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    • 1. 发明授权
    • Pattern forming method and photomasks used therefor
    • 图案形成方法和使用的光掩模
    • US5316878A
    • 1994-05-31
    • US894519
    • 1992-06-04
    • Tadashi SaitoHideyuki Jinbo
    • Tadashi SaitoHideyuki Jinbo
    • G03F1/34G03F1/68G03F7/00G03F7/20H01L21/027G03F1/08
    • B82Y40/00B82Y10/00G03F1/34G03F1/70G03F7/0002G03F7/2022G03F7/70466
    • In a photoresist pattern formation by exposure using first and second photomasks, the first photomask has a transparent part, a rectangular opaque part having a first pair of sides and a second pair of sides, and a phase shifter, having a first edge crossing one of the first pair of sides, so that a part of the first edge is in the transparent part, and the second photomask has a transparent part, a rectangular opaque part corresponding to the rectangular opaque part of the first photomask, and a stripe-shaped opaque part corresponding to the first part of the first edge of the phase shifter. The rectangular opaque part of the first photomask is expanded in the direction of the first pair of sides, while the rectangular opaque part of the second photomask is expanded in the direction the second pair of sides. The amount of expansion is preferably not smaller than a misalignment tolerance.
    • 在通过使用第一和第二光掩模曝光的光致抗蚀剂图案形成中,第一光掩模具有透明部分,具有第一对侧面和第二对侧面的矩形不透明部分,以及移相器,其具有与 所述第一对侧面,使得所述第一边缘的一部分在所述透明部分中,并且所述第二光掩模具有透明部分,对应于所述第一光掩模的矩形不透明部分的矩形不透明部分和条形不透明部分 部分对应于移相器的第一边缘的第一部分。 第一光掩模的矩形不透明部分沿着第一对侧面的方向扩展,而第二光掩模的矩形不透明部分沿第二对侧面的方向扩展。 膨胀量优选不小于不对准公差。
    • 5. 发明授权
    • Heat exchanger of plate fin and tube type
    • 板翅和管型热交换器
    • US07578339B2
    • 2009-08-25
    • US10557604
    • 2004-05-21
    • Kunihiko KagaShinji NakadeguchiAkira IshibashiShinichi WakamotoToshinori OhteHiroki MurakamiTadashi Saito
    • Kunihiko KagaShinji NakadeguchiAkira IshibashiShinichi WakamotoToshinori OhteHiroki MurakamiTadashi Saito
    • F28F1/32
    • F28F1/325F28F1/32
    • A heat exchanger including plate fins and, the tubes fins being stacked at respective intervals relative to one another, and heat exchanger tubes penetrating the fins in a fin-stacking direction. The heat exchanger exchanges heat between fluids flowing, respectively, inside and outside the heat exchanger tubes, through the heat exchanger tubes and the fins. Each of the fins includes cut-raised portions with a bridge shape having leg and beam segments. The cut-raised portions associated with each of the heat exchanger tubes are located substantially only in a region of the fin satisfying Ws=(1−φ)Dp+φD φ>0.5, where Ws is spread width of the cut-raised portions in a direction (column direction) extending along an end of the fin on the upstream side of the second fluid, and D is outer diameter of the heat exchanger tube. Dp is alignment pitch of the heat exchanger tubes in the column direction.
    • 一种热交换器,其包括板翅片,并且所述管翅片相对于彼此以相应的间隔堆叠,以及在翅片堆叠方向上穿透所述翅片的热交换器管。 热交换器通过热交换器管和翅片在热交换器管内部和外部流动的流体之间交换热量。 每个翅片包括具有腿和梁段的桥形的切割凸起部分。 与每个热交换器管相关联的切起部分基本上仅位于满足<?in-line-formula description =“In-line formula”end =“lead”>> Ws =(1 -phi)Dp + phiD <?in-line-formula description =“In-line Formulas”end =“tail”?> <?in-line-formula description =“In-line Formulas”end =“lead”?> phi> 0.5,<?in-line-formula description =“In-line Formulas”end =“tail”?>其中Ws是沿着沿着端部延伸的方向(列方向)上的切割部分的展开宽度 翅片在第二流体的上游侧,D是热交换器管的外径。 Dp是热交换器管在列方向上的对准间距。
    • 7. 发明申请
    • Heat exchanger of plate fin and tube type
    • 板翅和管型热交换器
    • US20070163764A1
    • 2007-07-19
    • US10557604
    • 2004-05-21
    • Kunihiko KagaShinji NakadeguchiAkira IshibashiShinichi WakamotoToshinori OhteHiroki MurakamiTadashi Saito
    • Kunihiko KagaShinji NakadeguchiAkira IshibashiShinichi WakamotoToshinori OhteHiroki MurakamiTadashi Saito
    • F28F1/32
    • F28F1/325F28F1/32
    • A heat exchanger including plate fins and, the tubes fins being stacked at respective intervals relative to one another, and heat exchanger tubes penetrating the fins in a fin-stacking direction. The heat exchanger exchanges heat between fluids flowing, respectively, inside and outside the heat exchanger tubes, through the heat exchanger tubes and the fins. Each of the fins includes cut-raised portions with a bridge shape having leg and beam segments. The cut-raised portions associated with each of the heat exchanger tubes are located substantially only in a region of the fin satisfying Ws=(1−φ)Dp+φD φ>0.5,where Ws is spread width of the cut-raised portions in a direction (column direction) extending along an end of the fin on the upstream side of the second fluid, and D is outer diameter of the heat exchanger tube. Dp is alignment pitch of the heat exchanger tubes in the column direction.
    • 一种热交换器,其包括板翅片,并且所述管翅片相对于彼此以相应的间隔堆叠,以及在翅片堆叠方向上穿透所述翅片的热交换器管。 热交换器通过热交换器管和翅片在热交换器管内部和外部流动的流体之间交换热量。 每个翅片包括具有腿和梁段的桥形的切割凸起部分。 与每个热交换器管相关联的切起部分基本上仅位于满足<?in-line-formula description =“In-line formula”end =“lead”>> Ws =(1 -phi)Dp + phiD <?in-line-formula description =“In-line Formulas”end =“tail”?> <?in-line-formula description =“In-line Formulas”end =“lead”?> phi> 0.5,<?in-line-formula description =“In-line Formulas”end =“tail”?>其中Ws是沿着沿着端部延伸的方向(列方向)上的切割部分的展开宽度 翅片在第二流体的上游侧,D是热交换器管的外径。 Dp是热交换器管在列方向上的对准间距。