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    • 1. 发明授权
    • Linear motor, stage device, and exposing device
    • 直线电机,平台装置和曝光装置
    • US6043572A
    • 2000-03-28
    • US172163
    • 1998-10-14
    • Shingo NagaiToyoshige SasakiShigeto Kamata
    • Shingo NagaiToyoshige SasakiShigeto Kamata
    • H01L21/027G03F7/20H02K41/03H02K41/00
    • G03F7/70691H02K41/03
    • A linear motor includes a coil for receiving an electrical current and a first plurality of permanent magnets. The coil and the first plurality of permanent magnets move relative to each other in a direction of relative movement when an electrical current flows through the coil. The permanent magnets are arrayed in the direction of relative movement to form a first array. The direction of polarity of each permanent magnet in the first plurality of permanent magnets is oriented 90.degree. relative to the direction of polarity of an adjacent permanent magnet in the first plurality of permanent magnets. The first plurality of permanent magnets has a main portion and an end portion comprising plural corrective permanent magnets. Each of the plural corrective permanent magnets is smaller than the permanent magnets in the main portion having the same or opposite direction of polarity.
    • 线性电动机包括用于接收电流的线圈和第一多个永磁体。 当电流流过线圈时,线圈和第一多个永磁体在相对移动的方向上相对于彼此移动。 永磁体在相对移动的方向上排列以形成第一阵列。 第一多个永磁体中的每个永磁体的极性方向相对于第一多个永磁体中的相邻永磁体的极性方向取向为90度。 第一多个永磁体具有主要部分和包括多个校正永磁体的端部。 多个校正永磁体中的每一个小于具有相同或相反极性方向的主要部分中的永磁体。
    • 2. 发明申请
    • HERMETIC ENVELOPE AND IMAGE DISPLAY APPARATUS USING THE SAME
    • 使用它的HERMETIC ENVELOPE和IMAGE DISPLAY APPARATUS
    • US20090205849A1
    • 2009-08-20
    • US12372287
    • 2009-02-17
    • Akihiro KimuraMasateru YasuharaShigeto Kamata
    • Akihiro KimuraMasateru YasuharaShigeto Kamata
    • H05K5/06
    • H05K5/061
    • A hermetic envelope includes a first plate, a second plate, and a frame provided between the first plate and the second plate to form an interior space. A first bonding part is provided between the frame and the first plate to bond the frame and the first plate to each other, and a first abutting part is provided between the frame and the first plate, and positioned closer to the interior space than the first bonding part. A second bonding part is provided between the frame and the second plate to bond the frame and the second plate to each other, and a second abutting part is provided between the frame and the second plate and positioned closer to the interior space than the second bonding part. The second bonding part is positioned closer to the interior space than the first bonding part.
    • 密封壳包括第一板,第二板和设置在第一板和第二板之间以形成内部空间的框架。 第一接合部设置在框架和第一板之间,以将框架和第一板彼此接合,并且第一邻接部分设置在框架和第一板之间,并且位于比第一板更接近内部空间的位置 粘接部分。 第二接合部设置在框架和第二板之间,以将框架和第二板彼此接合,并且第二抵接部分设置在框架和第二板之间,并且定位成比第二接合更靠近内部空间 部分。 第二接合部位于比第一接合部更靠近内部空间的位置。
    • 6. 发明授权
    • Hermetic envelope and image display apparatus using the same
    • 密封信封和使用其的图像显示装置
    • US08115391B2
    • 2012-02-14
    • US12372287
    • 2009-02-17
    • Akihiro KimuraMasateru YasuharaShigeto Kamata
    • Akihiro KimuraMasateru YasuharaShigeto Kamata
    • H01J17/16H01L33/00
    • H05K5/061
    • A hermetic envelope includes a first plate, a second plate, and a frame provided between the first plate and the second plate to form an interior space. A first bonding part is provided between the frame and the first plate to bond the frame and the first plate to each other, and a first abutting part is provided between the frame and the first plate, and positioned closer to the interior space than the first bonding part. A second bonding part is provided between the frame and the second plate to bond the frame and the second plate to each other, and a second abutting part is provided between the frame and the second plate and positioned closer to the interior space than the second bonding part. The second bonding part is positioned closer to the interior space than the first bonding part.
    • 密封壳包括第一板,第二板和设置在第一板和第二板之间以形成内部空间的框架。 第一接合部设置在框架和第一板之间,以将框架和第一板彼此接合,并且第一邻接部分设置在框架和第一板之间,并且位于比第一板更接近内部空间的位置 粘接部分。 第二接合部设置在框架和第二板之间,以将框架和第二板彼此接合,并且第二抵接部分设置在框架和第二板之间,并且定位成比第二接合更靠近内部空间 部分。 第二接合部位于比第一接合部更靠近内部空间的位置。
    • 9. 发明申请
    • Method of effecting heating and cooling in reduced pressure atmosphere
    • 在减压气氛中进行加热和冷却的方法
    • US20050029243A1
    • 2005-02-10
    • US10912141
    • 2004-08-06
    • Shigeto KamataAkihiro Kimura
    • Shigeto KamataAkihiro Kimura
    • F27B5/14F27B17/00F27D9/00F27D19/00F27D99/00
    • F27D99/0001F27B17/0016F27D9/00F27D19/00
    • The present invention provides a method of effecting high temperature vacuum heating and cooling suitable for conducting heat treatment to be performed on components used in a display apparatus. The present invention's heating/cooling method comprises the steps of: heating a plate-like member placed in a reduced pressure atmosphere in a chamber by heating means opposed to the plate-like member; and cooling the plate-like member by a cooling plate which is opposed to the plate-like member, with the heating means therebetween, the cooling plate having a heat reflecting function. In one aspect of the present invention, the cooling plate is designed to have a emissivity of not less than 0.50 but not more than 0.80 so as to minimizes a sum of a requisite time for the heating step and a requisite time for the cooling step. In another aspect of the present invention, the plate-like member to be heated has two main surfaces differing from each in an in-plane distribution of emissivity and the heating means is opposed to one of the two main surfaces, which has a smaller distribution ratio, thereby realizing uniform and efficient heating/cooling.
    • 本发明提供一种实现对在显示装置中使用的部件进行热处理的高温真空加热和冷却的方法。 本发明的加热/冷却方法包括以下步骤:通过与板状部件相对的加热装置将设置在减压气氛中的板状部件加热到室内; 并且通过与板状构件相对的冷却板将板状构件冷却,其间具有加热装置,冷却板具有热反射功能。 在本发明的一个方面,冷却板被设计为具有不小于0.50但不大于0.80的发射率,以使加热步骤的必要时间和冷却步骤的必要时间之和最小化。 在本发明的另一方面,待加热的板状构件具有两个主表面,每个在发射率的面内分布中各自不同,并且加热装置与两个主表面中的一个相对,分布较小 比例,从而实现均匀有效的加热/冷却。