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    • 3. 发明申请
    • INERTIAL SENSOR
    • 惯性传感器
    • US20130167634A1
    • 2013-07-04
    • US13409039
    • 2012-02-29
    • Seung Mo LimSung Wook KimSung Jun LeeKyo Yeol LeeYun Sung Kang
    • Seung Mo LimSung Wook KimSung Jun LeeKyo Yeol LeeYun Sung Kang
    • G01C19/56
    • G01C19/56G01P15/09G01P15/14G01P2015/084
    • Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.
    • 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100包括:膜110; 设置在膜110下方的质量体120; 形成在膜110上以驱动质量体120的压电体130; 以及通过在压电体130的厚度方向上折叠而形成的沟槽140,以便垂直地与质量体120的驱动方向相遇。 通过这种构造,通过在压电体130的厚度方向上收缩形成沟槽,以提供方向性,同时保持压电体130的刚性,以防止波在不必要的方向上传播,从而驱动惯性传感器100 在所需的特定方向。
    • 4. 发明授权
    • Inertial sensor
    • 惯性传感器
    • US08850888B2
    • 2014-10-07
    • US13409039
    • 2012-02-29
    • Seung Mo LimSung Wook KimSung Jun LeeKyo Yeol LeeYun Sung Kang
    • Seung Mo LimSung Wook KimSung Jun LeeKyo Yeol LeeYun Sung Kang
    • G01C19/56G01P15/09
    • G01C19/56G01P15/09G01P15/14G01P2015/084
    • Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.
    • 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100包括:膜110; 设置在膜110下方的质量体120; 形成在膜110上以驱动质量体120的压电体130; 以及通过在压电体130的厚度方向上折叠而形成的沟槽140,以便垂直地与质量体120的驱动方向相遇。 通过这种构造,通过在压电体130的厚度方向上收缩形成沟槽,以提供方向性,同时保持压电体130的刚性,以防止波在不必要的方向上传播,从而驱动惯性传感器100 在所需的特定方向。
    • 10. 发明授权
    • Inertial sensor for detecting angular velocity
    • 用于检测角速度的惯性传感器
    • US09052195B2
    • 2015-06-09
    • US13592096
    • 2012-08-22
    • Jung Eun NohSeung Heon HanJong Woon KimSung Jun LeeSeung Mo Lim
    • Jung Eun NohSeung Heon HanJong Woon KimSung Jun LeeSeung Mo Lim
    • G01C19/56G01C19/5684
    • G01C19/5684G01C19/56
    • Disclosed herein is an inertial sensor including: a membrane; first and second driving units provided in a first axis direction (an X axis direction) so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the first axis direction; and third and fourth driving units provided in a second axis direction (a Y axis direction) perpendicular to the first axis direction so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the second axis direction, wherein the first and second driving units have different vibration frequencies so that they vibrate while being expanded and contracted in the opposite manner and then vibrate while being expanded and contracted in the same manner.
    • 本文公开了一种惯性传感器,包括:膜; 第一驱动单元和第二驱动单元,其以第一轴方向(X轴方向)设置为基于膜的预定点彼此对称,从而在沿第一轴向方向膨胀和收缩的同时振动; 以及第三和第四驱动单元,其沿着垂直于第一轴线方向的第二轴线方向(Y轴方向)设置成基于膜的预定点彼此对称,从而在扩张和收缩的同时振动 第二轴方向,其中第一和第二驱动单元具有不同的振动频率,使得它们以相反的方式膨胀和收缩振动,然后以相同的方式在膨胀和收缩的同时振动。