waveguide having an input port for receiving incident light, for guiding the light incident via the input port, a plurality of output optical waveguides having at least two output ports, for outputting the light incident via the input optical waveguide to the output ports, wherein the number of output optical waveguides is equal to that of the output ports, and a beam separator located at a branch area in which the light incident on the input optical waveguide diverges toward the output optical waveguides, the beam separator being made of a material having a refractive index lower than the core of the input and output optical waveguides, for separating the light to the output optical waveguides with a predetermined ratio. Therefore, the length of the optical power divider becomes short and insertion loss can be lowered. Also, an optical power divider for the special application, providing different splitting ratios between inner and outer output ports, can be easily designed by controlling the lengths of a side of each beam separator and beam expanders, and the splitting ratio of the output optical power of the optical power divider can be controlled. Also, the cost of fabricating the optical power divider can be reduced.
    • 一种使用光束分离器和光束扩展器的光功率分配器及其制造方法。 光功率分配器包括输入光波导,其具有用于接收入射光的输入端口,用于引导经由输入端口入射的光;多个输出光波导,具有至少两个输出端口,用于输出经由输入光学器件入射的光 波导到输出端口,其中输出光波导的数量等于输出端口的数量;以及位于入射到输入光波导的光向输出光波导发散的分支区域处的光束分离器,光束 分离器由折射率低于输入和输出光波导的芯的材料制成,用于以预定比例将光分离成输出光波导。 因此,光功率分配器的长度变短,并且可以降低插入损耗。 此外,通过控制每个光束分离器和光束扩展器的一侧的长度以及输出光焦度的分离比,可以容易地设计用于特殊应用的光功率分配器,其在内部和外部输出端口之间提供不同的分离比 的光功率分配器可以控制。 此外,可以降低制造光功率分配器的成本。
    • 4. 发明授权
    • Method of fabricating planar optical waveguides in one chamber
    • 在一个室中制造平面光波导的方法
    • US06177290B1
    • 2001-01-23
    • US09184232
    • 1998-11-02
    • Woo-hyuk JangSang-yun YiByong-gwon YouJung-hee KimTae-hyung Rhee
    • Woo-hyuk JangSang-yun YiByong-gwon YouJung-hee KimTae-hyung Rhee
    • H01L2131
    • C03C17/02C03C17/3411C03C2218/33G02B6/136G02B2006/1215
    • A method of fabricating a planar optical waveguide in one chamber, comprising the steps of depositing a cladding layer and a core layer on a substrate, depositing an etch mask layer on the core layer, and forming a photoresist pattern on the etch mask layer. An etch mask pattern is formed by etching the etch mask layer according to the photoresist pattern using a first gas which reacts with the material of the etch mask layer, and removing the first gas. An optical waveguide is formed by etching the core layer according to the etch mask pattern using a second gas which reacts with the material of the core layer in the same chamber as the chamber where the above steps were performed, and removing the photoresist pattern and the second gas. The etch mask pattern is removed using the first gas which reacts with the material of the etch mask pattern in the same chamber as the chamber where the above steps were performed, and removing the first gas, and depositing an upper cladding layer formed of the same material as the core layer on the resultant structure of the above step. Accordingly, processes for fabricating an optical waveguide can be continuously performed in one chamber, thus simplifying and automating the optical waveguide fabrication method.
    • 一种在一个室中制造平面光波导的方法,包括以下步骤:在衬底上沉积包覆层和芯层,在芯层上沉积蚀刻掩模层,以及在蚀刻掩模层上形成光致抗蚀剂图案。 通过使用与蚀刻掩模层的材料反应并且去除第一气体的第一气体,根据光致抗蚀剂图案蚀刻蚀刻掩模层来形成蚀刻掩模图案。 通过使用与在上述步骤的室相同的室中与芯层的材料反应的第二气体根据蚀刻掩模图案蚀刻芯层来形成光波导,并且去除光致抗蚀剂图案和 第二气。 使用与在其中执行上述步骤的室相同的腔室中与蚀刻掩模图案的材料反应的第一气体去除蚀刻掩模图案,并且去除第一气体,并沉积由其形成的上覆层 材料作为上述步骤的结果结构上的核心层。 因此,可以在一个室中连续地进行制造光波导的工艺,从而简化和自动化光波导制造方法。
    • 6. 发明授权
    • Hybrid optical waveguide and manufacturing method thereof
    • 混合光波导及其制造方法
    • US6026209A
    • 2000-02-15
    • US140449
    • 1998-08-26
    • Tae-hyung RheeHyung-jae LeeByong-gwon YouEun-ji Kim
    • Tae-hyung RheeHyung-jae LeeByong-gwon YouEun-ji Kim
    • G02B6/122G02B6/10G02B6/12G02B6/125G02B6/13
    • G02B6/12004G02B6/125G02B2006/12119
    • A hybrid optical waveguide having linear and curved sections through which optical signals pass, includes: a planar substrate layer; a lower cladding layer formed of a material having optical transparency in a predetermined range of optical communication wavelengths, on the planar substrate layer; a core layer formed on the lower cladding layer where the optical waveguide is formed, the waveguide constituted of the linear section formed of a first optical polymer having a higher refractive index than the lower cladding layer and the curved section formed of a second optical polymer having a higher refractive index than the first optical polymer; and an upper cladding layer formed of a material having a lower refractive index than the first and the second optical polymers, surrounding the waveguide core layer. The optical waveguide having the linear and curved sections has reduced traveling losses and optical fiber coupling losses, and minimizes the size of the waveguide cross-section.
    • 具有光信号通过的线性和弯曲部分的混合光波导包括:平面基底层; 由在光学通信波长的预定范围内具有光学透明度的材料形成的下包层; 形成在形成有光波导的下包层的芯层,由具有比下包层更高的折射率的第一光聚合物形成的线状部和由具有第二光聚合物的第二光聚合物形成的弯曲部构成的波导构成的波导管, 比第一光学聚合物更高的折射率; 以及由包围波导芯层的折射率低于第一和第二光学聚合物的材料形成的上部包层。 具有线性和弯曲部分的光波导具有降低的行进损耗和光纤耦合损耗,并且使波导横截面的尺寸最小化。
    • 7. 发明授权
    • Apparatus and method for combining optical waveguide and optical fiber
    • 用于组合光波导和光纤的装置和方法
    • US6160936A
    • 2000-12-12
    • US15497
    • 1998-01-29
    • Byong-gwon YouHyung-jae LeeTae-hyung RheeYong-woo Lee
    • Byong-gwon YouHyung-jae LeeTae-hyung RheeYong-woo Lee
    • G02B6/30G02B6/36
    • G02B6/30
    • An apparatus and a method for combining an optical waveguide and optical fibers are provided. The apparatus includes an apparatus for combining optical fibers with an optical waveguide device, including a guide rail portion for alignment including guide rails for alignment spaced apart from each other by a predetermined distance, on a flat substrate, an optical fiber array portion put on the guide rail portion for alignment when the optical fibers are combined with the optical waveguide device, including an array of grooves for arranging the optical fibers spaced apart from each other by a predetermined distance in an array pattern, and including guide grooves for alignment having a concavo-convex relationship with the guide rail portion for alignment, and an optical waveguide device chip put on the guide rail portion when the optical fibers are combined with the optical waveguide, including the optical waveguide connected to the optical fibers of the optical fiber array portion, and including guide grooves for alignment spaced apart from each other by the same distance as that by which the rails of the guide rail portion are spaced apart from each other and having a concavo-convex relationship with the guide rail portion for alignment, to the outside of an optical waveguide area in which the cores of the optical fibers of the optical fiber array portion respectively coincide with those of the optical waveguide. According to the present invention, a light source and a photodetector (required for active alignment) are not necessary. A complicated alignment process of performing an alignment with respect to an alignment axis having six degrees of freedom with submicron precision is not necessary. Also, it is possible to save time and money when attaching the optical fibers to the optical waveguide device chip.
    • 提供了一种用于组合光波导和光纤的装置和方法。 该装置包括用于将光纤与光波导装置组合的装置,包括用于对准的导轨部分,包括用于在平坦基板上彼此隔开预定距离的对准的导轨的引导轨道,将光纤阵列部分放置在 导光轨部分,用于当光纤与光波导装置组合时对准,包括用于将光纤布置在阵列图案中彼此间隔开预定距离的光纤阵列,并且包括用于对准的引导槽,具有凹槽 与用于对准的导轨部分的凸起关系,以及当光纤与包括连接到光纤阵列部分的光纤的光波导的光波导合并时放置在导轨部分上的光波导器件芯片, 并且包括彼此间隔开距离相同的导向槽 导轨部分的轨道彼此间隔开并且与导轨部分具有凹凸关系用于对准到光波导区域的外侧,其中光纤的光纤的芯 阵列部分分别与光波导的一致。 根据本发明,不需要光源和光电检测器(主动对准所需的)。 不需要进行相对于具有亚微米精度的六自由度的对准轴的对准的复杂的对准处理。 此外,当将光纤连接到光波导器件芯片时,可以节省时间和金钱。
    • 8. 发明授权
    • Optical fiber passive alignment apparatus using alignment platform
    • 光纤无源对准装置采用对准平台
    • US6118917A
    • 2000-09-12
    • US124981
    • 1998-07-30
    • Hyung-jae LeeByong-gwon YouYong-woo LeeTae-hyung Rhee
    • Hyung-jae LeeByong-gwon YouYong-woo LeeTae-hyung Rhee
    • G02B6/40G02B6/00G02B6/30
    • G02B6/30
    • An optical fiber passive alignment apparatus for passively aligning optical fibers with input/output optical waveguides of an integrated optical device includes an optical fiber array block on which the optical fibers are mounted with a uniform spacing and having alignment grooves parallel to the optical fibers, and an optical fiber fixing plate for fixing the mounted optical fibers to a substrate; an optical waveguide device chip having an input/output optical waveguide array consisting of optical waveguides corresponding to the optical fibers, for coupling with the optical fibers, and alignment holes; and an alignment platform having first alignment ridges separated by the same spacing as the alignment grooves, for coupling with the alignment grooves, alignment bumps in positions corresponding to the alignment holes, for coupling with the alignment holes, and a space between the first alignment ridges for preventing the optical fiber plate of the optical fiber block array from contacting the alignment platform. The optical fiber passive alignment apparatus does not require a light source and a photodetector, or precise alignment with respect to an alignment axis having six degrees of freedom, so that less time and cost are required for attaching optical fibers to the optical waveguide device chip.
    • 用于将光纤与集成光学器件的输入/输出光波导无源对准的光纤无源对准装置包括光纤阵列块,光纤以均匀间隔安装在光纤阵列块上,并具有与光纤平行的对准槽,以及 用于将安装的光纤固定到基板的光纤固定板; 光波导器件芯片,其具有由与光纤对应的光波导构成的输入输出光波导阵列,用于与光纤耦合,以及对准孔; 以及对准平台,其具有与所述对准槽分开相同间隔的第一对准脊,用于与所述对准槽耦合,对准所述对准孔的位置中的对准凸块,用于与所述对准孔联接,以及所述第一对准脊 用于防止光纤块阵列的光纤板与对准平台接触。 光纤无源对准装置不需要光源和光电检测器,或者相对于具有六个自由度的对准轴的精确对准,因此将光纤连接到光波导器件芯片所需的时间和成本更少。
    • 9. 发明授权
    • Method for fabricating low-loss optically active device
    • US06210867B1
    • 2001-04-03
    • US09031064
    • 1998-02-26
    • Byong-gwon YouHyung-jae LeeTae-hyung RheeYong-woo Lee
    • Byong-gwon YouHyung-jae LeeTae-hyung RheeYong-woo Lee
    • G02F135
    • G02F1/365G02B2006/12069G02B2006/12142G02B2006/12145G02B2006/12147G02B2006/12159G02F1/065
    • A method for fabricating low-loss optically active device having an optical waveguide constructed of an optical waveguide core region (non-linear core region) necessitating the non-linear effect when waveguiding an optical signal, and an optical waveguide core region (linear core region) not necessitating the non-linear effect, the method includes method for fabricating an optically active device having an optical waveguide constructed of an optical waveguide core region (non-linear core region) necessitating the non-linear effect when waveguiding an optical signal, and an optical waveguide core region (linear core region) not necessitating the non-linear effect, the method includes the steps of: forming a lower clad layer having a refractive index lower than the material of the waveguide core regions and optical transparency on a substrate, forming a linear optical polymer layer on the lower clad layer by coating linear optical polymer having a refractive index lower than the material of the lower clad layer, forming a first metal layer at a region on the lower clad layer, other than the regions where the waveguide is to be disposed, etching a linear optical polymer layer without the first metal layer formed thereon, forming a non-linear optical polymer layer on the substrate having the non-linear core region, removing the non-linear optical polymer layer stacked to be higher than the waveguide core regions, removing the first metal layer, forming a second metal layer on the waveguide from which the first metal layer is removed, removing the linear optical polymer of the non-second metal layer portion, and forming an upper clad layer on the substrate with the linear optical polymer using a material having a refractive index lower than the waveguide core regions and optical transparency. The waveguide is formed using non-linear optical polymer only at the region where the non-linear effect such as optical modulation or optical switching occurs, and is formed using linear optical polymer at the remaining regions, thereby minimizing the overall waveguiding loss of the waveguide.