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1. 发明授权

US5404111A Probe apparatus with a swinging holder for an object of examination 失效
标题翻译：具有用于检查对象的摆动支架的探头装置
公开(公告)号：US5404111A
公开(公告)日：1995-04-04
申请号：US77392
申请日：1993-06-17
申请人： Shigeoki Mori , Wataru Karasawa , Hitoshi Fujihara , Masaru Suzuki , Keiichi Yokota
发明人： Shigeoki Mori , Wataru Karasawa , Hitoshi Fujihara , Masaru Suzuki , Keiichi Yokota
IPC分类号： G01R1/073 , G01R31/265 , G01R31/02
CPC分类号： G01R1/07314 , G01R31/2656
摘要： A probe apparatus which has a probe card having a plurality of probes, a wafer holder located above or beside the probe card, for holding a wafer to be examined, a tester head electrically connected to the probes of the probe card, a tester electrically connected to the tester head, for detecting electrical characteristics of the wafer from the data output from the wafer, and a CCD camera arranged to oppose the object, for detecting the position of the wafer.
摘要翻译：一种具有探针卡的探针装置，具有多个探针，位于探针卡上方或旁边的晶片保持器，用于保持要检查的晶片，电连接到探针卡的探针的测试器头，电连接的测试仪用于从晶片输出的数据检测晶片的电特性，以及配置成与物体相对的CCD照相机，用于检测晶片的位置。

2. 发明授权

US5416592A Probe apparatus for measuring electrical characteristics of objects 失效
标题翻译：用于测量物体的电气特性的探针装置
公开(公告)号：US5416592A
公开(公告)日：1995-05-16
申请号：US34779
申请日：1993-03-19
申请人： Shigeoki Mori , Keiichi Yokota
发明人： Shigeoki Mori , Keiichi Yokota
IPC分类号： G01R1/073 , G01R31/311 , G01B11/00 , G01N21/86
CPC分类号： G01R1/07314 , G01R31/311
摘要： A contact ring having probe pins is mounted in the top surface of a casing, and a wafer holder table is placed below the contact ring. A holder member comprising a longitudinally extended cylindrical body are provided in such a manner as to be free to move into and out of a space between the probe pins and the wafer holder table, parallel to the upper surface of a wafer and along guide rails protruding from a casing. An image of the probe pins which act as contact means and an image of the electrode pads of an IC chip on the wafer are input to a camera that is provided in the holder member. With the probe apparatus of the present invention, it is possible to position the wafer while viewing these images, and there is no need to provide a region for separate positioning. This facilitates the design of a smaller probe apparatus.
摘要翻译：具有探针的接触环安装在壳体的顶表面中，并且晶片保持台放置在接触环的下方。提供包括纵向延伸的圆筒体的保持器构件，以便平行于晶片的上表面自由地移动进入和离开探针和晶片保持台之间的空间，并沿着导轨突出从外壳。作为接触装置的探针的图像和晶片上的IC芯片的电极焊盘的图像被输入到设置在保持器构件中的照相机。利用本发明的探针装置，可以在观看这些图像的同时定位晶片，并且不需要提供用于单独定位的区域。这有助于设计较小的探针装置。

3. 发明授权

US4966520A Method of positioning objects to be measured 失效
标题翻译：定位被测物体的方法
公开(公告)号：US4966520A
公开(公告)日：1990-10-30
申请号：US430589
申请日：1989-11-01
申请人： Keiichi Yokota , Ryuichi Takebuchi
发明人： Keiichi Yokota , Ryuichi Takebuchi
IPC分类号： G01R31/316
CPC分类号： G01R31/316
摘要： A method of positioning a wafer when plural chips arranged on the semiconductor wafer are to be measured by a probe apparatus. The direction in which probes of the probe apparatus are set is measured via a dummy wafer and stored as data. The positioning of the wafer can be achieved by the operation of a table on which the wafer is mounted. When the wafer is to be positioned, the chips-lined direction on the wafer is rotated to align with the moving coordinates of the table and then with the probes-set direction. A probing direction in which wafers are successively moved and a reference position on the wafer are determined, and this reference position is aligned with the position of the probes. Measurement is carried out relative to every position of the chips calculated from the reference position, while moving the table along the probing direction.
摘要翻译：通过探针装置测量配置在半导体晶片上的多个芯片时的晶片定位方法。通过虚拟晶片测量探针装置的探针的设置方向，并作为数据存储。晶片的定位可以通过其上安装有晶片的工作台的操作来实现。当晶片定位时，晶片上的芯片排列的方向被旋转以与工作台的移动坐标，然后与探针设定方向对齐。确定晶片连续移动并在晶片上的参考位置的探测方向，并且该参考位置与探针的位置对准。沿着探测方向移动台，相对于从基准位置计算的芯片的每个位置进行测量。

4. 发明授权

US5416256A Process for manufacturing 5-hydroxyisophthalic acid 失效
标题翻译： 5-羟基间苯二甲酸的制备方法
公开(公告)号：US5416256A
公开(公告)日：1995-05-16
申请号：US322308
申请日：1994-10-04
申请人： Takeshi Namekata , Ikuo Ito , Kazuhiko Maeda , Toshio Sato , Keiichi Yokota
发明人： Takeshi Namekata , Ikuo Ito , Kazuhiko Maeda , Toshio Sato , Keiichi Yokota
IPC分类号： B01J31/04 , C07B61/00 , C07C51/255 , C07C51/265 , C07C65/03 , C07C51/16
CPC分类号： C07C51/255 , C07C51/265
摘要： An improved process for manufacturing 5-hydroxyisophthalic acid by means of oxidizing 5-acyloxy-m-xylene or its oxidation intermediate with molecular oxygen in a solvent consisting of lower aliphatic carboxylic acid and acetic anhydride in the presence of catalyst consisting of heavy metal comprising cobalt as the main component, and a bromine compound, and hydrolyzing the product thereby obtained. The improvement is characterized in that the oxidation is carried out under a pressure of 2-15/cm.sup.2 gauge in the presence of an alkali metal compound corresponding to 0.1-1.1 gram atom in terms of alkali metal atom based upon 1 gram atom of the heavy metal used for the catalyst.The present invention produces a high-quality 5-hydroxyisophthalic acid having excellent color from 5-acyloxy-m-xylene.
摘要翻译：在由含有钴的重金属组成的催化剂存在下，通过在由低级脂族羧酸和乙酸酐组成的溶剂中，用分子氧氧化5-酰氧基 - 间二甲苯或其氧化中间体的改进方法制备5-羟基间苯二甲酸作为主要成分和溴化合物，并水解由此得到的产物。改进的特征在于，在碱金属原子的碱金属化合物的存在下，以碱金属原子为基准的碱金属化合物的存在下，以2-15 / cm 2的压力进行氧化，所述碱金属化合物以1克原子重的用于催化剂的金属。本发明从5-酰氧基 - 间二甲苯生产出具有优异颜色的高品质5-羟基间苯二甲酸。

5. 发明授权

US5412329A Probe card 失效
标题翻译：探针卡
公开(公告)号：US5412329A
公开(公告)日：1995-05-02
申请号：US280567
申请日：1994-07-26
申请人： Shinji Iino , Tamio Kubota , Keiichi Yokota
发明人： Shinji Iino , Tamio Kubota , Keiichi Yokota
IPC分类号： G01R1/073 , H01L21/66 , G01R1/06
CPC分类号： G01R1/0735
摘要： A probe card used in a probing test machine which send and receive test signals into circuits through pads of a semiconductor chip, thereby examining the electrical characteristics of the circuits. The probe card comprises a supporting plate, a flexible printed circuit base including a flexible film base material supported by the supporting plate, circuits printed on the film base material being connected electrically to a tester, contactors connected electrically to the printed circuits and adapted to be brought into contact with the pads in equally corresponding relation, and a cushioning medium designed so as to back up a section in which the contactors are mounted. When the contactors are brought into contact with the pads, individually, the cushioning medium undergoes an elastic deformation, so that the contact between the contactors and the pads is improved.
摘要翻译：用于探测试验机的探针卡，其通过半导体芯片的焊盘发送和接收测试信号到电路中，从而检查电路的电特性。探针卡包括支撑板，柔性印刷电路基底，其包括由支撑板支撑的柔性膜基底材料，印刷在膜基材上的电路电连接到测试器，电连接到印刷电路的接触器，以相同的对应关系与垫接触，以及缓冲介质，其被设计成支撑接触器安装的部分。当接触器单独地与垫接触时，缓冲介质经历弹性变形，从而提高了接触器和焊盘之间的接触。

6. 发明授权

US4943767A Automatic wafer position aligning method for wafer prober 失效
标题翻译：晶圆探针自动晶圆位置对准方法
公开(公告)号：US4943767A
公开(公告)日：1990-07-24
申请号：US316142
申请日：1989-02-27
申请人： Keiichi Yokota
发明人： Keiichi Yokota
IPC分类号： G01R1/073
CPC分类号： G01R1/07314
摘要： An automatic alignment method of the position of the probe tips and electric pads of wafer comprises the steps of recognizing and filing the position data of the pads of a new sort wafer and correction amount data between the position of the electrode pads and the probe tips equipped actually with the probe, determining and filing not less than 2 positions of electrode pads for an .theta. alignment of probe, detecting and outputting a height level data of a position of a dummy wafer, forming probe mark, detecting and outputting the positions, in X-, Y-axes, and .theta. direction offset between pads and tips, correcting these offset, repeated these check steps, saving final correction data, and using these data for aligning an actual wafer.
摘要翻译：针对晶片的探针尖端和电极焊盘的位置的自动对准方法包括以下步骤：识别和填充新分类晶片的焊盘的位置数据，以及在电极焊盘的位置与配备的探针尖之间的校正量数据实际上使用探头，确定和填充不少于2个位置的电极焊盘用于探针的θ对准，检测并输出虚拟晶片的位置的高度电平数据，形成探针标记，检测和输出位置，X - ，Y轴和θ方向偏移，校正这些偏移，重复这些检查步骤，节省最终校正数据，并使用这些数据对准实际晶片。

7. 发明授权

US06768022B2 Method for producing thiosalicylic acid 失效
标题翻译：硫代水杨酸的制备方法
公开(公告)号：US06768022B2
公开(公告)日：2004-07-27
申请号：US10315985
申请日：2002-12-11
申请人： Keiichi Yokota
发明人： Keiichi Yokota
IPC分类号： C07C38100
CPC分类号： C07C319/14 , C07C323/62
摘要： The present invention relates to a method for causing sodium sulfide or a mixture of sodium sulfide and sulfur to react with diazonium salt formed by diazotizing anthranilic acid, wherein the Na/S atomic ratio as calculated on the basis of the employed sodium sulfide and sulfur is adjusted to within the range of 1.33 to 2.0 during the reaction. Thus is made practicable the manufacture of thiosalicylic acid in a high yield without going through the individual route of isolating and reducing dithiosalicylic acid.
摘要翻译：本发明涉及使硫化钠或硫化钠和硫的混合物与通过重氮化邻氨基苯甲酸形成的重氮盐反应的方法，其中根据所使用的硫化钠和硫计算的Na / S原子比为在反应期间调节至1.33至2.0的范围内。因此，可以高产率地制造硫代水杨酸，而不需要通过分离和还原二硫代水杨酸的单独途径。

8. 发明授权

US6054609A Method of separating isomers of nitrotoluic acid 失效
标题翻译：分离硝基甲酸异构体的方法
公开(公告)号：US6054609A
公开(公告)日：2000-04-25
申请号：US194018
申请日：1998-11-19
申请人： Keiichi Yokota , Ikuo Ito , Seiji Takeuchi
发明人： Keiichi Yokota , Ikuo Ito , Seiji Takeuchi
IPC分类号： C07C201/16 , C07C205/57 , C07C205/06
CPC分类号： C07C201/16
摘要： A method of separating 3-nitro-o-toluic acid and 5-nitro-o-toluic acid from a mixture of said isomers, comprising producing salts by adding an aromatic organic base, for example, aniline or pyridine, to the said mixture, separating said salts into solids and a mother liquor, by taking advantage of the difference in solubilities between the said salts to water or a mixed solvent consisting of water and a water-soluble organic compound, for example, methanol, and, further, recovering 3-nitro-o-toluic acid from the mother liquor and 5-nitro-o-toluic acid from the solids.
摘要翻译： PCT No.PCT / JP98 / 00277 Sec。 371日期：1998年11月19日 102（e）1998年11月19日日期PCT 1998年1月26日PCT PCT。出版物WO98 / 42654 日期1998年10月1日从所述异构体的混合物中分离出3-硝基邻甲苯甲酸和5-硝基邻甲苯甲酸的方法，包括通过加入芳族有机碱例如苯胺或吡啶来制备盐，通过利用所述盐与水或由水和水溶性有机化合物（例如甲醇）组成的混合溶剂之间的溶解度的差异，将所述盐分离成固体和母液，并且进一步从母液中回收3-硝基 - 邻甲苯甲酸，从固体中回收5-硝基 - 邻甲苯甲酸。

9. 发明授权

US5550284A Production method for alkoxynaphthalenecarboxylic acid 失效
标题翻译：烷氧基萘羧酸的制备方法
公开(公告)号：US5550284A
公开(公告)日：1996-08-27
申请号：US292052
申请日：1994-08-16
申请人： Toshio Sato , Ikuo Ito , Kazuhiko Maeda , Keiichi Yokota , Takeshi Namekata , Akihiko Nemoto
发明人： Toshio Sato , Ikuo Ito , Kazuhiko Maeda , Keiichi Yokota , Takeshi Namekata , Akihiko Nemoto
IPC分类号： C07C41/18 , C07C41/30 , C07C51/265 , C07C63/34
CPC分类号： C07C41/30 , C07C41/18 , C07C51/265 , C07C2101/10
摘要： Alkoxynaphthalenecarboxylic acid is produced by a process comprising the addition of 1,3-butadiene to alkoxyalkylbenzene to yield an adduct. The adduct is cyclized in the presence of an acid catalyst to alkoxyalkyltetralin. The tetralin derivative is then dehydrogenated to produce aloxyalkylnaphthalene, which is oxidized to alkoxynaphthalenecarboxylic acid.
摘要翻译：烷氧基萘羧酸通过包括向烷氧基烷基苯中加入1,3-丁二烯以产生加合物的方法制备。加成物在酸催化剂存在下环化成烷氧基烷基四氢化萘。然后将四氢化萘衍生物脱氢以产生氧化成烷氧基萘羧酸的氧基烷基萘。

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