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1. 发明授权

US06617187B1 Method for fabricating an electrically addressable silicon-on-sapphire light valve 有权
标题翻译：用于制造电可寻址硅蓝宝石光阀的方法
公开(公告)号：US06617187B1
公开(公告)日：2003-09-09
申请号：US09880660
申请日：2001-08-03
申请人： Randy L. Shimabukuro , Stephen D. Russell , Bruce W. Offord
发明人： Randy L. Shimabukuro , Stephen D. Russell , Bruce W. Offord
IPC分类号： H01L2100
CPC分类号： H01L29/6678 , G02F1/13454 , H01L21/8238 , H01L21/86 , H01L27/1214 , H01L29/78657
摘要： A method for fabricating a monolithically integrated liquid crystal array display and control circuitry on a silicon-on-sapphire structure comprises the steps of: a) forming an epitaxial silicon layer on a sapphire substrate to create a silicon-on-sapphire structure; b) ion implanting the epitaxial silicon layer; c) annealing the silicon-on sapphire structure; d) oxidizing the epitaxial silicon layer to form a silicon dioxide layer from portion of the epitaxial silicon layer so that a thinned epitaxial silicon layer remains; e) removing the silicon dioxide layer to expose the thinned epitaxial silicon layer; f) fabricating an array of pixels from the thinned epitaxial silicon layer; and g) fabricating integrated circuitry from the thinned epitaxial silicon layer which is operably coupled to modulate the pixels. The thinned epitaxial silicon supports the fabrication of device quality circuitry which is used to control the operation of the pixels.
摘要翻译：一种用于制造蓝宝石结构上的单片集成液晶阵列显示和控制电路的方法，包括以下步骤：a）在蓝宝石衬底上形成外延硅层以产生蓝宝石结构; b）离子注入外延硅层; c）退火硅蓝宝石结构; d）氧化所述外延硅层以从所述外延硅层的一部分形成二氧化硅层，从而保留减薄的外延硅层; e）去除二氧化硅层以暴露变薄的外延硅层; f）从所述变薄的外延硅层制造像素阵列; 以及g）从所述变薄的外延硅层制造集成电路，其可操作地耦合以调制像素。减薄的外延硅支持用于控制像素的操作的器件质量电路的制造。

2. 发明授权

US06312968B1 Method for fabricating an electrically addressable silicon-on-sapphire light valve 失效
标题翻译：用于制造电可寻址硅蓝宝石光阀的方法
公开(公告)号：US06312968B1
公开(公告)日：2001-11-06
申请号：US09047658
申请日：1998-03-25
申请人： Randy L. Shimabukuro , Stephen D. Russell , Bruce W. Offord
发明人： Randy L. Shimabukuro , Stephen D. Russell , Bruce W. Offord
IPC分类号： H01L2100
CPC分类号： H01L29/6678 , G02F1/13454 , H01L21/8238 , H01L21/86 , H01L27/1214 , H01L29/78657
摘要： A method for fabricating a monolithically integrated liquid crystal array display and control circuitry on a silicon-on-sapphire structure comprises the steps of: a) forming an epitaxial silicon layer on a sapphire substrate to create a silicon-on-sapphire structure; b) ion implanting the epitaxial silicon layer; c) annealing the silicon-on sapphire structure; d) oxidizing the epitaxial silicon layer to form a silicon dioxide layer from portion of the epitaxial silicon layer so that a thinned epitaxial silicon layer remains; e) removing the silicon dioxide layer to expose the thinned epitaxial silicon layer; f) fabricating an array of pixels from the thinned epitaxial silicon layer; and g) fabricating integrated circuitry from the thinned epitaxial silicon layer which is operably coupled to modulate the pixels. The thinned epitaxial silicon supports the fabrication of device quality circuitry which is used to control the operation of the pixels.
摘要翻译：一种用于制造蓝宝石结构上的单片集成液晶阵列显示和控制电路的方法，包括以下步骤：a）在蓝宝石衬底上形成外延硅层以产生蓝宝石结构; b）离子注入外延硅层; c）退火硅蓝宝石结构; d）氧化所述外延硅层以从所述外延硅层的一部分形成二氧化硅层，从而保留减薄的外延硅层; e）去除二氧化硅层以暴露变薄的外延硅层; f）从所述变薄的外延硅层制造像素阵列; 以及g）从所述变薄的外延硅层制造集成电路，其可操作地耦合以调制像素。减薄的外延硅支持用于控制像素的操作的器件质量电路的制造。

3. 发明授权

US06190933B1 Ultra-high resolution liquid crystal display on silicon-on-sapphire 失效
标题翻译：硅蓝宝石上的超高分辨率液晶显示器
公开(公告)号：US06190933B1
公开(公告)日：2001-02-20
申请号：US09047813
申请日：1998-03-25
申请人： Randy L. Shimabukuro , Stephen D. Russell , Bruce W. Offord
发明人： Randy L. Shimabukuro , Stephen D. Russell , Bruce W. Offord
IPC分类号： H01L2100
CPC分类号： H01L29/6678 , G02F1/13454 , H01L21/8238 , H01L21/86 , H01L27/1214 , H01L29/78657
摘要： A liquid crystal array and associated drive circuitry are monolithically formed on a silicon-on-sapphire structure, and are fabricated by a method comprising the steps of: a) forming an epitaxial silicon layer on a sapphire substrate to create a silicon-on-sapphire structure; b) ion implanting the epitaxial silicon layer; c) annealing the silicon-on sapphire structure; d) oxidizing the epitaxial silicon layer to form a silicon dioxide layer from a portion of the epitaxial silicon layer so that a thinned epitaxial silicon layer remains; e) removing the silicon dioxide layer to expose the thinned epitaxial silicon layer; f) fabricating an array of pixels from the thinned epitaxial silicon layer wherein each of the pixels includes a liquid crystal capacitor; and g) fabricating integrated circuitry from the thinned epitaxial silicon layer which is operably coupled to modulate the pixels. The thinned epitaxial silicon supports the fabrication of device quality circuitry on the silicon-on-sapphire structure which is used to control the operation of the pixels.
摘要翻译：液晶阵列和相关联的驱动电路单片地形成在蓝宝石结构上，并且通过包括以下步骤的方法制造：a）在蓝宝石衬底上形成外延硅层以产生蓝宝石上的硅结构体; b）离子注入外延硅层; c）退火硅蓝宝石结构; d）氧化所述外延硅层以从所述外延硅层的一部分形成二氧化硅层，从而保留减薄的外延硅层; e）去除二氧化硅层以暴露变薄的外延硅层; f）从所述变薄的外延硅层制造像素阵列，其中每个像素包括液晶电容器; 以及g）从所述变薄的外延硅层制造集成电路，其可操作地耦合以调制像素。减薄的外延硅支持在蓝宝石结构上的器件质量电路的制造，其用于控制像素的操作。

4. 发明授权

US07253869B1 Silicon-on-sapphire display with audio transducer and method of fabricating same 有权
标题翻译：具有音频传感器的蓝宝石蓝宝石显示器及其制造方法
公开(公告)号：US07253869B1
公开(公告)日：2007-08-07
申请号：US10901653
申请日：2004-07-29
申请人： Stephen D. Russell , Randy L. Shimabukuro , Bruce W. Offord
发明人： Stephen D. Russell , Randy L. Shimabukuro , Bruce W. Offord
IPC分类号： G02F1/1333
CPC分类号： G02F1/13454
摘要： A liquid crystal display includes: a) a sapphire substrate; b) a single crystal silicon structure disposed on the sapphire substrate to create a silicon-on-sapphire structure; c) a plurality of liquid crystal capacitors disposed on the silicon-on-sapphire structure; d) integrated self-aligned circuitry formed from the crystal silicon structure, where the circuitry modulates the liquid crystal capacitors such that a video image is generated; and e) an integrated audio transducer disposed on the silicon-on-sapphire structure for generating an audible signal.
摘要翻译：液晶显示器包括：a）蓝宝石衬底; b）设置在蓝宝石衬底上的单晶硅结构，以产生蓝宝石结构; c）设置在蓝宝石结构上的多个液晶电容器; d）由晶体硅结构形成的集成自对准电路，其中电路调制液晶电容器，使得产生视频图像; 以及e）设置在蓝宝石结构上的集成音频换能器，用于产生可听见的信号。

5. 发明授权

US07466369B1 Portable projector using a transmissive microdisplay 失效
标题翻译：便携式投影机使用透射微显示器
公开(公告)号：US07466369B1
公开(公告)日：2008-12-16
申请号：US11637576
申请日：2006-12-12
申请人： Bruce W. Offord , Stephen D. Russell , Randy L. Shimabukuro
发明人： Bruce W. Offord , Stephen D. Russell , Randy L. Shimabukuro
IPC分类号： G02F1/1335
CPC分类号： H04N9/3173
摘要： A portable micro-display projector uses a light transmissive liquid crystal display system wherein light is projected co-linearly from a light source through, and is selectively altered by, a transmissive liquid crystal display or liquid crystal light valve of the light transmissive liquid crystal display system.
摘要翻译：便携式微型显示投影仪使用透光型液晶显示系统，其中光从光源共线投射，并被透光液晶显示器的透射型液晶显示器或液晶光阀选择性地改变系统。

6. 发明授权

US06954235B1 Silicon-on-sapphire display apparatus and method of fabricating same 失效
标题翻译：蓝宝石蓝宝石显示装置及其制造方法
公开(公告)号：US06954235B1
公开(公告)日：2005-10-11
申请号：US10614426
申请日：2003-07-07
申请人： Stephen D. Russell , Randy L. Shimabukuro , Bruce W. Offord
发明人： Stephen D. Russell , Randy L. Shimabukuro , Bruce W. Offord
IPC分类号： G02F1/1333 , G02F1/1343 , G02F1/1362 , G02F1/1368
CPC分类号： G02F1/1362 , G02F1/1368 , G02F2001/133302
摘要： A liquid crystal display includes: a) a sapphire substrate having a first crystal lattice structure; b) a single crystal silicon structure having a thickness no greater than about 100 nanometers affixed to the sapphire substrate to create a silicon-on-sapphire structure, and a second crystal lattice structure oriented by the first crystal lattice structure; c) an array of liquid crystal capacitors formed on the silicon-on-sapphire structure; and d) integrated self-aligned circuitry formed from the silicon layer which is operably coupled to modulate the liquid crystal capacitors. The liquid crystals capacitors may include nematic or ferroelectric liquid crystal material.
摘要翻译：液晶显示器包括：a）具有第一晶格结构的蓝宝石衬底; b）具有不大于约100纳米的厚度的单晶硅结构，其固定到蓝宝石衬底以产生蓝宝石结构，以及由第一晶格结构取向的第二晶格结构; c）形成在蓝宝石蓝宝石结构上的液晶电容器阵列; 以及d）由硅层形成的集成的自对准电路，其可操作地耦合以调制液晶电容器。液晶电容器可以包括向列型或铁电型液晶材料。

7. 发明授权

US06521950B1 Ultra-high resolution liquid crystal display on silicon-on-sapphire 有权
标题翻译：硅蓝宝石上的超高分辨率液晶显示器
公开(公告)号：US06521950B1
公开(公告)日：2003-02-18
申请号：US10086952
申请日：2002-03-01
申请人： Randy L. Shimabukuro , Stephen D. Russell , Bruce W. Offord
发明人： Randy L. Shimabukuro , Stephen D. Russell , Bruce W. Offord
IPC分类号： H01L2701
CPC分类号： H01L21/8238 , H01L21/86 , H01L27/1255
摘要： A liquid crystal display includes: a) a sapphire substrate having a first crystal lattice structure; b) a single crystal silicon structure having a thickness no greater than about 100 nanometers affixed to the sapphire substrate to create a silicon-on-sapphire structure, and a second crystal lattice structure oriented by the first crystal lattice structure; c) an array of liquid crystal capacitors formed on the silicon-on-sapphire structure; and d) integrated circuitry formed from the silicon layer which is operably coupled to modulate the liquid crystal capacitors. The liquid crystals capacitors may include nematic or ferroelectric liquid crystal material.
摘要翻译：液晶显示器包括：a）具有第一晶格结构的蓝宝石衬底; b）具有不大于约100纳米的厚度的单晶硅结构，其固定到蓝宝石衬底以产生蓝宝石结构，以及由第一晶格结构取向的第二晶格结构; c）形成在蓝宝石蓝宝石结构上的液晶电容器阵列; 和d）由硅层形成的集成电路，其可操作地耦合以调制液晶电容器。液晶电容器可以包括向列型或铁电型液晶材料。

8. 发明授权

US06365936B1 Ultra-high resolution liquid crystal display on silicon-on-sapphire 有权
标题翻译：硅蓝宝石上的超高分辨率液晶显示器
公开(公告)号：US06365936B1
公开(公告)日：2002-04-02
申请号：US09607438
申请日：2000-06-29
申请人： Randy L. Shimabukuro , Stephen D. Russell , Bruce W. Offord
发明人： Randy L. Shimabukuro , Stephen D. Russell , Bruce W. Offord
IPC分类号： H01L2701
CPC分类号： H01L29/6678 , G02F1/13454 , H01L21/8238 , H01L21/86 , H01L27/1214 , H01L29/78657
摘要： A liquid crystal array and associated drive circuitry are monolithically formed on a silicon-on-sapphire structure, and are fabricated by a method comprising the steps of: a) forming an epitaxial silicon layer on a sapphire substrate to create a silicon-on-sapphire structure; b) ion implanting the epitaxial silicon layer; c) annealing the silicon-on-sapphire structure; d) oxidizing the epitaxial silicon layer to form a silicon dioxide layer from a portion of the epitaxial silicon layer so that a thinned epitaxial silicon layer remains; e) removing the silicon dioxide layer to expose the thinned epitaxial silicon layer; f) fabricating an array of pixels from the thinned epitaxial silicon layer wherein each of the pixels includes a liquid crystal capacitor; and g) fabricating integrated circuitry from the thinned epitaxial silicon layer which is operably coupled to modulate the pixels. The thinned epitaxial silicon supports the fabrication of device quality circuitry on the silicon-on-sapphire structure which is used to control the operation of the pixels.
摘要翻译：液晶阵列和相关联的驱动电路单片地形成在蓝宝石结构上，并且通过包括以下步骤的方法制造：a）在蓝宝石衬底上形成外延硅层以产生蓝宝石上的硅结构体; b）离子注入外延硅层; c）退火蓝宝石结构; d）氧化所述外延硅层以从所述外延硅层的一部分形成二氧化硅层，从而保留减薄的外延硅层; e）去除二氧化硅层以暴露变薄的外延硅层; f）从所述变薄的外延硅层制造像素阵列，其中每个像素包括液晶电容器; 以及g）从所述变薄的外延硅层制造集成电路，其可操作地耦合以调制像素。减薄的外延硅支持在蓝宝石结构上的器件质量电路的制造，其用于控制像素的操作。

9. 发明授权

US06954236B1 Silicon-on-sapphire display with wireless interconnections and method of fabricating same 失效
标题翻译：具有无线互连的蓝宝石蓝宝石显示器及其制造方法
公开(公告)号：US06954236B1
公开(公告)日：2005-10-11
申请号：US10911768
申请日：2004-07-29
申请人： Stephen D. Russell , Randy L. Shimabukuro , Bruce W. Offord
发明人： Stephen D. Russell , Randy L. Shimabukuro , Bruce W. Offord
IPC分类号： G02F1/1343 , G02F1/1362
CPC分类号： G02F1/13454
摘要： A liquid crystal display includes: a) a sapphire substrate; b) a single crystal silicon structure disposed on the sapphire substrate to create a silicon-on-sapphire structure; c) a plurality of liquid crystal capacitors disposed on the silicon-on-sapphire structure; d) integrated self-aligned circuitry formed from the crystal silicon structure, where the circuitry modulates the liquid crystal capacitors in response to an input control signal; and e) a receiver disposed on the silicon-on-sapphire structure for receiving electromagnetic radiation and generating the input control signal responsive to the received electromagnetic radiation.
摘要翻译：液晶显示器包括：a）蓝宝石衬底; b）设置在蓝宝石衬底上的单晶硅结构，以产生蓝宝石结构; c）设置在蓝宝石结构上的多个液晶电容器; d）由晶体硅结构形成的集成自对准电路，其中电路响应于输入控制信号调制液晶电容器; 以及e）设置在蓝宝石结构上的接收器，用于接收电磁辐射并响应于所接收的电磁辐射产生输入控制信号。

10. 发明授权

US06738194B1 Resonance tunable optical filter 失效
标题翻译：共振可调滤光片
公开(公告)号：US06738194B1
公开(公告)日：2004-05-18
申请号：US10200712
申请日：2002-07-22
申请人： Ayax D. Ramirez , Stephen D. Russell , Randy L. Shimabukuro
发明人： Ayax D. Ramirez , Stephen D. Russell , Randy L. Shimabukuro
IPC分类号： G02B2700
CPC分类号： G02B5/22 , G02B6/266
摘要： An optical modulating device capable of use as a light valve, display, or optical filter, which uses variation in incident angle to exploit color-selective absorption at a metal-dielectric interface by surface plasmons. The device includes a dielectric layer, at least one metallic layer through which electromagnetic radiation may be transmitted or reflected, and incident and exit layers which are both optically transmissive. A beam steering mechanism controls the incident angle of the electromagnetic radiation. In one embodiment, an external beam steering mechanism is used to set the incident light angle onto the filter. In another embodiment, the filter is formed as an integral part of, for example, a cantilever. The incident light angle is then controlled by the angle of the filter cantilever.
摘要翻译：能够用作光阀，显示器或滤光器的光调制装置，其使用入射角度的变化来利用表面等离子体激元在金属 - 电介质界面处利用颜色选择性吸收。该器件包括电介质层，电磁辐射可透过或反射的至少一个金属层，以及光学透射的入射层和出射层。光束转向机构控制电磁辐射的入射角。在一个实施例中，外部光束转向机构用于将入射光角度设置在过滤器上。在另一个实施例中，过滤器形成为例如悬臂的整体部分。入射光角然后由过滤器悬臂的角度控制。

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