专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2013139637A Continuous thin film vapor deposition apparatus 有权
标题翻译：连续薄膜蒸气沉积装置
公开(公告)号：JP2013139637A
公开(公告)日：2013-07-18
申请号：JP2012286188
申请日：2012-12-27
申请人： Snu Precision Co Ltd , エスエヌユープレシジョンカンパニーリミテッド
发明人： LEE HYOUNG BAE , JUNG KI TAEK , CHO WHANG SIN , YOON SUNG HOON
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To provide a continuous thin film vapor deposition apparatus capable of vapor deposition in a thin-film form on a substrate by evaporating an organic material for a long time.SOLUTION: The continuous thin film vapor deposition apparatus includes a material storage part, a material preheat part, a material transport part, a material evaporation part, and a crucible transport part. In the material storage part, an organic material is stored. In the material preheat part, a crucible, in which the organic material is contained, is preheated to a temperature less than the vaporization point of the organic material. In the material transport part, a fixed quantity of the organic material is delivered from the material storage part, and the organic material is conveyed to the crucible arranged in the material preheat part. In the material evaporation part, the organic material contained in the crucible is evaporated by supplying the transported crucible with heat. In the crucible transport part, the crucible preheated in the material preheat part is carried in the material evaporation part or the crucible whose organic material is consumed is carried out of the material evaporation part.
摘要翻译：要解决的问题：提供能够通过长时间蒸发有机材料在基板上以薄膜形式气相沉积的连续薄膜蒸镀装置。解决方案：连续薄膜气相沉积装置包括材料储存部件，材料预热部件，材料输送部件，材料蒸发部件和坩埚输送部件。在材料储存部分中存储有机材料。在材料预热部分中，将含有有机材料的坩埚预热到低于有机材料的蒸发点的温度。在材料输送部中，从材料收纳部输送固定量的有机材料，将有机材料输送到布置在材料预热部上的坩埚。在材料蒸发部件中，通过向运送的坩埚供热来蒸发坩埚中所含的有机材料。在坩埚输送部中，在材料预热部中预热的坩埚被载置在材料蒸发部或由有机材料消耗的坩埚从材料蒸发部进行的情况下。

2. 发明专利

JP2013204152A Organic matter vapor deposition system 审中-公开
标题翻译：有机物蒸汽沉积系统
公开(公告)号：JP2013204152A
公开(公告)日：2013-10-07
申请号：JP2012249029
申请日：2012-11-13
申请人： Snu Precision Co Ltd , エスエヌユー精密股▲ふん▼有限公司
发明人： LEE HYOUNG BAE , AHN DONG WON
IPC分类号： C23C14/50 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To provide a substrate conveying system capable of minimizing tack time, in a process of loading two substrates into a chamber and then performing organic matter vapor deposition.SOLUTION: In a vapor deposition system including a process chamber 20 and a transfer chamber 10, a substrate support base supporting a substrate 21, a mask support base located on the lower side of the substrate support base to support a mask 23, and a substrate align block disposed in the upper part of the substrate support base to align the mask and the substrate are arranged in each of the upper parts on one side and the other side inside the process chamber. On the bottom surface inside the process chamber, an organic matter vapor deposition source 25 reciprocating horizontally between the one side and the other side to deposit organic matter on the substrates is arranged. In the transfer chamber, a robot arm 11 is arranged rotationally to supply the substrates respectively to the substrate support bases on the one side and the other side diagonally.
摘要翻译：要解决的问题：提供一种能够将两个基板加载到室中然后进行有机物气相沉积的过程中能够最小化粘附时间的基板输送系统。解决方案：在包括处理室20和转印室10，支撑基板21的基板支撑基座，位于基板支撑基座的下侧以支撑掩模23的掩模支撑基座，以及设置在基板支撑基座的上部中的基板对准块，掩模和基板布置在处理室内的一侧和另一侧的每个上部。在处理室内的底面上布置有在一侧和另一侧之间水平往复移动的有机物气相沉积源25，以将有机物质沉积在基板上。在传送室中，旋转地布置有机器人手臂11，以将基板分别对置于一侧和另一侧的基板支撑基座。

3. 发明专利

JP2013104131A Flat panel manufacturing apparatus 审中-公开
标题翻译：平板制造设备
公开(公告)号：JP2013104131A
公开(公告)日：2013-05-30
申请号：JP2012237278
申请日：2012-10-26
申请人： Snu Precision Co Ltd , エスエヌユー精密股▲ふん▼有限公司
发明人： LEE HYOUNG BAE , CHO WHANG SIN , AHN WOO JUNG , SONG KI CHUL
IPC分类号： C23C14/24 , C23C14/56 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To provide a flat panel manufacturing apparatus that can minimize the entire process time for depositing an organic thin film onto a substrate.SOLUTION: The flat panel manufacturing apparatus includes: a plurality of process chambers 110 in which at least two substrates 10 are processed; a transfer chamber 120 that is provided among the plurality of the process chambers along a first direction L1 and is provided with a transfer robot 123 that supplies untreated substrates to the process chamber and takes out processed substrates from the process chamber while moving reciprocally and linearly along a second direction L2 crossing orthogonally to the first direction; a loading chamber 130 that is connected with one side of the transfer chamber and houses substrates to be supplied; and an unloading chamber 140 that is connected with the other side of the transfer chamber and houses discharged substrates. Within the process chamber, a process gas is deposited to either one of substrates along the second direction, and remaining substrates are subjected to transfer and positional arrangement.
摘要翻译：要解决的问题：提供一种能够将有机薄膜沉积到基板上的整个处理时间最小化的平板制造装置。解决方案：平板制造装置包括：多个处理室110，其中处理至少两个基板10; 传送室120，沿着第一方向L1设置在多个处理室之间，并且设置有传送机器人123，其将未处理的基板供应到处理室，并且从处理室中取出处理的基板，同时沿着与第一方向垂直的第二方向L2; 装载室130，其与传送室的一侧连接并容纳待供应的基板; 以及与输送室的另一侧连接并容纳排出的基板的卸载室140。在处理室内，沿着第二方向将工艺气体沉积到基板中的任一个，并且剩余的基板经受传送和位置布置。版权所有（C）2013，JPO＆INPIT

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式