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    • 1. 发明授权
    • Process of forming an electronic device including a doped semiconductor layer
    • 形成包括掺杂半导体层的电子器件的工艺
    • US07560354B2
    • 2009-07-14
    • US11835643
    • 2007-08-08
    • Stefan ZollnerBich-Yen Nguyen
    • Stefan ZollnerBich-Yen Nguyen
    • H01L21/336
    • H01L21/28035H01L21/02532H01L21/02576H01L21/0262H01L21/2807H01L29/4916H01L29/66636H01L29/7833
    • A process can include forming a doped semiconductor layer over a substrate. The process can also include performing an action that reduces a dopant content along an exposed surface of a workpiece that includes the substrate and the doped semiconductor layer. The action is performed after forming the doped semiconductor layer and before the doped semiconductor layer is exposed to a room ambient. In particular embodiments, the doped semiconductor layer includes a semiconductor material that includes a combination of at least two elements selected from the group consisting of C, Si, and Ge, and the doped semiconductor layer also includes a dopant, such as phosphorus, arsenic, boron, or the like. The action can include forming an encapsulating layer, exposing the doped semiconductor layer to radiation, annealing the doped semiconductor layer, or any combination thereof.
    • 工艺可以包括在衬底上形成掺杂半导体层。 该方法还可以包括执行减少沿着包括衬底和掺杂半导体层的工件的暴露表面的掺杂剂含量的动作。 在形成掺杂半导体层之后并且在掺杂半导体层暴露于室内环境之前执行该动作。 在特定实施例中,掺杂半导体层包括半导体材料,其包括选自由C,Si和Ge组成的组中的至少两种元素的组合,并且掺杂半导体层还包括掺杂剂,例如磷,砷, 硼等。 该作用可以包括形成封装层,将掺杂半导体层暴露于辐射,退火掺杂半导体层,或其任何组合。
    • 2. 发明申请
    • PROCESS OF FORMING AN ELECTRONIC DEVICE INCLUDING A DOPED SEMICONDUCTOR LAYER
    • 形成包含掺杂半导体层的电子器件的工艺
    • US20090042373A1
    • 2009-02-12
    • US11835643
    • 2007-08-08
    • Stefan ZollnerBich-Yen Nguyen
    • Stefan ZollnerBich-Yen Nguyen
    • H01L21/20H01L21/02
    • H01L21/28035H01L21/02532H01L21/02576H01L21/0262H01L21/2807H01L29/4916H01L29/66636H01L29/7833
    • A process can include forming a doped semiconductor layer over a substrate. The process can also include performing an action that reduces a dopant content along an exposed surface of a workpiece that includes the substrate and the doped semiconductor layer. The action is performed after forming the doped semiconductor layer and before the doped semiconductor layer is exposed to a room ambient. In particular embodiments, the doped semiconductor layer includes a semiconductor material that includes a combination of at least two elements selected from the group consisting of C, Si, and Ge, and the doped semiconductor layer also includes a dopant, such as phosphorus, arsenic, boron, or the like. The action can include forming an encapsulating layer, exposing the doped semiconductor layer to radiation, annealing the doped semiconductor layer, or any combination thereof.
    • 工艺可以包括在衬底上形成掺杂半导体层。 该方法还可以包括执行减少沿着包括衬底和掺杂半导体层的工件的暴露表面的掺杂剂含量的动作。 在形成掺杂半导体层之后并且在掺杂半导体层暴露于室内环境之前执行该动作。 在特定实施例中,掺杂半导体层包括半导体材料,其包括选自由C,Si和Ge组成的组中的至少两种元素的组合,并且掺杂半导体层还包括掺杂剂,例如磷,砷, 硼等。 该作用可以包括形成封装层,将掺杂半导体层暴露于辐射,退火掺杂半导体层,或其任何组合。
    • 4. 发明授权
    • Pseudo-inverter circuit on SeOI
    • SeOI上的伪逆变电路
    • US08654602B2
    • 2014-02-18
    • US13495632
    • 2012-06-13
    • Carlos MazureRichard FerrantBich-Yen Nguyen
    • Carlos MazureRichard FerrantBich-Yen Nguyen
    • G11C8/00
    • G11C8/08G11C11/4085G11C2211/4016
    • A circuit made on a semiconductor-on-insulator substrate. The circuit includes a first transistor having a first channel, a second transistor having a second channel, with the transistors provided in serial association between first and second terminals for applying a power supply potential, each of the transistors comprising a drain region and a source region in the thin layer, a channel extending between the source region and the drain region, and a front control gate located above the channel. Each transistor has a back control gate formed in the base substrate below the channel of the transistor and capable of being biased in order to modulate the threshold voltage of the transistor. At least one of the transistors is configured for operating in a depletion mode under the action of a back gate signal which will sufficiently modulate its threshold voltage.
    • 在绝缘体上半导体衬底上制成的电路。 该电路包括具有第一通道的第一晶体管,具有第二通道的第二晶体管,晶体管以第一和第二端子串联连接的方式提供,以施加电源电位,每个晶体管包括漏极区域和源极区域 在薄层中,在源极区域和漏极区域之间延伸的沟道以及位于沟道上方的前部控制栅极。 每个晶体管具有形成在晶体管的沟道下方的基底衬底中的背控制栅极,并且能够被偏置以便调制晶体管的阈值电压。 晶体管中的至少一个被配置为在充分调制其阈值电压的背栅信号的作用下以耗尽模式工作。
    • 5. 发明申请
    • PSEUDO-INVERTER CIRCUIT ON SeO1
    • PSO1上的PSEUDO-INVERTER电路
    • US20110242926A1
    • 2011-10-06
    • US12793553
    • 2010-06-03
    • Carlos MazureRichard FerrantBich-Yen Nguyen
    • Carlos MazureRichard FerrantBich-Yen Nguyen
    • G11C8/08G05F1/10
    • G11C8/08G11C11/4085G11C2211/4016
    • A circuit made on a semiconductor-on-insulator substrate. The circuit includes a first transistor having a first channel, a second transistor having a second channel, with the transistors provided in serial association between first and second terminals for applying a power supply potential, each of the transistors comprising a drain region and a source region in the thin layer, a channel extending between the source region and the drain region, and a front control gate located above the channel. Each transistor has a back control gate formed in the base substrate below the channel of the transistor and capable of being biased in order to modulate the threshold voltage of the transistor. At least one of the transistors is configured for operating in a depletion mode under the action of a back gate signal which will sufficiently modulate its threshold voltage.
    • 在绝缘体上半导体衬底上制成的电路。 该电路包括具有第一通道的第一晶体管,具有第二通道的第二晶体管,晶体管以第一和第二端子串联连接的方式提供,以施加电源电位,每个晶体管包括漏极区域和源极区域 在薄层中,在源极区域和漏极区域之间延伸的沟道以及位于沟道上方的前部控制栅极。 每个晶体管具有形成在晶体管的沟道下方的基底衬底中的背控制栅极,并且能够被偏置以便调制晶体管的阈值电压。 晶体管中的至少一个被配置为在充分调制其阈值电压的背栅信号的作用下以耗尽模式工作。
    • 6. 发明授权
    • Power MOSFET with a gate structure of different material
    • 功率MOSFET具有栅极结构不同的材料
    • US07943988B2
    • 2011-05-17
    • US12205438
    • 2008-09-05
    • Daniel PhamBich-Yen Nguyen
    • Daniel PhamBich-Yen Nguyen
    • H01L29/78
    • H01L29/7833H01L21/28105H01L29/42372
    • A semiconductor device includes a semiconductor layer of a first conductivity type and a first doping concentration. A first semiconductor region, used as drain, of the first conductivity type has a lower doping concentration than the semiconductor layer and is over the semiconductor layer. A gate dielectric is over the first semiconductor region. A gate electrode over the gate dielectric has a metal-containing center portion and first and second silicon portions on opposite sides of the center portion. A second semiconductor region, used as a channel, of the second conductivity type has a first portion under the first silicon portion and the gate dielectric. A third semiconductor region, used as a source, of the first conductivity type is laterally adjacent to the first portion of the second semiconductor region. The metal-containing center portion, replacing silicon, increases the source to drain breakdown voltage.
    • 半导体器件包括第一导电类型和第一掺杂浓度的半导体层。 用作第一导电类型的漏极的第一半导体区域具有比半导体层更低的掺杂浓度,并且在半导体层之上。 栅极电介质在第一半导体区域之上。 栅极电介质上的栅极电极在中心部分的相对侧上具有含金属的中心部分和第一和第二硅部分。 用作第二导电类型的沟道的第二半导体区域具有在第一硅部分下面的第一部分和栅极电介质。 用作第一导电类型的源的第三半导体区域与第二半导体区域的第一部分横向相邻。 置换硅的含金属中心部分将源极增加到漏极击穿电压。
    • 8. 发明授权
    • Electronic device including a semiconductor fin
    • 包括半导体鳍片的电子设备
    • US07800141B2
    • 2010-09-21
    • US12174357
    • 2008-07-16
    • Da ZhangBich-Yen Nguyen
    • Da ZhangBich-Yen Nguyen
    • H01L29/06
    • H01L29/785H01L29/4908H01L29/66507H01L29/66795H01L29/78684
    • An electronic device can include a semiconductor fin overlying an insulating layer. The electronic device can also include a semiconductor layer overlying the semiconductor fin. The semiconductor layer can have a first portion and a second portion that are spaced-apart from each other. In one aspect, the electronic device can include a conductive member that lies between and spaced-apart from the first and second portions of the semiconductor layer. The electronic device can also include a metal-semiconductor layer overlying the semiconductor layer. In another aspect, the semiconductor layer can abut the semiconductor fin and include a dopant. In a further aspect, a process of forming the electronic device can include reacting a metal-containing layer and a semiconductor layer to form a metal-semiconductor layer. In another aspect, a process can include forming a semiconductor layer, including a dopant, abutting a wall surface of a semiconductor fin.
    • 电子器件可以包括覆盖绝缘层的半导体鳍片。 电子器件还可以包括覆盖半导体鳍片的半导体层。 半导体层可以具有彼此间隔开的第一部分和第二部分。 在一个方面,电子设备可以包括位于半导体层的第一和第二部分之间并与之隔开的导电构件。 电子器件还可以包括覆盖半导体层的金属 - 半导体层。 在另一方面,半导体层可以邻接半导体鳍并包括掺杂剂。 在另一方面,形成电子器件的方法可以包括使含金属层和半导体层反应以形成金属 - 半导体层。 在另一方面,一种方法可以包括形成邻接半导体鳍片的壁表面的包括掺杂剂的半导体层。