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1. 发明申请

US20090294697A1 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US20090294697A1
公开(公告)日：2009-12-03
申请号：US12453986
申请日：2009-05-28
申请人： Souichi Katagiri , Takashi Ohshima , Sho Takami , Makoto Ezumi , Takashi Doi , Yuji Kasai
发明人： Souichi Katagiri , Takashi Ohshima , Sho Takami , Makoto Ezumi , Takashi Doi , Yuji Kasai
IPC分类号： A61N5/00 , G21F5/02
CPC分类号： H01J37/18 , H01J2237/06341 , H01J2237/182 , H01J2237/188
摘要： The present invention provides a charged particle beam apparatus that keeps the degree of vacuum in the vicinity of the electron source to ultra-high vacuum such as 10−8 to 10−9 Pa even in the state where electron beams are emitted using a non-evaporable getter pump and is not affected by dropout foreign particles.The present invention includes a vacuum vessel in which a charged particle source (electron source, ion source, etc.) is disposed and a non-evaporable getter pump disposed at a position that does not directly face electron beams and includes a structure that makes the non-evaporable getter pump upward with respect to a horizontal direction to drop out foreign particles into a bottom in a groove, so that the foreign particles dropped out from the non-evaporable getter pump do not face an electron optical system. Or, the present invention includes a structure that is covered by a shield means, or a means that is disposed immediately on a surface of the non-evaporable getter pump but at a position where the electron beams are not seen and has a concave structure capable of trapping the dropout foreign particles on a lower portion of the non-evaporable getter pump.
摘要翻译：本发明提供了一种带电粒子束装置，其将电子源附近的真空度保持为10-8至10-9Pa的超高真空度，即使在使用非电子束发射电子束的状态下，可蒸发吸气泵，不受脱落异物的影响。本发明包括设置有带电粒子源（电子源，离子源等）的真空容器和设置在不直接面向电子束的位置的非蒸发性吸气泵，并且包括使不可蒸发的吸气剂相对于水平方向向上泵送以将异物排出到槽中的底部，使得从非蒸发性吸气泵排出的异物不面向电子光学系统。或者，本发明包括被屏蔽装置覆盖的结构，或者立即设置在不可蒸发的吸气泵的表面上，但是在不能看到电子束的位置处并具有凹形结构的装置在非蒸发性吸气泵的下部捕获脱落的异物。

2. 发明授权

US08686380B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US08686380B2
公开(公告)日：2014-04-01
申请号：US12453986
申请日：2009-05-28
申请人： Souichi Katagiri , Takashi Ohshima , Sho Takami , Makoto Ezumi , Takashi Doi , Yuji Kasai
发明人： Souichi Katagiri , Takashi Ohshima , Sho Takami , Makoto Ezumi , Takashi Doi , Yuji Kasai
IPC分类号： G21G5/00
CPC分类号： H01J37/18 , H01J2237/06341 , H01J2237/182 , H01J2237/188
摘要： The present invention provides a charged particle beam apparatus that keeps the degree of vacuum in the vicinity of the electron source to ultra-high vacuum such as 10−8 to 10−9 Pa even in the state where electron beams are emitted using a non-evaporable getter pump and is not affected by dropout foreign particles.The present invention includes a vacuum vessel in which a charged particle source (electron source, ion source, etc.) is disposed and a non-evaporable getter pump disposed at a position that does not directly face electron beams and includes a structure that makes the non-evaporable getter pump upward with respect to a horizontal direction to drop out foreign particles into a bottom in a groove, so that the foreign particles dropped out from the non-evaporable getter pump do not face an electron optical system. Or, the present invention includes a structure that is covered by a shield means, or a means that is disposed immediately on a surface of the non-evaporable getter pump but at a position where the electron beams are not seen and has a concave structure capable of trapping the dropout foreign particles on a lower portion of the non-evaporable getter pump.
摘要翻译：本发明提供了一种带电粒子束装置，其将电子源附近的真空度保持为10-8至10-9Pa的超高真空度，即使在使用非电子束发射电子束的状态下，可蒸发吸气泵，不受脱落异物的影响。本发明包括设置有带电粒子源（电子源，离子源等）的真空容器和设置在不直接面向电子束的位置的非蒸发性吸气泵，并且包括使不可蒸发的吸气剂相对于水平方向向上泵送以将异物排出到槽中的底部，使得从非蒸发性吸气泵排出的异物不面向电子光学系统。或者，本发明包括被屏蔽装置覆盖的结构，或者立即设置在不可蒸发的吸气泵的表面上，但是在不能看到电子束的位置处并具有凹形结构的装置在非蒸发性吸气泵的下部捕获脱落的异物。

3. 发明授权

US07583749B2 Digital data transmitting apparatus 失效
标题翻译：数字数据发送装置
公开(公告)号：US07583749B2
公开(公告)日：2009-09-01
申请号：US10569274
申请日：2004-09-07
申请人： Yuji Kasai , Masahiro Murakawa , Tetsuya Higuchi
发明人： Yuji Kasai , Masahiro Murakawa , Tetsuya Higuchi
IPC分类号： H04L25/49
CPC分类号： H04L27/368 , H04L5/14 , H04L25/03343
摘要： A transmitting circuit 10 converts transmission data to a multilevel analog signal suitable for transmission. The multilevel analog signal is output to a cable 21 via an amplifier and a hybrid circuit 12. In the transmitting circuit 10, a waveform which compensates waveform deterioration at the cable 21 is generated. A reception signal from the cable 21 is input to a mixer 14 via the hybrid circuit 12 and an amplifier 13. The mixer 14 mixes the reception signal and a cancel signal output from a cancel signal generation circuit 17 so as to remove undesired signals. In a receiving circuit 15, the signal output from the mixer 14 is sampled by use of a plurality of sample-hold circuits, and subjected to analog sum-of-product computation which is performed by a matrix circuit for distortion compensation. Subsequently, the sampled signals are converted to digital signals. The digital signals are collectively subjected to processing such as parallel-serial conversion, whereby reception data and an evaluation signal are obtained. An adjustment control circuit 18 includes a CPU, and adjusts the respective circuits on the basis of the evaluation signal such that data can be correctly transmitted and received.
摘要翻译：发送电路10将发送数据转换为适合于发送的多级模拟信号。多电平模拟信号经由放大器和混合电路12输出到电缆21.在发送电路10中，产生补偿电缆21的波形恶化的波形。来自电缆21的接收信号经由混合电路12和放大器13输入到混频器14.混频器14混合接收信号和从消除信号发生电路17输出的消除信号，以便去除不想要的信号。在接收电路15中，通过使用多个采样保持电路对从混频器14输出的信号进行采样，并进行由用于失真补偿的矩阵电路执行的模拟和积计算。随后，采样信号被转换成数字信号。数字信号被集体地进行并行串行转换的处理，从而获得接收数据和评估信号。调整控制电路18包括CPU，并且基于评估信号调整各个电路，使得可以正确地发送和接收数据。

4. 发明申请

US20080310492A1 Parameter Adjustment Device and Parameter Adjustment Method 审中-公开
标题翻译：参数调整装置及参数调整方法
公开(公告)号：US20080310492A1
公开(公告)日：2008-12-18
申请号：US11630647
申请日：2005-06-22
申请人： Yuji Kasai , Masatoshi Sato , Takashi Kamata
发明人： Yuji Kasai , Masatoshi Sato , Takashi Kamata
IPC分类号： H03K5/159
CPC分类号： H04B3/04 , H04L25/0272 , H04L25/0278 , H04L25/03885 , H04L25/4975
摘要： Transmission equipment that can be used up to a high frequency and simplifies a circuit design includes a THP preceding means on a transmitting side, and an equalizer means, wherein analog processing is carried out on a receiving side. Compensation of the frequency characteristic of a transmission channel is divided into the THP preceding means on the transmitting side and the equalizer means, so that due to compensation by the equalizer circuit, the absolute value of a THP coefficient becomes small, and a DAC with lower resolution, wherein stability of a loop of the THP increases, can be used. Detailed adjustment for adapting to the characteristic of a transmission channel is carried out by the THP, so that the equalizer circuit is only required to roughly compensate, and is not required to adjust. As a result, the equalizer circuit can be of a simple design.
摘要翻译：可以使用高频率并简化电路设计的传输设备包括发送侧的THP先前装置和均衡器装置，其中在接收侧执行模拟处理。传输信道的频率特性的补偿被分成发送侧的THP先前装置和均衡装置，由于由均衡器电路补偿，THP系数的绝对值变小，并且具有较低的DAC 可以使用其中THP的环路的稳定性增加的分辨率。通过THP进行适应传输通道的特性的详细调整，使均衡器电路只需要大致补偿，不需要调整。结果，均衡器电路可以是简单的设计。

5. 发明申请

US20060274850A1 Digital data transmitting apparatus 失效
公开(公告)号：US20060274850A1
公开(公告)日：2006-12-07
申请号：US10569274
申请日：2004-09-07
申请人： Yuji Kasai , Maria Murakawa , Tetsuya Higuchi
发明人： Yuji Kasai , Maria Murakawa , Tetsuya Higuchi
IPC分类号： H04L25/49
CPC分类号： H04L27/368 , H04L5/14 , H04L25/03343
摘要： A transmitting circuit 10 converts transmission data to a multilevel analog signal suitable for transmission. The multilevel analog signal is output to a cable 21 via an amplifier and a hybrid circuit 12. In the transmitting circuit 10, a waveform which compensates waveform deterioration at the cable 21 is generated. A reception signal from the cable 21 is input to a mixer 14 via the hybrid circuit 12 and an amplifier 13. The mixer 14 mixes the reception signal and a cancel signal output from a cancel signal generation circuit 17 so as to remove undesired signals. In a receiving circuit 15, the signal output from the mixer 14 is sampled by use of a plurality of sample-hold circuits, and subjected to analog sum-of-product computation which is performed by a matrix circuit for distortion compensation. Subsequently, the sampled signals are converted to digital signals. The digital signals are collectively subjected to processing such as parallel-serial conversion, whereby reception data and an evaluation signal are obtained. An adjustment control circuit 18 includes a CPU, and adjusts the respective circuits on the basis of the evaluation signal such that data can be correctly transmitted and received.

6. 发明申请

US20060236146A1 Digital system, clock signal adjusting method for digital system, recording medium recording processing program executed in the adjusting method 审中-公开
标题翻译：数字系统，数字系统的时钟信号调整方法，以调整方式执行的记录介质记录处理程序
公开(公告)号：US20060236146A1
公开(公告)日：2006-10-19
申请号：US10559672
申请日：2004-06-03
申请人： Eiichi Takahashi , Masahiro Murakawa , Yuji Kasai , Tetsuya Higuchi
发明人： Eiichi Takahashi , Masahiro Murakawa , Yuji Kasai , Tetsuya Higuchi
IPC分类号： G06F1/12
CPC分类号： G06F1/10 , G01R31/31725 , G01R31/31726 , H03K2005/00058 , H03K2005/00156 , H03K2005/0026
摘要： A digital system (1) which performs a digital processing according to a single or a plurality of clock signals to deliver a specified basic function, and which comprises a plurality of delay elements (4) respectively inserted into a plurality of clock circuits for supplying clock signals in a digital system, and respectively constituted by circuit elements for changing delay times according to values indicated by a control signal, and a plurality of holding circuits (5) for holding a plurality of control signals to be given to a plurality of delay elements. The plurality of holding circuits have a plurality of control signal values, held by these holding circuits, changed by external devices (6-8) according to a probabilistic search method with the digital system (1) supplied with power from a variable-output-voltage power supply (14) so that the basic function of the digital system satisfies specified specifications.
摘要翻译：一种数字系统（1），其根据单个或多个时钟信号执行数字处理以传送指定的基本功能，并且包括分别插入到多个时钟电路中的多个延迟元件（4），用于提供时钟信号，并且分别由用于根据控制信号指示的值改变延迟时间的电路元件构成，以及多个保持电路（5），用于保持多个控制信号被提供给多个延迟元件。多个保持电路具有由这些保持电路保持的多个控制信号值，根据概率搜索方法由外部设备（6-8）改变，数字系统（1）从可变输出 - 电压电源（14），使数字系统的基本功能满足规定的规格。

7. 发明申请

US20060055449A1 Bus driver and semiconductor integrated circuit 失效
标题翻译：总线驱动器和半导体集成电路
公开(公告)号：US20060055449A1
公开(公告)日：2006-03-16
申请号：US11213779
申请日：2005-08-30
申请人： Munehiro Uratani , Yuji Kasai , Tetsuya Higuchi , Eiichi Takahashi
发明人： Munehiro Uratani , Yuji Kasai , Tetsuya Higuchi , Eiichi Takahashi
IPC分类号： H03K3/01
CPC分类号： H03K19/0005 , H03K19/018557
摘要： A bus driving device is provided with a driver circuit for driving a bus line thereof. The driver circuit includes an MOS transistor whose well is separated from other circuits. Further, the bus driving device is provided with a voltage control section for adjusting a well voltage, in accordance with a level of a signal in the bus line. With this bus driving device, a threshold voltage of the MOS transistor is set at a predetermined target value.
摘要翻译：总线驱动装置设有用于驱动总线的驱动电路。驱动电路包括一个与其他电路分离的MOS晶体管。此外，总线驱动装置设置有用于根据总线中的信号的电平来调节阱电压的电压控制部。利用该总线驱动装置，将MOS晶体管的阈值电压设定为规定的目标值。

8. 发明授权

US06637008B1 Electronic holding circuit and adjusting method thereof using a probabilistic searching technique 失效
标题翻译：电子保持电路及其使用概率搜索技术的调整方法
公开(公告)号：US06637008B1
公开(公告)日：2003-10-21
申请号：US09397636
申请日：1999-09-16
申请人： Tetsuya Higuchi , Masahiro Murakawa , Yuji Kasai , Shogo Kiryu , Toshio Adachi , Shiro Suzuki
发明人： Tetsuya Higuchi , Masahiro Murakawa , Yuji Kasai , Shogo Kiryu , Toshio Adachi , Shiro Suzuki
IPC分类号： G06F1750
CPC分类号： G06N3/126 , H03H7/19 , H03H7/20 , H03H11/0422 , H03H11/1291
摘要： In an electronic circuit being provided with a plurality of circuit elements and performing a specified function, a plurality of specific circuit elements related to a circuit performing the specified function out of the plurality of circuit elements are composed of circuit elements changing their element parameters according to values indicated by control signals. The electronic circuit is provided with a plurality of holding circuits for holding a plurality of control signals to be given to the plurality of specific circuit elements. The values of the plurality of control signals which these holding circuits hold are changed by external or internal apparatuses according to a probabilistic searching technique (for example genetic algorithms or simulated annealing algorithms) so that the function of the electronic circuit satisfies designated specifications.
摘要翻译：在设置有多个电路元件并执行指定功能的电子电路中，与执行多个电路元件中的指定功能的电路相关的多个特定电路元件由电路元件组成，电路元件根据值由控制信号表示。电子电路设有多个保持电路，用于保持多个控制信号给予多个特定电路元件。这些保持电路保持的多个控制信号的值根据概率搜索技术（例如遗传算法或模拟退火算法）由外部或内部装置改变，使得电子电路的功能满足指定的规格。

9. 发明授权

US06583413B1 Method of inspecting a circuit pattern and inspecting instrument 有权
标题翻译：检查电路图案和检查仪器的方法
公开(公告)号：US06583413B1
公开(公告)日：2003-06-24
申请号：US09652606
申请日：2000-08-30
申请人： Hiroyuki Shinada , Atsuko Takafuji , Takanori Ninomiya , Yuko Sasaki , Mari Nozoe , Hisaya Murakoshi , Taku Ninomiya , Yuji Kasai , Hiroshi Makino , Yutaka Kaneko , Kenji Tanimoto
发明人： Hiroyuki Shinada , Atsuko Takafuji , Takanori Ninomiya , Yuko Sasaki , Mari Nozoe , Hisaya Murakoshi , Taku Ninomiya , Yuji Kasai , Hiroshi Makino , Yutaka Kaneko , Kenji Tanimoto
IPC分类号： G01N2300
CPC分类号： G01N23/225 , G01R31/307 , H01J37/28 , H01J2237/2817
摘要： A circuit pattern inspecting instrument includes an electron-optical system for irradiating an electron beam on a sample, an electron beam deflector, a detector for detecting secondary charged particles from the sample, and a mode setting unit for switching between a first mode and a second mode. An electron beam current is larger in the first mode than in the second mode, and an electron beam scanning speed is higher in the first mode than in the second mode. The circuit pattern inspecting instrument is configured so that first the sample is observed in the first mode, then a particular position on the sample is selected based on image data produced by an output of the detector in the first mode, and then the particular position on the sample is observed in the second mode.
摘要翻译：电路图形检查装置包括用于对样品照射电子束的电子光学系统，电子束偏转器，用于从样品检测二次带电粒子的检测器，以及用于在第一模式和第二模式之间切换的模式设置单元模式。在第一模式中电子束电流比第二模式中的电子束电流大，并且在第一模式中电子束扫描速度高于第二模式。电路图形检查装置被配置为使得首先在第一模式中观察样本，然后基于在第一模式中由检测器的输出产生的图像数据来选择样本上的特定位置，然后选择特定位置在第二模式下观察样品。

10. 发明授权

US08890068B2 Charged particle ray apparatus and pattern measurement method 有权
标题翻译：带电粒子装置和图案测量方法
公开(公告)号：US08890068B2
公开(公告)日：2014-11-18
申请号：US14002275
申请日：2012-01-27
申请人： Yuji Kasai , Makoto Suzuki , Hiroshi Makino
发明人： Yuji Kasai , Makoto Suzuki , Hiroshi Makino
IPC分类号： H01J37/05 , H01J37/244 , H01J37/28 , G01N23/225 , G06T1/00
CPC分类号： H01J37/05 , G01N23/2251 , G06T1/00 , H01J37/244 , H01J37/28 , H01J2237/24475 , H01J2237/24485 , H01J2237/2449 , H01J2237/24495
摘要： Provided is a technique to automatize a synthesis function of signal charged particles having different energies. A charged particle beam apparatus includes: a charged particle source configured to irradiate a sample with a primary charged particle ray; a first detector configured to detect a first signal electron having first energy from signal charged particles generated from the sample; a second detector configured to detect a second signal electron having second energy from signal charged particles generated from the sample; a first operation part configured to change a synthesis ratio of a signal intensity of the first signal electron and a signal intensity of the second signal electron and to generate a detected image corresponding to each synthesis ratio; a second operation part configured to calculate a ratio of signal intensities corresponding to predetermined two areas of the detected image generated for each synthesis ratio; and a third operation part configured to determine a mixture ratio to be used for acquisition of the detected image on a basis of a change of the ratio of signal intensities.
摘要翻译：提供了一种使具有不同能量的信号带电粒子的合成功能自动化的技术。带电粒子束装置包括：带电粒子源，被配置为用一次带电粒子射线照射样品; 第一检测器，被配置为检测从所述样品产生的信号带电粒子的具有第一能量的第一信号电子; 第二检测器，被配置为检测从样品产生的信号带电粒子的具有第二能量的第二信号电子; 第一操作部，被配置为改变第一信号电子的信号强度和第二信号电子的信号强度的合成比，并且生成与每个合成比相对应的检测图像; 第二操作部，被配置为计算与针对每个合成比生成的检测图像的预定的两个区域相对应的信号强度的比率; 以及第三操作部件，被配置为基于信号强度比的变化来确定用于获取检测到的图像的混合比率。

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