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    • 2. 发明申请
    • Volatile memory structure and method for forming the same
    • 挥发性记忆结构及其形成方法
    • US20050067646A1
    • 2005-03-31
    • US10669346
    • 2003-09-25
    • Shih-Lung ChenYueh-Chuan Lee
    • Shih-Lung ChenYueh-Chuan Lee
    • H01L21/8239H01L21/8242H01L27/108
    • H01L27/10867
    • A method for forming a volatile memory structure. A buried trench capacitor in each of a pair of neighboring trenches formed in a substrate. An asymmetric collar insulating layer is formed over an upper portion of the sidewall of each trench and has a high and a low level portions. A conductive layer is formed overlying the buried trench capacitor and below the surface of the substrate. The high level portion is adjacent to the substrate between the neighboring trenches and the low level portion is covered by the conductive layer. A dielectric layer is formed overlying the conductive layer. Two access transistors are formed on the substrate outside of the pair of the neighboring trenches, respectively, which have source/drain regions electrically connecting to the conductive layer. A volatile memory structure is also disclosed.
    • 一种用于形成易失性存储器结构的方法。 在一对相邻的沟槽中的每一个中形成在衬底中的埋沟槽电容器。 在每个沟槽的侧壁的上部上形成不对称的环形绝缘层,并且具有高和低的电平部分。 形成覆盖在埋入沟槽电容器上并在衬底表面下方的导电层。 高电平部分与相邻沟槽之间的衬底相邻,并且低电平部分被导电层覆盖。 形成覆盖导电层的电介质层。 两个存取晶体管分别形成在一对相邻沟槽之外的衬底的外侧,其中源/漏区电连接到导电层。 还公开了易失性存储器结构。
    • 4. 发明授权
    • Heat dissipating system of high-speed circular knitting machine
    • 高速圆针织机散热系统
    • US07036340B1
    • 2006-05-02
    • US11218462
    • 2005-09-06
    • Shih-Lung Chen
    • Shih-Lung Chen
    • D04B35/30
    • D04B35/30
    • A heat dissipating system of a high-speed circular knitting machine includes a super low temperature air gun. Cold air is ejected from a cold air outlet of the super low temperature air gun for carrying away the high heat produced by a cylinder base during a knitting process. The super low temperature air gun is connected to an extension pipe and extended to a gap between a cutting disc and a pressing plate, or saddle bases, or a lower rhombus ring and two saddle bases, or yarn feeding nozzles. Cold air ejected from the cold air outlet passes through the gap to the cylinder base or other peripheral components of the high-speed circular knitting machine to achieve the heat dissipating effect. The super low temperature air gun is installed inside a leg for supporting a yarn supplying device or on its external surface or on a yarn feeding ring.
    • 高速圆形针织机的散热系统包括超低温气枪。 冷空气从超低温气枪的冷气出口排出,用于在编织过程中带走由气缸底座产生的高热量。 超低温气枪连接到延伸管,并延伸到切割盘和压板,鞍座或下菱形环,两个鞍座或喂纱喷嘴之间的间隙。 从冷气出口排出的冷空气通过间隙通向高速圆形针织机的圆筒底座或其他周边部件,以达到散热效果。 超低温气枪安装在用于支撑供纱装置的腿部或其外表面或喂纱环上。
    • 7. 发明授权
    • Method of manufacturing deep trench capacitor
    • 制造深沟槽电容器的方法
    • US06680237B2
    • 2004-01-20
    • US09967709
    • 2001-09-27
    • Shih-Lung ChenHsiao-Lei WangHwei-Lin ChuangYueh-Chuan Lee
    • Shih-Lung ChenHsiao-Lei WangHwei-Lin ChuangYueh-Chuan Lee
    • H01L2120
    • H01L27/10867
    • A method of manufacturing a deep trench capacitor. A deep trench is formed in a substrate. A conformal capacitor dielectric layer and a first conductive layer are sequentially formed, completely filling the deep trench. The first conductive layer has a seam. The first conductive layer is etched to open up the seam. A collar oxide layer is formed over the interior surface of the deep trench. A collar liner layer is formed over the collar oxide layer inside the deep trench. Using the collar liner layer as a mask, the collar oxide material above the first conductive layer and within the seam is removed. The collar liner layer is removed. Finally, a second conductive layer and a third conductive layer are sequentially formed inside the deep trench.
    • 一种制造深沟槽电容器的方法。 在衬底中形成深沟槽。 依次形成保形电容器电介质层和第一导电层,完全填充深沟槽。 第一导电层具有接缝。 蚀刻第一导电层以打开接缝。 在深沟槽的内表面上形成环状氧化物层。 在深沟槽内部的轴环氧化物层上方形成轴环衬层。 使用套环内层作为掩模,去除第一导电层上方和接缝内的环氧化物材料。 衣领衬里层被去除。 最后,在深沟槽内依次形成第二导电层和第三导电层。