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1. 发明申请

US20140120704A1 METHOD FOR CRYSTALLIZING A SILICON SUBSTRATE 有权
标题翻译：用于结晶硅基板的方法
公开(公告)号：US20140120704A1
公开(公告)日：2014-05-01
申请号：US13890476
申请日：2013-05-09
申请人： Sung-Ho KIM , Min-Hwan CHOI , Min-Ji BAEK , Sang-Kyung LEE , Sang-Ho JEON , Jong-Moo HUH
发明人： Sung-Ho KIM , Min-Hwan CHOI , Min-Ji BAEK , Sang-Kyung LEE , Sang-Ho JEON , Jong-Moo HUH
IPC分类号： H01L21/02
CPC分类号： H01L21/02686 , H01L21/02532 , H01L22/12 , H01L22/20
摘要： A method for crystallizing a silicon substrate includes manufacturing a crystallized silicon test substrate that is crystallized by scanning excimer laser annealing beams with different energy densities on respective areas of an amorphous silicon test substrate, irradiating a surface of the crystallized silicon test substrate using a light source, and measuring reflectivity corresponding to the respective areas of the crystallized silicon test substrate in a visible light wavelength range, extracting average reflectivities of the respective areas of the crystallized silicon test substrate in wavelength ranges corresponding to respective colors, calculating an optimum energy density (OPED) index per energy density by using a value acquired by subtracting average reflectivity of red-based colors from average reflectivity of blue-based colors, selecting an optimal energy density, and crystallizing an amorphous silicon substrate using the optimal energy density.
摘要翻译：一种硅衬底的结晶方法包括：制造结晶硅测试衬底，其通过在非晶硅测试衬底的各个区域上扫描具有不同能量密度的准分子激光退火光束而被结晶，使用光源照射结晶硅测试衬底的表面，并且在可见光波长范围内测量对应于结晶硅测试衬底的各个区域的反射率，提取结晶硅测试衬底的各个区域的平均反射率，其对应于各种颜色的波长范围，计算最佳能量密度（OPED ）通过使用通过从基于蓝色的颜色的平均反射率减去红色颜色的平均反射率而获得的值，选择最佳能量密度，并使用最佳能量密度结晶非晶硅衬底而获得的值。

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