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1. 发明申请

US20070139122A1 Radio Frequency Power Delivery System 有权
标题翻译：射频供电系统
公开(公告)号：US20070139122A1
公开(公告)日：2007-06-21
申请号：US11554979
申请日：2006-10-31
申请人： Siddharth Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy Kalvaitis , William McKinney , Daniel Goodman , William Holber , John Smith
发明人： Siddharth Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy Kalvaitis , William McKinney , Daniel Goodman , William Holber , John Smith
IPC分类号： H03F3/191
CPC分类号： H03F1/56 , H03F3/191 , H03F3/20
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种将功率传递给动态负载的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

2. 发明申请

US20100231296A1 Radio Frequency Power Delivery System 有权
标题翻译：射频供电系统
公开(公告)号：US20100231296A1
公开(公告)日：2010-09-16
申请号：US12786763
申请日：2010-05-25
申请人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, JR. , Daniel Goodman , William M. Holber , John A. Smith
发明人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, JR. , Daniel Goodman , William M. Holber , John A. Smith
IPC分类号： H03F1/08
CPC分类号： H03F1/56 , H03F3/191 , H03F3/20
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种将功率传递给动态负载的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

3. 发明授权

US08633782B2 Radio frequency power delivery system 有权
标题翻译：射频发射系统
公开(公告)号：US08633782B2
公开(公告)日：2014-01-21
申请号：US12786763
申请日：2010-05-25
申请人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith
发明人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith
IPC分类号： H03H7/38
CPC分类号： H03F1/56 , H03F3/191 , H03F3/20
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种将功率传递给动态负载的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

4. 发明授权

US07764140B2 Radio frequency power delivery system 有权
标题翻译：射频发射系统
公开(公告)号：US07764140B2
公开(公告)日：2010-07-27
申请号：US11554979
申请日：2006-10-31
申请人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith , Ilya Bystryak
发明人： Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith , Ilya Bystryak
IPC分类号： H03H7/38
CPC分类号： H03F1/56 , H03F3/191 , H03F3/20
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种将功率传递给动态负载的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

5. 发明授权

US09714474B2 Seed layer deposition in microscale features 有权
公开(公告)号：US09714474B2
公开(公告)日：2017-07-25
申请号：US12755198
申请日：2010-04-06
申请人： Arthur Keigler , Johannes Chiu , Zhenqiu Liu , Daniel Goodman
发明人： Arthur Keigler , Johannes Chiu , Zhenqiu Liu , Daniel Goodman
IPC分类号： C25D7/12 , H01L21/288 , H01L21/768 , C25D17/00
CPC分类号： C25D7/123 , C25D17/001 , H01L21/2885 , H01L21/76873 , H01L21/76898 , H01L2221/1089
摘要： A method and system for coating the interior surfaces of microscale hole features fabricated into the substantially planar surface of a work piece. The method comprises providing a work piece with a barrier metal coating that is substantially continuous and uniform both along the planar surface of the work piece and the inner surfaces of the microscale hole features wherein said barrier metal coating is applied by a substantially surface reaction limited process. The workpiece is provided with a coating, on the planar surface of the work piece, of a thick metal layer anchored to the barrier metal coat and disposed to provide substantially uniform electrical conduction capability to the microscale features located throughout and across the workpiece. An electrical contact path is provided to the electrically conductive coating at the perimeter of the work piece. The workpiece is immersed in a chemical bath, causing said chemical bath to fully contact the interior surfaces of the microscale hole features, said chemical bath containing metal ions suitable for electrodeposition. An electric potential is applied at the perimeter of the work piece to cause electrodeposition of metal ions onto all surfaces of the work piece including the interior surfaces of the microscale hole features to a predetermined finish coating in one step.

6. 发明授权

US09421617B2 Substrate holder 有权
标题翻译：基板支架
公开(公告)号：US09421617B2
公开(公告)日：2016-08-23
申请号：US13356252
申请日：2012-01-23
申请人： Daniel Goodman , Arthur Keigler , David G. Guarnaccia
发明人： Daniel Goodman , Arthur Keigler , David G. Guarnaccia
IPC分类号： B23B31/14 , H01L21/687 , F26B5/08 , B23B31/12
CPC分类号： B23B31/14 , B23B31/1261 , F26B5/08 , H01L21/68728 , Y10T279/18 , Y10T279/247
摘要： A rotary chuck adapted to hold a substrate. The rotary chuck has a rotatable chuck portion and an edge grip having a movable grip member movably mounted to the rotatable chuck portion, the moveable grip member being substantially free moving so that rotation of the rotating chuck portion causes the moveable grip member to move in a plane substantially aligned with a surface of the substrate to engage the substrate in a engaged position. A resilient element is coupled to the moveable grip member, the resilient member biasing the grip member to a disengaged position.
摘要翻译：适于保持基板的旋转卡盘。旋转卡盘具有可旋转卡盘部分和边缘把手，其具有可移动地安装到可旋转卡盘部分的可移动抓握构件，可移动抓握构件基本上自由移动，使得旋转卡盘部分的旋转导致可移动抓握构件在平面基本上与衬底的表面对准，以将衬底接合在接合位置。弹性元件联接到可移动握持构件，弹性构件将把手构件偏置到脱离位置。

7. 发明授权

US08420981B2 Apparatus for thermal processing with micro-environment 失效
标题翻译：微环境热处理设备
公开(公告)号：US08420981B2
公开(公告)日：2013-04-16
申请号：US12590852
申请日：2009-11-13
申请人： Daniel Goodman , Arthur Keigler , David G. Guarnaccia , Matthew R. Jeffers
发明人： Daniel Goodman , Arthur Keigler , David G. Guarnaccia , Matthew R. Jeffers
IPC分类号： H01L21/477 , F27D11/00
CPC分类号： H01L21/6719 , H01L21/67109
摘要： A substrate thermal processing system. The system has at least one substrate holding module having a housing configured for holding an isolated environment therein. A substrate heater is located in the housing and has a substrate heating surface. A substrate cooler is located in the housing and having a substrate cooling surface. A gas feed opening into the housing and feeding inert or reducing gas into the housing when the substrate is heated by the heating surface. A gas restrictor is within the housing restricting the fed gas between the substrate heating surface and a surrounding atmospheric region substantially surrounding the substrate heating surface in the housing and forming an aperture through which the fed gas communicates with the atmospheric region.
摘要翻译：基板热处理系统。该系统具有至少一个基板保持模块，该模块具有用于在其中保持隔离环境的壳体。衬底加热器位于壳体中并且具有衬底加热表面。衬底冷却器位于壳体中并且具有衬底冷却表面。当基板被加热表面加热时，气体进入开口并进入惰性气体或还原气体进入壳体。气体限制器在壳体内部，限制基板加热表面和基本上围绕壳体中的基板加热表面的周围大气区域之间的进料气体，并形成进料气体与大气区域连通的孔。

8. 发明申请

US20130011222A1 SUBSTRATE LOADER AND UNLOADER 有权
标题翻译：基座装载机和卸载器
公开(公告)号：US20130011222A1
公开(公告)日：2013-01-10
申请号：US13279432
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher
IPC分类号： B65G49/00
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate loader adapted to load and unload a substrate to and from a moveable holder having a seal. The substrate loader has a base and a holder support frame coupled to the base, the holder support frame adapted to repeatably position the moveable holder relative to a predetermined datum. The substrate transport is coupled to the base and having a substrate chuck and adapted to move and transport the substrate relative to the holder. The substrate transport is deterministically positioned relative to the predetermined datum and is adapted to move the substrate from a first position, with the substrate captured by the moveable holder, to a second position with the substrate disengaged from the holder and the seal, the substrate transport movement of the substrate from the first to the second position effecting disengagement from the holder and the seal substantially without contacting the substrate.
摘要翻译：一种衬底装载机，其适于将基板装载到具有密封件的可移动保持器上和从其移出。衬底装载机具有底座和联接到基座的保持器支撑框架，保持器支撑框架适于相对于预定的基准重复地定位可移动保持器。衬底输送器耦合到基座并且具有衬底卡盘并且适于相对于保持器移动和运输衬底。衬底传送相对于预定的原点确定地定位，并且适于将衬底从第一位置移动，其中衬底由可移动保持器捕获到第二位置，其中衬底与保持器和密封件脱离，衬底传送基板从第一位置到第二位置的运动实质上不与基板接触，从而保持器和密封件脱离接触。

9. 发明授权

US07853523B2 Secure networked transaction system 有权
标题翻译：安全网络交易系统
公开(公告)号：US07853523B2
公开(公告)日：2010-12-14
申请号：US12356868
申请日：2009-01-21
申请人： Scott Krueger , Daniel Goodman
发明人： Scott Krueger , Daniel Goodman
IPC分类号： G06Q40/00
CPC分类号： G06Q30/06 , G06Q20/02 , G06Q20/04 , G06Q20/10 , G06Q20/102 , G06Q20/12 , G06Q20/24 , G06Q20/3674 , G06Q20/382 , G06Q20/383 , G06Q20/385 , G06Q20/40 , G06Q20/401 , G06Q20/4012 , G06Q20/403 , G06Q40/00 , G06Q40/025
摘要： A method and system for approving a transaction between a customer and a merchant including the steps of transmitting a transaction request from a customer to a merchant; transmitting a verification request from the merchant to a verification entity, the verification request comprising first data; the customer device transmitting second data to the verification entity; and the verification entity performing a verification step by using the first data and the second data to verify if the transaction should be approved.
摘要翻译：一种用于批准客户和商家之间的交易的方法和系统，包括从客户向商家发送交易请求的步骤; 将来自所述商家的验证请求发送到验证实体，所述验证请求包括第一数据; 所述客户设备向所述验证实体发送第二数据; 并且所述验证实体通过使用所述第一数据和所述第二数据来执行验证步骤，以验证所述交易是否应被批准。

10. 发明申请

US20070150819A1 Graphical User Interface 审中-公开
标题翻译：图形用户界面
公开(公告)号：US20070150819A1
公开(公告)日：2007-06-28
申请号：US11301182
申请日：2005-12-09
申请人： Daniel Goodman , Michael Toler , Leonid Mindlin , Philip Sullivan
发明人： Daniel Goodman , Michael Toler , Leonid Mindlin , Philip Sullivan
IPC分类号： G06F17/00
CPC分类号： G06F16/95
摘要： A system for monitoring a sensor includes a GUI (Graphical User Interface) such as a WebPage embedded in the sensor. The GUI is configured to display information relating to the sensor from a user computer connectable to the sensor via an Ethernet connection and having an internet web browser for accessing the WebPage of the sensor. A computer-readable medium is embedded within the sensor and has stored therein computer-usable instructions for a processor. These instructions, when executed by the processor, cause the processor to generate the GUI.
摘要翻译：用于监测传感器的系统包括GUI（图形用户界面），诸如嵌入在传感器中的WebPage。 GUI被配置为通过以太网连接从可连接到传感器的用户计算机显示与传感器有关的信息，并且具有用于访问传感器的WebPage的因特网web浏览器。计算机可读介质被嵌入在传感器内并且存储有用于处理器的计算机可用指令。当处理器执行时，这些指令使处理器生成GUI。

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