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1. 发明申请

WO2012129249A2 BIOLOGICALLY BASED CHAMBER MATCHING 审中-公开
标题翻译：基于生物学的腔室匹配
公开(公告)号：WO2012129249A2
公开(公告)日：2012-09-27
申请号：PCT/US2012/029847
申请日：2012-03-20
申请人： TOKYO ELECTRON LIMITED , KAUSHAL, Sanjeev , SUGISHIMA, Kenji , PATEL, Sukesh Janubhai , FILMAN, Robert , POLAK, Wolfgang , WOLFE, Orion , BURGER, Jessie
发明人： KAUSHAL, Sanjeev , SUGISHIMA, Kenji , PATEL, Sukesh Janubhai , FILMAN, Robert , POLAK, Wolfgang , WOLFE, Orion , BURGER, Jessie
IPC分类号： G06T11/20
CPC分类号： G06N99/005 , G05B23/0237 , G06F3/04842
摘要： The subject disclosure relates to automatically learning relationships among a plurality of manufacturing tool parameters as applied to arbitrary semiconductor manufacturing tools and a graphical user interface that is supported, at least in part, by an autonomous learning system. The graphical user interface can create one or more matrixes based on received data and can further generate additional matrices by transforming the one or more matrixes. A series of windows can be output, wherein the series of windows, provide performance analysis that comprises a matching between a focus chamber and a reference chamber. In an aspect, the focus chamber and the reference chamber can be different chambers. In another aspect, the focus chamber and the reference chamber can be the same chamber, which provides analysis of the deterioration in performance of the same chamber over time.
摘要翻译：本公开涉及自动学习应用于任意半导体制造工具的多个制造工具参数之间的关系以及至少部分由自主学习系统支持的图形用户界面。图形用户界面可以基于接收到的数据创建一个或多个矩阵，并且可以通过转换一个或多个矩阵来进一步生成附加矩阵。可以输出一系列窗口，其中该系列窗口提供包括聚焦室和参考室之间的匹配的性能分析。在一个方面，聚焦室和参考室可以是不同的室。在另一方面，聚焦室和参考室可以是相同的室，其提供了相同室随时间的性能劣化的分析。

2. 发明申请

WO2014074221A1 AUTONOMOUS TOOL PARAMETER IMPACT IDENTIFICATION FOR SEMICONDUCTOR MANUFACTURING 审中-公开
标题翻译：自主工具参数对半导体制造的影响识别
公开(公告)号：WO2014074221A1
公开(公告)日：2014-05-15
申请号：PCT/US2013/059715
申请日：2013-09-13
申请人： TOKYO ELECTRON LIMITED , KAUSHAL, Sanjeev
发明人： KAUSHAL, Sanjeev , PATEL, Sukesh Janubhai , POLAK, Wolfgang , WATERMAN, Aaron Archer , WOLFE, Orion
IPC分类号： H01L21/02 , G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32187 , G05B2219/45031 , G06N99/005 , Y02P90/22 , Y02P90/86
摘要： A system and method for autonomously determining the impact of respective tool parameters on tool performance in a semiconductor manufacturing system is provided. A parameter impact identification system receives tool parameter and tool performance data for one or more process runs of the semiconductor fabrication system and generates a separate function for each tool parameter characterizing the behavior of a tool performance indicator in terms of a single one of the tool parameters. Each function is then scored according to how well the function predicts the actual behavior of the tool performance indicator, or based on a determined sensitivity of the tool performance indicator to changes in the single tool parameter. The tool parameters are then ranked based on these scores, and a reduced set of critical tool parameters is derived based on the ranking. The tool performance indicator can then be modeled based on this reduced set of tool parameters.
摘要翻译：提供了一种用于自主确定各个工具参数对半导体制造系统中的工具性能的影响的系统和方法。参数影响识别系统接收用于半导体制造系统的一个或多个过程运行的工具参数和工具性能数据，并且针对每个工具参数生成表征工具性能指标的行为的单独函数，所述工具参数根据工具参数中的单个参数。然后根据功能预测工具性能指标的实际行为或者根据工具性能指标对单个工具参数的变化确定的灵敏度来评分每个功能。然后根据这些分数对工具参数进行排序，并根据排序推导出一组减少的关键工具参数。然后可以基于这组缩减的工具参数对工具性能指标进行建模。

3. 发明申请

WO2017015155A1 TOOL FAILURE ANALYSIS USING SPACE-DISTORTED SIMILARITY 审中-公开
标题翻译：使用空间失真相似性的工具故障分析
公开(公告)号：WO2017015155A1
公开(公告)日：2017-01-26
申请号：PCT/US2016/042624
申请日：2016-07-15
申请人： TOKYO ELECTRON LIMITED , TOKYO ELECTRON U. S. HOLDINGS, INC.
发明人： KAUSHAL, Sanjeev , PATEL, Sukesh , POLAK, Wolfgang , WOLFE, Orion
IPC分类号： G01B3/44
CPC分类号： G05B19/4065 , G05B2219/37242 , G05B2219/37245 , G05B2219/45031
摘要： Systems and techniques to facilitate tool failure analysis associated with fabrication processes are presented. A monitoring component determines a candidate tool failure associated with one or more fabrication tools based on sensor data generated by a set of sensors associated with the one or more fabrication tools. A signature component generates a signature dataset for the candidate tool failure based on data associated with the one or more fabrication tools. A comparison component compares the candidate tool failure to at least one previously determined tool failure based on the signature dataset and at least one other signature dataset associated with the at least one previously determined tool failure.
摘要翻译：介绍了有助于与制造工艺相关的工具故障分析的系统和技术。监测部件基于由与一个或多个制造工具相关联的一组传感器生成的传感器数据来确定与一个或多个制造工具相关联的候选工具故障。签名组件基于与一个或多个制造工具相关联的数据来生成用于候选工具故障的签名数据集。比较部件将候选工具故障与基于签名数据集的至少一个先前确定的工具故障和与至少一个先前确定的工具故障相关联的至少一个其他签名数据集进行比较。

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