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    • 5. 发明授权
    • Mask set for compensating a misalignment between patterns and method of compensating a misalignment between patterns using the same
    • 用于补偿图案之间的未对准的掩模组以及使用该图案补偿图案之间的未对准的方法
    • US06867109B2
    • 2005-03-15
    • US10750832
    • 2004-01-05
    • Soon Won HongTae Hum Yang
    • Soon Won HongTae Hum Yang
    • G03F1/00H01L23/544
    • H01L23/544H01L2223/54453H01L2924/0002Y10S438/975H01L2924/00
    • The present invention discloses a mask set for compensating for a misalignment between the patterns and method of compensating for a misalignment between the patterns. A mask set of the present invention comprises a first mask consisted of a mask substrate on which a main pattern and a plurality of sub-patterns are formed, said sub-patterns formed at a side of the main pattern; a second mask consisted of a mask substrate on which a plurality of hole patterns are formed, the hole patterns corresponded to spaces between the main pattern and the sub-patterns of the first mask, respectively when the first and second mask are overlapped to each other; and a third mask consisted of mask substrate on which a plurality of bar patterns are formed, the bar patterns corresponded to the hole patterns of the second mask, respectively when the second and third mask are overlapped to each other.
    • 本发明公开了一种用于补偿图案之间的未对准的掩模组和补偿图案之间的未对准的方法。 本发明的掩模组包括由形成有主图案和多个子图案的掩模基板构成的第一掩模,所述子图案形成在主图案的一侧; 第二掩模由其上形成有多个孔图案的掩模基板组成,当第一和第二掩模彼此重叠时,孔图案分别对应于主图案和第一掩模的子图案之间的空间 ; 以及第三掩模,其由形成有多个条形图案的掩模基板组成,当第二和第三掩模彼此重叠时,条形图案分别对应于第二掩模的孔图案。
    • 6. 发明授权
    • Mask set for compensating a misalignment between patterns
    • 用于补偿图案之间的未对准的掩模集
    • US06713883B1
    • 2004-03-30
    • US08991261
    • 1997-12-16
    • Soon Won HongTae Hum Yang
    • Soon Won HongTae Hum Yang
    • H01L23544
    • H01L23/544H01L2223/54453H01L2924/0002Y10S438/975H01L2924/00
    • The present invention discloses a mask set for compensating for a misalignment between the patterns and method of compensating for a misalignment between the patterns. A mask set of the present invention comprises a first mask consisted of a mask substrate on which a main pattern and a plurality of sub-patterns are formed, said sub-patterns formed at a side of the main pattern; a second mask consisted of a mask substrate on which a plurality of hole patterns are formed, the hole patterns corresponded to spaces between the main pattern and the sub-patterns of the first mask, respectively when the first and second mask are overlapped to each other; and a third mask consisted of mask substrate on which a plurality of bar patterns are formed, the bar patterns corresponded to the hole patterns of the second mask, respectively when the second and third mask are overlapped to each other.
    • 本发明公开了一种用于补偿图案之间的未对准的掩模组和补偿图案之间的未对准的方法。 本发明的掩模组包括由形成有主图案和多个子图案的掩模基板构成的第一掩模,所述子图案形成在主图案的一侧; 第二掩模由其上形成有多个孔图案的掩模基板组成,当第一和第二掩模彼此重叠时,孔图案分别对应于主图案和第一掩模的子图案之间的空间 ; 以及第三掩模,其由形成有多个条形图案的掩模基板组成,当第二和第三掩模彼此重叠时,条形图案分别对应于第二掩模的孔图案。