专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20060097162A1 Apparatus and method for determining surface profiles using a scanning probe microscope 有权
标题翻译：使用扫描探针显微镜确定表面轮廓的装置和方法
公开(公告)号：US20060097162A1
公开(公告)日：2006-05-11
申请号：US11251795
申请日：2005-10-18
申请人： Shigenobu Maruyama , Mineo Nomoto , Toru Kurenuma , Yuichi Kunitomo , Yukio Kembo
发明人： Shigenobu Maruyama , Mineo Nomoto , Toru Kurenuma , Yuichi Kunitomo , Yukio Kembo
IPC分类号： G21K7/00
CPC分类号： G01Q10/04
摘要： A scanning probe microscope for measuring a surface profile of a sample by bringing a probe into close proximity to or contact with the surface of the sample and scanning the sample surface includes: a sample stage movable in at least one axis direction; the probe which is brought into close proximity to or contact with the surface of the sample mounted on the sample stage and scans the sample surface; a probe-driving unit for moving the probe three-dimensionally; a probe deflection detector for detecting a deflection of the probe; and an observation optical system which has an objective lens and observes the probe disposed on substantially the optical axis of the objective lens, and the sample. The probe-driving unit is disposed with three sets of paired drive sources arranged essentially with symmetry with respect to the optical axis of the objective lens.
摘要翻译：一种扫描探针显微镜，用于通过使探针靠近或接触样品的表面并扫描样品表面来测量样品的表面轮廓，包括：可在至少一个轴向移动的样品台; 该探头与安装在样品台上的样品的表面紧密接触或接触并扫描样品表面; 用于三维移动探头的探针驱动单元; 用于检测探针偏转的探针偏转检测器; 以及观察光学系统，其具有物镜并观察设置在物镜的基本光轴上的探针和样品。探针驱动单元设置有三组成对的驱动源，其基本上相对于物镜的光轴对称布置。

2. 发明授权

US07498589B2 Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：US07498589B2
公开(公告)日：2009-03-03
申请号：US11251795
申请日：2005-10-18
申请人： Shigenobu Maruyama , Mineo Nomoto , Toru Kurenuma , Yuichi Kunitomo , Yukio Kembo
发明人： Shigenobu Maruyama , Mineo Nomoto , Toru Kurenuma , Yuichi Kunitomo , Yukio Kembo
IPC分类号： G21K7/00
CPC分类号： G01Q10/04
摘要： A scanning probe microscope for measuring a surface profile of a sample by bringing a probe into close proximity to or contact with the surface of the sample and scanning the sample surface includes: a sample stage movable in at least one axis direction; the probe which is brought into close proximity to or contact with the surface of the sample mounted on the sample stage and scans the sample surface; a probe-driving unit for moving the probe three-dimensionally; a probe deflection detector for detecting a deflection of the probe; and an observation optical system which has an objective lens and observes the probe disposed on substantially the optical axis of the objective lens, and the sample. The probe-driving unit is disposed with three sets of paired drive sources arranged essentially with symmetry with respect to the optical axis of the objective lens.
摘要翻译：一种扫描探针显微镜，用于通过使探针靠近或接触样品的表面并扫描样品表面来测量样品的表面轮廓，包括：可在至少一个轴向移动的样品台; 该探头与安装在样品台上的样品的表面紧密接触或接触并扫描样品表面; 用于三维移动探头的探针驱动单元; 探针偏转检测器，用于检测探针的偏转; 以及观察光学系统，其具有物镜并观察设置在物镜的基本光轴上的探针和样品。探针驱动单元设置有三组成对的驱动源，其基本上相对于物镜的光轴对称布置。

3. 发明申请

US20080087820A1 PROBE CONTROL METHOD FOR SCANNING PROBE MICROSCOPE 审中-公开
标题翻译：用于扫描探针显微镜的探测控制方法
公开(公告)号：US20080087820A1
公开(公告)日：2008-04-17
申请号：US11867476
申请日：2007-10-04
申请人： Toru KURENUMA , Hiroaki Yanagimoto , Yukio Kembo , Yuichi Kunitomo , Takafumi Morimoto , Satoshi Sekino
发明人： Toru KURENUMA , Hiroaki Yanagimoto , Yukio Kembo , Yuichi Kunitomo , Takafumi Morimoto , Satoshi Sekino
IPC分类号： G01N23/00
CPC分类号： G01Q10/06 , G01Q30/06
摘要： This probe control method is applied to the scanning probe microscope having a probe section with a probe pointed at a sample, a detection section for detecting physical quantity between the sample and the probe, a measurement section for measuring the surface of the sample to obtain the surface information on the basis of the physical quantity when scanning the sample surface by the probe, and a movement mechanism with at least two degree of freedom. The probe control method has steps of moving the probe in a scanning direction different from the contact direction while making the probe come into contact with the sample surface, detecting the torsional state of the probe during the movement of the probe, and adjusting either or both of the rate in the scanning direction and the force in the contact direction on the basis of the detected value obtained by the detection step.
摘要翻译：将该探针控制方法应用于具有探针指向样品的探针部的扫描探针显微镜，用于检测样品与探针之间的物理量的检测部，测定样品表面的测定部，基于通过探针扫描样品表面时的物理量的表面信息，以及具有至少两个自由度的移动机构。探针控制方法具有使探针沿着与接触方向不同的扫描方向移动的步骤，同时使探针与样品表面接触，检测探针移动期间探针的扭转状态，并且调节任一或两者基于通过检测步骤获得的检测值，扫描方向上的速率和接触方向上的力。

4. 发明授权

US5623100A Ultrasonic inspection and imaging intstrument 失效
标题翻译：超声波检查和成像仪器
公开(公告)号：US5623100A
公开(公告)日：1997-04-22
申请号：US505535
申请日：1995-07-21
申请人： Yukio Arima , Toshihiro Kimura , Yuichi Kunitomo , Tadatoshi Shimamura , Takeshi Nishiduka , Ken Takeuchi
发明人： Yukio Arima , Toshihiro Kimura , Yuichi Kunitomo , Tadatoshi Shimamura , Takeshi Nishiduka , Ken Takeuchi
IPC分类号： G01N29/06 , G01N29/24 , G01N29/34 , G01N29/38 , G01S15/89
CPC分类号： G01S15/8906 , G01N29/0645 , G01N29/2456 , G01N29/343 , G01N29/345 , G01N29/38 , G01N29/4454 , G01N29/4463 , G01N2291/011 , G01N2291/02854 , G01N2291/0423 , G01N2291/2697
摘要： In an ultrasonic inspection and imaging instrument, a pulse generator and a burst wave generator are provided in association with the activation of an ultrasonic probe by the pulse generator and in response to a measurement value obtained from a signal reception circuit portion. A first gate position is obtained with regard to an inspection portion in a sample, and then a second gate position for a burst wave measurement is set by correcting the first gate position. The burst wave measurement is performed by activating the burst wave generator.
摘要翻译：在超声波检查和成像仪器中，与通过脉冲发生器激活超声波探头并响应于从信号接收电路部分获得的测量值相关联地提供脉冲发生器和脉冲波发生器。关于样本中的检查部分获得第一门位置，然后通过校正第一门位置来设置用于突发波测量的第二门位置。突发波测量通过激活脉冲串波发生器来执行。

5. 发明授权

US5179954A Ultrasonic inspection and imaging instrument 失效
标题翻译：超声波检查和成像仪器
公开(公告)号：US5179954A
公开(公告)日：1993-01-19
申请号：US707567
申请日：1991-05-30
申请人： Yukio Arima , Hiroaki Yanagimoto , Yuichi Kunitomo , Tetsuyoshi Tominaga
发明人： Yukio Arima , Hiroaki Yanagimoto , Yuichi Kunitomo , Tetsuyoshi Tominaga
IPC分类号： G01Q30/04 , G01Q80/00 , G01Q90/00 , G01S7/52 , G01S15/89
CPC分类号： G01S15/8945 , B82Y15/00 , G01S7/52061
摘要： An ultrasonic inspection and imaging instrument scans an object under examination, the object having an inspection plane at a predetermined depth, in the direction slanted to the depth (slant scanning), in such a way as to cause rectilinear scanning as viewed from the plane. Measured data on a peak value corresponding to each measurement point obtained from the slant scanning are displayed in the form of a picture on the screen of a display relative to each measurement point. The image displayed on the picturee at that time is most clearly demonstrated, provided an image portion in the vicinity of a test portion corresponding to a test surface is brought into focus in the depth direction. An operator selects the image portion clearly indicated out of the picture displayed on the display, and inputs the position of the image thereon to an input unit, whereby an image processor bases the positional information about the display data thus fed and the relevant information indicating the positional relationship in the depth direction on obtaining the position of the probe in the depth direction when the measured value resulting from the image is collected. The image processor positions the probe there, so that the probe is automatically focused on the test surface.

6. 发明授权

US5293326A Ultrasonic inspection and imaging instrument 失效
标题翻译：超声波检查和成像仪器
公开(公告)号：US5293326A
公开(公告)日：1994-03-08
申请号：US719510
申请日：1991-06-24
申请人： Yukio Arima , Hiroaki Yanagimoto , Yuichi Kunitomo , Shouya Makihara , Tetsuyoshi Tominaga
发明人： Yukio Arima , Hiroaki Yanagimoto , Yuichi Kunitomo , Shouya Makihara , Tetsuyoshi Tominaga
IPC分类号： G01N29/06 , G01N29/44 , G01Q10/06 , G01Q30/04 , G01Q80/00 , G01Q90/00 , G01S7/52 , G01N29/00 , G09G5/00
CPC分类号： G01S7/52074 , G01N29/0609 , G01N29/0645 , B82Y35/00 , G01N2291/02854
摘要： An ultrasonic inspection and imaging instrument is characterized by storing reduced image examples (images by means of reduced image display data obtained by scaling down picture display data) of an ultrasonic measurement picture beforehand, together with measurement conditions at the time the measurement picture is obtained prior to a scale-down imaging process. When the measurement is started or the measurement conditions are otherwise changed, the measurement conditions are set as those obtained from the measurement picture prior to the scale-down processing with one of the reduced image examples thus selected as an index while a list of image examples is indicated on a display and read from a memory unit for ultrasonic measuring purposes. When a reduced image example or what is similar to the example desired by an operator is selected, proper measurement conditions are automatically set in the ultrasonic inspection and imaging instrument. When the operator wants to change or switch the measurement picture, moreover, he/she is able to make ultrasonic measurement on confirming what the subsequent image is like or what an image is desired to be selected by means of the reduced image example beforehand.
摘要翻译：超声波检查和成像仪器的特征在于预先存储超声波测量图像的缩小图像示例（通过缩小图像显示数据获得的缩小图像显示数据的图像）以及在获得测量图像时的测量条件到缩小成像过程。当测量开始或测量条件另外改变时，测量条件被设置为在缩小处理之前从测量图像获得的测量条件，其中一个缩小图像示例被选择为索引，而图像示例列表在显示器上指示并从用于超声波测量目的的存储器单元读取。当选择缩小的图像示例或类似于操作者期望的示例时，在超声波检查和成像仪器中自动设置适当的测量条件。此外，当操作者想要改变或切换测量图像时，他/她能够通过预先通过缩小的图像实例来确认随后的图像是什么样的或希望选择什么图像来进行超声波测量。

7. 发明授权

US5481917A Ultrasonic inspection and imaging instrument 失效
标题翻译：超声波检查和成像仪器
公开(公告)号：US5481917A
公开(公告)日：1996-01-09
申请号：US290960
申请日：1994-08-24
申请人： Yukio Arima , Toshihiro Kimura , Tohru Miyata , Yuichi Kunitomo
发明人： Yukio Arima , Toshihiro Kimura , Tohru Miyata , Yuichi Kunitomo
IPC分类号： G01N29/06 , G01S15/89 , G01N29/04
CPC分类号： G01S15/8936 , G01N29/0618
摘要： A scanning range of an object under examination is divided into m pieces (m is an integer equal to or more than 2) in a subscanning direction. One measurement condition or one parameter is set in m steps, and an ultrasonic measurement is performed on the object under examination while allotting successively the m-stepped measurement conditions or the m-stepped parameters to the respective scanning regions divided in the subscanning direction. A plurality of measurement images obtained under the m-stepped measurement conditions are displayed so as to permit comparison on a screen, and one of the m-stepped measurement conditions or m-stepped parameters which corresponds to an image selected from the displayed screen is set as the measurement condition.
摘要翻译： PCT No.PCT / JP94 / 00003 Sec。 371日期：1994年8月24日 102（e）1994年8月24日PCT 1994年1月5日PCT PCT。 WO94 / 16321 PCT出版物日期为1994年7月21日。检查对象的扫描范围在副扫描方向上被划分为m个（m是等于或大于2的整数）。一个测量条件或一个参数以m个步骤设置，并且对被检查对象进行超声波测量，同时连续分配m级测量条件或m阶参数到在副扫描方向上划分的各个扫描区域。显示在m阶测量条件下获得的多个测量图像，以便允许在屏幕上进行比较，并且设置与从所显示的屏幕中选择的图像相对应的m步测量条件或m阶参数中的一个作为测量条件。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式