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1. 发明授权

US09484048B2 Magnetic head with a heating element between the read and write element and method of manufacturing thereof 有权
标题翻译：具有读写单元之间的加热元件的磁头及其制造方法
公开(公告)号：US09484048B2
公开(公告)日：2016-11-01
申请号：US12623151
申请日：2009-11-20
申请人： Shinji Sasaki , Takateru Seki , Masayuki Kurita , Toshiya Shiramatsu
发明人： Shinji Sasaki , Takateru Seki , Masayuki Kurita , Toshiya Shiramatsu
IPC分类号： G11B11/00 , G11B5/31 , B24B37/04 , G11B5/60 , G11B5/39
CPC分类号： G11B5/314 , B24B37/042 , G11B5/3136 , G11B5/3967 , G11B5/6064 , Y10T29/49032
摘要： According to one embodiment, a magnetic head includes a write element, a read element, and a heating element disposed between the write element and the read element. When power is applied to the heating element, either the read element or the write element projects beyond a plane of an air-bearing surface (ABS) of the magnetic head, and when power is not applied to the heating element, a portion of the ABS of the magnetic head facing a magnetic disk close to the heating element has a concave shape. In another embodiment, when power is applied to the heating element, at least one of a portion of the read element and a portion of the write element approaches a magnetic disk, and when power is not applied to the heating element, a portion of the ABS of the magnetic head facing a magnetic disk close to the heating element has a concave shape.
摘要翻译：根据一个实施例，磁头包括写入元件，读取元件和设置在写入元件和读取元件之间的加热元件。当对加热元件施加电力时，读取元件或写入元件突出超过磁头的空气轴承表面（ABS）的平面，并且当功率未被施加到加热元件时，一部分面对靠近加热元件的磁盘的磁头的ABS具有凹形。在另一个实施例中，当向加热元件施加电力时，读取元件的一部分和写入元件的一部分中的至少一个接近磁盘，并且当功率未被施加到加热元件时，面对靠近加热元件的磁盘的磁头的ABS具有凹形。

2. 发明申请

US20100134915A1 MAGNETIC HEAD WITH A HEATING ELEMENT BETWEEN THE READ AND WRITE ELEMENT AND METHOD OF MANUFACTURING THEREOF 有权
标题翻译：具有读取和写入元件之间的加热元件的磁头及其制造方法
公开(公告)号：US20100134915A1
公开(公告)日：2010-06-03
申请号：US12623151
申请日：2009-11-20
申请人： Shinji Sasaki , Takateru Seki , Masayuki Kurita , Toshiya Shiramatsu
发明人： Shinji Sasaki , Takateru Seki , Masayuki Kurita , Toshiya Shiramatsu
IPC分类号： G11B5/02 , B24B51/00 , G11B5/187
CPC分类号： G11B5/314 , B24B37/042 , G11B5/3136 , G11B5/3967 , G11B5/6064 , Y10T29/49032
摘要： According to one embodiment, a magnetic head includes a write element, a read element, and a heating element disposed between the write element and the read element. When power is applied to the heating element, either the read element or the write element projects beyond a plane of an air-bearing surface (ABS) of the magnetic head, and when power is not applied to the heating element, a portion of the ABS of the magnetic head facing a magnetic disk close to the heating element has a concave shape. In another embodiment, when power is applied to the heating element, at least one of a portion of the read element and a portion of the write element approaches a magnetic disk, and when power is not applied to the heating element, a portion of the ABS of the magnetic head facing a magnetic disk close to the heating element has a concave shape.
摘要翻译：根据一个实施例，磁头包括写入元件，读取元件和设置在写入元件和读取元件之间的加热元件。当对加热元件施加电力时，读取元件或写入元件突出超过磁头的空气轴承表面（ABS）的平面，并且当功率未被施加到加热元件时，一部分面对靠近加热元件的磁盘的磁头的ABS具有凹形。在另一个实施例中，当向加热元件施加电力时，读取元件的一部分和写入元件的一部分中的至少一个接近磁盘，并且当功率未被施加到加热元件时，面对靠近加热元件的磁盘的磁头的ABS具有凹形。

3. 发明授权

US08786975B2 Thin-femto magnetic head slider and method for producing the same 有权
标题翻译：薄毫微微磁头滑块及其制造方法
公开(公告)号：US08786975B2
公开(公告)日：2014-07-22
申请号：US13104830
申请日：2011-05-10
申请人： Tomomitsu Inoue , Hideo Yamakura , Takateru Seki
发明人： Tomomitsu Inoue , Hideo Yamakura , Takateru Seki
IPC分类号： G11B21/21
CPC分类号： G11B5/3166 , G11B5/102 , G11B5/3173 , G11B5/607 , Y10T29/49032
摘要： In one embodiment, a magnetic head slider includes a substrate, at least two elements (read element, write element, and/or heater element) positioned adjacent to the substrate, a resistance detection element positioned near the two elements, a pair of conductive terminals in an accessible position and coupled to each of the two elements, a protective film surrounding the two elements and the resistance detection element, a first and a second thin conductive wire extending from the resistance detection element and terminating at an edge of the protective film, a third thin conductive wire extending from one of the pair of conductive terminals for a first of the two elements and terminating at an edge of the protective film, and a fourth thin conductive wire extending from one of the pair of conductive terminals for a second of the two elements and terminating at an edge of the protective film.
摘要翻译：在一个实施例中，磁头滑块包括衬底，与衬底相邻定位的至少两个元件（读取元件，写入元件和/或加热器元件），位于两个元件附近的电阻检测元件，一对导电端子在可访问位置并且耦合到两个元件中的每一个，围绕两个元件和电阻检测元件的保护膜，从电阻检测元件延伸并终止在保护膜的边缘处的第一和第二细导线，从所述一对导电端子中的一个延伸到所述两个元件中的第一元件并终止于所述保护膜的边缘的第三细导线，以及从所述一对导电端子中的一个导电端子延伸的第四细导线，两个元件并终止于保护膜的边缘。

4. 发明授权

US07735213B2 Method for fabricating magnetic head slider 失效
标题翻译：制造磁头滑块的方法
公开(公告)号：US07735213B2
公开(公告)日：2010-06-15
申请号：US11845010
申请日：2007-08-24
申请人： Nobuto Yasui , Katsuro Watanabe , Takateru Seki , Kazuhito Miyata , Tetsuya Matsusaki
发明人： Nobuto Yasui , Katsuro Watanabe , Takateru Seki , Kazuhito Miyata , Tetsuya Matsusaki
IPC分类号： H04R31/00
CPC分类号： G11B5/3163 , G11B5/3169 , G11B5/3173 , G11B5/6011 , Y10T29/49021 , Y10T29/49032 , Y10T29/49041
摘要： Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.
摘要翻译：本发明的实施例提供一种制造磁头滑块的方法，其通过防止在磁头滑块的空气轴承表面上形成短路而以高产率实现高记录密度，并且防止形成具有显着性的氧化层在磁头滑块的空气轴承表面上增加有效磁间距的膜厚度。根据一个实施例，在排杆或磁头滑块的空气轴承表面机械研磨之后，通过离子束轰击进行清洁以除去导电涂片。进行氧曝光以回收在磁阻膜5的中间层的端面处通过离子束轰击形成的损伤区域。之后，形成空气轴承表面保护膜，然后形成轨道。如果在行条上执行过程，则将行条切割成单独的分离的磁头滑块。

5. 发明授权

US06881124B2 Method of manufacturing magnetic head 失效
标题翻译：制造磁头的方法
公开(公告)号：US06881124B2
公开(公告)日：2005-04-19
申请号：US10024962
申请日：2001-12-18
申请人： Toshio Takahashi , Hiromu Chiba , Takateru Seki , Hideaki Tanaka , Toshio Tamura , Minoru Yamasaka , Akio Takakura
发明人： Toshio Takahashi , Hiromu Chiba , Takateru Seki , Hideaki Tanaka , Toshio Tamura , Minoru Yamasaka , Akio Takakura
IPC分类号： B24B19/26 , B24B37/04 , B24B37/10 , B24B37/30 , B24B41/06 , B24B53/007 , B24B53/017 , G11B5/187 , G11B5/31 , G11B5/39 , B24B7/22 , B24B51/00
CPC分类号： B24B53/017 , B24B37/00 , B24B41/06 , G11B5/3163 , G11B5/3903 , Y10T29/49046
摘要： An L-shaped slide plate mounted with a workpiece holding device on a slide guide is firmly attached to an angle adjustment mechanism, and a reciprocating motion drive unit mounted with the angle adjustment mechanism on a slider table is firmly attached to a bridge so that an angle between a surface of a workpiece to be lapped and a surface of a lapping plate is kept substantially constant, and also the bridge is disposed so as to stride the lapping plate. Thereby, in a state of row bar in which a plurality of magnetic head sliders run in a line, an air bearing surface of magnetic head can be lapped with high accuracy with an element recession being decreased and an occurrence of a scratch being restrained.
摘要翻译：在滑动导轨上安装有工件保持装置的L形滑板牢固地附接到角度调节机构，并且将安装有角度调节机构的往复运动驱动单元牢固地附接到桥架上，要研磨的工件的表面与研磨板的表面之间的角度保持基本上恒定，并且桥被设置成跨越研磨板。因此，在多个磁头滑块沿着一条直线行进的行杆的状态下，可以高精度地研磨磁头的空气支承表面，同时减少元件的衰减并且发生划痕。

6. 发明授权

US08254057B1 Detecting wedge angle with a third electric lapping guide (ELG) during manufacture of a magnetic head 有权
标题翻译：在制造磁头期间用第三个电动研磨导轨（ELG）检测楔角
公开(公告)号：US08254057B1
公开(公告)日：2012-08-28
申请号：US13369199
申请日：2012-02-08
申请人： Manabu Hattori , Takateru Seki
发明人： Manabu Hattori , Takateru Seki
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3169 , G11B5/3173
摘要： In one embodiment, a magnetic head includes a read element, a write element, a write upper shield positioned in a downtrack direction from the write element, a first resistance detecting element positioned on an air bearing surface (ABS) side in a first cross-track direction from the read element, a second resistance detecting element positioned on the ABS side in a second cross-track direction from the write element, a third resistance detecting element positioned on the ABS side in a third cross-track direction from the write upper shield, a protective film positioned near the read and write elements, first, second, and third resistance detecting elements, and the write upper shield, and terminals positioned on an end surface side of the magnetic head, the terminals being coupled to the write element, the read element, the first resistance detecting element, the second resistance detecting element, and the third resistance detecting element.
摘要翻译：在一个实施例中，磁头包括读写元件，写入元件，位于沿着写入元件的倾斜方向的写入上屏蔽件，位于第一横截面中的空气支承表面（ABS）侧的第一电阻检测元件，读取元件的轨道方向，位于来自写入元件的第二交叉轨道方向上的ABS侧上的第二电阻检测元件;第三电阻检测元件，位于来自写入上部的第三十字轨道方向上的ABS侧上屏蔽，位于读取和写入元件附近的保护膜，第一，第二和第三电阻检测元件以及写入上屏蔽，以及位于磁头的端面侧的端子，端子耦合到写入元件读取元件，第一电阻检测元件，第二电阻检测元件和第三电阻检测元件。

7. 发明授权

US07716811B2 Method for manufacturing a thin film magnetic head 有权
标题翻译：薄膜磁头制造方法
公开(公告)号：US07716811B2
公开(公告)日：2010-05-18
申请号：US11588866
申请日：2006-10-27
申请人： Takateru Seki , Akihiro Namba , Hideo Yamakura , Takahiro Noji
发明人： Takateru Seki , Akihiro Namba , Hideo Yamakura , Takahiro Noji
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3166 , G11B5/102 , G11B5/3169 , G11B5/3173 , Y10T29/49032 , Y10T29/49037 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49798
摘要： Head elements are formed on a wafer to suppress deterioration in pinning strength of a pinned layer, which is caused by ESD generated during air bearing surface polishing of a thin film magnetic head. The wafer is cut into rovers in each of which are connected head elements. Rover air bearing surfaces are polished until an MR elements attain a predetermined height. A final polishing step finishes air bearing surfaces by applying an electroconductive polishing liquid to achieve a predetermined shape and surface roughness with high accuracy. A pinning defect occurrence rate is reduced by suppressing deterioration in pinning strength of a pinned layer of a read element. To achieve this, a specific resistance of the electroconductive polishing liquid is controlled to 5 GΩ·cm or less. A shallow rail and a deep rail are formed on the air bearing surfaces, and the rover is cut into thin film magnetic heads.
摘要翻译：头元件形成在晶片上以抑制由薄膜磁头的空气轴承表面抛光期间产生的ESD引起的被钉扎层的钉扎强度的劣化。将晶片切割成每个都连接的头元件的流动站。流动车空气轴承表面被抛光直到MR元件达到预定高度。最终的抛光步骤通过施加导电研磨液来完成空气轴承表面，以高精度实现预定的形状和表面粗糙度。通过抑制读取元件的被钉扎层的钉扎强度的劣化来降低钉扎缺陷发生率。为了达到这个目的，将导电研磨液的电阻值控制在5G＆OHgr·cm以下。在空气轴承表面上形成浅轨和深轨，并将流动车切成薄膜磁头。

8. 发明申请

US20070119046A1 Method for manufacturing a thin film magnetic head 有权
标题翻译：薄膜磁头制造方法
公开(公告)号：US20070119046A1
公开(公告)日：2007-05-31
申请号：US11588866
申请日：2006-10-27
申请人： Takateru Seki , Akihiro Namba , Hideo Yamakura , Takahiro Noji
发明人： Takateru Seki , Akihiro Namba , Hideo Yamakura , Takahiro Noji
IPC分类号： G11B5/127
CPC分类号： G11B5/3166 , G11B5/102 , G11B5/3169 , G11B5/3173 , Y10T29/49032 , Y10T29/49037 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49798
摘要： Head elements are formed on a wafer in order to suppress deterioration in pinning strength of a pinned layer, which is caused by ESD generated during a thin film magnetic head production process, particularly in an air bearing surface polishing step. The wafer is cut line by line into rovers in each of which the head elements are connected; surfaces to be used as air bearing surfaces of the rover are polished until an MR element height reaches to a predetermined value. After this air bearing surface polishing, an electroconductive polishing liquid is used in a final bearing surface polishing step of finishing the air bearing surfaces to achieve a predetermined shape with high accuracy and a predetermined value of a surface roughness. In order to suppress a pinning defect occurrence rate by suppressing deterioration in pinning strength of a pinned layer of a read element, a specific resistance of the electroconductive polishing liquid is controlled to GΩ·cm or less, preferably 1 GΩ·cm or less. After that, a shallow rail and a deep rail are formed on the air bearing surfaces, and the rover is cut to accomplish thin film magnetic heads.
摘要翻译：头元件形成在晶片上，以便抑制在薄膜磁头制造过程中产生的ESD引起的钉扎层的钉扎强度的劣化，特别是在空气轴承表面抛光步骤中。每个头元件连接的晶片被逐行切割成流动站; 用作流动站的空气轴承表面的表面被抛光直到MR元件高度达到预定值。在这种空气轴承表面抛光之后，在最终的轴承表面抛光步骤中使用导电研磨液，以完成空气轴承表面，以高精度和预定的表面粗糙度值达到预定的形状。为了通过抑制读取元件的被钉扎层的钉扎强度的劣化来抑制钉扎缺陷发生率，导电研磨液的比电阻被控制在GOmea.cm以下，优选为1Ggga.cm以下。之后，在空气轴承表面上形成浅轨和深轨，并且切割流动站以实现薄膜磁头。

9. 发明申请

US20100077600A1 Method for Manufacturing Thin Film Magnetic Heads 有权
标题翻译：制造薄膜磁头的方法
公开(公告)号：US20100077600A1
公开(公告)日：2010-04-01
申请号：US12559327
申请日：2009-09-14
申请人： Takateru Seki , Zhou Wenjun , Kazuo Takeda , Takefumi Kubota
发明人： Takateru Seki , Zhou Wenjun , Kazuo Takeda , Takefumi Kubota
IPC分类号： G11B5/187 , G11B5/31
CPC分类号： G11B5/3166 , G11B5/3169 , G11B5/3173 , G11B5/3906 , Y10T29/49036 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： According to one embodiment, a method for manufacturing a thin film magnetic head includes forming on a substrate magnetic head portions having a magnetoresistive element and resistance detection elements for measuring an amount of polishing; slicing the substrate to form at least one row bar; polishing the ABS of each row bar; forming rails on the polished ABS; and cutting each row bar to separate each magnetic head portion. The step of polishing the ABS includes measuring a resistance of each resistance detection element and a resistance of each magnetoresistive element; calculating an offset value between the resistance detection element and the magnetoresistive element; and calculating a final resistance of the resistance detection element by using the calculated offset value. When the resistance of the resistance detection element reaches the final resistance, polishing of the ABS of the row bar is terminated. Other methods are presented as well.
摘要翻译：根据一个实施例，一种制造薄膜磁头的方法包括在基板上形成具有磁阻元件的磁头部分和用于测量抛光量的电阻检测元件; 将基板切片以形成至少一排排条; 抛光每排行的ABS; 在抛光ABS上形成轨道; 并切割每个行条以分离每个磁头部分。抛光ABS的步骤包括测量每个电阻检测元件的电阻和每个磁阻元件的电阻; 计算电阻检测元件和磁阻元件之间的偏移值; 以及通过使用所计算的偏移值来计算电阻检测元件的最终电阻。当电阻检测元件的电阻达到最终电阻时，排列的ABS的抛光结束。还提出了其他方法。

10. 发明授权

US08407882B2 Method for manufacturing thin film magnetic heads 有权
标题翻译：薄膜磁头制造方法
公开(公告)号：US08407882B2
公开(公告)日：2013-04-02
申请号：US12559327
申请日：2009-09-14
申请人： Takateru Seki , Zhou Wenjun , Kazuo Takeda , Takefumi Kubota
发明人： Takateru Seki , Zhou Wenjun , Kazuo Takeda , Takefumi Kubota
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3166 , G11B5/3169 , G11B5/3173 , G11B5/3906 , Y10T29/49036 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： According to one embodiment, a method for manufacturing a thin film magnetic head includes forming on a substrate magnetic head portions having a magnetoresistive element and resistance detection elements for measuring an amount of polishing; slicing the substrate to form at least one row bar; polishing the ABS of each row bar; forming rails on the polished ABS; and cutting each row bar to separate each magnetic head portion. The step of polishing the ABS includes measuring a resistance of each resistance detection element and a resistance of each magnetoresistive element; calculating an offset value between the resistance detection element and the magnetoresistive element; and calculating a final resistance of the resistance detection element by using the calculated offset value. When the resistance of the resistance detection element reaches the final resistance, polishing of the ABS of the row bar is terminated. Other methods are presented as well.
摘要翻译：根据一个实施例，一种制造薄膜磁头的方法包括在基板上形成具有磁阻元件的磁头部分和用于测量抛光量的电阻检测元件; 将基板切片以形成至少一排排条; 抛光每排行的ABS; 在抛光ABS上形成轨道; 并切割每个行条以分离每个磁头部分。抛光ABS的步骤包括测量每个电阻检测元件的电阻和每个磁阻元件的电阻; 计算电阻检测元件和磁阻元件之间的偏移值; 以及通过使用所计算的偏移值来计算电阻检测元件的最终电阻。当电阻检测元件的电阻达到最终电阻时，排列的ABS的抛光结束。还提出了其他方法。

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