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    • 8. 发明公开
    • METHOD FOR GROWING GROUP III-NITRIDE CRYSTALS IN SUPERCRITICAL AMMONIA USING AN AUTOCLAVE
    • 的程序对超临界氨拖带III族氮化物晶体用高压釜
    • EP1917382A1
    • 2008-05-07
    • EP05769394.7
    • 2005-07-08
    • The Regents of the University of CaliforniaJapan Science and Technology Agency
    • NAKAMURA, ShujiHASHIMOTO, TadaoFUJITO, Kenji
    • C30B7/10
    • C30B7/105C30B7/10C30B29/403C30B29/406Y10T117/1096
    • A method of growing high-quality, group-III nitride, bulk single crystals. The group III-nitride bulk crystal is grown in an autoclave in supercritical ammonia using a source material or nutrient that is a group III-nitride polycrystals or group-III metal having a grain size of at least 10 microns or more and a seed crystal that is a group-III nitride single crystal. The group III-nitride polycrystals may be recycled from previous ammonothermal process after annealing in reducing gas at more then 600°C. The autoclave may include an internal chamber that is filled with ammonia, wherein the ammonia is released from the internal chamber into the autoclave when the ammonia attains a supercritical state after the heating of the autoclave, such that convection of the supercritical ammonia transfers source materials and deposits the transferred source materials onto seed crystals, but undissolved particles of the source materials are prevented from being transferred and deposited on the seed crystals.
    • 生长高品质,III族氮化物,块状单晶的方法。 该III族氮化物块状晶体中在超临界氨中使用高压釜的源材料生长或营养所做的是III族金属具有至少10微米或更大的晶粒尺寸和晶种III族氮化物多晶或基团做了 是III族氮化物单晶。 该III族氮化物多晶体可以从先前的氨热过程退火后在还原性气体在更然后600℃,将高压釜可包括内部腔室被回收并填充有氨,worin的氨从所述内部腔室释放到高压釜 当氨高压釜的加热后达到一个超临界状态,求做了超临界氨转移源材料和存款的对流被转让源材料施加到晶种,但是源材料的未溶解颗粒被转移并沉积在防治 晶种。