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1. 发明授权

US08692204B2 Apparatus and methods for electron beam detection 失效
标题翻译：电子束检测装置及方法
公开(公告)号：US08692204B2
公开(公告)日：2014-04-08
申请号：US13453902
申请日：2012-04-23
申请人： Shinichi Kojima , Christopher F. Bevis , Joseph Maurino , William M. Tong
发明人： Shinichi Kojima , Christopher F. Bevis , Joseph Maurino , William M. Tong
IPC分类号： G01T1/20
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/244 , H01J2237/24528 , H01J2237/30438 , H01J2237/31798
摘要： One embodiment disclosed relates a method of detecting a patterned electron beam. The patterned electron beam is focused onto a grating with a pattern that has a same pitch as the patterned electron beam. Electrons of the patterned electron beam that pass through the grating un-scattered are detected. Another embodiment relates to focusing the patterned electron beam onto a grating with a pattern that has a second pitch that is different than a first pitch of the patterned electron beam. Electrons of the patterned electron beam that pass through the grating form a Moiré pattern that is detected using a position-sensitive detector. Other embodiments, aspects and features are also disclosed.
摘要翻译：公开的一个实施例涉及一种检测图案化电子束的方法。图案化电子束被聚焦到具有与图案化电子束相同的间距的图案的光栅上。检测通过光栅不分散的图案化电子束的电子。另一个实施例涉及将图案化电子束聚焦到具有不同于图案化电子束的第一间距的第二间距的图案的光栅上。通过光栅的图案化电子束的电子形成使用位置敏感检测器检测的莫尔图案。还公开了其它实施例，方面和特征。

2. 发明申请

US20160358742A1 CHARGE DRAIN COATING FOR ELECTRON-OPTICAL MEMS 有权
标题翻译：电光MEMS的充电排水涂层
公开(公告)号：US20160358742A1
公开(公告)日：2016-12-08
申请号：US14052610
申请日：2013-10-11
申请人： William M. Tong , Alan D. Brodie , Jeffrey Elam , Anil Mane
发明人： William M. Tong , Alan D. Brodie , Jeffrey Elam , Anil Mane
IPC分类号： H01J37/06 , H01J37/12 , C23C16/32 , C23C16/40 , C23C16/34 , H01J37/317 , C23C16/455
CPC分类号： C23C16/45529 , B81B3/0008 , C23C16/32 , C23C16/34 , C23C16/40 , C23C16/402 , C23C16/403 , C23C16/405 , H01J37/026 , H01J37/06 , H01J37/12 , H01J37/3174 , H01J2237/1205 , H01J2237/31794
摘要： A system and method associated with a charge drain coating are disclosed. The charge drain coating may be applied to surfaces of an electron-optical device to drain electrons that come into contact with the charge drain coating so that the performance of the electron-optical device will not be hindered by electron charge build-up. The charge drain coating may include a doping material that coalesces into clusters that are embedded within a high dielectric insulating material. The charge drain coating may be deposited onto the inner surfaces of lenslets of the electron-optical device.
摘要翻译：公开了一种与电荷放电涂层相关的系统和方法。可以将电荷漏极涂层施加到电子 - 光学器件的表面以排出与电荷漏极涂层接触的电子，使得电子 - 电子器件的性能不会受到电子电荷积聚的阻碍。电荷漏极涂层可以包括聚集成嵌入高介电绝缘材料中的簇的掺杂材料。电荷漏极涂层可以沉积到电子 - 光学器件的小透镜的内表面上。

3. 发明授权

US07780841B2 E-field induced ion selective molecular deposition onto sensor arrays 失效
标题翻译：电场诱导离子选择性分子沉积到传感器阵列上
公开(公告)号：US07780841B2
公开(公告)日：2010-08-24
申请号：US11059258
申请日：2005-02-15
申请人： Sean Xiao-An Zhang , Zhiyong Li , Zhang-Lin Zhou , William M. Tong , R. Stanley Williams , Yong Chen
发明人： Sean Xiao-An Zhang , Zhiyong Li , Zhang-Lin Zhou , William M. Tong , R. Stanley Williams , Yong Chen
IPC分类号： G01N27/327
CPC分类号： G01N33/5308 , G01N33/5438 , G01N2430/00
摘要： A sensor array for sensing at least one of chemical moieties and biological moieties is provided. The sensor array comprises a plurality of working electrodes electrically associated with a reference electrode, each working electrode in combination with the reference electrode forming a transducer. Each working electrode is provided with a coating of a sensing element comprised of an ionizable moiety and a functional group sensitive to one of the chemical and/or biological moieties.
摘要翻译：提供了用于感测化学部分和生物部分中的至少一个的传感器阵列。传感器阵列包括与参考电极电连接的多个工作电极，每个工作电极与参考电极组合形成换能器。每个工作电极设置有由可电离部分和对化学和/或生物部分之一敏感的官能团组成的感测元件的涂层。

4. 发明授权

US07763552B2 Method of interconnect formation using focused beams 有权
标题翻译：使用聚焦光束的互连形成方法
公开(公告)号：US07763552B2
公开(公告)日：2010-07-27
申请号：US11413476
申请日：2006-04-28
申请人： William M. Tong , Duncan Stewart , R. Stanley Williams , Manish Sharma , Zhiyong Li , Gary A. Gibson
发明人： William M. Tong , Duncan Stewart , R. Stanley Williams , Manish Sharma , Zhiyong Li , Gary A. Gibson
IPC分类号： H01L21/768 , H01L21/62
CPC分类号： H01L21/76892 , H01L21/76823 , H01L23/5254 , H01L27/1052 , H01L2924/0002 , H01L2924/12044 , H01L2924/3011 , H01L2924/00
摘要： A method of forming an electrical interconnect, which includes a first electrode, an interlayer of a programmable material disposed over at least a portion of the first electrode, and a second electrode disposed over the programmable material at a non-zero angle relative to the first electrode. The interlayer includes a modified region having differing electrical properties than the rest of the interlayer, sandwiched at the junction of the first electrode and the second electrode. The interlayer may be exposed to a focused beam to form the modified region.
摘要翻译：一种形成电互连的方法，包括第一电极，设置在第一电极的至少一部分上的可编程材料的中间层，以及设置在可编程材料上的第二电极，相对于第一电极以非零角度电极。中间层包括夹在第一电极和第二电极的接合处的与中间层的其余部分不同的电特性的改性区域。中间层可以暴露于聚焦光束以形成改质区域。

5. 发明授权

US07641468B2 Imprint lithography apparatus and method employing an effective pressure 有权
标题翻译：压印光刻设备和采用有效压力的方法
公开(公告)号：US07641468B2
公开(公告)日：2010-01-05
申请号：US10931672
申请日：2004-09-01
申请人： Wei Wu , William M. Tong , Jun Gao , Carl Picciotto
发明人： Wei Wu , William M. Tong , Jun Gao , Carl Picciotto
IPC分类号： B29D17/00
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An imprint apparatus and method employ an effective pressure in imprint lithography. The imprint apparatus includes a compressible chamber that encloses an imprint mold having a mold pattern and a sample to be imprinted. The chamber is compressed to imprint the mold pattern on the sample. The mold is pressed against the sample with the effective pressure. The effective pressure is controlled by a selected ratio of a cavity area of the chamber to a contact area between the mold and the sample.
摘要翻译：压印设备和方法在压印光刻中采用有效压力。压印装置包括可压缩室，其包围具有模具图案和要印刷的样品的压印模具。压缩室以将模具图案压印在样品上。模具以有效的压力压在样品上。有效压力通过腔室的空腔面积与模具和样品之间的接触面积的选定比例来控制。

6. 发明授权

US07309642B2 Metallic quantum dots fabricated by a superlattice structure 有权
公开(公告)号：US07309642B2
公开(公告)日：2007-12-18
申请号：US11271354
申请日：2005-11-09
申请人： William M. Tong , M. Saif Islam
发明人： William M. Tong , M. Saif Islam
IPC分类号： H01L21/30 , H01L21/46
CPC分类号： H01L49/006 , B82Y10/00 , G01N21/658 , Y10S977/888 , Y10S977/893
摘要： A method for forming quantum dots includes forming a superlattice structure that includes at least one nanostrip protruding from the superlattice structure, providing a quantum dot substrate, transferring the at least one nanostrip to the quantum dot substrate, and removing at least a portion of the at least one nanostrip from the substrate. The superlattice structure is formed by providing a superlattice substrate, forming alternating layers of first and second materials on the substrate to form a stack, cleaving the stack to expose the alternating layers, and etching the exposed alternating layers with an etchant that etches the second material at a greater rate than the first to form the at least one nanostrip.

7. 发明授权

US08766228B2 Electrically actuated device and method of controlling the formation of dopants therein 有权
标题翻译：电动装置及其中控制掺杂剂形成的方法
公开(公告)号：US08766228B2
公开(公告)日：2014-07-01
申请号：US13121133
申请日：2008-10-29
申请人： Jianhua Yang , Duncan Stewart , Philip J. Kuekes , William M. Tong
发明人： Jianhua Yang , Duncan Stewart , Philip J. Kuekes , William M. Tong
IPC分类号： H01L21/00
CPC分类号： H01L27/10 , H01L21/2254 , H01L27/2463 , H01L45/08 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1625 , H01L45/1658 , H01L45/1675
摘要： An electrically actuated device includes a first electrode, a second electrode, and an active region disposed between the first and second electrodes. The device further includes at least one of dopant initiators or dopants localized at an interface between i) the first electrode and the active region, or ii) the second electrode and the active region, or iii) the active region and each of the first and second electrodes.
摘要翻译：电驱动装置包括第一电极，第二电极和设置在第一和第二电极之间的有源区。该器件还包括位于i）第一电极和有源区之间的界面处的掺杂剂引发剂或掺杂剂中的至少一种，或ii）第二电极和有源区，或iii）活性区和第一和第二电极。

8. 发明授权

US07796800B2 Determining a dimensional change in a surface using images acquired before and after the dimensional change 失效
标题翻译：使用在尺寸变化之前和之后获取的图像来确定表面中的尺寸变化
公开(公告)号：US07796800B2
公开(公告)日：2010-09-14
申请号：US11046146
申请日：2005-01-28
申请人： Carl E. Picciotto , William M. Tong , Jun Gao
发明人： Carl E. Picciotto , William M. Tong , Jun Gao
IPC分类号： G06K9/00
CPC分类号： G01B11/002 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/7003 , G03F9/7088 , G03F9/7092
摘要： Determining a dimensional change in a surface of an object is described. At a first time, a first image of the surface is acquired at a first spatial window thereon having a first known position relative to a frame of reference. At a second time, a second image of the surface is acquired at a second spatial window thereon having a second known position relative to the frame of reference. The first image and the second image are processed according to an image displacement sensing algorithm to determine a relative translation of a first point on the surface between the first and second times. The relative translation of the first point, the first known position, and the second known position are used to determine the dimensional change in the surface between the first and second times.
摘要翻译：描述确定物体表面中的尺寸变化。在第一时间，在其上具有相对于参照系的第一已知位置的第一空间窗口处获取表面的第一图像。在第二时间，在其上具有相对于参考框架的第二已知位置的第二空间窗口处获取表面的第二图像。根据图像位移检测算法处理第一图像和第二图像，以确定第一次和第二次之间表面上的第一点的相对平移。使用第一点，第一已知位置和第二已知位置的相对平移来确定第一次和第二次之间的表面中的尺寸变化。

9. 发明申请

US20090103930A1 Method and system of tracking optical beam shift 有权
标题翻译：跟踪光束偏移的方法和系统
公开(公告)号：US20090103930A1
公开(公告)日：2009-04-23
申请号：US11975228
申请日：2007-10-17
申请人： Raymond G. Beausoleil , William M. Tong , Alexandre M. Bratkovski
发明人： Raymond G. Beausoleil , William M. Tong , Alexandre M. Bratkovski
IPC分类号： H04B10/00
CPC分类号： H04B10/803
摘要： An optical interconnect includes an optical transmitter having a plurality of optical sources; a light sensing array configured to receive optical beams emitted from the optical sources; and a beam tracking module in communication with the light sensing array. The beam tracking module is configured to calculate a displacement of at least one of the optical beams by extrapolating an extremum from cross-correlation data obtained between at least a portion of a sample reading from the light sensing array and at least a portion of a plurality of shifted versions of a reference reading from the light sensing array. A related method includes calculating a displacement of an optical beam by extrapolating an extremum from cross-correlation data obtained between a sample reading of the optical beam and at least a portion of a plurality of shifted versions of a reference reading from the light sensing array.
摘要翻译：光学互连包括具有多个光源的光发射机; 光感测阵列，被配置为接收从所述光源发射的光束; 以及与光感测阵列通信的光束跟踪模块。光束跟踪模块被配置为通过从在光检测阵列的样本读取的至少一部分和多个部分之间获得的互相关数据外插外部来计算至少一个光束的位移，从光感测阵列的参考读数的移位版本。相关方法包括通过从光传感阵列的参考读数的至少一部分移位的光束的样本读取之间获得的互相关数据外推外部来计算光束的位移。

10. 发明申请

US20090056575A1 Pattern transfer apparatus 审中-公开
标题翻译：图案转印装置
公开(公告)号：US20090056575A1
公开(公告)日：2009-03-05
申请号：US11897776
申请日：2007-08-31
申请人： Jon A. Bartman , William M. Tong , Wei Wu , YuFong Chen
发明人： Jon A. Bartman , William M. Tong , Wei Wu , YuFong Chen
IPC分类号： B41F1/16
CPC分类号： G03F7/0002 , B29C2059/023 , B82Y10/00 , B82Y40/00
摘要： A pattern transfer apparatus including an inflatable membrane is described.
摘要翻译：描述包括充气膜的图案转印装置。

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