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1. 发明授权

US09117856B2 Substrate loader and unloader having an air bearing support 有权
标题翻译：底板装载机和卸载机具有空气轴承支撑
公开(公告)号：US09117856B2
公开(公告)日：2015-08-25
申请号：US13279414
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher
IPC分类号： A47J45/00 , H01L21/67 , H01L21/683 , H01L21/687
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate separation chuck which is adapted to separate a substrate from an adhering surface. The substrate separation chuck has a support adapted to support the adhering surface. An air bearing surface is adapted to support the substrate, the air bearing surface axially moveable relative to the support. The air bearing surface has a first position adjacent the substrate with the substrate coupled to the adhering surface. The air bearing surface is moveable from the first position to a second position separating the substrate from the adhering surface without contact between the substrate and the air bearing surface.
摘要翻译：一种衬底分离卡盘，其适于将基底与粘附表面分离。衬底分离卡盘具有适于支撑粘附表面的支撑件。空气轴承表面适于支撑基底，空气轴承表面相对于支撑件可轴向移动。空气轴承表面具有与衬底相邻的第一位置，衬底与粘附表面相连。空气轴承表面可以从第一位置移动到第二位置，从而将基板与粘合表面分离，而不会在基板和空气轴承表面之间接触。

2. 发明申请

US20130011222A1 SUBSTRATE LOADER AND UNLOADER 有权
标题翻译：基座装载机和卸载器
公开(公告)号：US20130011222A1
公开(公告)日：2013-01-10
申请号：US13279432
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher
IPC分类号： B65G49/00
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate loader adapted to load and unload a substrate to and from a moveable holder having a seal. The substrate loader has a base and a holder support frame coupled to the base, the holder support frame adapted to repeatably position the moveable holder relative to a predetermined datum. The substrate transport is coupled to the base and having a substrate chuck and adapted to move and transport the substrate relative to the holder. The substrate transport is deterministically positioned relative to the predetermined datum and is adapted to move the substrate from a first position, with the substrate captured by the moveable holder, to a second position with the substrate disengaged from the holder and the seal, the substrate transport movement of the substrate from the first to the second position effecting disengagement from the holder and the seal substantially without contacting the substrate.
摘要翻译：一种衬底装载机，其适于将基板装载到具有密封件的可移动保持器上和从其移出。衬底装载机具有底座和联接到基座的保持器支撑框架，保持器支撑框架适于相对于预定的基准重复地定位可移动保持器。衬底输送器耦合到基座并且具有衬底卡盘并且适于相对于保持器移动和运输衬底。衬底传送相对于预定的原点确定地定位，并且适于将衬底从第一位置移动，其中衬底由可移动保持器捕获到第二位置，其中衬底与保持器和密封件脱离，衬底传送基板从第一位置到第二位置的运动实质上不与基板接触，从而保持器和密封件脱离接触。

3. 发明授权

US08967935B2 Substrate loader and unloader 有权
标题翻译：基板装载机和卸载机
公开(公告)号：US08967935B2
公开(公告)日：2015-03-03
申请号：US13279432
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher
IPC分类号： H01L21/687 , H01L21/67 , H01L21/683
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate loader adapted to load and unload a substrate to and from a moveable holder having a seal. The substrate loader has a base and a holder support frame coupled to the base, the holder support frame adapted to repeatably position the moveable holder relative to a predetermined datum. The substrate transport is coupled to the base and having a substrate chuck and adapted to move and transport the substrate relative to the holder. The substrate transport is deterministically positioned relative to the predetermined datum and is adapted to move the substrate from a first position, with the substrate captured by the moveable holder, to a second position with the substrate disengaged from the holder and the seal, the substrate transport movement of the substrate from the first to the second position effecting disengagement from the holder and the seal substantially without contacting the substrate.
摘要翻译：一种衬底装载机，其适于将基板装载到具有密封件的可移动保持器上和从其移出。衬底装载机具有底座和联接到基座的保持器支撑框架，保持器支撑框架适于相对于预定的基准重复地定位可移动保持器。衬底输送器耦合到基座并且具有衬底卡盘并且适于相对于保持器移动和运输衬底。衬底传送相对于预定的原点确定地定位，并且适于将衬底从第一位置移动，其中衬底由可移动保持器捕获到第二位置，其中衬底与保持器和密封件脱离，衬底传送基板从第一位置到第二位置的运动实质上不与基板接触，从而保持器和密封件脱离接触。

4. 发明授权

US08613474B2 Substrate loader and unloader having a Bernoulli support 有权
标题翻译：具有伯努利支持的基板装载机和卸载机
公开(公告)号：US08613474B2
公开(公告)日：2013-12-24
申请号：US13279405
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher , David G. Guarnaccia
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher , David G. Guarnaccia
IPC分类号： A47J45/00
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate chuck includes a frame forming a support adapted to support an adhering surface thereon, and a Bernoulli chuck surface coupled to the frame and adapted to support the substrate. The Bernoulli chuck surface is axially moveable relative to the support between first and second positions. In the first position, the substrate is coupled to the adhering surface, and the substrate is separated from the adhering surface with movement of the Bernoulli chuck from the first position to the second position, without contact between the substrate and the Bernoulli chuck surface.
摘要翻译：衬底卡盘包括形成支撑其上的粘合表面的支撑件的框架，以及联接到框架并适于支撑衬底的伯努利卡盘表面。伯努利卡盘表面相对于第一和第二位置之间的支撑件可轴向移动。在第一位置，衬底被耦合到粘附表面，并且当伯努利卡盘从第一位置移动到第二位置时，衬底与粘附表面分离，而不与衬底和伯努利卡盘表面接触。

5. 发明申请

US20130009415A1 SUBSTRATE LOADER AND UNLOADER HAVING AN AIR BEARING SUPPORT 有权
标题翻译：底座装载机和卸载机具有空气轴承支持
公开(公告)号：US20130009415A1
公开(公告)日：2013-01-10
申请号：US13279414
申请日：2011-10-24
申请人： Daniel Goodman , Arthur Keigler , Freeman Fisher
发明人： Daniel Goodman , Arthur Keigler , Freeman Fisher
IPC分类号： B25J15/06
CPC分类号： H01L21/67092 , H01L21/6838 , H01L21/68764 , H01L21/68785
摘要： A substrate separation chuck adapted to separate a substrate from an adhering surface. The substrate separation chuck has a support adapted to support the adhering surface. An air bearing surface is adapted to support the substrate, the air bearing surface axially moveable relative to the support. The air bearing surface has a first position adjacent the substrate with the substrate coupled to the adhering surface. The air bearing surface is moveable from the first position to a second position separating the substrate from the adhering surface without contact between the substrate and the air bearing surface.
摘要翻译：衬底分离卡盘，其适于将衬底与粘附表面分离。衬底分离卡盘具有适于支撑粘附表面的支撑件。空气轴承表面适于支撑基底，空气轴承表面相对于支撑件可轴向移动。空气轴承表面具有与衬底相邻的第一位置，衬底与粘附表面相连。空气轴承表面可以从第一位置移动到第二位置，从而将基板与粘合表面分离，而不会在基板和空气轴承表面之间接触。

6. 发明申请

US20120305193A1 PARALLEL SINGLE SUBSTRATE PROCESSING AGITATION MODULE 审中-公开
标题翻译：并行单基板处理激励模块
公开(公告)号：US20120305193A1
公开(公告)日：2012-12-06
申请号：US13488416
申请日：2012-06-04
申请人： Arthur Keigler , Freeman Fisher , Daniel L. Goodman
发明人： Arthur Keigler , Freeman Fisher , Daniel L. Goodman
IPC分类号： B05C13/02 , B08B3/04 , C25D17/00
CPC分类号： H01L21/67757 , H01L21/67028 , H01L21/67034 , H01L21/67051 , H01L21/67057 , H01L21/67173 , H01L21/6776 , H01L21/67781 , H01L21/68 , H01L21/68707
摘要： A system for fluid processing one or more substrate surfaces arrayed in a fluid. The system has a process module with a frame and a plurality of agitation members to fluid process the substrate surfaces without contacting the substrate surfaces. A substrate holder assembly has a holder frame and a number of substrate holders, each of which is coupled to the holder frame and configured to hold a substrate so that a different substrate is held by each substrate holder of the substrate holder assembly for transport therewith as a unit to and from the process module. The substrate holder assembly and each substrate holder of the substrate holder assembly are removably coupled to the process module frame and, when coupled to the process module frame, each substrate holder is independently moveable and positionable relative to the other substrate holders of the substrate holder assembly.
摘要翻译：一种用于流体处理排列在流体中的一个或多个衬底表面的系统。该系统具有一个具有框架和多个搅拌构件的过程模块，用于在不接触衬底表面的情况下流体地处理衬底表面。衬底保持器组件具有保持器框架和多个衬底保持器，每个衬底保持器联接到保持器框架并且构造成保持衬底，使得不同的衬底由衬底保持器组件的每个衬底保持器保持以便作为来往和来自过程模块的单元。衬底保持器组件和衬底保持器组件的每个衬底保持器可移除地联接到过程模块框架，并且当耦合到过程模块框架时，每个衬底保持器可独立地相对于衬底保持器组件的其他衬底保持器可移动和定位。

7. 发明授权

US09293356B2 Parallel single substrate processing system 有权
标题翻译：平行单基板加工系统
公开(公告)号：US09293356B2
公开(公告)日：2016-03-22
申请号：US13488343
申请日：2012-06-04
申请人： Arthur Keigler , Freeman Fisher , Daniel L. Goodman , Jonathan Haynes
发明人： Arthur Keigler , Freeman Fisher , Daniel L. Goodman , Jonathan Haynes
IPC分类号： B23Q1/25 , H01L21/677 , H01L21/67 , H01L21/68 , H01L21/687
CPC分类号： H01L21/67757 , H01L21/67028 , H01L21/67034 , H01L21/67051 , H01L21/67057 , H01L21/67173 , H01L21/6776 , H01L21/67781 , H01L21/68 , H01L21/68707
摘要： A system for fluid processing substrate surfaces arrayed in a fluid having a process section with a frame having a plurality of process elements to process the substrate surfaces without contacting the substrate surfaces. A substrate holder assembly having a holder frame and a number of substrate holders, each of which is coupled to the holder frame and is configured for holding a substrate so that each substrate holder holds a different substrate for transport as a unit with the substrate holder assembly to and from the process section. The substrate holder assembly and each substrate holder are removably coupled to the process section frame, and the substrate holders of the substrate holder assembly are movable relative to the holder frame and positionable in repeatable alignment with respect to a predetermined feature of the process section and independent of positioning of the holder frame with respect to the process section.
摘要翻译：一种用于流体处理衬底表面的系统，其布置在具有工艺部分的流体中，所述工艺部分具有框架，所述框架具有多个处理元件，以处理所述衬底表面而不接触所述衬底表面。一种衬底保持器组件，其具有保持器框架和多个衬底保持器，每个衬底保持器联接到保持器框架并且构造成用于保持衬底，使得每个衬底保持器保持不同的衬底以作为与衬底保持器组件往返于过程部分。衬底保持器组件和每个衬底保持器可移除地联接到处理部分框架，并且衬底保持器组件的衬底保持器相对于保持器框架可移动并且可相对于工艺段的预定特征可重复地对准并且独立地保持框架相对于处理部分的定位。

8. 发明申请

US20120308345A1 PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM 有权
标题翻译：平行单基板加工系统
公开(公告)号：US20120308345A1
公开(公告)日：2012-12-06
申请号：US13488090
申请日：2012-06-04
申请人： Arthur Keigler , Freeman Fisher , Daniel L. Goodman
发明人： Arthur Keigler , Freeman Fisher , Daniel L. Goodman
IPC分类号： B65G49/00
CPC分类号： H01L21/67757 , H01L21/67028 , H01L21/67034 , H01L21/67051 , H01L21/67057 , H01L21/67173 , H01L21/6776 , H01L21/67781 , H01L21/68 , H01L21/68707
摘要： A system for processing surfaces of substrates having a process module having a process module frame and a plurality of process elements to process the substrate surfaces without contacting the substrate surfaces. A plurality of substrate holder assemblies, each having a number of substrate holders, each of which is removably coupled to the process module frame, each substrate holder configured to hold a substrate. The process module frame has alignment features aligning the substrate holders in the substrate holder assembly in repeatable alignment with respect to each of the process elements with each of the process elements located between the substrates. A loader module is configured to unload processed substrates from each of the substrate holder assemblies and load unprocessed substrates to each of the substrate holder assemblies. A transporter is configured to transport the substrate holder assemblies to and from the process module and the loader module.
摘要翻译：一种用于处理具有处理模块的基板的表面的系统，该处理模块具有处理模块框架和多个处理元件，以在不接触基板表面的情况下处理基板表面。多个衬底保持器组件，每个衬底保持器组件具有多个衬底保持器，每个衬底保持器可移除地联接到过程模块框架，每个衬底保持器被构造成保持衬底。过程模块框架具有对准特征，其中衬底保持器组件中的衬底保持器相对于每个工艺元件可重复地对准，每个工艺元件位于衬底之间。装载器模块被配置为从每个基板保持器组件卸载经处理的基板，并且将未处理的基板装载到每个基板保持器组件。传送器构造成将基板保持器组件传送到过程模块和加载器模块。

9. 发明申请

US20120306139A1 PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM HOLDER 审中-公开
标题翻译：平行单基板加工系统支架
公开(公告)号：US20120306139A1
公开(公告)日：2012-12-06
申请号：US13488407
申请日：2012-06-04
申请人： Arthur Keigler , Freeman Fisher , Mehran Asdigha
发明人： Arthur Keigler , Freeman Fisher , Mehran Asdigha
IPC分类号： H01L21/687
CPC分类号： H01L21/67757 , H01L21/67028 , H01L21/67034 , H01L21/67051 , H01L21/67057 , H01L21/67173 , H01L21/6776 , H01L21/67781 , H01L21/68 , H01L21/68707
摘要： A substrate holder adapted to hold and retain a substrate during vertical fluid processing of a surface of the substrate. The wafer holder has a frame. A first leg is coupled to the frame by a first compliant flexure, the first leg having a first contact member configured to engage a first edge of the substrate. A second leg is coupled to the frame by a second compliant flexure, the second leg having a second contact member configured to engage a second edge of the substrate. Upon deflection of the first and second compliant flexures, the first and second legs are moveable in substantially opposite directions disengaging the first and second contact fingers from the first and second edges of the substrate respectively.
摘要翻译：衬底保持器，适于在衬底的表面的垂直流体处理期间保持和保持衬底。晶片架具有框架。第一腿通过第一柔顺弯曲部联接到框架，第一腿部具有构造成接合衬底的第一边缘的第一接触构件。第二腿通过第二柔顺弯曲部联接到框架，第二腿具有构造成接合衬底的第二边缘的第二接触构件。在第一和第二柔性弯曲部偏转时，第一和第二腿部可以基本上相反的方向移动，从而分别使第一和第二接触指与基板的第一和第二边缘分离。

10. 发明授权

US09449862B2 Parallel single substrate processing system 有权
标题翻译：平行单基板加工系统
公开(公告)号：US09449862B2
公开(公告)日：2016-09-20
申请号：US13488090
申请日：2012-06-04
申请人： Arthur Keigler , Freeman Fisher , Daniel L. Goodman
发明人： Arthur Keigler , Freeman Fisher , Daniel L. Goodman
IPC分类号： H01L21/67 , H01L21/677 , H01L21/68 , H01L21/687
CPC分类号： H01L21/67757 , H01L21/67028 , H01L21/67034 , H01L21/67051 , H01L21/67057 , H01L21/67173 , H01L21/6776 , H01L21/67781 , H01L21/68 , H01L21/68707
摘要： A system for processing surfaces of substrates having a process module having a process module frame and a plurality of process elements to process the substrate surfaces without contacting the substrate surfaces. A plurality of substrate holder assemblies, each having a number of substrate holders, each of which is removably coupled to the process module frame, each substrate holder configured to hold a substrate. The process module frame has alignment features aligning the substrate holders in the substrate holder assembly in repeatable alignment with respect to each of the process elements with each of the process elements located between the substrates. A loader module is configured to unload processed substrates from each of the substrate holder assemblies and load unprocessed substrates to each of the substrate holder assemblies. A transporter is configured to transport the substrate holder assemblies to and from the process module and the loader module.
摘要翻译：一种用于处理具有处理模块的基板的表面的系统，该处理模块具有处理模块框架和多个处理元件，以在不接触基板表面的情况下处理基板表面。多个衬底保持器组件，每个衬底保持器组件具有多个衬底保持器，每个衬底保持器可移除地联接到过程模块框架，每个衬底保持器被构造成保持衬底。过程模块框架具有对准特征，其中衬底保持器组件中的衬底保持器相对于每个工艺元件可重复地对准，每个工艺元件位于衬底之间。装载器模块被配置为从每个基板保持器组件卸载经处理的基板，并且将未处理的基板装载到每个基板保持器组件。传送器构造成将基板保持器组件传送到过程模块和加载器模块。

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