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1. 发明授权

US08707553B2 Method and system for improving alignment precision of parts in MEMS 失效
标题翻译：提高MEMS零件对准精度的方法和系统
公开(公告)号：US08707553B2
公开(公告)日：2014-04-29
申请号：US11571811
申请日：2005-05-17
申请人： Stefano S. Oggioni , Michel Despont , Mark Lantz , Thomas Albrecht
发明人： Stefano S. Oggioni , Michel Despont , Mark Lantz , Thomas Albrecht
IPC分类号： H05K3/30 , H05K3/20
CPC分类号： B81C1/00269 , B81C3/005 , B81C2203/054 , B81C2203/055 , B82Y10/00 , G11B9/1436 , H01L2924/00013 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599
摘要： A method and system for improving alignment precision of a pair of MEMS parts. The method involves stacking the two parts such that at least one rolling element is between facing surfaces of said two parts, and each rolling element has a first diameter and an axis of rotation parallel to the facing surfaces. The first and second of a pair of MEMS parts respectively include a first alignment pad and a second alignment pad and a liquid drop formed in contact with both alignment pads can align the two parts which can then be locked together by solidification of solder while remaining spaced by the first diameter.
摘要翻译：一种用于提高一对MEMS部件的对准精度的方法和系统。该方法包括堆叠两个部分，使得至少一个滚动元件位于所述两个部件的相对表面之间，并且每个滚动元件具有平行于相对表面的第一直径和旋转轴线。一对MEMS部件中的第一和第二部分分别包括第一对准焊盘和第二对准焊盘，并且与两个对准焊盘接触形成的液滴可以对准两个部分，然后可以通过焊料固化将其锁定在一起，同时保持间隔按第一个直径。

2. 发明申请

US20090211087A1 METHOD AND SYSTEM FOR IMPROVING ALIGNMENT PRECISION OF PARTS IN MEMS 失效
标题翻译：改进MEMS零件对准精度的方法和系统
公开(公告)号：US20090211087A1
公开(公告)日：2009-08-27
申请号：US11571811
申请日：2005-05-05
申请人： Stefano S. Oggioni , Michel Despont , Mark Lantz , Thomas Albrecht
发明人： Stefano S. Oggioni , Michel Despont , Mark Lantz , Thomas Albrecht
IPC分类号： H05K3/30
CPC分类号： B81C1/00269 , B81C3/005 , B81C2203/054 , B81C2203/055 , B82Y10/00 , G11B9/1436 , H01L2924/00013 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599
摘要： A method and system for improving alignment precision of MEMS parts during manufacturing are disclosed. According to the invention at least one of the MEMS parts comprises a cavity wherein a sphere or bearing is centered and preferably temporary blocked with a temperature dissipative material. When MEMS parts are in contact of the sphere or bearing, the temperature dissipative material is evaporated, offering a very low friction against two facing MEMS parts moving in different directions, enabling a very precise positioning.
摘要翻译：公开了一种在制造过程中提高MEMS部件的对准精度的方法和系统。根据本发明，MEMS部件中的至少一个包括空腔，其中球体或轴承居中并且优选地用温度耗散材料临时阻挡。当MEMS部件与球体或轴承接触时，温度耗散材料被蒸发，对于在不同方向上移动的两个面对的MEMS部件提供非常低的摩擦，从而能够进行非常精确的定位。

3. 发明授权

US07482826B2 Probe for scanning over a substrate and a data storage device 失效
标题翻译：用于扫描基板和数据存储设备的探头
公开(公告)号：US07482826B2
公开(公告)日：2009-01-27
申请号：US11332137
申请日：2006-01-13
申请人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
IPC分类号： G01R31/02
CPC分类号： G01Q70/14 , G01Q80/00 , G11B9/1409 , G11B11/007
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译：数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。存储介质可以包含在基板中。探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。提供具有纳米级顶点的尖端。梁结构包括加热电阻器，并且在端部附接到支撑结构。与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。

4. 发明申请

US20080013437A1 Probe for scanning over a substrate and a data storage device 失效
标题翻译：用于扫描基板和数据存储设备的探头
公开(公告)号：US20080013437A1
公开(公告)日：2008-01-17
申请号：US11332137
申请日：2006-01-13
申请人： Thomas Albrecht , Michel Despont , Urs Duerig , Mark Lantz , Hugo Rothuizen , Dorothea Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs Duerig , Mark Lantz , Hugo Rothuizen , Dorothea Wiesmann Rothuizen
IPC分类号： G11B3/00
CPC分类号： G01Q70/14 , G01Q80/00 , G11B9/1409 , G11B11/007
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译：数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。存储介质可以包含在基板中。探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。提供具有纳米级顶点的尖端。梁结构包括加热电阻器，并且在端部附接到支撑结构。与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。

5. 发明申请

US20080011814A1 Method and System for Self-Aligning Parts in Mems 审中-公开
标题翻译：内存中自动对齐零件的方法和系统
公开(公告)号：US20080011814A1
公开(公告)日：2008-01-17
申请号：US10596349
申请日：2004-11-08
申请人： Stefano Oggioni , Thomas Albrecht , Michel Despont , Mark Lantz , Michele Castriotta
发明人： Stefano Oggioni , Thomas Albrecht , Michel Despont , Mark Lantz , Michele Castriotta
IPC分类号： B23K31/02 , B81B7/00
CPC分类号： B81C3/002 , H05K3/3436 , H05K2201/094 , H05K2201/09418 , H05K2201/2036 , H05K2203/048 , Y02P70/613
摘要： A method and system for efficiently self-aligning parts of a MEMS during manufacturing, as well as controlling distance between these parts, are disclosed. According to the invention each MEMS part comprises at least one pad that is aligned so as to form a pair of pads. In a preferred embodiment, each part comprises three pads. The pad shape of two pairs of pads is rectangular, one pair being rotated of an angle approximately equal to 90° from the other, and the pad shape of the third pair is annular. Therefore, one of the pair of pads allows alignment according to a first direction, a second pair of pads allows alignment according to a second direction, and the third pair of pads allows rotational alignment.
摘要翻译：公开了一种用于在制造期间有效地对准MEMS部件的方法和系统，以及控制这些部件之间的距离。根据本发明，每个MEMS部件包括至少一个对准以形成一对焊盘的焊盘。在优选实施例中，每个部分包括三个焊盘。两对焊盘的焊盘形状是矩形的，一对由另一对旋转大约等于90°的角度，第三对的焊盘形状是环形的。因此，一对衬垫之一允许根据第一方向进行对准，第二对衬垫允许根据第二方向对准，并且第三对衬垫允许旋转对准。

6. 发明授权

US08373431B2 Probe for scanning over a substrate and data storage device 失效
标题翻译：用于扫描基板和数据存储设备的探头
公开(公告)号：US08373431B2
公开(公告)日：2013-02-12
申请号：US12054938
申请日：2008-03-25
申请人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
IPC分类号： G01R31/02 , G01R31/28
CPC分类号： G11B11/007 , G01Q70/14 , G01Q80/00 , G11B9/1409
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译：数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。存储介质可以包含在基板中。探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。提供具有纳米级顶点的尖端。梁结构包括加热电阻器，并且在端部附接到支撑结构。与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。

7. 发明申请

US20090003188A1 PROBE FOR SCANNING OVER A SUBSTRATE AND DATA STORAGE DEVICE 失效
标题翻译：用于扫描基板和数据存储设备的探测
公开(公告)号：US20090003188A1
公开(公告)日：2009-01-01
申请号：US12054938
申请日：2008-03-25
申请人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo Rothuizen , Dorothea W. Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo Rothuizen , Dorothea W. Wiesmann Rothuizen
IPC分类号： G11B3/00
CPC分类号： G11B11/007 , G01Q70/14 , G01Q80/00 , G11B9/1409
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译：数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。存储介质可以包含在基板中。探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。提供具有纳米级顶点的尖端。梁结构包括加热电阻器，并且在端部附接到支撑结构。与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。

8. 发明申请

US20060043288A1 Scanning probe for data storage and microscopy 失效
标题翻译：扫描探针用于数据存储和显微镜
公开(公告)号：US20060043288A1
公开(公告)日：2006-03-02
申请号：US10502366
申请日：2002-12-11
申请人： Gerd Binnig , Michel Despont , Walter Haeberle , Mark Lantz
发明人： Gerd Binnig , Michel Despont , Walter Haeberle , Mark Lantz
IPC分类号： G21K7/00
CPC分类号： G11B9/1418 , G01Q70/06 , G01Q80/00 , G11B9/14 , G11B9/1409 , G11B2005/0021
摘要： A cantilever device for scanning a surface comprises a support, a tip platform and a flexible arm arrangement. The tip platform has a plurality of tips. These comprise at least two contact tips providing points of contact with a surface to be scanned, and a scanning tip for scanning the surface, where the scanning tip may be one of the two or more contact tips provided on the platform. The flexible arm arrangement connects the tip platform to the support and allows orientation of the platform, via flexing of the arm arrangement, to bring the contact tips into contact with a surface to be scanned. The platform is then at a well-defined orientation relative to the scan surface, and the scanning tip is appropriately positioned for the scanning operation. Scanning probe microscopes and data storage devices incorporating such cantilever devices are also provided.
摘要翻译：用于扫描表面的悬臂装置包括支撑件，尖端平台和柔性臂装置。尖端平台具有多个尖端。这些包括提供与待扫描表面的接触点的至少两个接触尖端和用于扫描表面的扫描尖端，其中扫描尖端可以是设置在平台上的两个或更多个接触尖端中的一个。柔性臂装置将尖端平台连接到支撑件并且允许平台的取向通过臂装置的弯曲，以使接触尖端与待扫描的表面接触。然后平台相对于扫描表面定义明确，并且扫描尖端适当地定位用于扫描操作。还提供了包括这种悬臂装置的扫描探针显微镜和数据存储装置。

9. 发明申请

US20080017978A1 Semiconductor Device With A High Thermal Dissipation Efficiency 有权
标题翻译：具有高散热效率的半导体器件
公开(公告)号：US20080017978A1
公开(公告)日：2008-01-24
申请号：US11852317
申请日：2007-09-09
申请人： Thomas Brunschwiler , Michel Despont , Mark Lantz , Bruno Michel , Peter Vettiger
发明人： Thomas Brunschwiler , Michel Despont , Mark Lantz , Bruno Michel , Peter Vettiger
IPC分类号： H01L23/34
CPC分类号： H01L21/4882 , H01L21/4871 , H01L21/4875 , H01L23/3677 , H01L2224/16 , H01L2224/73253 , H01L2924/09701 , H01L2924/1461 , H01L2924/00
摘要： A semiconductor device having a higher thermal dissipation efficiency comprises a thermally conducting structure attached to a surface of the semiconductor device via soldering. The thermally conducting structure is essentially formed of a thermally conducting material and comprises an array of freestanding fins, studs or frames, or a grid of connected fins. A process for fabricating such a semiconductor device includes forming a thermally conducting structure on a carrier and attaching the thermally conducting structure formed on the carrier to a surface of the semiconductor device via soldering.
摘要翻译：具有更高散热效率的半导体器件包括通过焊接附接到半导体器件的表面的导热结构。导热结构基本上由导热材料形成，并且包括独立的翅片，螺柱或框架的阵列或连接的翅片的格栅。制造这种半导体器件的方法包括在载体上形成导热结构，并通过焊接将形成在载体上的导热结构附着在半导体器件的表面上。

10. 发明申请

US20050277280A1 Semiconductor device with a high thermal dissipation efficiency 有权
标题翻译：具有高散热效率的半导体器件
公开(公告)号：US20050277280A1
公开(公告)日：2005-12-15
申请号：US11148737
申请日：2005-06-09
申请人： Thomas Brunschwiler , Michel Despont , Mark Lantz , Bruno Michel , Peter Vettiger
发明人： Thomas Brunschwiler , Michel Despont , Mark Lantz , Bruno Michel , Peter Vettiger
IPC分类号： H01L21/44 , H01L21/48 , H01L23/367
CPC分类号： H01L21/4882 , H01L21/4871 , H01L21/4875 , H01L23/3677 , H01L2224/16 , H01L2224/73253 , H01L2924/09701 , H01L2924/1461 , H01L2924/00
摘要： Provides semiconductor devices and method for fabricating devices having a high thermal dissipation efficiency. An example device comprises a thermally conducting structure attached to a surface of the semiconductor device via soldering. The thermally conducting structure is essentially formed of a thermally conducting material and comprises an array of freestanding fins, studs or frames, or a grid of connected fins. A process for fabricating such a semiconductor device includes forming a thermally conducting structure on a carrier and attaching the thermally conducting structure formed on the carrier to a surface of the semiconductor device via soldering.
摘要翻译：提供用于制造具有高散热效率的器件的半导体器件和方法。示例性装置包括通过焊接附接到半导体器件的表面的导热结构。导热结构基本上由导热材料形成，并且包括独立的翅片，螺柱或框架的阵列或连接的翅片的格栅。制造这种半导体器件的方法包括在载体上形成导热结构，并通过焊接将形成在载体上的导热结构附着在半导体器件的表面上。

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