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1. 发明申请

US20020001460A1 Heater sealed with carbon wire heating element 有权
标题翻译：加热器用碳丝加热元件密封
公开(公告)号：US20020001460A1
公开(公告)日：2002-01-03
申请号：US09864196
申请日：2001-05-25
申请人： TOSHIBA CERAMICS CO., LTD. & TOKYO ELECTRON LIMITED
发明人： Sunao Seko , Tomio Konn , Tomohiro Nagata , Norihiko Saito , Hideyuki Yokoyama , Masakazu Kobayashi , Takanori Saito , Ken Nakao
IPC分类号： H05B003/28 , H05B003/48
CPC分类号： H01L21/67103 , H01L2924/0002 , H05B3/145 , H01L2924/00
摘要： The heater sealed with a carbon wire heating element of the present invention has a carbon wire heating element sealed within a quartz glass member, said carbon wire being prepared by knitting carbon single fibers into a knitted cord or a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and a crystallite size Lc (002) thereof being 4.0 nm or more.
摘要翻译：用本发明的碳丝加热元件密封的加热器具有密封在石英玻璃构件内的碳丝加热元件，所述碳线通过将碳单纤维编织成编织绳或编织物制成，每根线具有晶体结构层间距d（002）为0.343以下，微晶尺寸Lc（002）为4.0nm以上。

2. 发明申请

US20040247302A1 Steam generator and mixer using the same 失效
标题翻译：蒸汽发生器和搅拌机使用相同
公开(公告)号：US20040247302A1
公开(公告)日：2004-12-09
申请号：US10811822
申请日：2004-03-30
申请人： TOSHIBA CERAMICS CO., LTD.
发明人： Eiichi Toya , Tomio Konn
IPC分类号： F22B029/06
CPC分类号： A61M16/109 , A61M11/042 , A61M16/1075
摘要： A steam generating apparatus includes: a liquid tank portion 1 for storing a liquid; an evaporator portion 2 which is directly connected to the liquid tank portion, heats the liquid supplied from the liquid tank portion, and generates steam; a steam storage portion 3 which is directly connected to the evaporator portion, and stores the steam generated by the evaporator portion; a passageway 4 which is directly connected to the steam storage portion and outwardly passes the generated steam; a liquid pathway 10b which is connected to the liquid tank portion, and supplies the liquid; and a heater unit 20 which is provided on one side of the evaporator portion, and heats at least the evaporator portion. The liquid tank portion 1, the evaporator portion 2, the steam storage portion 3, the passageway 4, and the liquid pathway 10b are formed within an integral member of a translucent material.
摘要翻译：蒸汽发生装置包括：用于储存液体的液体罐部分1; 蒸发器部分2直接连接到液罐部分，加热从液罐部分供应的液体，并产生蒸汽; 蒸汽存储部3，其直接连接到蒸发器部分，并且存储由蒸发器部分产生的蒸汽; 通道4，其直接连接到蒸汽存储部分并向外通过产生的蒸汽; 液体通道10b，其连接到液体罐部分，并供应液体; 以及加热器单元20，其设置在蒸发器部分的一侧，并且至少加热蒸发器部分。液体槽部1，蒸发器部2，蒸汽收容部3，通路4以及液体通路10b形成在半透明材料的整体构件内。

3. 发明申请

US20020162835A1 Heater 有权
标题翻译：加热器
公开(公告)号：US20020162835A1
公开(公告)日：2002-11-07
申请号：US10170539
申请日：2002-06-14
申请人： TOSHIBA CERAMICS CO., LTD
发明人： Eiichi Toya , Tomio Konn , Tomohiro Nagata , Norihiko Saito , Shigeru Yamamura , Ken Nakao , Takanori Saito , Hisaei Osanai , Toshiyuki Makiya
IPC分类号： H05B003/10
CPC分类号： H05B3/0047 , H01L2924/0002 , H01L2924/00
摘要： A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.
摘要翻译：所提供的棒状加热器由密封在小直径或大直径的石英玻璃管中的碳线加热元件2，在其相对端装有压缩线碳材料的小直径石英玻璃管部分3a和3b组成; 密封的端子部分10具有用于电源的连接线11a和11b，保持在被填充在小直径石英玻璃管中的压缩线碳体之间。连接线和碳线加热元件通过导线碳元件电连接。使用碳丝加热元件的棒状加热器适用于容易地提高湿式蚀刻剂或研磨剂的储罐中的试剂的温度。

4. 发明申请

US20030180034A1 Carbon wire heating object sealing heater and fluid heating apparatus using the same heater 失效
标题翻译：碳丝加热对象密封加热器和使用相同加热器的流体加热装置
公开(公告)号：US20030180034A1
公开(公告)日：2003-09-25
申请号：US10395395
申请日：2003-03-25
申请人： TOSHIBA CERAMICS CO., LTD. , TOKYO ELECTRON LIMITED
发明人： Takanori Saito , Hiroshi Mori , Akira Otsu , Norihiko Saito , Hiroyuki Honma , Eiichi Toya , Tomio Konn , Tomohiro Nagata , Ken Nakao , Kazutoshi Miura , Harunari Hasegawa , George Hoshi , Katsutoshi Ishi , Sunao Seko
IPC分类号： H05B003/02
CPC分类号： H05B3/145 , H01L2924/0002 , H01L2924/00
摘要： A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2null10null3 g/cm3 or less.
摘要翻译：提供碳丝加热元件密封加热器。其中，使用碳纤维的碳线加热元件密封在石英玻璃构件中，其中碳线加热元件的吸收水量为2×10 -3 g / cm 3以下。

5. 发明申请

US20020023919A1 Fluid heating apparatus 有权
标题翻译：流体加热装置
公开(公告)号：US20020023919A1
公开(公告)日：2002-02-28
申请号：US09819702
申请日：2001-03-29
申请人： TOSHIBA CERAMICS CO., LTD.
发明人： Eiichi Toya , Tomio Konn , Tomohiro Nagata , Sunao Seko , Takanori Saito , Kazutoshi Miura , Harunari Hasegawa , Joji Hoshi , Katsutoshi Ishii
IPC分类号： F24H001/10 , H05B003/44
CPC分类号： H05B3/44 , H05B3/42 , H05B3/46 , H05B2203/022
摘要： The fluid heating apparatus, in accordance with the present invention, developed to solve the technological problems described above is characterized by comprising at least a heating tube heating fluid to be supplied from fluid supply source, a heater section spirally formed on an outer periphery of the heating tube and a housing accommodating the heating tube and the heater section, wherein the heater section comprises a carbon wire heating element and a quartz glass tube in which the carbon wire heating element is enclosed.
摘要翻译：根据本发明开发的用于解决上述技术问题的流体加热装置的特征在于至少包括从流体供应源供应的加热管加热流体，螺旋地形成在流体供应源的外周上的加热器部分加热管和容纳加热管和加热器部分的壳体，其中加热器部分包括碳丝加热元件和封闭碳丝加热元件的石英玻璃管。

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