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    • 3. 发明申请
    • PROCESS FOR PRODUCING PHOTOVOLTAIC DEVICE
    • 生产光伏器件的方法
    • US20110092012A1
    • 2011-04-21
    • US12993252
    • 2008-10-30
    • Hiroshi MashimaKoichi AsakusaAkemi TakanoNobuki YamashitaYoshiaki Takeuchi
    • Hiroshi MashimaKoichi AsakusaAkemi TakanoNobuki YamashitaYoshiaki Takeuchi
    • H01L31/18
    • H01L31/075H01L31/03762H01L31/0463H01L31/202Y02E10/548Y02P70/521
    • A process for producing a photovoltaic device, wherein when providing an n-type amorphous silicon layer on an i-type amorphous silicon layer, a desired crystallization ratio can be achieved without reducing the deposition rate. The production process comprises a p-layer formation step of depositing a p-type amorphous silicon layer, an i-layer formation step of depositing an i-type amorphous silicon layer on the p-type amorphous silicon layer, and an n-layer formation step of depositing an n-type amorphous silicon layer on the i-type amorphous silicon layer, wherein the n-layer formation step comprises a first n-layer formation step of depositing a first n-layer on the i-type amorphous silicon layer, and a second n-layer formation step of depositing a second n-layer on the first n-layer, and the deposition conditions for the first n-layer formation step are conditions that yield a higher crystallization ratio than the deposition conditions for the second n-layer formation step, for deposition onto the same base material substrate.
    • 一种制造光电器件的方法,其中当在i型非晶硅层上提供n型非晶硅层时,可以在不降低沉积速率的情况下实现期望的结晶比。 制造方法包括沉积p型非晶硅层的p层形成步骤,在p型非晶硅层上沉积i型非晶硅层的i层形成步骤和n层形成 在i型非晶硅层上沉积n型非晶硅层的步骤,其中所述n层形成步骤包括在i型非晶硅层上沉积第一n层的第一n层形成步骤, 以及在第一n层上沉积第二n层的第二n层形成步骤,并且用于第一n层形成步骤的沉积条件是产生比第二n层的沉积条件更高的结晶比的条件 层形成步骤,用于沉积到相同的基底材料基底上。
    • 4. 发明授权
    • Lens barrel and imaging apparatus
    • 镜筒和成像装置
    • US07738195B2
    • 2010-06-15
    • US12285915
    • 2008-10-16
    • Hiroshi MashimaNaoyuki OhnoHironori ShimizuKazuhiko TakatsukaHiroaki Tojo
    • Hiroshi MashimaNaoyuki OhnoHironori ShimizuKazuhiko TakatsukaHiroaki Tojo
    • G02B7/02
    • G02B7/102G03B3/10G03B17/17G03B2217/002
    • A lens barrel includes: a plurality of lenses disposed in an outer enclosure; an imaging device that converts image light introduced through the plurality of lenses into an image signal; a first movable unit including a first movable lens and a first lens holder that holds the first movable lens; a second movable unit including a second movable lens and a second lens holder that holds the second movable lens; a first lead screw rotated by a first drive motor; a second lead screw rotated by a second drive motor; a first nut member made of a metal material threadably engaging the first lead screw and connected to the first lens holder; and a second nut member made of a metal material threadably engaging the second lead screw and connected to the second lens holder.
    • 镜筒包括:设置在外壳中的多个透镜; 将通过所述多个透镜引入的图像光转换为图像信号的成像装置; 第一可移动单元,包括第一可移动透镜和保持第一可移动透镜的第一透镜保持器; 第二可移动单元,包括第二可移动透镜和保持第二可移动透镜的第二透镜保持器; 由第一驱动马达旋转的第一导螺杆; 由第二驱动马达旋转的第二导螺杆; 由金属材料制成的第一螺母构件,其与所述第一导螺杆螺纹接合并连接到所述第一透镜架; 以及第二螺母构件,其由与第二导螺杆螺纹接合并连接到第二透镜架的金属材料制成。
    • 6. 发明申请
    • Lens barrel and imaging apparatus
    • 镜筒和成像装置
    • US20090109319A1
    • 2009-04-30
    • US12289041
    • 2008-10-20
    • Kazuhiko TakatsukaNaoyuki OhnoHironori ShimizuHiroshi Mashima
    • Kazuhiko TakatsukaNaoyuki OhnoHironori ShimizuHiroshi Mashima
    • H04N5/225
    • H04N5/2252G02B7/021G02B7/102G02B27/62G03B17/00H04N5/2254H04N5/2257
    • A lens barrel includes: a plurality of lenses disposed in an outer enclosure; and an imaging device that converts image light introduced as an image capturing signal through the plurality of lenses into an image signal. The outer enclosure has a unit assembling portion in which an imaging unit is disposed. The imaging unit includes a centering lens disposed in the bottom portion of the unit assembling portion, a pressing plate that presses the centering lens from the side opposite the bottom portion, a packing disposed on the opposite side of the pressing plate, and an imaging module having the imaging device and disposed on the opposite side of the packing to the pressing plate and pressing the packing against the pressing plate. A working hole through which an adjustment jig is inserted is formed in the peripheral side portion of the unit assembling portion.
    • 镜筒包括:设置在外壳中的多个透镜; 以及将通过多个透镜作为图像捕获信号引入的图像光转换为图像信号的成像装置。 外壳具有设置成像单元的单元组装部。 成像单元包括设置在单元组装部分的底部中的定心透镜,从与底部相对的一侧按压定心透镜的按压板,设置在按压板的相对侧上的填充物,以及成像模块 具有成像装置,并且将其放置在与压板相对的衬垫的相对侧上,并将衬垫压靠在压板上。 在单元组装部的周边部形成有插入有调整夹具的工作孔。
    • 10. 发明申请
    • High frequency plasma generator and high frequency plasma generating method
    • 高频等离子体发生器和高频等离子体发生方法
    • US20050241768A1
    • 2005-11-03
    • US10519553
    • 2003-10-01
    • Keisuke KawamuraAkira YamadaHiroshi MashimaYoshiaki Takeuchi
    • Keisuke KawamuraAkira YamadaHiroshi MashimaYoshiaki Takeuchi
    • H05H1/46C23C16/509C23F1/00H01J37/32H01L21/205H01L21/3065
    • H01J37/32155H01J37/32091
    • An object is to provide a high-frequency plasma generating apparatus and process which can further advance uniformity of the thickness of a film on a substrate with a large area in comparison with conventional apparatuses. In a reaction chamber (1), a ground electrode (3) is disposed, and a discharge electrode (2) is disposed opposite to the ground electrode (3). A substrate (4) as a processing object is placed in close contact with the ground electrode (3). A high-frequency voltage is applied to the discharge electrode (2) so as to generate plasma between the ground electrode and the discharge electrode. An RF electric power supply (15) generates a first high-frequency voltage, and outputs the generated voltage on feeding points (9) disposed on a lateral portion of the discharge electrode (2). An RF electric power supply (16) generates a second high-frequency voltage, and outputs the generated voltage on feeding points (9) disposed on another lateral portion of the discharge electrode (2). Here, the second high-frequency voltage has the same frequency as that of the first high-frequency voltage and has a phase which varies with a low-frequency signal, which is modulated by a predetermined modulation signal.
    • 本发明的目的是提供一种高频等离子体发生装置和方法,与现有的装置相比,能够进一步提高基板上膜厚度的均匀性。 在反应室(1)中设置接地电极(3),放电电极(2)与接地电极(3)相对设置。 作为处理对象的基板(4)与接地电极(3)紧密接触。 向放电电极(2)施加高频电压,以在接地电极和放电电极之间产生等离子体。 RF电源(15)产生第一高频电压,并且在放电电极(2)的侧面部分上的馈电点(9)上输出产生的电压。 RF电源(16)产生第二高频电压,并且在放电电极(2)的另一侧面部分上的馈电点(9)上输出产生的电压。 这里,第二高频电压具有与第一高频电压相同的频率,并且具有随着由预定调制信号调制的低频信号而变化的相位。