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    • 9. 发明申请
    • Microfabricated rubber microscope using soft solid immersion lenses
    • 微型橡胶显微镜使用软固体浸没透镜
    • US20050052754A1
    • 2005-03-10
    • US10915943
    • 2004-08-10
    • Stephen QuakeYann GambinOlivier Legrand
    • Stephen QuakeYann GambinOlivier Legrand
    • G02B1/04G02B21/00G02B21/33G02B3/00
    • G02B21/33G02B1/041G02B21/0008C08L83/04
    • Soft lithography with surface tension control is used to microfabricate extremely efficient solid immersion lenses (SILs) out of rubber elastomeric material for use in microscope type applications. In order to counteract the surface tension of the mold material in a negative mold that causes creep on a positive mold, material such as RTV is partially cured before use in order to allow the reticulation of polymer chains to change the viscosity of the uncured material in a controllable manner. In a specific embodiment, the techniques of soft lithography with surface tension control are used to make molded SILs out of the elastomer polydimethylsiloxane. The lenses achieve an NA in the range of 1.25. The principle of compound lens design is used to make the first compound solid immersion lens, which is corrected for higher light gathering ability and has a calculated NA=1.32. An important application of these lenses is integrated optics for microfluidic devices, specifically in a handheld rubber microscope for microfluidic flow cytometry.
    • 使用表面张力控制的软光刻技术可以将非常有效的固体浸没透镜(SIL)从橡胶弹性体材料中微调制成,用于显微镜型应用。 为了抵消在负模具中的模具材料的表面张力,其在正模具上引起蠕变,诸如RTV的材料在使用前被部分固化,以便使聚合物链的网状化以改变未固化材料的粘度 一种可控的方式。 在一个具体的实施方案中,使用表面张力控制的软光刻技术从弹性体聚二甲基硅氧烷中制备模制的SIL。 透镜实现NA在1.25的范围内。 复合透镜设计的原理是用于制造第一个复合固体浸没透镜,其被更正为更高的聚光能力,并且具有计算的NA = 1.32。 这些透镜的重要应用是用于微流体装置的集成光学器件,特别是用于微流体流式细胞术的手持式橡胶显微镜。