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    • 5. 发明授权
    • Plasma processing apparatus and shower head
    • 等离子处理装置和淋浴头
    • US08747609B2
    • 2014-06-10
    • US12888664
    • 2010-09-23
    • Hachishiro IizukaJun AbeYuki Mochizuki
    • Hachishiro IizukaJun AbeYuki Mochizuki
    • H01L21/3065C23F1/00C23C16/00
    • H01J37/3244H01J37/3266
    • A plasma processing apparatus includes a shower head that is installed within a processing chamber for processing a substrate therein so as to face a mounting table for mounting the substrate thereon and supplies a gas toward the substrate in a shower pattern through a plurality of gas discharge holes provided in a facing surface of the shower head facing the mounting table; a plurality of gas exhaust holes formed through the shower head to be extended from the facing surface of the shower head to an opposite surface from the facing surface; a multiple number of rod-shaped magnet pillars standing upright in a gas exhaust space communicating with the gas exhaust holes on the side of the opposite surface; and a driving unit that varies a distance between the magnet pillars and the gas exhaust holes by moving at least a part of the magnet pillars.
    • 一种等离子体处理装置,包括安装在用于处理基板的处理室内的淋浴喷头,面对用于将基板安装在其上的安装台,并通过多个气体排出孔向喷射基板喷射气体 设置在所述淋浴喷头的面向所述安装台的面对面上; 多个排气孔,其形成为穿过所述淋浴喷头,从所述喷淋头的相对表面延伸到与所述相对表面相反的表面; 多个杆状磁体柱直立放置在与相对表面侧的排气孔连通的排气空间中; 以及驱动单元,其通过移动至少一部分磁体柱来改变磁体柱和排气孔之间的距离。
    • 6. 发明授权
    • Temperature measuring apparatus and temperature measuring method
    • 温度测量仪和温度测量方法
    • US07952717B2
    • 2011-05-31
    • US12043406
    • 2008-03-06
    • Jun AbeTatsuo MatsudoChishio Koshimizu
    • Jun AbeTatsuo MatsudoChishio Koshimizu
    • G01B9/02
    • G01K11/125
    • A temperature measuring apparatus includes a light source, a first splitter, a second splitter, a reference beam reflector, an optical path length adjuster, a reference beam transmitting member, a first to an nth measuring beam transmitting member and a photodetector. The temperature measuring apparatus further includes a controller that stores, as initial peak position data, positions of interference peaks respectively measured in advance by irradiating the first to the nth measuring beam onto the first to the nth measurement point of the temperature measurement object, and compares the initial peak position data to positions of interference peaks respectively measured during a temperature measurement to thereby estimate a temperature at each of the first to the nth measurement point.
    • 温度测量装置包括光源,第一分离器,第二分离器,参考光束反射器,光程长度调节器,参考光束传输部件,第一至第N测量光束传输部件和光电检测器。 温度测量装置还包括控制器,该控制器通过将第一至第N测量光束照射到温度测量对象的第一至第N测量点上,预先分别测量的干扰峰的位置作为初始峰值位置数据,并将其进行比较 初始峰值位置数据分别在温度测量期间测量的干涉峰位置,从而估计第一至第n测量点中的每一个处的温度。
    • 8. 发明申请
    • Connection Member In Wiper Blade
    • 雨刷连接件
    • US20090293218A1
    • 2009-12-03
    • US12223058
    • 2007-01-26
    • Masaru FujiwaraJun AbeKen Machida
    • Masaru FujiwaraJun AbeKen Machida
    • B60S1/40
    • B60S1/4009B60S1/4019B60S2001/4012
    • A connection member that includes right and left side walls; a shaft support portion that is swingably fitted onto a support shaft that is provided at the blade main body; upper and lower pieces that are formed so as to be continuous from the shaft support portion; and projections that come into sliding contact with inner side surfaces at the opening are formed on outer side surfaces of the right and left side walls, wherein: the shaft support portion and the upper piece are integrally formed so as to bridge the right and left side walls, the lower piece is formed so as to be separated from the right and left side walls by a groove, and outward projection amounts of the projections are larger at the lower piece than at the upper piece.
    • 包括右侧壁和左侧壁的连接构件; 轴支撑部,其可摆动地安装在设置在所述叶片主体上的支撑轴上; 形成为从轴支撑部连续的上下片; 并且在左右侧壁的外侧面形成有与开口部的内侧面滑动接触的突起,其中:轴支撑部和上部片整体形成为使左右侧 壁部分形成为通过凹槽与左右侧壁分离,并且突出部的向外突出量比下部件处于较大的部分。