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1. 发明申请

US20150130561A1 PIEZOELECTRIC THIN FILM RESONATOR, FILTER AND DUPLEXER 有权
标题翻译：压电薄膜共振器，滤波器和双工器
公开(公告)号：US20150130561A1
公开(公告)日：2015-05-14
申请号：US14527335
申请日：2014-10-29
申请人： TAIYO YUDEN CO., LTD.
发明人： Shinji TANIGUCHI , Tokihiro NISHIHARA , Tsuyoshi YOKOYAMA , Takeshi SAKASHITA
IPC分类号： H03H9/70 , H03H9/17 , H03H9/54
CPC分类号： H03H9/173 , H03H9/02118 , H03H9/175 , H03H9/564 , H03H9/568 , H03H9/706
摘要： A piezoelectric thin film resonator includes: a substrate; a piezoelectric film provided on the substrate; a lower electrode and an upper electrode that sandwich at least a part of the piezoelectric film and face with each other; and an inserted film that is inserted in the piezoelectric film, is provided on an outer circumference region in a resonance region in which the lower electrode and the upper electrode sandwich the piezoelectric film and face with each other, is not provided in a center region of the resonance region, and has a cutout in the resonance region.
摘要翻译：压电薄膜谐振器包括：基板; 设置在基板上的压电膜; 夹着所述压电膜的至少一部分并且彼此面对的下电极和上电极; 并且插入在压电膜中的插入膜设置在下电极和上电极夹着压电膜并相互面对的谐振区域的外周区域上，不设置在中心区域共振区域，并且在共振区域中具有切口。

2. 发明申请

US20180294794A1 PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND MULTIPLEXER 审中-公开
公开(公告)号：US20180294794A1
公开(公告)日：2018-10-11
申请号：US15917474
申请日：2018-03-09
申请人： TAIYO YUDEN CO., LTD.
发明人： Jiansong LIU , Tokihiro NISHIHARA
IPC分类号： H03H9/17 , H03H3/02 , H03H9/54 , H03H9/70 , H03H9/13
CPC分类号： H03H9/175 , H03H3/02 , H03H9/02118 , H03H9/13 , H03H9/173 , H03H9/54 , H03H9/70 , H03H2003/021 , H03H2003/025
摘要： A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; lower and upper electrodes facing each other across the piezoelectric film; a mass load film that is located at least one of a first side, which is closer to the upper electrode, of the piezoelectric film and a second side, which is closer to the lower electrode, of the piezoelectric film, separated from the upper and lower electrodes, and surrounds in plan view a resonance region at least in part, the lower and upper electrodes facing each other across the piezoelectric film in the resonance region; and an acoustic reflection layer that includes the resonance region and the mass load film in plan view, is located in or on the substrate, and includes an air gap or an acoustic mirror in which at least two layers with different acoustic characteristics are stacked.

3. 发明申请

US20180026604A1 PIEZOELECTRIC THIN FILM RESONATOR, FILTER, DUPLEXER, AND METHOD OF FABRICATING PIEZOELECTRIC THIN FILM RESONATOR 审中-公开
公开(公告)号：US20180026604A1
公开(公告)日：2018-01-25
申请号：US15616080
申请日：2017-06-07
申请人： TAIYO YUDEN CO., LTD.
发明人： Tsuyoshi YOKOYAMA , Tokihiro NISHIHARA
IPC分类号： H03H9/17 , H01L41/047 , H01L41/18 , H03H9/70 , H01L41/314 , H01L41/293 , H03H3/02 , H01L41/08 , H03H9/54
CPC分类号： H03H9/17 , H01L41/0472 , H01L41/081 , H01L41/18 , H01L41/293 , H01L41/314 , H03H3/02 , H03H9/02015 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/54 , H03H9/605 , H03H9/706
摘要： A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate, the piezoelectric film including an aluminum nitride film containing a II-group or XII-group element and a IV-group or V-group element, a concentration of the IV-group or V-group element being higher than a concentration of the II-group or XII-group element in a middle region in a thickness direction, the concentration of the II-group or XII-group element being higher than the concentration of the IV-group or V-group element in at least one of end regions in the thickness direction; and a lower electrode and an upper electrode facing each other across the piezoelectric film.

4. 发明申请

US20170373668A1 FILTER AND MULTIPLEXER 审中-公开
公开(公告)号：US20170373668A1
公开(公告)日：2017-12-28
申请号：US15610996
申请日：2017-06-01
申请人： TAIYO YUDEN CO., LTD.
发明人： Tokihiro NISHIHARA , Taisei IRIEDA
IPC分类号： H03H9/64 , H03H9/72 , H01L41/107
CPC分类号： H03H9/706 , H03H9/568 , H03H9/605 , H03H9/6406 , H03H9/6483 , H03H9/725
摘要： A filter includes: one or more series resonators connected in series between an input terminal and an output terminal, the one or more series resonators including a series resonator located closest to the output terminal, the series resonator located closest to the output terminal having a resonant frequency that is 99.6% or less of or 102.2% or greater of a center frequency of a passband; one or more parallel resonators connected in parallel between the input terminal and the output terminal; and an inductor connected in parallel to the series resonator located closest to the output terminal.

5. 发明申请

US20170170807A1 PIEZOELECTRIC THIN FILM RESONATOR AND FILTER 审中-公开
公开(公告)号：US20170170807A1
公开(公告)日：2017-06-15
申请号：US15357644
申请日：2016-11-21
申请人： TAIYO YUDEN CO., LTD.
发明人： Tsuyoshi YOKOYAMA , Takeshi SAKASHITA , Shinji TANIGUCHI , Tokihiro NISHIHARA
IPC分类号： H03H9/17 , H03H9/54
CPC分类号： H03H9/171 , H03H9/02118 , H03H9/173 , H03H9/175 , H03H9/54 , H03H9/587 , H03H9/605
摘要： A piezoelectric thin film resonator includes: a substrate; a lower electrode and an upper electrode located on the substrate; a piezoelectric film, at least a part of the piezoelectric film being sandwiched between the upper electrode and the lower electrode, the piezoelectric film including a discontinuous portion in which the piezoelectric film discontinues in at least a part of a region surrounding a center region that includes a center of a resonance region where the upper electrode and the lower electrode face each other across the at least a part of the piezoelectric film.

6. 发明申请

US20170019085A1 ACOUSTIC WAVE FILTER, DUPLEXER, AND MODULE 审中-公开
标题翻译：声波滤波器，双工器和模块
公开(公告)号：US20170019085A1
公开(公告)日：2017-01-19
申请号：US15203525
申请日：2016-07-06
申请人： TAIYO YUDEN CO., LTD.
发明人： Masumi KIDA , Tokihiro NISHIHARA , Yoshio SATO , Shinji TANIGUCHI , Taisei IRIEDA
IPC分类号： H03H9/70 , H03H9/205 , H03H9/05 , H03H9/58
CPC分类号： H03H9/205 , H03H9/02086 , H03H9/542 , H03H9/564 , H03H9/568 , H03H9/706
摘要： An acoustic wave filter includes: series resonators connected in series; and one or more parallel resonators connected in parallel, wherein at least two series resonators and a parallel resonator therebetween are divided into a first divided resonator, which includes a piezoelectric substance sandwiched between a pair of electrodes in a c-axis orientation direction, and a second divided resonator, which includes another piezoelectric substance sandwiched between another pair of electrodes so that the another pair of electrodes in the c-axis orientation direction has an electric potential opposite to that of the electrodes of the first divided resonator in the c-axis orientation direction, a first group including the first divided resonators and a second group including the second divided resonators are interconnected in parallel between two nodes, and the first divided resonators and the second divided resonators of the at least two series resonators are not electrically interconnected at the two nodes.
摘要翻译：声波滤波器包括：串联连接的串联谐振器; 以及并联连接的一个或多个并联谐振器，其中至少两个串联谐振器和它们之间的并联谐振器被分成第一分频谐振器，该第一分频谐振器包括夹在一对电极之间的压电物质，其位于c轴取向方向，第二分频谐振器，其包括夹在另一对电极之间的另一压电体，使得在c轴取向方向上的另一对电极具有与c轴取向中的第一分割谐振器的电极相反的电位包括第一分割谐振器的第一组和包括第二分频谐振器的第二组在两个节点之间并联互连，并且至少两个串联谐振器的第一分频谐振器和第二分频谐振器在电连接两个节点。

7. 发明申请

US20150130560A1 PIEZOELECTRIC THIN-FILM RESONATOR, FILTER AND DUPLEXER 有权
标题翻译：压电薄膜谐振器，滤波器和双工器
公开(公告)号：US20150130560A1
公开(公告)日：2015-05-14
申请号：US14527273
申请日：2014-10-29
申请人： TAIYO YUDEN CO., LTD.
发明人： Tsuyoshi YOKOYAMA , Tokihiro NISHIHARA , Takeshi SAKASHITA
IPC分类号： H03H9/70 , H03H9/17 , H01P5/18
CPC分类号： H03H9/706 , H01P5/028 , H01P7/082 , H01P11/008 , H03H9/02015 , H03H9/02118 , H03H9/173 , H03H9/175 , H03H9/587 , H03H9/589
摘要： A piezoelectric thin-film resonator includes, a substrate, a piezoelectric film provided on the substrate, and a lower electrode and an upper electrode that face each other through the piezoelectric film. The piezoelectric film has an air space that is provided in at least part of an outer circumferential part of a resonance region in which the upper and lower electrodes face each other through the piezoelectric film and is not provided in a central part of the resonance region.
摘要翻译：压电薄膜谐振器包括基板，设置在基板上的压电膜，以及通过压电膜彼此相对的下电极和上电极。压电膜具有设置在谐振区域的外周部的至少一部分中的空气空间，其中上电极和下电极通过压电膜彼此面对，并且不设置在谐振区域的中心部分。

8. 发明申请

US20140361664A1 ACOUSTIC WAVE DEVICE 有权
标题翻译：声波设备
公开(公告)号：US20140361664A1
公开(公告)日：2014-12-11
申请号：US14275597
申请日：2014-05-12
申请人： TAIYO YUDEN CO., LTD.
发明人： Shinji TANIGUCHI , Tokihiro NISHIHARA
IPC分类号： H03H9/02
CPC分类号： H03H9/02102 , H03H9/173 , H03H9/175
摘要： An acoustic wave device includes: a piezoelectric film located on a substrate; a lower electrode and an upper electrode facing each other across the piezoelectric film; a temperature compensation film located on a surface, which is opposite to the piezoelectric film, of at least one of the lower electrode and the upper electrode and having a temperature coefficient of elastic constant opposite in sign to a temperature coefficient of elastic constant of the piezoelectric film; and an additional film located on a surface of the temperature compensation film opposite to the piezoelectric film and having an acoustic impedance greater than an acoustic impedance of the temperature compensation film.
摘要翻译：声波装置包括：位于基板上的压电膜; 下电极和上电极跨过压电膜; 位于与压电薄膜相反的表面上的温度补偿薄膜，所述温度补偿薄膜位于下电极和上电极中的至少一个的表面上，并且具有与压电体的弹性常数的温度系数相反的弹性常数的温度系数电影; 以及位于温度补偿膜的与压电膜相对的表面上并且具有大于温度补偿膜的声阻抗的声阻抗的附加膜。

9. 发明申请

US20130147577A1 FILTER AND DUPLEXER 有权
标题翻译：过滤器和双面器
公开(公告)号：US20130147577A1
公开(公告)日：2013-06-13
申请号：US13666524
申请日：2012-11-01
申请人： Taiyo Yuden Co., LTD.
发明人： Tokihiro NISHIHARA , Shinji TANIGUCHI , Toshio NISHIZAWA
IPC分类号： H03H9/70 , H03H9/54
CPC分类号： H03H9/132 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/54 , H03H9/605 , H03H9/706 , H03H2003/0471
摘要： A filter includes: a plurality of piezoelectric thin film resonators, each having a multilayered film including a lower electrode located on a substrate, a piezoelectric film located on the lower electrode, and an upper electrode located on the piezoelectric film so as to face the lower electrode, wherein at least two piezoelectric thin film resonators have thick film portions, in each of which the multilayered film is thicker in at least a part of an outer peripheral portion than in an inner portion of a resonance region in which the lower electrode and the upper electrode face each other across the piezoelectric film, and lengths of the thick film portions from edges of the resonance regions are different from each other in the at least two piezoelectric thin film resonators.
摘要翻译：滤波器包括：多个压电薄膜谐振器，每个压电薄膜谐振器具有包括位于基板上的下电极的多层膜，位于下电极上的压电薄膜和位于压电薄膜上的上电极，电极，其中至少两个压电薄膜谐振器具有厚膜部分，其中多层膜在外周部分的至少一部分中比在下电极和谐振区域的共振区域的内部部分中更厚上电极彼此面对压电膜，并且在至少两个压电薄膜谐振器中，来自谐振区域边缘的厚膜部分的长度彼此不同。

10. 发明申请

US20190007021A1 PIEZOELECTRIC THIN FILM RESONATOR AND FABRICATION METHOD OF THE SAME, FILTER, AND MULTIPLEXER 审中-公开
公开(公告)号：US20190007021A1
公开(公告)日：2019-01-03
申请号：US16008845
申请日：2018-06-14
申请人： TAIYO YUDEN CO., LTD.
发明人： Shinji TANIGUCHI , Hiroomi KANEKO , Hiroshi KAWAKAMI , Tokihiro NISHIHARA
IPC分类号： H03H9/02 , H03H3/02 , H03H9/13 , H03H9/17 , H03H9/56 , H03H9/70
CPC分类号： H03H9/02102 , H03H3/02 , H03H9/02015 , H03H9/02031 , H03H9/02118 , H03H9/131 , H03H9/173 , H03H9/175 , H03H9/178 , H03H9/562 , H03H9/564 , H03H9/568 , H03H9/706 , H03H2003/021 , H03H2003/025
摘要： A piezoelectric thin film resonator includes: a substrate; lower and upper electrodes located on the substrate; a piezoelectric film that has a lower piezoelectric film mainly composed of aluminum nitride and an upper piezoelectric film mainly composed of aluminum nitride, the lower piezoelectric film and the upper piezoelectric film being in contact with each other in at least a part of a resonance region where the lower electrode and the upper electrode face each other across at least a part of the piezoelectric film, and a fluorine concentration at a boundary face with which the lower piezoelectric film and the upper piezoelectric film are in contact being 0.03 atomic % or less; and an insulating film that is located between the lower piezoelectric film and the upper piezoelectric film in a region other than the at least a part of the resonance region and contains silicon oxide.

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