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    • 2. 发明申请
    • CRYOPUMP CONTROL APPARATUS, CRYOPUMP SYSTEM, AND METHOD FOR MONITORING CRYOPUMP
    • CRYOPUMP控制装置,CRYOPUMP系统和监测CRYOPUMP的方法
    • US20120317999A1
    • 2012-12-20
    • US13495675
    • 2012-06-13
    • Tomohiro Koyama
    • Tomohiro Koyama
    • B01D8/00
    • F04B37/08
    • A cryopump comprises a cryopanel that cools and thus condenses or adsorbs gas, and a pump housing that contains the cryopanel. a regeneration process of the cryopump includes a basic purge process, an evacuation processes, and an optional purge process that is executed additionally if required. The optional purge process includes one or more gas purge steps. In a cryopump control apparatus that controls the cryopump, a deterioration evaluation unit determines whether a re-purge number, which is the total number of gas purge steps that are required to be executed in one regeneration process, reaches a deterioration evaluation criteria number.
    • 低温泵包括冷却并因此冷凝或吸附气体的冷冻板和包含冷冻板的泵壳体。 低温泵的再生过程包括基本清洗过程,撤离过程以及如果需要另外执行的可选清洗过程。 可选的清洗过程包括一个或多个气体吹扫步骤。 在控制低温泵的低温泵控制装置中,劣化评价部判定在一个再生处理中需要执行的气体吹扫步骤的总数的再吹扫次数是否达到劣化评价标准数。
    • 6. 发明授权
    • Cryopump control apparatus, cryopump system, and method for monitoring cryopump
    • 低温泵控制装置,低温泵系统和低温泵监控方法
    • US08800304B2
    • 2014-08-12
    • US13495675
    • 2012-06-13
    • Tomohiro Koyama
    • Tomohiro Koyama
    • B01D8/00
    • F04B37/08
    • A cryopump comprises a cryopanel that cools and thus condenses or adsorbs gas, and a pump housing that contains the cryopanel. a regeneration process of the cryopump includes a basic purge process, an evacuation processes, and an optional purge process that is executed additionally if required. The optional purge process includes one or more gas purge steps. In a cryopump control apparatus that controls the cryopump, a deterioration evaluation unit determines whether a re-purge number, which is the total number of gas purge steps that are required to be executed in one regeneration process, reaches a deterioration evaluation criteria number.
    • 低温泵包括冷却并因此冷凝或吸附气体的冷冻板和包含冷冻板的泵壳体。 低温泵的再生过程包括基本清洗过程,撤离过程以及如果需要另外执行的可选清洗过程。 可选的清洗过程包括一个或多个气体吹扫步骤。 在控制低温泵的低温泵控制装置中,劣化评价部判定在一个再生处理中需要执行的气体吹扫步骤的总数的再吹扫次数是否达到劣化评价标准数。