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1. 发明授权

US5737137A Critical illumination condenser for x-ray lithography 失效
标题翻译：用于x射线光刻的临界照明电容器
公开(公告)号：US5737137A
公开(公告)日：1998-04-07
申请号：US617719
申请日：1996-04-01
申请人： Simon J. Cohen , Lynn G. Seppala
发明人： Simon J. Cohen , Lynn G. Seppala
IPC分类号： G02B19/00 , G03F7/20 , G02B5/10 , G02B17/00 , G21K1/06 , G21K5/00
CPC分类号： G03F7/70091 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70175 , G03F7/702
摘要： A critical illumination condenser system, particularly adapted for use in extreme ultraviolet (EUV) projection lithography based on a ring field imaging system and a laser produced plasma source. The system uses three spherical mirrors and is capable of illuminating the extent of the mask plane by scanning either the primary mirror or the laser plasma source. The angles of radiation incident upon each mirror of the critical illumination condenser vary by less than eight (8) degrees. For example, the imaging system in which the critical illumination condenser is utilized has a 200 .mu.m source and requires a magnification of 26.times.. The three spherical mirror system constitutes a two mirror inverse Cassegrain, or Schwarzschild configuration, with a 25% area obstruction (50% linear obstruction). The third mirror provides the final pupil and image relay. The mirrors include a multilayer reflective coating which is reflective over a narrow bandwidth.
摘要翻译：一种关键的照明冷凝器系统，特别适用于基于环形场成像系统和激光产生等离子体源的极紫外（EUV）投影光刻技术。该系统使用三个球面镜，并且能够通过扫描主镜或激光等离子体源来照射掩模平面的程度。入射到临界照明电容器的每个反射镜上的辐射角度变化小于八（8）度。例如，其中使用临界照明冷凝器的成像系统具有200μm的源，并且需要26倍的放大倍数。三个球面镜系统构成了双镜反向卡塞格林（Schsevarschild）或者Schwarzschild配置，具有25％的区域阻塞（50％线性阻塞）。第三镜提供最终的瞳孔和图像继电器。镜子包括在窄带宽上反射的多层反射涂层。

2. 发明授权

US5003567A Soft x-ray reduction camera for submicron lithography 失效
标题翻译：用于亚微米光刻的软X射线照相机
公开(公告)号：US5003567A
公开(公告)日：1991-03-26
申请号：US308332
申请日：1989-02-09
申请人： Andrew M. Hawryluk , Lynn G. Seppala
发明人： Andrew M. Hawryluk , Lynn G. Seppala
IPC分类号： G02B17/06 , G03F7/20
CPC分类号： B82Y10/00 , G02B17/0621 , G03F7/2039 , G03F7/70033 , G03F7/70233
摘要： Soft x-ray projection lithography can be performed using x-ray optical components and spherical imaging lenses (mirrors), which form an x-ray reduction camera. The x-ray reduction is capable of projecting a 5x demagnified image of a mask onto a resist coated wafer using 4.5 nm radiation. The diffraction limited resolution of this design is about 135 nm with a depth of field of about 2.8 microns and a field of view of 0.2 cm.sup.2. X-ray reflecting masks (patterned x-ray multilayer mirrors) which are fabricated on thick substrates and can be made relatively distortion free are used, with a laser produced plasma for the source. Higher resolution and/or larger areas are possible by varying the optic figures of the components and source characteristics.
摘要翻译：可以使用形成x射线减少相机的X射线光学部件和球形成像透镜（反射镜）来执行软X射线投影光刻。 X射线减少能够使用4.5nm辐射将掩模的5x缩小图像投影到抗蚀剂涂覆的晶片上。该设计的衍射限制分辨率为约135nm，景深为约2.8微米，视场为0.2cm 2。使用制造在厚基板上并且可以相对无变形的X射线反射掩模（图案化的X射线多层反射镜），其中激光产生用于源的等离子体。通过改变组件的光学图形和源特性，可以实现更高的分辨率和/或更大的面积。

3. 发明授权

US5071207A Broadband diffractive lens or imaging element 失效
$Broadband diffractive lens or imaging element$
标题翻译：宽带衍射透镜或成像元件
公开(公告)号：US5071207A
公开(公告)日：1991-12-10
申请号：US587699
申请日：1990-09-25
申请人： Natale M. Ceglio , Andrew M. Hawryluk , Richard A. London , Lynn G. Seppala
发明人： Natale M. Ceglio , Andrew M. Hawryluk , Richard A. London , Lynn G. Seppala
IPC分类号： G02B5/18
CPC分类号： G02B5/1876 , G02B5/188
摘要： A broadband diffractive lens or imaging element produces a sharp focus and/or a high resolution image with broad bandwidth illuminating radiation. The diffractive lens is sectored or segmented into regions, each of which focuses or images a distinct narrowband of radiation but all of which have a common focal length. Alternatively, a serial stack of minus filters, each with a diffraction pattern which focuses or images a distinct narrowband of radiation but all of which have a common focal length, is used. The two approaches can be combined. Multifocal broadband diffractive elements can also be formed.
摘要翻译：宽带衍射透镜或成像元件产生具有宽带宽照明辐射的清晰焦点和/或高分辨率图像。衍射透镜被分割或分割成各个区域，每个区域聚焦或成像不同的辐射窄带，但都具有共同的焦距。或者，使用负滤波器的串联堆叠，每个具有聚焦或图像不同的辐射窄带的衍射图案，但都具有共同的焦距。这两种方法可以组合。也可以形成多焦点宽带衍射元件。

4. 发明授权

US5257132A Broadband diffractive lens or imaging element 失效
$Broadband diffractive lens or imaging element$
标题翻译：宽带衍射透镜或成像元件
公开(公告)号：US5257132A
公开(公告)日：1993-10-26
申请号：US683592
申请日：1991-04-09
申请人： Natale M. Ceglio , Andrew M. Hawryluk , Richard A. London , Lynn G. Seppala
发明人： Natale M. Ceglio , Andrew M. Hawryluk , Richard A. London , Lynn G. Seppala
IPC分类号： G02B5/18
CPC分类号： G02B5/1876 , G02B5/188
摘要： A broadband diffractive lens or imaging element produces a sharp focus and/or a high resolution image with broad bandwidth illuminating radiation. The diffractive lens is sectored or segmented into regions, each of which focuses or images a distinct narrowband of radiation but all of which have a common focal length. Alternatively, a serial stack of minus filters, each with a diffraction pattern which focuses or images a distinct narrowband of radiation but all of which have a common focal length, is used. The two approaches can be combined. Multifocal broadband diffractive elements can also be formed. Thin film embodiments are described.
摘要翻译：宽带衍射透镜或成像元件产生具有宽带宽照明辐射的清晰焦点和/或高分辨率图像。衍射透镜被分割或分割成各个区域，每个区域聚焦或成像不同的辐射窄带，但都具有共同的焦距。或者，使用负滤波器的串联堆叠，每个具有聚焦或图像不同的辐射窄带的衍射图案，但都具有共同的焦距。这两种方法可以组合。也可以形成多焦点宽带衍射元件。描述薄膜实施例。

5. 发明授权

US4627068A Fiber optics interface for a dye laser oscillator and method 失效
标题翻译：用于染料激光振荡器的光纤接口和方法
公开(公告)号：US4627068A
公开(公告)日：1986-12-02
申请号：US620305
申请日：1984-06-13
申请人： Steve A. Johnson , Lynn G. Seppala
发明人： Steve A. Johnson , Lynn G. Seppala
IPC分类号： G02B6/32 , G02B6/42 , H01S3/02 , H01S3/094 , H01S3/08
CPC分类号： H01S3/022 , G02B6/32 , G02B6/4206 , G02B6/425 , H01S3/094034
摘要： A dye laser oscillator in which one light beam is used to pump a continuoustream of dye within a cooperating dye chamber for producing a second, different beam is generally disclosed herein along with a specific arrangement including an optical fiber and a fiber optics interface for directing the pumping beam into the dye chamber. The specific fiber optics interface illustrated includes three cooperating lenses which together image one particular dimension of the pumping beam into the dye chamber from the output end of the optical fiber in order to insure that the dye chamber is properly illuminated by the pumping beam.
摘要翻译：一种染料激光振荡器，其中一个光束用于在合作的染料室内泵送连续的染料流以产生第二不同的光束，这里一般地公开一种具体的布置，包括光纤和用于引导的光纤接口泵送光束进入染料室。所示的具体光纤接口包括三个配合透镜，它们一起将泵浦光束的一个特定尺寸从光纤的输出端成像到染料室中，以确保染料室被泵送光束适当照射。

6. 发明授权

US4345212A Efficient optical pulse stacker system 失效
标题翻译：高效的光脉冲堆垛机系统
公开(公告)号：US4345212A
公开(公告)日：1982-08-17
申请号：US205076
申请日：1980-11-10
申请人： Lynn G. Seppala , Roger A. Haas
发明人： Lynn G. Seppala , Roger A. Haas
IPC分类号： H01S3/00 , H01S3/098
CPC分类号： H01S3/0057
摘要： Method and apparatus for spreading and angle-encoding each pulse of a multiplicity of small area, short pulses into several temporally staggered pulses by use of appropriate beam splitters, with the optical elements being arranged so that each staggered pulse is contiguous with one or two other such pulses, and the entire sequence of stacked pulses comprising a single, continuous long pulse. The single long pulse is expanded in area, and then doubly passed through a nonstorage laser amplifier such as KrF. After amplification, the physically separated, angle-encoded and temporally staggered pulses are recombined into a single pulse of short duration. This high intensity output beam is well collimated and may be propagated over long distance, or used for irradiating inertial confinement fusion targets.
摘要翻译：用于通过使用适当的分束器将多个小面积短脉冲的每个脉冲扩展和角度编码成若干时间交错脉冲的方法和装置，其中光学元件被布置成使得每个交错脉冲与一个或两个其他这样的脉冲，并且整个堆叠脉冲序列包括单个连续的长脉冲。单个长脉冲在面积上扩大，然后双重通过诸如KrF的非存储激光放大器。在放大之后，物理分离的，角度编码的和时间上交错的脉冲被重组为短持续时间的单个脉冲。该高强度输出光束是准直的，并且可以在长距离上传播，或者用于照射惯性约束聚变靶。

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