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1. 发明专利

JP2000264770A METHOD AND SYSTEM FOR EVALUATING SEED WIRE 失效
公开(公告)号：JP2000264770A
公开(公告)日：2000-09-26
申请号：JP7515399
申请日：1999-03-19
申请人： TOSHIBA CERAMICS CO
发明人： TSUZUKI SHINJI , ENDO TETSUYA , MIURA HIROYUKI , KONDO SHINSUKE , IWATA YASUYUKI
IPC分类号： C30B15/00
摘要： PROBLEM TO BE SOLVED: To provide a seed wire evaluation method for simply and accurately evaluating whether the seed wire to be used can appropriately be used or not, before the operation of a single crystal pulling device and also to provide a system for the method. SOLUTION: The method comprises: suspending a dummy ingot 6 having the same shape and the same weight as those of an actual semiconductor ingot with a seed wire 2; detecting the rotational speed of a servo motor 4 for rotationally driving the seed wire 2 by a motor speed detector 9; detecting the rotational speed and the rotational position of the upper end of the seed wire 2 from the detection outputs of first and second rotation sensors for detecting rotation of the upper end and lower end of the seed wire 2 respectively; checking rotational speed characteristics and rotational phase difference characteristics of the seed wire 2 from the above information to recognize the presence of nonuniformity in rotation, rotational torsion or rotational delay between the upper end and the lower end of the seed wire 2, and thereby to simply and accurately evaluate whether or not the seed wire 2 can appropriately be used for the objective single crystal pulling-up device.

2. 发明专利

JP2002093872A APPARATUS AND METHOD FOR RECOVERING ANALYZING LIQUID USED FOR MEASURING QUANTITY OF IMPURITY ON WAFER SURFACE 失效
公开(公告)号：JP2002093872A
公开(公告)日：2002-03-29
申请号：JP2000275055
申请日：2000-09-11
申请人： TOSHIBA CERAMICS CO
发明人： EBINA MAKOTO , IWAI SEIJI , KONDO SHINSUKE
IPC分类号： G01N1/00 , G01N1/28 , G01N1/32 , G01N33/00 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To improve efficiency and reliability of analyzing liquid recovery by means of an analyzing liquid recovering apparatus and the productivity of the device for wafer treatment, and at the same time, to reduce the occurrence of particles and the occupying space of the apparatus. SOLUTION: The analyzing liquid recovering apparatus is provided with an arm 7, which is provided rotatably and vertically movably above a work stage 1 and has a nozzle 8, which recovers an analyzing liquid by suction at its front end, an arm-driving device 6 which rotates, elevates, and lowers the arm 7, and a sucking and discharging device 9 which causes the nozzle 7 to suck and discharge the analyzing liquid. The recovering device is also provided with a CCD camera 4 which images the surface section w of a semiconductor wafer W, placed on the stage 1 and outputs picked-up image data and a controller 10 which is connected to the camera 4 and outputs a drive signal to the arm-driving device 6 and sucking and discharging device 9, by calculating the barycentric coordinate position of the analyzing liquid on the surface section w of the wafer W from the image data.

3. 发明专利

JP2000135676A REUSING METHOD OF ABRASIVE GRAIN OF MULTIWIRE-SAW AND DEVICE THEREFOR 失效
公开(公告)号：JP2000135676A
公开(公告)日：2000-05-16
申请号：JP31115998
申请日：1998-10-30
申请人： TOSHIBA CERAMICS CO
发明人： KONDO SHINSUKE , ENDO TETSUYA , SASAKI MICHIO , IWATA YASUYUKI , TSUJIMOTO KENICHI
IPC分类号： B24B57/02 , B28D5/04
摘要： PROBLEM TO BE SOLVED: To prevent the occurrence of wire breaking trouble by a lump of an insufficiently separating abrasive grain by reusing separated abrasive grains after being separated into an abrasive grain component and work cutting powder by making centrifugal separation force act on used slurry containing the work cutting powder. SOLUTION: Recovering slurry sent to an abrasive grain crusher 6 is concentrated by separating/removing much oil by the action of centrifugal force of a centrifugal separator 5 to become cake-like slurry. The cake-like slurry stagnating in a vessel of the abrasive grain crusher 6 becomes oil and an abrasive grain having the prescribed size by being crushed by imparting motional force by a vibration generator, and drops in a slurry mixing tank 7. The abrasive grain having the prescribed size and the oil dropped in the slurry mixing tank 7 are agitated by an agitator together with an abrasive grain supplied from a new abrasive grain hopper 22 and oil supplied from a new oil supply vessel 23 to be sent to a slurry tank 3 to be reused as slurry.

4. 发明专利

JP2004107123A Method for manufacturing vacuum silica glass parts and cutting apparatus for vacuum silica glass member to be used for the same 审中-公开
公开(公告)号：JP2004107123A
公开(公告)日：2004-04-08
申请号：JP2002270692
申请日：2002-09-17
申请人： Toshiba Ceramics Co Ltd , 東芝セラミックス株式会社
发明人： KONDO SHINSUKE , TSUZUKI SHINJI , YOSHITOME HIROSHI , EBINA MAKOTO
IPC分类号： C03B23/217 , C03B29/02 , C03B33/06
CPC分类号： C03B33/06 , C03B29/02
摘要： PROBLEM TO BE SOLVED: To provide a method for automating the process of cutting and removing a pipe for reduced pressure, the process which is conventionally a manual process so as to stabilize the quality of vacuum silica glass parts and to avoid hazardous works.
SOLUTION: A pipe to be connected to an evacuation apparatus is attached by welding to the housing of vacuum silica glass parts made of silica glass, the pipe is connected to the evacuation apparatus to reduce the pressure in the silica glass housing, then the pipe is closed to seal the silica glass housing, and the tube of the obtained structure is cut to manufacture the vacuum silica glass parts. The method includes a process of scratching the pipe by using a swing and rotation cutting apparatus having a cutting tool and a process of cutting the pipe at the scratched part by applying bending force or hitting force on the scratched part of the pipe. The cut flaw remaining in the housing by the above method can be heated to soften and shaped by pressing to obtain a smooth outer surface.
COPYRIGHT: (C)2004,JPO

5. 发明专利

JP2003286045A Apparatus for automatically perforating silica glass tube 有权
标题翻译：自动执行二氧化硅玻璃管的设备
公开(公告)号：JP2003286045A
公开(公告)日：2003-10-07
申请号：JP2002088975
申请日：2002-03-27
申请人： Toshiba Ceramics Co Ltd , 東芝セラミックス株式会社
发明人： MIZUTARI TERUHIRO , YAMAZAKI KEISUKE , KONDO SHINSUKE , EBINA MAKOTO
IPC分类号： B26F1/26 , C03B20/00 , C03B23/045 , C03B23/09 , C03B33/06
CPC分类号： C03B23/045 , C03B23/099 , Y02P40/57
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for automatically perforating a silica glass tube which assures the dimensional accuracy of pore position and pore diameter, enhances the yield, reduces a set-up time and allows the shortening of a working time. SOLUTION: The apparatus for automatically perforating a silica glass tube is provided with a work fixing means 2 to which a silica glass tube G is attached, a perforating burner 3 which perforates the silica glass tube G by heating the same, a tube end position detecting means 4 which detects the tube end position e of the silica glass tube G, a position adjusting means 5 which adjusts the relative position between the work fixing means 2 and the perforating burner 3 on the basis of tube end position information detected by the tube end position detecting means 4 so as to position the perforating burner 3 on the perforation position p of the silica glass tube G, a pressurizing means 6 which pressurizes the inside of the silica glass tube G and a pressure detecting means 7 which detects a pressure of the inside of the silica glass tube G pressurized by the pressurizing means 6. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种自动穿孔石英玻璃管的装置，其确保孔位置和孔径的尺寸精度，提高产量，减少设置时间并且缩短工作时间。解决方案：用于自动穿孔石英玻璃管的装置设置有安装石英玻璃管G的工件固定装置2，通过加热石英玻璃管G穿孔的穿孔式燃烧器3，管检测石英玻璃管G的管端位置e的端部位置检测装置4，位置调整装置5，其基于由工作固定装置2和射孔烧嘴3之间检测的管端位置信息来调节工件固定装置2和射孔燃烧器3之间的相对位置管端位置检测装置4，以将穿孔燃烧器3定位在石英玻璃管G的穿孔位置p上，对石英玻璃管G的内部加压的加压装置6和压力检测装置7，由加压装置6加压的石英玻璃管G内部的压力。（C）2004，JPO

6. 发明专利

JP2002187048A CUTTING RESISTANCE MEASUREMENT METHOD OF MACHINE TOOL 失效
公开(公告)号：JP2002187048A
公开(公告)日：2002-07-02
申请号：JP2000388941
申请日：2000-12-21
申请人： TOSHIBA CERAMICS CO
发明人： KONDO SHINSUKE , MIURA HIROYUKI
IPC分类号： G01L5/00 , B23Q17/09
摘要： PROBLEM TO BE SOLVED: To provide a cutting resistance measuring method of machine tool which can measure actual cutting resistance only. SOLUTION: This invention is related to a cutting resistance measuring method of a machine tool 1 which moves spindle 3 based on process program of control portion, does cutting process toward work by cutting tool 4 installed in spindle, measures the repulsion of axis direction as cutting resistance based on the signal of cristal piezo electric type plural load sensor 6 located around spindle. It measures the signal of load sensor as cutting resistance between both signals inputting cutting process start and completion signals from the process program.

7. 发明专利

JP2005289710A Apparatus and method of molding silica glass made vessel molded body and method of manufacturing silica glass made vessel 有权
标题翻译：二氧化硅玻璃制品模具体的成型装置及其制造方法及制造二氧化硅玻璃制品的方法
公开(公告)号：JP2005289710A
公开(公告)日：2005-10-20
申请号：JP2004106080
申请日：2004-03-31
申请人： Toshiba Ceramics Co Ltd , 東芝セラミックス株式会社
发明人： MIZUTARI TERUHIRO , KONDO SHINSUKE
IPC分类号： C03B20/00 , C30B15/10 , C30B29/06
CPC分类号： C03B19/095
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for molding a silica glass made vessel molded body capable of controlling the silica glass made vessel to have an optional thickness uniform over the whole periphery without forming the projecting and recessed part on the inner surface of the silica glass made vessel and attaining the high precision control of the optional thickness of the silica glass made vessel, a molding method thereof and a method of manufacturing the silica glass made vessel. SOLUTION: The apparatus for molding the silica glass made vessel molded body is provided with a base 1, a supporting frame 2 pivoted movably by a shaft 1a provided on the base 1, a driving means 3 for making the supporting frame erected and inclined, a plate like forming plate 4 for forming raw material powder supplied to a metallic mold, the metallic mold 6 attached to the base to be rotated and inclined and a driving means 7 for rotating and inclining the metallic mold. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种能够控制二氧化硅玻璃制造的容器的石英玻璃制成的容器成型体的设备，以在整个周边上具有任选的厚度均匀而不在内表面上形成突出和凹陷部分的二氧化硅玻璃制造的容器，并且获得了对石英玻璃制造的容器的任选厚度的高精度控制，其成型方法和制造石英玻璃制造的容器的方法。解决方案：用于成型石英玻璃的容器成型体的设备设置有基座1，由设置在基座1上的轴1a可移动地枢转的支撑框架2，用于使支撑框架竖立的驱动装置3，倾斜的板状成形板4，用于形成供给金属模具的原料粉末，金属模具6，其安装在要旋转和倾斜的基座上;以及驱动装置7，用于使金属模具旋转和倾斜。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2004051405A Apparatus for working glass tube end part and method of controlling working of glass tube end part 审中-公开
公开(公告)号：JP2004051405A
公开(公告)日：2004-02-19
申请号：JP2002209843
申请日：2002-07-18
申请人： Toshiba Ceramics Co Ltd , 東芝セラミックス株式会社
发明人： YAMAZAKI KEISUKE , KONDO SHINSUKE
IPC分类号： C03B23/09 , C03B23/207
CPC分类号： C03B23/092 , C03B23/207
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for working a glass tube end part which can stably form the end part of the glass tube into a particular shape to weld the end surfaces of glass tubes having different diameters.
SOLUTION: An image pickup part 10 picks up the end surface 202 of a quartz glass tube, an image processing part 20 measures the diameter of the end surface 202 from the picked up data, and an overall control part 30 compares the measured value with the objective value and issues a control instruction to a trowel axis numerical control part 40.
COPYRIGHT: (C)2004,JPO

9. 发明专利

JP2002144179A MACHINE TOOL 失效
公开(公告)号：JP2002144179A
公开(公告)日：2002-05-21
申请号：JP2000341884
申请日：2000-11-09
申请人： TOSHIBA CERAMICS CO
发明人： TSUJIMOTO KENICHI , YAMAZAKI KEISUKE , KONDO SHINSUKE
IPC分类号： B23Q11/12 , B23Q1/00 , B23Q1/70
摘要： PROBLEM TO BE SOLVED: To provide a machine tool capable of accurately measuring cutting resistance during cutting. SOLUTION: In this machine tool, a plurality of crystal piezoelectric load sensors 3 for detecting axial reaction received by a spindle, as cutting resistance are arranged around the spindle being interposed between a support member 2 for rotatably supporting the spindle mounted with a cutting tool, and a spindle slide 1 sliding while supporting the support member 2, and the support member and spindle slide are fastened through a preloading bolt 4 inserted through the center hole of the load sensors 3. The outer periphery of the load sensor is surrounded by heat insulating material 7 of ring plate shape formed of bulk ceramic fiber, and the heat insulating material is packaged in an annular case 8.

10. 发明专利

JP2002080293A APPARATUS AND METHOD OF PULLING-UP SINGLE CRYSTAL 失效
公开(公告)号：JP2002080293A
公开(公告)日：2002-03-19
申请号：JP2000377337
申请日：2000-12-12
申请人： TOSHIBA CERAMICS CO
发明人： MIURA HIROYUKI , IWATA YASUYUKI , KONDO SHINSUKE
IPC分类号： C30B15/26 , C30B15/20
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive apparatus and a method of pulling a high quality single crystal wherein liquid a level is optimized by reliable monitoring and handling is safe and easy. SOLUTION: The liquid level controller 32 of the pulling apparatus of the single crystal is provided with the laser oscillator 46, the spot image pickup device 47, the image processor 50, the level calculator 49 and the crucible elevator 8. The laser oscillator 46 oscillates the laser light with wavelength of

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