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1. 发明授权

US08294225B2 Ultrasonic transducer and manufacturing method 有权
标题翻译：超声波换能器及制造方法
公开(公告)号：US08294225B2
公开(公告)日：2012-10-23
申请号：US12407414
申请日：2009-03-19
申请人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki
发明人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki
IPC分类号： H01L21/00
CPC分类号： B06B1/0292 , Y10T29/49005
摘要： This invention provides a technique whereby, even if a step is produced by splitting a lower electrode into component elements, resistance increase of an upper electrode, damage to a membrane and decrease of dielectric strength between an upper electrode and the lower electrode, are reduced. In an ultrasonic transducer comprising plural lower electrodes, an insulation film covering the lower electrodes, plural hollow parts formed to overlap the lower electrodes on the insulation film, an insulation film filling the gaps among the hollow parts, an insulation film covering the hollow parts and insulation film, plural upper electrodes formed to overlap the hollow parts on the insulation film and plural interconnections joining them, the surfaces of the hollow parts and insulation film are flattened to the same height.
摘要翻译：本发明提供一种技术，即使通过将下部电极分割成成分元件而产生台阶，也能够降低上部电极的电阻增加，膜的损伤以及上部电极与下部电极之间的介电强度的降低。在包括多个下电极的超声波换能器中，覆盖下电极的绝缘膜，形成为与绝缘膜上的下电极重叠的多个中空部，填充中空部之间的间隙的绝缘膜，覆盖中空部的绝缘膜，绝缘膜，形成为与绝缘膜上的中空部分重叠的多个上电极和连接它们的多个互连，中空部分和绝缘膜的表面被平坦化到相同的高度。

2. 发明授权

US07512038B2 Ultrasonic transducer and manufacturing method 有权
标题翻译：超声波换能器及制造方法
公开(公告)号：US07512038B2
公开(公告)日：2009-03-31
申请号：US11671040
申请日：2007-02-05
申请人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki
发明人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki
IPC分类号： H04R19/00
CPC分类号： B06B1/0292 , Y10T29/49005
摘要： This invention provides a technique whereby, even if a step is produced by splitting a lower electrode into component elements, resistance increase of an upper electrode, damage to a membrane and decrease of dielectric strength between an upper electrode and the lower electrode, are reduced. In an ultrasonic transducer comprising plural lower electrodes, —an insulation film covering the lower electrodes, —plural hollow parts formed to overlap the lower electrodes on the insulation film, —an insulation film filling the gaps among the hollow parts, an insulation film covering the hollow parts and insulation film, plural upper electrodes formed to overlap the hollow parts on the insulation film and plural interconnections joining them, —the surfaces of the hollow parts and insulation film are flattened to the same height.
摘要翻译：本发明提供一种技术，即使通过将下部电极分割成成分元件而产生台阶，也能够降低上部电极的电阻增加，膜的损伤以及上部电极与下部电极之间的介电强度的降低。在包括多个下电极的超声波换能器中， - 覆盖下电极的绝缘膜， - 形成为与绝缘膜上的下电极重叠的 - 中空部分， - 填充中空部分之间的间隙的绝缘膜，覆盖中空部分和绝缘膜，形成为与绝缘膜上的中空部分重叠的多个上电极和连接它们的多个互连， - 中空部分和绝缘膜的表面被平坦化到相同的高度。

3. 发明申请

US20070052093A1 Ultrasonic transducer and manufacturing method thereof 有权
标题翻译：超声波换能器及其制造方法
公开(公告)号：US20070052093A1
公开(公告)日：2007-03-08
申请号：US11489612
申请日：2006-07-20
申请人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki , Tatsuya Nagata
发明人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki , Tatsuya Nagata
IPC分类号： H01L23/48
CPC分类号： B06B1/0292
摘要： Disclosed is an improved construction of an ultrasonic transducer, wherein a charge is not easily injected into an insulating film even when the bottom of a membrane comes in contact with a lower electrode, and a manufacturing method thereof without using the wafer laminating technique. The ultrasonic transducer includes a lower electrode; a cavity layer formed on the first electrode; an insulating film covering the cavity layer; and an upper electrode formed on the insulating film, wherein, the cavity layer includes projections formed into an insulating film protruded from the cavity layer. In addition, an opening is formed into the upper electrode, and this upper electrode having the opening formed therein is deposited at a position not being superposed with the projections of the insulating film when seen from the top.
摘要翻译：公开了一种超声换能器的改进结构，其中即使膜的底部与下电极接触，电荷也不容易注入到绝缘膜中，并且其制造方法不使用晶片层压技术。超声波换能器包括下电极; 形成在所述第一电极上的空腔层; 覆盖空腔层的绝缘膜; 以及形成在绝缘膜上的上电极，其中，所述空腔层包括形成为从所述空腔层突出的绝缘膜的突起。此外，在上部电极中形成开口，并且其上形成有开口的该上部电极沉积在从顶部观察时不与绝缘膜的突起重叠的位置。

4. 发明授权

US08754489B2 Ultrasonic transducer and manufacturing method 有权
标题翻译：超声波换能器及制造方法
公开(公告)号：US08754489B2
公开(公告)日：2014-06-17
申请号：US13605340
申请日：2012-09-06
申请人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki
发明人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki
IPC分类号： H01L27/14
CPC分类号： B06B1/0292 , Y10T29/49005
摘要： An ultrasonic transducer includes a first electrode, a first insulation film covering the first electrode, a hollow part overlapping the first electrode on the first insulation film, a second insulation film covering the hollow part, a second electrode overlapping the hollow part on the second insulation film, and an interconnection joined to the second electrode. An edge of the first electrode is formed so as to moderate a step of the first electrode.
摘要翻译：超声波换能器包括第一电极，覆盖第一电极的第一绝缘膜，与第一绝缘膜上的第一电极重叠的中空部分，覆盖中空部分的第二绝缘膜，与第二绝缘体上的中空部分重叠的第二电极膜，以及与第二电极接合的互连。形成第一电极的边缘以调节第一电极的台阶。

5. 发明申请

US20100148594A1 Ultrasonic Transducer And Manufacturing Method Thereof 有权
标题翻译：超声波传感器及其制造方法
公开(公告)号：US20100148594A1
公开(公告)日：2010-06-17
申请号：US12714631
申请日：2010-03-01
申请人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki , Tatsuya Nagata
发明人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki , Tatsuya Nagata
IPC分类号： H02N11/00
CPC分类号： B06B1/0292
摘要： An ultrasonic transducer includes a first electrode, a second electrode, an insulating film disposed between the first and second electrodes, and a cavity disposed between the first and second electrodes. The insulating film includes a projection extending in the cavity, and a portion of the cavity is disposed between the projection and the first electrode. A portion of one of the first electrode and the second electrode has an opening corresponding to a position of the projection of the insulating film when viewed in plan view.
摘要翻译：超声换能器包括第一电极，第二电极，设置在第一和第二电极之间的绝缘膜，以及设置在第一和第二电极之间的空腔。绝缘膜包括在空腔中延伸的突起，并且空腔的一部分设置在突起和第一电极之间。当在平面图中观察时，第一电极和第二电极中的一个的一部分具有对应于绝缘膜的突起的位置的开口。

6. 发明申请

US20080042225A1 ULTRASONIC TRANSDUCER AND MANUFACTURING METHOD 有权
标题翻译：超声波传感器和制造方法
公开(公告)号：US20080042225A1
公开(公告)日：2008-02-21
申请号：US11671040
申请日：2007-02-05
申请人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki
发明人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki
IPC分类号： H01L29/84 , H01L21/62
CPC分类号： B06B1/0292 , Y10T29/49005
摘要： This invention provides a technique whereby, even if a step is produced by splitting a lower electrode into component elements, resistance increase of an upper electrode, damage to a membrane and decrease of dielectric strength between an upper electrode and the lower electrode, are reduced. In an ultrasonic transducer comprising plural lower electrodes, an insulation film covering the lower electrodes, plural hollow parts formed to overlap the lower electrodes on the insulation film, an insulation film filling the gaps among the hollow parts, an insulation film covering the hollow parts and insulation film, plural upper electrodes formed to overlap the hollow parts on the insulation film and plural interconnections joining them, the surfaces of the hollow parts and insulation film are flattened to the same height.
摘要翻译：本发明提供一种技术，即使通过将下部电极分割成成分元件而产生台阶，也能够降低上部电极的电阻增加，膜的损伤以及上部电极与下部电极之间的介电强度的降低。在包括多个下电极的超声波换能器中，覆盖下电极的绝缘膜，形成为与绝缘膜上的下电极重叠的多个中空部，填充中空部之间的间隙的绝缘膜，覆盖中空部的绝缘膜，绝缘膜，形成为与绝缘膜上的中空部分重叠的多个上电极和连接它们的多个互连，中空部分和绝缘膜的表面被平坦化到相同的高度。

7. 发明授权

US08198782B2 Ultrasonic transducer and manufacturing method thereof 有权
标题翻译：超声波换能器及其制造方法
公开(公告)号：US08198782B2
公开(公告)日：2012-06-12
申请号：US12714631
申请日：2010-03-01
申请人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki , Tatsuya Nagata
发明人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki , Tatsuya Nagata
IPC分类号： H01L41/08
CPC分类号： B06B1/0292
摘要： An ultrasonic transducer includes a first electrode, a second electrode, an insulating film disposed between the first and second electrodes, and a cavity disposed between the first and second electrodes. The insulating film includes a projection extending in the cavity, and a portion of the cavity is disposed between the projection and the first electrode. A portion of one of the first electrode and the second electrode has an opening corresponding to a position of the projection of the insulating film when viewed in plan view.
摘要翻译：超声换能器包括第一电极，第二电极，设置在第一和第二电极之间的绝缘膜，以及设置在第一和第二电极之间的空腔。绝缘膜包括在空腔中延伸的突起，并且空腔的一部分设置在突起和第一电极之间。当在平面图中观察时，第一电极和第二电极中的一个的一部分具有对应于绝缘膜的突起的位置的开口。

8. 发明授权

US07675221B2 Ultrasonic transducer and manufacturing method thereof 有权
标题翻译：超声波换能器及其制造方法
公开(公告)号：US07675221B2
公开(公告)日：2010-03-09
申请号：US11489612
申请日：2006-07-20
申请人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki , Tatsuya Nagata
发明人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki , Tatsuya Nagata
IPC分类号： H01L41/08
CPC分类号： B06B1/0292
摘要： Disclosed is an improved construction of an ultrasonic transducer, wherein a charge is not easily injected into an insulating film even when the bottom of a membrane comes in contact with a lower electrode, and a manufacturing method thereof without using the wafer laminating technique. The ultrasonic transducer includes a lower electrode; a cavity layer formed on the first electrode; an insulating film covering the cavity layer; and an upper electrode formed on the insulating film, wherein, the cavity layer includes projections formed into an insulating film protruded from the cavity layer. In addition, an opening is formed into the upper electrode, and this upper electrode having the opening formed therein is deposited at a position not being superposed with the projections of the insulating film when seen from the top.
摘要翻译：公开了一种超声换能器的改进结构，其中即使膜的底部与下电极接触，电荷也不容易注入到绝缘膜中，并且其制造方法不使用晶片层压技术。超声波换能器包括下电极; 形成在所述第一电极上的空腔层; 覆盖空腔层的绝缘膜; 以及形成在所述绝缘膜上的上电极，其中，所述空腔层包括形成为从所述空腔层突出的绝缘膜的突起。此外，在上部电极中形成开口，并且其上形成有开口的该上部电极沉积在从顶部观察时不与绝缘膜的突起重叠的位置。

9. 发明申请

US20090189480A1 Ultrasonic Transducer And Manufacturing Method 有权
标题翻译：超声波传感器及制造方法
公开(公告)号：US20090189480A1
公开(公告)日：2009-07-30
申请号：US12407414
申请日：2009-03-19
申请人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki
发明人： Shuntaro Machida , Hiroyuki Enomoto , Yoshitaka Tadaki
IPC分类号： H02N11/00 , H04R31/00
CPC分类号： B06B1/0292 , Y10T29/49005
摘要： This invention provides a technique whereby, even if a step is produced by splitting a lower electrode into component elements, resistance increase of an upper electrode, damage to a membrane and decrease of dielectric strength between an upper electrode and the lower electrode, are reduced. In an ultrasonic transducer comprising plural lower electrodes, an insulation film covering the lower electrodes, plural hollow parts formed to overlap the lower electrodes on the insulation film, an insulation film filling the gaps among the hollow parts, an insulation film covering the hollow parts and insulation film, plural upper electrodes formed to overlap the hollow parts on the insulation film and plural interconnections joining them, the surfaces of the hollow parts and insulation film are flattened to the same height.
摘要翻译：本发明提供一种技术，即使通过将下部电极分割成成分元件而产生台阶，也能够降低上部电极的电阻上升，膜的损伤以及上部电极与下部电极之间的介电强度的降低。在包括多个下电极的超声波换能器中，覆盖下电极的绝缘膜，形成为与绝缘膜上的下电极重叠的多个中空部，填充中空部之间的间隙的绝缘膜，覆盖中空部的绝缘膜，绝缘膜，形成为与绝缘膜上的中空部分重叠的多个上电极和连接它们的多个互连，中空部分和绝缘膜的表面被平坦化到相同的高度。

10. 发明授权

US07667374B2 Ultrasonic transducer, ultrasonic probe and method for fabricating the same 有权
标题翻译：超声波换能器，超声波探头及其制造方法
公开(公告)号：US07667374B2
公开(公告)日：2010-02-23
申请号：US11657186
申请日：2007-01-23
申请人： Takanori Aono , Tatsuya Nagata , Hiroyuki Enomoto , Shuntaro Machida
发明人： Takanori Aono , Tatsuya Nagata , Hiroyuki Enomoto , Shuntaro Machida
IPC分类号： H01L41/00
CPC分类号： B06B1/0292
摘要： In an ultrasonic transducer including a gap between an upper electrode and a lower electrode on a silicon substrate, it is made possible to reduce or adjust warpage of an above-gap membrane vibrated by electrostatic actuation due to internal stress. A fourth insulating film and a fifth insulating film of films positioned above the gap which is a cavity required for transmitting and receiving ultrasonic are respectively a silicon oxide film for compression stress and a silicon nitride film for tensile stress. Therefore, compression stress and tensile stress cancel each other, so that warpage of the above-gap membrane is reduced. An amount of warpage can be adjusted by adjusting a film thickness of the fourth insulating film and a film thickness of the fifth insulating film.
摘要翻译：在包括硅基板上的上电极和下电极之间的间隙的超声波换能器中，由于内部应力，能够减少或调整由静电驱动振动的上间隙膜的翘曲。位于间隙上方的膜的第四绝缘膜和第五绝缘膜分别是用于发送和接收超声波所需的腔，分别是用于压缩应力的氧化硅膜和用于拉伸应力的氮化硅膜。因此，压缩应力和拉伸应力彼此抵消，从而减小了上间隙膜的翘曲。可以通过调整第四绝缘膜的膜厚度和第五绝缘膜的膜厚来调节翘曲量。

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