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    • 1. 发明授权
    • Method of making master for manufacturing optical disc and method of manufacturing optical disc
    • 制造光盘的制造方法和制造光盘的方法
    • US07648671B2
    • 2010-01-19
    • US10502038
    • 2003-11-20
    • Shinichi KaiAkira KouchiyamaKatsuhisa ArataniKenzo NakagawaYoshihiro Takemoto
    • Shinichi KaiAkira KouchiyamaKatsuhisa ArataniKenzo NakagawaYoshihiro Takemoto
    • H05B6/00
    • G11B7/261G11B7/1267
    • The method of the present invention includes an exposing step in which a laser beam for recording modulated by an information signal corresponding to an information signal of an information concave and convex pattern formed on the optical disc is applied to an inorganic resist layer 101 formed on a substrate 100 to form an exposed pattern corresponding to the information concave and convex pattern on the optical disc, and a development step in which a concave and convex pattern corresponding to the information concave and convex pattern by the inorganic resist layer is formed. By applying a laser beam for estimation to a predetermined area on the inorganic resist layer in the exposing step to estimate recorded signal characteristics of the exposed pattern by the inorganic resist layer using reflected light of the laser beam for estimation, and controlling power of the laser beam for recording based on the estimated result, the aimed information recording on the optical disc can reliably be obtained.
    • 本发明的方法包括曝光步骤,其中将用与在光盘上形成的信息凹凸图案的信息信号对应的信息信号进行记录的激光束施加到形成在光盘上的无机抗蚀剂层101上 基板100,以形成对应于光盘上的信息凹凸图案的曝光图案,以及形成与无机抗蚀剂层的信息凹凸图案相对应的凹凸图案的显影步骤。 通过在曝光步骤中将用于估计的激光束施加到无机抗蚀剂层上的预定区域,以使用用于估计的激光束的反射光通过无机抗蚀剂层估计曝光图案的记录信号特性,并且控制激光器的功率 基于估计结果记录的光束,可以可靠地获得在光盘上记录的目标信息。
    • 2. 发明申请
    • Manufacturing process of original disc for producing optical disc and production process of optical disc
    • 用于生产光盘的原盘的制造过程和光盘的生产过程
    • US20050161842A1
    • 2005-07-28
    • US10505455
    • 2003-12-24
    • Shinichi KaiKatsuhisa ArataniAkira KouchiyamaKenzo NakagawaYoshihiro Takemoto
    • Shinichi KaiKatsuhisa ArataniAkira KouchiyamaKenzo NakagawaYoshihiro Takemoto
    • B29D11/00G11B7/26
    • G11B7/261Y10S425/81
    • The method of the present invention includes: an exposing process in which an inorganic resist layer 101 formed on a substrate 100 is irradiated with recording laser light modulated by an information signal corresponding to an information signal of an information concave and convex pattern formed on an optical disc to form an exposed pattern corresponding to the information concave and convex pattern on the optical disc, and after the above process a development process in which development processing is performed on the inorganic resist layer to form a concave and convex pattern corresponding to the information concave and convex pattern of the inorganic resist layer; in the above exposing process, after a trial exposure is performed on a non-recording area of the above resist layer, the exposed portion is irradiated with evaluation laser light and a recording signal characteristic of the above resist layer is evaluated from the reflected light to determine based on the evaluation result an optimum focus position of recording laser light which is later performed; and accordingly the recording signal characteristic (jitter value) of the optical disc is predicted and evaluated in the exposing process from the recording characteristic of the exposed portion on the resist to appropriately adjust an exposure focusing position based on the evaluation result and thus, a master having an appropriate concave and convex pattern and consequently an optical disc having an excellent characteristic can be manufactured.
    • 本发明的方法包括:曝光处理,其中形成在基板100上的无机抗蚀剂层101被记录激光照射,该记录激光由对应于在光学上形成的信息凹凸图案的信息信号的信息信号调制 形成对应于光盘上的信息凹凸图案的曝光图案,在上述处理之后,对无机抗蚀剂层进行显影处理以形成对应于信息凹部的凹凸图案的显影处理 和无机抗蚀剂层的凸起图案; 在上述曝光处理中,在对上述抗蚀剂层的非记录区域进行试验曝光之后,用评价激光照射曝光部分,并将上述抗蚀剂层的记录信号从反射光评估为 基于评价结果确定记录稍后进行的激光的最佳聚焦位置; 因此根据曝光部分的抗蚀剂的记录特性,在曝光处理中预测和评估光盘的记录信号特性(抖动值),以根据评估结果适当地调整曝光聚焦位置,因此,主 具有适当的凹凸图案,因此可以制造具有优异特性的光盘。
    • 3. 发明授权
    • Method of making master for manufacturing optical disc and method of manufacturing optical disc
    • 制造光盘的制造方法和制造光盘的方法
    • US08119043B2
    • 2012-02-21
    • US10505455
    • 2003-12-24
    • Shinichi KaiKatsuhisa ArataniAkira KouchiyamaKenzo NakagawaYoshihiro Takemoto
    • Shinichi KaiKatsuhisa ArataniAkira KouchiyamaKenzo NakagawaYoshihiro Takemoto
    • B29D11/00B29D17/00
    • G11B7/261Y10S425/81
    • The method of the present invention includes: an exposing process in which an inorganic resist layer 101 formed on a substrate 100 is irradiated with recording laser light modulated by an information signal corresponding to an information signal of an information concave and convex pattern formed on an optical disc to form an exposed pattern corresponding to the information concave and convex pattern on the optical disc, and after the above process a development process in which development processing is performed on the inorganic resist layer to form a concave and convex pattern corresponding to the information concave and convex pattern of the inorganic resist layer; in the above exposing process, after a trial exposure is performed on a non-recording area of the above resist layer, the exposed portion is irradiated with evaluation laser light and a recording signal characteristic of the above resist layer is evaluated from the reflected light to determine based on the evaluation result an optimum focus position of recording laser light which is later performed; and accordingly the recording signal characteristic (jitter value) of the optical disc is predicted and evaluated in the exposing process from the recording characteristic of the exposed portion on the resist to appropriately adjust an exposure focusing position based on the evaluation result and thus, a master having an appropriate concave and convex pattern and consequently an optical disc having an excellent characteristic can be manufactured.
    • 本发明的方法包括:曝光处理,其中形成在基板100上的无机抗蚀剂层101被记录激光照射,该记录激光由对应于在光学上形成的信息凹凸图案的信息信号的信息信号调制 形成对应于光盘上的信息凹凸图案的曝光图案,在上述处理之后,对无机抗蚀剂层进行显影处理以形成对应于信息凹部的凹凸图案的显影处理 和无机抗蚀剂层的凸起图案; 在上述曝光处理中,在对上述抗蚀剂层的非记录区域进行试验曝光之后,用评价激光照射曝光部分,并将上述抗蚀剂层的记录信号从反射光评估为 基于评价结果确定记录稍后进行的激光的最佳聚焦位置; 因此根据曝光部分的抗蚀剂的记录特性,在曝光处理中预测和评估光盘的记录信号特性(抖动值),以根据评估结果适当地调整曝光聚焦位置,因此,主 具有适当的凹凸图案,因此可以制造具有优异特性的光盘。
    • 7. 发明授权
    • Resist material and nanofabrication method
    • 抗蚀材料和纳米加工方法
    • US07175962B2
    • 2007-02-13
    • US10474852
    • 2003-02-20
    • Akira KouchiyamaKatsuhisa Aratani
    • Akira KouchiyamaKatsuhisa Aratani
    • G03F7/004
    • B82Y10/00G03F7/0043G11B7/261
    • A resist material and a nanofabrication method provide high-resolution nanofabrication without an expensive irradiation apparatus using, for example, electron beams or ion beams. That is, the resist material and the nanofabrication method provide finer processing using exposure apparatuses currently in use. A resist layer of an incompletely oxidized transition metal such as W and Mo is selectively exposed and developed to be patterned in a predetermined form. The incompletely oxidized transition metal herein is a compound having an oxygen content slightly deviated to a lower content from the stoichiometric oxygen content corresponding to a possible valence of the transition metal. In other words, the compound has an oxygen content lower than the stoichiometric oxygen content corresponding to a possible valence of the transition metal.
    • 抗蚀剂材料和纳米制造方法提供高分辨率纳米制造,而不需要使用例如电子束或离子束的昂贵的照射装置。 也就是说,抗蚀剂材料和纳米制造方法使用目前使用的曝光设备提供更精细的处理。 不完全氧化的过渡金属如W和Mo的抗蚀剂层被选择性地暴露和显影以以预定形式图案化。 本文中不完全氧化的过渡金属是相对于过渡金属的可能化合价的化学计量氧含量略低于含量的氧含量的化合物。 换句话说,化合物的氧含量低于对应于过渡金属的可能化合价的化学计量的氧含量。