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1. 发明公开

EP0057332A3 Symmetric beam width compression multistrip coupler 失效
标题翻译：对称梁宽度压缩多重连接器
公开(公告)号：EP0057332A3
公开(公告)日：1982-08-18
申请号：EP81306137
申请日：1981-12-24
申请人： TEXAS INSTRUMENTS INCORPORATED
发明人： Malocha, Donald C. , Wagers, Robert S. , Goll, Jeffrey H.
IPC分类号： H03H09/44 , H03H09/64
CPC分类号： H03H9/44 , H03H9/02708
摘要： A structure for compressing an acoustic surface wave into a symmetric higher energy density output surface acoustic wave. Conductive strips 1 are placed in parallel upon a piezoelectric surface 19. When a symmetric input is generated at one side of the multistrip coupler 12, the energy of the input wave is compressed into the center channel 2 and is presented at the output 5 in a single moded symmetric form.

2. 发明公开

EP0104740A3 Broad band surface acoustic wave edge deposited transducer 失效
标题翻译：宽带表面波形边缘沉积传感器
公开(公告)号：EP0104740A3
公开(公告)日：1986-02-19
申请号：EP83304744
申请日：1983-08-16
申请人： TEXAS INSTRUMENTS INCORPORATED
发明人： Wagers, Robert S.
IPC分类号： H03H09/145 , H03H03/08
CPC分类号： H03H9/14502
摘要： Disclosed is a method for fabricating and structure for a broad band surface acoustic wave (SAW) edge deposited transducer (EDT) (10) capable of frequencies in excess of 1 GHz and bandwidths in the hundreds of MHz. The method and apparatus allows fabrication of such a transducer on a semiconductor substrate (12) which is either non-piezoelectric or weakly piezoelectric. The substrate is formed such as to have a sharp, smooth edge (20) formed by the intersection of its top (18) and a side surface (16). A passivation layer (24) is deposited on the side surface of the substrate followed by a starter layer (34) to provide adhesion and nucleation sites. An inner metallic (gold, for example) electrode (26) is then deposited on the starter layer followed by a transducer layer (40) being deposited on the inner metallic electrode. An outer metallic electrode (36) is then deposited on the transducer layer a predetermined distance below the top surface of the substrate. When the transducer is excited, bulk longitudinal waves are generated in the transducer layer which couple to the longitudinal component of the surface wave in the substrate causing the SAW mode to propagate away from the transducer (10).

3. 发明公开

EP0104740A2 Broad band surface acoustic wave edge deposited transducer 失效
标题翻译： AkustischerOberflächenwellenwandlerauf der Seite eines Substrats deponiert。
公开(公告)号：EP0104740A2
公开(公告)日：1984-04-04
申请号：EP83304744.2
申请日：1983-08-16
申请人： TEXAS INSTRUMENTS INCORPORATED
发明人： Wagers, Robert S.
IPC分类号： H03H9/145 , H03H3/08
CPC分类号： H03H9/14502
摘要： Disclosed is a method for fabricating and structure for a broad band surface acoustic wave (SAW) edge deposited transducer (EDT) (10) capable of frequencies in excess of 1 GHz and bandwidths in the hundreds of MHz. The method and apparatus allows fabrication of such a transducer on a semiconductor substrate (12) which is either non-piezoelectric or weakly piezoelectric. The substrate is formed such as to have a sharp, smooth edge (20) formed by the intersection of its top (18) and a side surface (16). A passivation layer (24) is deposited on the side surface of the substrate followed by a starter layer (34) to provide adhesion and nucleation sites. An inner metallic (gold, for example) electrode (26) is then deposited on the starter layer followed by a transducer layer (40) being deposited on the inner metallic electrode. An outer metallic electrode (36) is then deposited on the transducer layer a predetermined distance below the top surface of the substrate. When the transducer is excited, bulk longitudinal waves are generated in the transducer layer which couple to the longitudinal component of the surface wave in the substrate causing the SAW mode to propagate away from the transducer (10).
摘要翻译：公开了一种用于制造和构造能够以超过1GHz的频率和数百MHz的带宽的宽带声表面波（SAW）边缘沉积换能器（EDT）（10）的方法。该方法和装置允许在非压电或弱压电的半导体衬底（12）上制造这种传感器。基板形成为具有由其顶部（18）和侧表面（16）的交点形成的尖锐的平滑边缘（20）。钝化层（24）沉积在基板的侧表面上，随后是起始层（34），以提供粘附和成核位置。然后将内金属（例如金）的电极（26）沉积在起始层上，随后沉积在内金属电极上的换能器层（40）。然后将外部金属电极（36）沉积在基板的顶表面下方预定距离的换能器层上。当换能器被激发时，在耦合到衬底中的表面波的纵向分量的换能器层中产生大量长波，导致SAW模式传播离开换能器（10）。

4. 发明公开

EP0057332A2 Symmetric beam width compression multistrip coupler 失效
标题翻译：对称波束宽度压缩机Mehrfachstreifenkoppler。
公开(公告)号：EP0057332A2
公开(公告)日：1982-08-11
申请号：EP81306137.1
申请日：1981-12-24
申请人： TEXAS INSTRUMENTS INCORPORATED
发明人： Malocha, Donald C. , Wagers, Robert S. , Goll, Jeffrey H.
IPC分类号： H03H9/44 , H03H9/64
CPC分类号： H03H9/44 , H03H9/02708
摘要： A structure for compressing an acoustic surface wave into a symmetric higher energy density output surface acoustic wave. Conductive strips 1 are placed in parallel upon a piezoelectric surface 19. When a symmetric input is generated at one side of the multistrip coupler 12, the energy of the input wave is compressed into the center channel 2 and is presented at the output 5 in a single moded symmetric form.

5. 发明授权

EP0104740B1 Broad band surface acoustic wave edge deposited transducer 失效
标题翻译：宽带表面波形边缘沉积传感器
公开(公告)号：EP0104740B1
公开(公告)日：1990-01-03
申请号：EP83304744.2
申请日：1983-08-16
申请人： TEXAS INSTRUMENTS INCORPORATED
发明人： Wagers, Robert S.
IPC分类号： H03H9/145 , H03H3/08
CPC分类号： H03H9/14502

6. 发明授权

EP0057332B1 Symmetric beam width compression multistrip coupler 失效
标题翻译：对称梁宽度压缩多重连接器
公开(公告)号：EP0057332B1
公开(公告)日：1984-09-26
申请号：EP81306137.1
申请日：1981-12-24
申请人： TEXAS INSTRUMENTS INCORPORATED
发明人： Malocha, Donald C. , Wagers, Robert S. , Goll, Jeffrey H.
IPC分类号： H03H9/44 , H03H9/64
CPC分类号： H03H9/44 , H03H9/02708

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