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    • 6. 发明专利
    • NONVOLATILE STORAGE DEVICE
    • JPH0786440A
    • 1995-03-31
    • JP22864593
    • 1993-09-14
    • TOSHIBA CORP
    • MATSUZAWA KAZUYAMOMOTOMI MASAKI
    • H01L21/8247H01L27/115H01L29/788H01L29/792
    • PURPOSE:To increase effective device width and obtain a large current value, by forming a gate electrode so as to fill the inside of a charge storage layer in the trench of a substrate. CONSTITUTION:A trench is formed in a semiconductor device. A titanium silicide film 6 is formed on the inner surface of the trench. N type polycrystalline silicon 7 is buried in the trench. A gate region is formed by eliminating the central part. A gate oxide film 8 and titanium oxide 9 are formed on the inner surface of the N type polycrystalline silicon 7 of the gate region. A control electrode is formed by burying N type polycrystalline silicon in the inside. A source.drain diffusion layer is formed by solid-phase diffusion from the N type polycrystalline silicon. A channel region between diffusion layers is formed on the side surface and the bottom surface in the gate region, so that the channel region has a large area as compared with the conventional one. Hence the effective device width is increased and a large current value can be obtained when the device size is reduced.