会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明申请
    • Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output
    • 具有E.S.C.反馈控制的双偏压等离子体反应器 电压使用晶圆电压测量在偏置电源输出
    • US20060256499A1
    • 2006-11-16
    • US11127036
    • 2005-05-10
    • Jang YangDaniel HoffmanSteven ShannonDouglas BurnsWonseok LeeKwang-Soo Kim
    • Jang YangDaniel HoffmanSteven ShannonDouglas BurnsWonseok LeeKwang-Soo Kim
    • H01T23/00
    • H01J37/32706H01J37/32935H01L21/6833Y10T279/23
    • A plasma reactor has a dual frequency plasma RF bias power supply furnishing RF bias power comprising first and second frequency components, f(1), f(2), respectively, and an RF power path having an input end coupled to the plasma RF bias power supply and an output end coupled to the wafer support pedestal, and sensor circuits providing measurement signals representing first and second frequency components of a measured voltage and first and second frequency components of a measured current near the input end of the RF power path. The reactor further includes a processor for providing first and second frequency components of a wafer voltage signal as, respectively, a first sum of the first frequency components of the measured voltage and measured current multiplied by first and second coefficients respectively, and a second sum of the second frequency components of the measured voltage and measured current multiplied by third and fourth coefficients, respectively. A processor produces a D.C. wafer voltage by combining D.C. components of the first and second frequency components of the wafer voltage with an intermodulation correction factor that is the product of the D.C. components of the first and second components of the wafer voltage raised to a selected power and multiplied by a selected coefficient.
    • 等离子体反应器具有双频等离子体RF偏压电源,其分别提供包括第一和第二频率分量f(1),f(2)的RF偏置功率,以及具有耦合到等离子体RF偏置的输入端的RF功率路径 电源和耦合到晶片支撑基座的输出端,以及传感器电路,其提供表示测量电压的第一和第二频率分量以及在RF功率路径的输入端附近的测量电流的第一和第二频率分量的测量信号。 反应器还包括处理器,用于分别提供晶片电压信号的第一和第二频率分量,分别为测量电压的第一频率分量和测量电流乘以第一和第二系数的第一和,以及第二和 测量电压和测量电流的第二频率分量分别乘以第三和第四系数。 处理器通过将晶片电压的第一和第二频率分量的DC分量与作为晶片电压的第一和第二分量的DC分量升高到所选功率的互调校正因子相结合来产生DC晶片电压 并乘以所选系数。
    • 6. 再颁专利
    • Controlling client access to networked data based on content subject matter categorization
    • 根据内容主题分类控制客户端对网络数据的访问
    • USRE41168E1
    • 2010-03-23
    • US10965710
    • 2004-10-14
    • Steven Shannon
    • Steven Shannon
    • G06F15/16
    • H04L63/0236G06F17/30887H04L63/0263H04L63/10H04L67/06
    • An access control technique to limit access to information content such as available on the Internet. The technique is implemented within a network device such as a proxy server, router, switch, firewall, bridge or other network gateway. The access control process analyzes data in each request from the clients and determines if the request should be forwarded for processing by a server to which it is destined. Access control may be determined by comparing client source information against a database of Uniform Resource Locators (URLs), IP addresses, or other resource identification data specifying the data requested by the client. The invention therefore provides access control not based only upon content, but rather, based primarily upon the identity of the computers or users making the requests. The technique further avoids the problems of the prior art which categories or filters the content of only web pages based solely upon objectionable words. This is because a category database is used by the network device to control access and is created via a process involving human editors who assist in the creation and maintenance of the category database.
    • 访问控制技术来限制对因特网上可用的信息内容的访问。 该技术在诸如代理服务器,路由器,交换机,防火墙,网桥或其他网络网关的网络设备中实现。 访问控制过程分析来自客户端的每个请求中的数据,并确定该请求是否应转发给由其注册的服务器进行处理。 可以通过将客户端源信息与统一资源定位符(URL),IP地址或指定客户端请求的数据的其他资源标识数据进行比较来确定访问控制。 因此,本发明提供不基于内容的访问控制,而是主要基于提出请求的计算机或用户的身份。 该技术进一步避免了仅基于令人反感的单词对仅网页的内容进行分类或过滤的现有技术的问题。 这是因为网络设备使用类别数据库来控制访问,并且通过涉及帮助创建和维护类别数据库的人类编辑者的过程来创建类别数据库。