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1. 发明申请

US20160329219A1 SUBSTRATE CLEANING APPARATUS 审中-公开
标题翻译：基板清洁装置
公开(公告)号：US20160329219A1
公开(公告)日：2016-11-10
申请号：US15058277
申请日：2016-03-02
申请人： Eun-Seok LEE , Chang-Gil RYU , Geun-Young SONG , Jae-Chang LEE , Yun-Seok CHOI , Jin-Suk HONG
发明人： Eun-Seok LEE , Chang-Gil RYU , Geun-Young SONG , Jae-Chang LEE , Yun-Seok CHOI , Jin-Suk HONG
IPC分类号： H01L21/67 , B08B1/00 , B08B1/04 , B08B3/10
CPC分类号： H01L21/67046 , B05B1/20 , B05B13/0415 , B08B1/002 , B08B1/04 , B08B3/024 , B08B3/10 , H01L21/67051 , H01L21/67057
摘要： Provided is a substrate cleaning apparatus including: a cleaning bath configured to accommodate a substrate having a first surface and a second surface; a substrate support configured to support the substrate; first and second nozzle bars provided in the cleaning bath to be rotatable in a plane parallel with the substrate, each of the first and the second nozzle bars including a passage; a plurality of nozzles provided along a longitudinal direction of each of the first and the second nozzle bars and configured to spray the cleaning solution from the passage of each of the first and the second nozzle bars to the substrate; and first and second brushes, the first brush provided on a first side of the substrate and configured to clean the first surface and the second brush provided on a second side of the substrate and configured to clean the second surface of the substrate.
摘要翻译：本发明提供一种基板清洗装置，其特征在于，包括：清洗槽，其配置为容纳具有第一表面和第二表面的基板; 衬底支撑件，其构造成支撑所述衬底; 设置在所述清洗槽中的第一和第二喷嘴杆可在与所述基板平行的平面中旋转，所述第一和第二喷嘴杆中的每一个包括通道; 多个喷嘴，其沿着所述第一喷嘴杆和所述第二喷嘴杆中的每一个的纵向方向设置并且构造成将所述清洁溶液从所述第一和第二喷嘴杆中的每一个的通道喷射到所述基板; 以及第一和第二刷，所述第一刷设置在所述基板的第一侧上，并且被配置为清洁设置在所述基板的第二侧上的所述第一表面和所述第二刷，并且构造成清洁所述基板的所述第二表面。

2. 发明授权

US08813363B2 Piezoelectric inkjet printhead and method of manufacturing the same 有权
标题翻译：压电喷墨打印头及其制造方法
公开(公告)号：US08813363B2
公开(公告)日：2014-08-26
申请号：US12722843
申请日：2010-03-12
申请人： Jae-chang Lee , Jae-woo Chung , Kyo-yool Lee , Chang-seung Lee , Sung-gyu Kang
发明人： Jae-chang Lee , Jae-woo Chung , Kyo-yool Lee , Chang-seung Lee , Sung-gyu Kang
IPC分类号： B21D53/76 , B23P17/00 , H01L41/22 , H04R17/00 , H01L41/00
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a piezoelectric inkjet printhead includes processing a lower silicon-on-insulator substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer, processing the lower silicon-on-insulator substrate by etching the second silicon layer to form a manifold, a plurality of pressure chambers arranged along at least one side of the manifold and connected with the manifold, and a plurality of dampers connected with the pressure chambers, and by etching the first silicon layer and the intervening oxide layer to form a plurality of vertical nozzles through the first silicon layer and the intervening oxide layer to corresponding ones of the plurality of dampers, stacking and bonding an upper substrate on the lower substrate, reducing the upper substrate to a predetermined thickness, and forming a piezoelectric actuator on the upper substrate.
摘要翻译：一种制造压电喷墨打印头的方法包括：通过第一硅层，中间氧化物层和第二硅层处理具有顺序层叠结构的下硅绝缘体上基板，通过以下方式处理下硅绝缘体上基板：蚀刻所述第二硅层以形成歧管，沿所述歧管的至少一侧布置并与所述歧管连接的多个压力室以及与所述压力室连接的多个阻尼器，并且通过蚀刻所述第一硅层和所述第二硅层形成多个垂直喷嘴，通过第一硅层和中间氧化物层到多个阻尼器中的相应的阻尼器，堆叠并结合下基板上的上基板，将上基板还原成预定厚度;以及在上基板上形成压电致动器。

3. 发明申请

US20140147198A1 ONE-TOUCH TYPE QUICK COUPLER FOR CONNECTING STEEL BARS 审中-公开
标题翻译：用于连接钢筋的单触式快速接头
公开(公告)号：US20140147198A1
公开(公告)日：2014-05-29
申请号：US14127200
申请日：2012-04-10
申请人： Hyun Ho Kim , Jae Chang Lee
发明人： Hyun Ho Kim , Jae Chang Lee
IPC分类号： E04C5/16
CPC分类号： E04C5/162 , E04C5/165 , E04C5/166 , F16B2200/10
摘要： Disclosure relates to a method of sharing a session key between wireless communication terminals using a variable-length authentication code. The method includes: generating a public key by using an own private key; generating a message including the public key and a first random number and encoding the message using an own secret key to exchange an encrypted message with the other terminal; decoding the encrypted message of the other terminal by receiving a secret key of the other terminal; generating an authentication code by calculating the first random number and a second random number included in the decoded message; obtaining a medium value from the authenticated code; and generating a session key by using a public key included in the decoded message of the other terminal.
摘要翻译：公开涉及使用可变长度认证码在无线通信终端之间共享会话密钥的方法。该方法包括：通过使用自己的私钥生成公开密钥; 生成包括所述公开密钥和第一随机数的消息，并使用自己的密钥对所述消息进行编码，以与所述另一终端交换加密消息; 通过接收另一终端的秘密密钥对另一终端的加密消息进行解码; 通过计算解码消息中包含的第一随机数和第二随机数来生成认证码; 从认证代码获取中值; 以及通过使用包括在另一终端的解码消息中的公钥来生成会话密钥。

4. 发明申请

US20100319195A1 PIEZOELECTRIC INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME 失效
标题翻译：压电喷墨印刷机及其制造方法
公开(公告)号：US20100319195A1
公开(公告)日：2010-12-23
申请号：US12852613
申请日：2010-08-09
申请人： Jong-beom Kim , Jae-chang Lee
发明人： Jong-beom Kim , Jae-chang Lee
IPC分类号： B23P17/00
CPC分类号： B41J2/1628 , B41J2/14233 , B41J2/161 , B41J2/1631 , B41J2/1642 , B41J2/1646 , Y10T29/49401
摘要： Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.
摘要翻译：提供一种压电喷墨打印头及其制造方法。压电喷墨打印头包括第一和第二单晶硅衬底。墨流路设置在第一基板的第一表面中。墨水流路包括墨水引入口，用于供应墨水的歧管，填充有待喷射墨水的多个压力室，分别用于将歧管与多个压力室连接的多个限制器，以及多个喷嘴用于喷墨。第二基板结合到第一基板，从而完成油墨流动路径。多个压电致动器设置在第一基板的第二表面上以对应于每个压力室，并提供将油墨喷射到各个压力室所需的驱动能力。在这种结构中，不需要对准第一和第二基板，从而可以简化制造工艺，可以降低制造成本，并且可以提高喷墨性能。

5. 发明授权

US07603756B2 Method of forming piezoelectric actuator of inkjet head 失效
标题翻译：形成喷墨头压电致动器的方法
公开(公告)号：US07603756B2
公开(公告)日：2009-10-20
申请号：US11583798
申请日：2006-10-20
申请人： Seung-mo Lim , Kyo-yeol Lee , Jae-woo Chung , Hwa-sun Lee , Jae-chang Lee
发明人： Seung-mo Lim , Kyo-yeol Lee , Jae-woo Chung , Hwa-sun Lee , Jae-chang Lee
IPC分类号： H04R17/00 , H01L41/24
CPC分类号： B41J2/161 , B41J2/1631 , B41J2/1645 , B41J2/1646 , B41J2002/1425 , Y10T29/42 , Y10T29/435 , Y10T29/49401
摘要： A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.
摘要翻译：提供一种形成在振动板上的喷墨头的压电致动器的方法，以提供用于将油墨喷射到每个压力室的驱动力。该方法包括在振动板上形成下电极，在下电极上形成压电层，位于每个压力室之上，形成覆盖下电极和压电层的保护层，暴露压电层的上表面通过减小保护层和压电层的厚度，在压电层的上表面上形成上电极，除去保护层。根据本发明，由于具有平坦的上表面的压电层形成均匀的图形，所以形成在其上的上电极的面积和厚度被均匀地控制。

6. 发明申请

US20090147049A1 NOZZLE PLATE OF INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：喷嘴喷嘴板及其制造方法
公开(公告)号：US20090147049A1
公开(公告)日：2009-06-11
申请号：US12041018
申请日：2008-03-03
申请人： Jae-chang LEE , Tae-kyung LEE , Tae-woon CHA
发明人： Jae-chang LEE , Tae-kyung LEE , Tae-woon CHA
IPC分类号： B41J2/14 , G01D15/00
CPC分类号： B41J2/1433 , B41J2/1606 , B41J2/162 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1631
摘要： Provided are a nozzle plate of an inkjet printhead and a method of manufacturing the same. The nozzle plate includes: a substrate including a plurality of nozzles; and a plurality of first grooves formed on the surface of a substrate around the nozzles. In this structure, ink remaining on the surface of the nozzle plate can be efficiently removed.
摘要翻译：提供一种喷墨打印头的喷嘴板及其制造方法。喷嘴板包括：包括多个喷嘴的基板; 以及形成在所述喷嘴周围的基板的表面上的多个第一凹槽。在这种结构中，可以有效地去除留在喷嘴板表面上的油墨。

7. 发明申请

US20070155056A1 Silicon direct bonding method 有权
标题翻译：硅直接键合法
公开(公告)号：US20070155056A1
公开(公告)日：2007-07-05
申请号：US11505420
申请日：2006-08-17
申请人： Sung-gyu Kang , Seung-mo Lim , Jae-chang Lee , Woon-bae Kim
发明人： Sung-gyu Kang , Seung-mo Lim , Jae-chang Lee , Woon-bae Kim
IPC分类号： H01L21/00
CPC分类号： H01L21/187 , H01L21/2007
摘要： A silicon direct bonding (SDB) method by which void formation caused by gases is suppressed. The SDB method includes: preparing two silicon substrates having corresponding bonding surfaces; forming trenches having a predetermined depth in at least one bonding surface of the two silicon substrates; forming gas discharge outlets connected to the trenches on at least one of the two silicon substrates to vertically penetrate the bonding surface; cleaning the two silicon substrates; closely contacting the two silicon substrates to each other; and thermally treating the two substrates to bond them to each other. The trenches are formed along at least a part of a plurality of dicing lines, and both ends of the trenches are clogged. Gases generated during a thermal treatment process can be smoothly and easily discharged through the trenches and the gas discharge outlet such that a void is prevented from being formed in the junctions of the two silicon substrates due to the gases.
摘要翻译：抑制由气体引起的空隙形成的硅直接接合（SDB）方法。 SDB方法包括：制备具有相应粘合表面的两个硅衬底; 在所述两个硅衬底的至少一个接合表面中形成具有预定深度的沟槽; 形成连接到所述两个硅衬底中的至少一个上的沟槽的气体放电出口，以垂直地穿透所述接合表面; 清洁两个硅衬底; 使两个硅衬底彼此紧密接触; 并对两个基板进行热处理以将它们彼此粘合。沟槽沿着多个切割线的至少一部分形成，并且沟槽的两端被堵塞。在热处理过程中产生的气体可以通过沟槽和气体排出口平滑且容易地排出，从而防止由于气体而在两个硅衬底的接合处形成空隙。

8. 发明授权

US07121650B2 Piezoelectric ink-jet printhead 有权
标题翻译：压电式喷墨打印头
公开(公告)号：US07121650B2
公开(公告)日：2006-10-17
申请号：US10321604
申请日：2002-12-18
申请人： Jae-woo Chung , Jae-chang Lee , Seung-mo Lim
发明人： Jae-woo Chung , Jae-chang Lee , Seung-mo Lim
IPC分类号： B41J2/045
CPC分类号： B41J2/161 , B41J2/1618 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2002/14306 , B41J2002/14475
摘要： A piezoelectric ink-jet printhead and a method for manufacturing the same, wherein the piezoelectric ink-jet printhead is formed by stacking three monocrystalline silicon substrates on one another and adhering them to one another. The three substrates include an upper substrate, through which an ink supply hole is formed and a pressure chamber is formed on a bottom surface thereof; an intermediate substrate, in which an ink reservoir and a damper are formed; and a lower substrate, in which a nozzle is formed. A piezoelectric actuator is monolithically formed on the upper substrate. A restrictor, which connects the ink reservoir to the pressure chamber in flow communication, may be formed on the upper substrate or intermediate substrate.
摘要翻译：一种压电喷墨打印头及其制造方法，其中压电喷墨打印头通过将三个单晶硅基板彼此堆叠并将它们彼此粘合而形成。三个基板包括上基板，在其上形成有供墨孔，在其底面上形成有压力室; 中间基板，其中形成有墨水储存器和阻尼器; 以及形成有喷嘴的下基板。压电致动器整体地形成在上基板上。可以在上基板或中间基板上形成将油墨储存器与流动连通的压力室连接的限流器。

9. 发明申请

US20130135395A1 SILICON SUBSTRATE, METHOD OF MANUFACTURING THE SAME, AND INKJET PRINT HEAD 审中-公开
标题翻译：硅基板，其制造方法和喷墨打印头
公开(公告)号：US20130135395A1
公开(公告)日：2013-05-30
申请号：US13572018
申请日：2012-08-10
申请人： Jae Chang LEE , Tae Kyung Lee , Hwa Sun Lee , Sung Wook Kim
发明人： Jae Chang LEE , Tae Kyung Lee , Hwa Sun Lee , Sung Wook Kim
IPC分类号： B41J2/04 , H01L21/306
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2002/14411 , B41J2202/11
摘要： There is provided a silicon substrate including: a first connection part connected to a manifold and having a first width of a first size; a second connection part connected to a pressure chamber and having a second width of a second size; and a restrictor part connecting the first connection part to the second connection part and having a third width of a third size smaller than the first size or the second size, wherein a boundary part connecting the restrictor part to the first connection part or the restrictor part to the second connection part is formed to be curved.
摘要翻译：提供了一种硅基板，包括：连接到歧管并具有第一尺寸的第一宽度的第一连接部分; 连接到压力室并具有第二尺寸的第二宽度的第二连接部分; 以及将所述第一连接部连接到所述第二连接部并且具有小于所述第一尺寸或所述第二尺寸的第三尺寸的第三宽度的限制部，其中，将所述限制部连接到所述第一连接部或所述节流部的边界部第二连接部形成为弯曲状。

10. 发明申请

US20120019596A1 Inkjet print head and method for manufacturing the same 失效
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US20120019596A1
公开(公告)日：2012-01-26
申请号：US12929638
申请日：2011-02-04
申请人： Jae Chang Lee , Hwa Sun Lee , Tae Kyung Lee
发明人： Jae Chang Lee , Hwa Sun Lee , Tae Kyung Lee
IPC分类号： B41J2/135 , H01L21/302
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2002/14411 , Y10T29/49401
摘要： An inkjet print head and a method for manufacturing the same are provided. The inkjet print head includes: an upper board having a pressure chamber; and a lower board including an upper silicon layer, an insulating layer, and a lower silicon layer, wherein the lower board includes a projection formed of the upper silicon layer and protruded into the interior of the pressure chamber in order to reduce the space of the pressure chamber, and a lower surface of the upper board and an upper surface of the lower silicon layer are fixed.
摘要翻译：提供一种喷墨打印头及其制造方法。喷墨打印头包括：具有压力室的上板; 以及包括上硅层，绝缘层和下硅层的下板，其中所述下板包括由所述上硅层形成并突出到所述压力室的内部的突起，以便减小所述上硅层的空间压力室，上板的下表面和下硅层的上表面固定。

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