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1. 发明授权

US07145269B2 Lithographic apparatus, Lorentz actuator, and device manufacturing method 有权
标题翻译：光刻设备，洛伦兹致动器和器件制造方法
公开(公告)号：US07145269B2
公开(公告)日：2006-12-05
申请号：US10796291
申请日：2004-03-10
申请人： Sven Antoin Johan Hol , Henrikus Herman Marie Cox , Hernes Jacobs , Patricia Vreugdewater , Koen Jacobus Johannes Marie Zaal
发明人： Sven Antoin Johan Hol , Henrikus Herman Marie Cox , Hernes Jacobs , Patricia Vreugdewater , Koen Jacobus Johannes Marie Zaal
IPC分类号： H02K41/00
CPC分类号： G03F7/70758 , G03F7/70941
摘要： A lithographic apparatus comprising a highly effective Lorentz actuator, is presented. The Lorentz actuator comprises a main magnet system and a subsidiary magnet system arranged in Halbach configuration, an electrically conductive element for producing a force via the interaction of an electric current carried by the electrically conductive element and a resulting field of the first and second magnetic field generated by the main and subsidiary magnet system, respectively. The actuator further comprises a magnetic element extending substantially between outer sides of the first and second magnet system subassemblies. The magnetic element guides a portion of the second, subsidiary field between the first and second magnet system subassemblies.
摘要翻译：提出了包括高效洛伦兹致动器的光刻设备。洛伦兹致动器包括以Halbach构造布置的主磁体系统和辅助磁体系统，用于通过由导电元件承载的电流和第一和第二磁场的所得场的相互作用产生力的导电元件分别由主磁铁系统产生。致动器还包括基本上在第一和第二磁体系统子组件的外侧之间延伸的磁性元件。磁性元件引导第一和第二磁体系统子组件之间的第二辅助磁场的一部分。

2. 发明授权

US07079226B2 Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method 有权
标题翻译：光刻致动器机构，光刻设备和器件制造方法
公开(公告)号：US07079226B2
公开(公告)日：2006-07-18
申请号：US10797568
申请日：2004-03-11
申请人： Patricia Vreugdewater , Sven Antoin Johan Hol , Henrikus Herman Marie Cox
发明人： Patricia Vreugdewater , Sven Antoin Johan Hol , Henrikus Herman Marie Cox
IPC分类号： G03B27/58 , G03B27/62
CPC分类号： G03F7/70758 , G03F7/70858
摘要： The present invention relates to a Lorentz actuator in the context of a lithographic projection apparatus. The present invention improves the thermal performance of a Lorentz actuator over the prior art by employing a plurality of coils, separated by separation layers of high thermal conductivity material in good thermal contact with a cooling element. In this way, heat flows more quickly from hotspot regions near the center of the coils into the cooling element. According to an embodiment of the invention, the cooling element is arranged to be in line with the separation layers so as to optimize the thermal connection between these two members. It is found that splitting a parent coil into two coils provides a practical balance between improved thermal performance and undesirable increases in volume and complexity.
摘要翻译：本发明涉及在光刻投影装置的上下文中的洛伦兹致动器。本发明通过采用多个线圈来提高洛伦兹致动器的热性能，该多个线圈由与散热元件良好热接触的高热导率材料的分离层隔开。以这种方式，热量从线圈中心附近的热点区域更快地流入冷却元件。根据本发明的实施例，冷却元件布置成与分离层成一直线，以便优化这两个构件之间的热连接。发现将母线圈分成两个线圈提供了改进的热性能和不期望的体积和复杂性增加之间的实际平衡。

3. 发明授权

US07245047B2 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US07245047B2
公开(公告)日：2007-07-17
申请号：US10834359
申请日：2004-04-29
申请人： Patricia Vreugdewater , Henrikus Herman Marie Cox , Sven Antoin Johan Hol , Harmen Klaas Van Der Schoot
发明人： Patricia Vreugdewater , Henrikus Herman Marie Cox , Sven Antoin Johan Hol , Harmen Klaas Van Der Schoot
IPC分类号： H02K41/00
CPC分类号： G03F7/70991 , G03F7/70758 , H02K41/03 , H02K2201/18
摘要： A lithographic projection apparatus includes a conduit shuttle used to at least partly support conduits which provide utilities to moveable objects. The conduit shuttle has an actuator which is positionable with six degrees of freedom. The actuator comprises a 2-phase or 3-phase motor with one degree of freedom and a Lorentz actuator with five degrees of freedom.
摘要翻译：平版印刷投影设备包括用于至少部分地支撑向可移动物体提供效用的导管的导管梭。导管梭具有可以六自由度定位的致动器。执行器包括具有一个自由度的2相或3相电动机和具有5个自由度的洛伦兹致动器。

4. 发明授权

US07167234B2 Actuator assembly and lithographic apparatus comprising such an actuator assembly 有权
标题翻译：包括这种致动器组件的致动器组件和光刻设备
公开(公告)号：US07167234B2
公开(公告)日：2007-01-23
申请号：US10967306
申请日：2004-10-19
申请人： Henrikus Herman Marie Cox , Sven Antoin Johan Hol , Hernes Jacobs
发明人： Henrikus Herman Marie Cox , Sven Antoin Johan Hol , Hernes Jacobs
IPC分类号： G03B27/58 , G03B27/62
CPC分类号： G03F7/70758
摘要： An actuator assembly includes a coil moveably positionable in a magnetic field generated by a magnet assembly, each of the coil and the magnet having substantially only one side facing the other. A magnetized field-shaping element is provided for shaping the magnetic field such that the magnetic field is substantially perpendicular to the direction of the electrical current for generating a force in a first degree of freedom. Thus, the coil may easily be mounted, since it does not need to be enclosed by magnet poles.
摘要翻译：致动器组件包括能够由磁体组件产生的磁场中的可移动地定位的线圈，线圈和磁体中的每一个基本上只有一个面朝向另一侧。提供磁化场成形元件用于使磁场成形，使得磁场基本上垂直于用于产生第一自由度的电流的方向。因此，线圈可以容易地安装，因为它不需要被磁极包围。

5. 发明授权

US07456935B2 Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table 有权
标题翻译：利用定位装置定位物体台的平版印刷设备和装置制造方法
公开(公告)号：US07456935B2
公开(公告)日：2008-11-25
申请号：US11098608
申请日：2005-04-05
申请人： Henrikus Herman Marie Cox , Sven Antoin Johan Hol , Petrus Matthijs Henricus Vosters
发明人： Henrikus Herman Marie Cox , Sven Antoin Johan Hol , Petrus Matthijs Henricus Vosters
IPC分类号： G03B27/58 , G03B27/42
CPC分类号： G03F7/70791 , G03F7/70716 , G03F7/70758
摘要： A positioning device for positioning an object table includes a frame for supporting the object table in a first direction and a motor constructed and arranged to exert a first force on the object table in a second direction substantially perpendicular to the first direction and a second force on the object table in a third direction substantially perpendicular to the first direction and the second direction. A first part of the motor is constructed and arranged to co-operate with a second part for generating the first and second force. The first part is arranged on the object table, such that both the first force and the second force are directed substantially through the center of gravity of the object table.
摘要翻译：用于定位物体台的定位装置包括：用于在第一方向上支撑物体台的框架;以及构造和布置成在基本上垂直于第一方向的第二方向上在第一方向上施加第一力并在第二方向施加第二力的电动机所述物体台在大致垂直于所述第一方向和所述第二方向的第三方向上。马达的第一部分被构造和布置成与第二部分配合以产生第一和第二力。第一部分布置在物体台上，使得第一力和第二力都基本上指向物体台的重心。

6. 发明授权

US07072025B2 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US07072025B2
公开(公告)日：2006-07-04
申请号：US11118476
申请日：2005-05-02
申请人： Henrikus Herman Marie Cox , Robertus Nicodemus Jacobus Van Ballegoij , Petrus Matthijs Henricus Vosters , Sven Antoin Johan Hol , Sebastiaan Maria Johannes Cornelissen
发明人： Henrikus Herman Marie Cox , Robertus Nicodemus Jacobus Van Ballegoij , Petrus Matthijs Henricus Vosters , Sven Antoin Johan Hol , Sebastiaan Maria Johannes Cornelissen
IPC分类号： G03B27/42 , G03B27/58 , G05B5/01
CPC分类号： G03F7/70766 , B23Q1/58 , B23Q11/0032 , G03F7/70725 , G03F7/70758 , G03F7/70833 , G03F7/709
摘要： A lithographic projection apparatus in which a reaction force is generated between a balance mass and a substrate table. The balance mass is elastically coupled to the base frame with a suspension eigenfrequency of between 0.3 and 10 Hz.
摘要翻译：一种在平衡块和基板台之间产生反作用力的光刻投影装置。平衡质量弹性地耦合到基架上，其悬挂本征频率在0.3和10Hz之间。

7. 发明授权

US06906786B2 Lithographic apparatus and device manufacturing method 有权
公开(公告)号：US06906786B2
公开(公告)日：2005-06-14
申请号：US10454839
申请日：2003-06-05
申请人： Henrikus Herman Marie Cox , Robertus Nicodemus Jacobus Van Ballegoij , Petrus Matthijs Henricus Vosters , Sven Antoin Johan Hol , Sebastiaan Maria Johannes Cornelissen
发明人： Henrikus Herman Marie Cox , Robertus Nicodemus Jacobus Van Ballegoij , Petrus Matthijs Henricus Vosters , Sven Antoin Johan Hol , Sebastiaan Maria Johannes Cornelissen
IPC分类号： B23Q1/58 , B23Q11/00 , F16F15/02 , G03F7/20 , H01L21/027 , G03B27/42 , G03B27/58 , G03B5/01
CPC分类号： G03F7/70766 , B23Q1/58 , B23Q11/0032 , G03F7/70725 , G03F7/70758 , G03F7/70833 , G03F7/709
摘要： A lithographic projection apparatus in which a reaction force is generated between a balance mass and a substrate table. The balance mass is elastically coupled to the base frame with a suspension eigenfrequency of between 0.3 and 10 Hz.

8. 发明授权

US07205741B2 Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method 有权
标题翻译：平面电机初始化方法，平面电机，光刻设备及器件制造方法
公开(公告)号：US07205741B2
公开(公告)日：2007-04-17
申请号：US10874691
申请日：2004-06-24
申请人： Wilhelmus Franciscus Johannes Simons , Henrikus Herman Marie Cox , Sven Antoin Johan Hol
发明人： Wilhelmus Franciscus Johannes Simons , Henrikus Herman Marie Cox , Sven Antoin Johan Hol
IPC分类号： G05B11/01
CPC分类号： G03F7/70758 , G03F7/70725 , H02K41/03 , H02K2201/18 , H02P25/06 , Y10S414/135
摘要： A planar motor is controlled by supplying a three-phase alternating current to a coil assembly. Each phase is supplied to one of three coils. The coils are positioned in a magnetic field generated by a magnet plate having alternating magnet poles at its surface for generating an alternating magnetic field. In operation, the phase of each current flowing through each coil determines the direction of a force generated due to the current in the magnetic field. For correct operation, the phase angle of each current is to be adapted to the local direction of the magnetic field by determining a commutation-offset angle. The commutation-offset angle is determined by generating a force in an unknown direction and varying the commutation-angle, and determining when the generated force is directed perpendicular to the magnet plate, while ensuring that the generated force does not exceed a horizontal friction force. By determining a maximum compression of end stops of the coil assembly, or determining a maximum pressure, it may be determined when the generated force is directed perpendicular to the magnet plate.
摘要翻译：通过向线圈组件提供三相交流电来控制平面电动机。每相提供给三个线圈中的一个。线圈位于由其表面上具有交替磁极的磁板产生的磁场中，用于产生交变磁场。在操作中，流过每个线圈的每个电流的相位确定由于磁场中的电流而产生的力的方向。为了正确的操作，通过确定换向偏移角度，每个电流的相位角将适应于磁场的局部方向。通过产生未知方向的力并改变换向角来确定换向偏移角，并且确定所产生的力何时垂直于磁体板定向，同时确保所产生的力不超过水平摩擦力。通过确定线圈组件的端部止动件的最大压缩或确定最大压力，可以确定何时生成的力垂直于磁体板定向。

9. 发明授权

US07468589B2 Lithographic apparatus having a controlled motor, and motor control system and method 失效
标题翻译：具有受控电机的光刻设备，以及电机控制系统和方法
公开(公告)号：US07468589B2
公开(公告)日：2008-12-23
申请号：US11331337
申请日：2006-01-13
申请人： Henrikus Herman Marie Cox , Hans Butler , Sven Antoin Johan Hol
发明人： Henrikus Herman Marie Cox , Hans Butler , Sven Antoin Johan Hol
IPC分类号： H02K41/00
CPC分类号： H02P25/06
摘要： A lithographic apparatus includes an illumination system to condition a radiation beam. A patterning support holds a patterning device that imparts the radiation beam with a pattern to form a patterned radiation beam. A substrate support holds a substrate. A projection system projects the patterned radiation beam onto the substrate. A positioning system positions the patterning support and the substrate support. The positioning system has a motor with a stator and a mover coupled to a support, and an associated motor control system with a controller providing an output for controlling currents applied to the motor. The motor control system determines a controller output required to compensate for a weight of mover and associated support, determines a deviation of this output from an output required to compensate the gravity force acting on the mover and associated support, and corrects the currents applied to the motor based on the deviation.
摘要翻译：光刻设备包括用于调节辐射束的照明系统。图案形成支撑件保持图案形成装置，其使得辐射束具有图案以形成图案化的辐射束。衬底支撑件保持衬底。投影系统将图案化的辐射束投射到衬底上。定位系统定位图形支撑件和基板支撑件。定位系统具有带有定子的电动机和耦合到支撑件的动子，以及具有控制器的相关联的电动机控制系统，该控制器提供用于控制施加到电动机的电流的输出。电动机控制系统确定需要补偿动力和相关支撑的重量的控制器输出，确定该输出与补偿作用在动子和相关支撑上的重力所需的输出的偏差，并校正施加到电机基于偏差。

10. 发明授权

US07005823B2 Positioning system and positioning method 有权
标题翻译：定位系统及定位方法
公开(公告)号：US07005823B2
公开(公告)日：2006-02-28
申请号：US10969235
申请日：2004-10-21
申请人： Martijn Houkes , Henrikus Herman Marie Cox , Ramidin Izair Kamidin , Patricia Vreugdewater
发明人： Martijn Houkes , Henrikus Herman Marie Cox , Ramidin Izair Kamidin , Patricia Vreugdewater
IPC分类号： G05D23/275
CPC分类号： G03F7/70758 , G05B2219/45031
摘要： A positioning system for moving an object to a target position is presented. In an embodiment, the system includes a first actuator configured to exert a force on the object in a first direction in response to a control current, the actuator having an actuator gain and the generated force being a function of the control current and the actuator gain, the actuator including a magnet configured to induce a magnetic field; and a coil arranged in the magnetic field, the magnet and the coil being movable relative to each other. The system also includes a power supply configured to supply the control current to the actuator in response to a control signal; and a control system configured to control the force generated by the actuator by supplying the control signal to the power supply, the control signal being adapted to the actuator gain, the gain being predetermined as a function of a parameter.
摘要翻译：提出了一种用于将物体移动到目标位置的定位系统。在一个实施例中，系统包括第一致动器，其构造成响应于控制电流在第一方向上对物体施加力，致动器具有致动器增益，并且所产生的力是控制电流和致动器增益的函数所述致动器包括被配置为引起磁场的磁体; 以及布置在所述磁场中的线圈，所述磁体和所述线圈可相对于彼此移动。该系统还包括被配置为响应于控制信号向致动器提供控制电流的电源; 以及控制系统，其被配置为通过将所述控制信号提供给所述电源来控制由所述致动器产生的力，所述控制信号适于所述致动器增益，所述增益作为参数的函数被预先确定。

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