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1. 发明申请

US20060245854A1 Dual cassette load lock 审中-公开
公开(公告)号：US20060245854A1
公开(公告)日：2006-11-02
申请号：US11410797
申请日：2006-04-24
申请人： Masato Toshima , Phil Salzman , Steven Murdoch , Cheng Wang , Mark Stenholm , James Howard , Leonard Hall
发明人： Masato Toshima , Phil Salzman , Steven Murdoch , Cheng Wang , Mark Stenholm , James Howard , Leonard Hall
IPC分类号： H01L21/677
CPC分类号： H01L21/67754 , H01L21/67201 , H01L21/67766 , H01L21/67772 , H01L21/67778 , Y10S414/137 , Y10S414/139 , Y10S414/14
摘要： A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate chambers. Each chamber may be separately pumped down. Thus, while a first cassette of wafers, from a first chamber is being accessed, a second cassette of wafers may be loaded in the second chamber and the second chamber pumped down. Each chamber is designed to minimize intrusion to a clean room. Thus a door to each chamber has a mechanism which, when opening the door, first moves the door slightly away from an opening in the chamber and then the door is moved down parallel to the chamber. After the door is opened, a cassette of wafers is lowered through the opening in a motion much like a drawbridge. The cassette may be pivoted within the chamber when the position from which wafers are accessed from the cassette differs from the position from which the cassette is lowered out of the chamber.

2. 发明授权

US5046909A Method and apparatus for handling semiconductor wafers 失效
标题翻译：用于处理半导体晶片的方法和设备
公开(公告)号：US5046909A
公开(公告)日：1991-09-10
申请号：US632599
申请日：1990-12-24
申请人： Steven Murdoch
发明人： Steven Murdoch
IPC分类号： H01L21/687
CPC分类号： H01L21/68721 , H01L21/68707 , H01L21/68728 , Y10S414/135 , Y10S414/136
摘要： A method and apparatus is disclosed for handling semiconductor wafers used for the production of integrated circuit structures which permits moving the wafer from one processing station to another without direct handling of the wafer and which also permits equal processing of both the top and bottom surfaces of the wafer. A wafer retaining ring is disclosed having structure for engaging the retaining ring to transfer the wafer and the retaining ring from one processing station to another to perform a plurality of processing steps on one or both surfaces of the wafer without direct handling of the wafer. The retaining ring is also provided with structure for engaging the end edges of the wafer leaving both the top and bottom surfaces of the wafer equally exposed for processing. The retaining ring has an inner diameter sufficiently large with respect to the outer diameter of the wafer so as to not interfere with processing by shadowing either side of the wafer.
摘要翻译：公开了一种用于处理用于生产集成电路结构的半导体晶片的方法和装置，其允许将晶片从一个处理站移动到另一个处理站而不直接处理晶片，并且还允许对晶片的顶表面和底表面进行相等的处理晶圆。公开了一种晶片保持环，其具有用于接合保持环以将晶片和保持环从一个处理站传递到另一个的结构，以在晶片的一个或两个表面上执行多个处理步骤，而不直接处理晶片。保持环还设置有用于接合晶片的端边缘的结构，留下晶片的顶表面和底表面均等地暴露用于处理。保持环具有相对于晶片的外径足够大的内径，从而不影响晶片的任一侧的处理。

3. 发明授权

US08806565B2 Secure network location awareness 有权
标题翻译：安全的网络位置感知
公开(公告)号：US08806565B2
公开(公告)日：2014-08-12
申请号：US11854333
申请日：2007-09-12
申请人： Tuomas Aura , Michael Roe , Steven Murdoch
发明人： Tuomas Aura , Michael Roe , Steven Murdoch
IPC分类号： H04L29/06 , G06F17/00 , G06F7/04 , G06F17/30
CPC分类号： H04L63/0823 , H04L9/3265 , H04L2209/80
摘要： Secure network location awareness is provided whereby a client is able to use appropriate settings when communicating with an access node of a communications network. In an embodiment a client receives a signed message from the access node, the signed message comprising at least a certificate chain having a public key. In some embodiments the certificate chain may be only a self-signed certificate and in other embodiments the certificate chain is two or more certificates in length. The client validates the certificate chain and verifies the signature of the signed message. If this is successful the client accesses stored settings for use with the access node. The stored settings are accessed at least using information about the public key. In another embodiment the signed message also comprises a location identifier which is, for example, a domain name system (DNS) suffix of the access node.
摘要翻译：提供安全的网络位置感知，由此当与通信网络的接入节点通信时，客户端能够使用适当的设置。在一个实施例中，客户端从接入节点接收签名的消息，所签署的消息至少包括具有公开密钥的证书链。在一些实施例中，证书链可以仅是自签名证书，并且在其他实施例中，证书链是长度上的两个或更多个证书。客户端验证证书链并验证签名消息的签名。如果这是成功的，客户端访问存储的设置以与接入节点一起使用。至少使用有关公钥的信息访问存储的设置。在另一个实施例中，签名的消息还包括位置标识符，其是例如接入节点的域名系统（DNS）后缀。

4. 发明授权

US08239549B2 Dynamic host configuration protocol 有权
标题翻译：动态主机配置协议
公开(公告)号：US08239549B2
公开(公告)日：2012-08-07
申请号：US11854298
申请日：2007-09-12
申请人： Tuomas Aura , Michael Roe , Steven Murdoch
发明人： Tuomas Aura , Michael Roe , Steven Murdoch
IPC分类号： G06F15/16
CPC分类号： H04L61/2015 , H04L63/0823 , H04L63/126
摘要： Dynamic host configuration protocol (DHCP) is extended in order to assist with secure network location awareness. In an embodiment a DHCP client receives a signed DHCP response message from a DHCP server, the signed message comprising at least a certificate chain having a public key. In that embodiment the DHCP client validates the certificate chain and verifies the signature of the signed message. If this is successful the DHCP client accesses stored settings for use with the server. The stored settings are accessed at least using information about the public key. In some embodiments signed DHCPOFFER messages and signed DHCPACK messages are used. In another embodiment the signed DHCP message comprises a location identifier which is, for example, a domain name system (DNS) suffix of a DHCP server.
摘要翻译：动态主机配置协议（DHCP）被扩展，以协助安全的网络位置感知。在一个实施例中，DHCP客户端从DHCP服务器接收签名的DHCP响应消息，所签署的消息至少包括具有公钥的证书链。在该实施例中，DHCP客户端验证证书链并验证签名消息的签名。如果此操作成功，DHCP客户端将访问存储的设置以供服务器使用。至少使用有关公钥的信息访问存储的设置。在一些实施例中，使用了签名的DHCPOFFER消息和签名的DHCPACK消息。在另一个实施例中，签名的DHCP消息包括例如DHCP服务器的域名系统（DNS）后缀的位置标识符。

5. 发明申请

US20090070582A1 Secure Network Location Awareness 有权
标题翻译：安全的网络位置意识
公开(公告)号：US20090070582A1
公开(公告)日：2009-03-12
申请号：US11854333
申请日：2007-09-12
申请人： Tuomas Aura , Michael Roe , Steven Murdoch
发明人： Tuomas Aura , Michael Roe , Steven Murdoch
IPC分类号： H04L9/00
CPC分类号： H04L63/0823 , H04L9/3265 , H04L2209/80
摘要： Secure network location awareness is provided whereby a client is able to use appropriate settings when communicating with an access node of a communications network. In an embodiment a client receives a signed message from the access node, the signed message comprising at least a certificate chain having a public key. In some embodiments the certificate chain may be only a self-signed certificate and in other embodiments the certificate chain is two or more certificates in length. The client validates the certificate chain and verifies the signature of the signed message. If this is successful the client accesses stored settings for use with the access node. The stored settings are accessed at least using information about the public key. In another embodiment the signed message also comprises a location identifier which is, for example, a domain name system (DNS) suffix of the access node.
摘要翻译：提供安全的网络位置感知，由此当与通信网络的接入节点通信时，客户端能够使用适当的设置。在一个实施例中，客户端从接入节点接收签名的消息，所签署的消息至少包括具有公开密钥的证书链。在一些实施例中，证书链可以仅是自签名证书，并且在其他实施例中，证书链是长度上的两个或更多个证书。客户端验证证书链并验证签名消息的签名。如果这是成功的，客户端访问存储的设置以与接入节点一起使用。至少使用有关公钥的信息访问存储的设置。在另一个实施例中，签名的消息还包括位置标识符，其是例如接入节点的域名系统（DNS）后缀。

6. 发明授权

US07292427B1 Pin lift chuck assembly for warped substrates 有权
标题翻译：用于翘曲基材的销钉提升卡盘组件
公开(公告)号：US07292427B1
公开(公告)日：2007-11-06
申请号：US10962737
申请日：2004-10-12
申请人： Steven Murdoch , Timothy Blomgren
发明人： Steven Murdoch , Timothy Blomgren
IPC分类号： H01L21/67
CPC分类号： H01L21/68714 , H01L21/6838
摘要： A vacuum chuck apparatus may include chuck plate having a substantially flat chucking surface, one or more lift pins, and a lifting mechanism. The lift pins are configured to clamp a substrate at three or more locations. The lifting mechanism lifts the heads of the pins above the level of the chucking surface subsequently lowers the pins to pull the substrate to substantially conform to the chucking surface. A warped substrate may be secured to the chuck surface by raising the lift pins above the surface of chuck, securing a backside of the substrate with the lift pins at three or more locations, and lowering the lift pins to draw the substrate against the surface of the chuck so that the substrate substantially conforms to the surface of the chuck.
摘要翻译：真空吸盘装置可以包括具有基本上平坦的夹紧表面的卡盘板，一个或多个提升销和提升机构。提升销被配置成在三个或更多个位置处夹持基板。提升机构将销钉的头部提升到夹紧表面的高度之上，随后降低销以拉动基板以基本上符合夹紧表面。翘曲的基底可以通过将提升销抬高到卡盘的表面上而固定到卡盘表面，将提升销的基板的背面固定在三个或更多个位置，并且降低升降销以将基板拉到卡盘，使得基底基本上符合卡盘的表面。

7. 发明申请

US20090070474A1 Dynamic Host Configuration Protocol 有权
标题翻译：动态主机配置协议
公开(公告)号：US20090070474A1
公开(公告)日：2009-03-12
申请号：US11854298
申请日：2007-09-12
申请人： Tuomas Aura , Michael Roe , Steven Murdoch
发明人： Tuomas Aura , Michael Roe , Steven Murdoch
IPC分类号： G06F15/16
CPC分类号： H04L61/2015 , H04L63/0823 , H04L63/126
摘要： Dynamic host configuration protocol (DHCP) is extended in order to assist with secure network location awareness. In an embodiment a DHCP client receives a signed DHCP response message from a DHCP server, the signed message comprising at least a certificate chain having a public key. In that embodiment the DHCP client validates the certificate chain and verifies the signature of the signed message. If this is successful the DHCP client accesses stored settings for use with the server. The stored settings are accessed at least using information about the public key. In some embodiments signed DHCPOFFER messages and signed DHCPACK messages are used. In another embodiment the signed DHCP message comprises a location identifier which is, for example, a domain name system (DNS) suffix of a DHCP server.
摘要翻译：动态主机配置协议（DHCP）被扩展，以协助安全的网络位置感知。在一个实施例中，DHCP客户端从DHCP服务器接收签名的DHCP响应消息，所签署的消息至少包括具有公钥的证书链。在该实施例中，DHCP客户端验证证书链并验证签名消息的签名。如果此操作成功，DHCP客户端将访问存储的设置以供服务器使用。至少使用有关公钥的信息访问存储的设置。在一些实施例中，使用了签名的DHCPOFFER消息和签名的DHCPACK消息。在另一个实施例中，签名的DHCP消息包括例如DHCP服务器的域名系统（DNS）后缀的位置标识符。

8. 发明授权

US5000225A Low profile, combination throttle/gate valve for a multi-pump chamber 失效
标题翻译：用于多泵室的低轮廓，组合式油门/闸阀
公开(公告)号：US5000225A
公开(公告)日：1991-03-19
申请号：US438554
申请日：1989-11-17
申请人： Steven Murdoch
发明人： Steven Murdoch
IPC分类号： H01L21/00
CPC分类号： H01L21/67069 , Y10S438/935 , Y10T137/86131 , Y10T137/86863 , Y10T137/87909
摘要： A combination gate valve and throttle valve is presented for use between a process chamber and at least one pump includes a base plate a lower plate and a gate plate. The base plate is attached to the process chamber and includes a base plate gas port for each pump in the system. Each pump is attached to the lower plate. Where each pump is attached to the lower plate there is a lower plate gas port. Each of the lower plate gas ports lines up with one of the base plate gas ports. The gate plate is attached between the lower plate and the base plate. The gate plate has gate plate gas ports so that when the gate plate is moved into an open position with respect to the base plate and the lower plate, the gate plate gas ports line up with the lower plate gas ports and the base plate gas ports allowing gas to flow from the process chamber through the gas ports to the pumps. When the gate plate is moved into a closed position the process chamber is selaed from the pumps. The process chamber is now isolated from the pumps allowing the pumps to be removed without contaminating the process chamber.
摘要翻译：提供组合闸阀和节流阀用于处理室之间，并且至少一个泵包括底板，下板和闸板。基板连接到处理室，并且包括用于系统中的每个泵的基板气体端口。每个泵连接到下板。在每个泵连接到下板的地方有一个下板气口。每个下板气体端口与一个基板气体端口对齐。门板安装在下板和底板之间。门板具有闸板气体端口，使得当闸板相对于基板和下板移动到打开位置时，闸板气体端口与下板气体端口和底板气体端口对齐允许气体从处理室通过气体端口流到泵。当门板移动到关闭位置时，处理室从泵中脱落。处理室现在与泵隔离，允许泵移除而不污染处理室。

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