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    • 1. 发明申请
    • Magnetic head with air bearing surface protection film and manufacturing method thereof
    • 带空气轴承表面保护膜的磁头及其制造方法
    • US20060072246A1
    • 2006-04-06
    • US11245481
    • 2005-10-05
    • Shigehiko FujimakiHiroshi InabaHiroshi Ishizaki
    • Shigehiko FujimakiHiroshi InabaHiroshi Ishizaki
    • G11B5/60
    • G11B5/6005G11B5/3106G11B5/40
    • To promote reduction in thickness of an air bearing surface protective film of a magnetic head, a magnetic head having an air bearing surface protective film consisting only of a thin carbon film while excluding formation of a dead layer by ion incidence as less as possible to the read/write device, and a manufacturing method therefore, are provided. In an embodiment, an air bearing surface protective film of a magnetic head comprises a thin carbon film, in which the mass density a lowermost layer of the air bearing surface protective film on the side of a magnetic device is made lower compared with a thin carbon film constituting other adjacent layers. Further, the manufacturing method comprises deposition under the control of time for the incident angle of ion flow to a substrate to be processed and deposition under the control of time for the ion flow energy to a substrate to be processed
    • 为了促进磁头的空气轴承表面保护膜的厚度的减小,磁头具有仅由薄碳膜构成的空气轴承表面保护膜,同时排除通过离子入射形成的死层尽可能少地 读/写装置及其制造方法。 在一个实施例中,磁头的空气轴承表面保护膜包括薄碳膜,其中与磁性元件一侧的空气轴承表面保护膜的最下层的质量密度比薄碳 构成其他相邻层的膜。 此外,制造方法包括在时间控制下进行离子流入待处理基板的入射角的沉积,并且在时间控制下进行离子流动能量到待处理基板的沉积
    • 2. 发明授权
    • Magnetic head with air bearing surface protection film and manufacturing method thereof
    • 带空气轴承表面保护膜的磁头及其制造方法
    • US07551398B2
    • 2009-06-23
    • US11245481
    • 2005-10-05
    • Shigehiko FujimakiHiroshi InabaHiroshi Ishizaki
    • Shigehiko FujimakiHiroshi InabaHiroshi Ishizaki
    • G11B5/60
    • G11B5/6005G11B5/3106G11B5/40
    • To promote reduction in thickness of an air bearing surface protective film of a magnetic head, a magnetic head having an air bearing surface protective film consisting only of a thin carbon film while excluding formation of a dead layer by ion incidence as less as possible to the read/write device, and a manufacturing method therefore, are provided. In an embodiment, an air bearing surface protective film of a magnetic head comprises a thin carbon film, in which the mass density a lowermost layer of the air bearing surface protective film on the side of a magnetic device is made lower compared with a thin carbon film constituting other adjacent layers. Further, the manufacturing method comprises deposition under the control of time for the incident angle of ion flow to a substrate to be processed and deposition under the control of time for the ion flow energy to a substrate to be processed.
    • 为了促进磁头的空气轴承表面保护膜的厚度的减小,磁头具有仅由薄碳膜构成的空气轴承表面保护膜,同时排除通过离子入射形成的死层尽可能少地 读/写装置及其制造方法。 在一个实施例中,磁头的空气轴承表面保护膜包括薄碳膜,其中与磁性元件一侧的空气轴承表面保护膜的最下层的质量密度比薄碳 构成其他相邻层的膜。 此外,制造方法包括在时间控制下进行离子流入待处理基板的入射角的沉积,并且在时间控制下进行离子流向待处理基板的能量的沉积。
    • 3. 发明授权
    • Magnetic head with air bearing surface protection film
    • 磁头带空气轴承表面保护膜
    • US07286326B2
    • 2007-10-23
    • US11140557
    • 2005-05-27
    • Nobuto YasuiHiroshi InabaShinji SasakiHiroshi Ishizaki
    • Nobuto YasuiHiroshi InabaShinji SasakiHiroshi Ishizaki
    • G11B5/60
    • G11B5/6005G11B5/40G11B5/56G11B5/6082
    • Embodiments of the invention provide an air bearing surface protection film having good corrosive resistance, electrical insulative property and mechanical wear resistance in the state of an extremely thin film. In one embodiment, an air bearing surface protection film having good corrosive resistance, electrical insulative property and mechanical wear resistance in a state of an extremely thin film is obtained by disposing a thin silicon nitride film having high density, high electric resistance, chemical stability and high adhesion with a substrate as a lowermost air bearing surface protection film and disposing a film comprising tetrahedral amorphous carbon and nitrogen as an uppermost air bearing surface protection film.
    • 本发明的实施例提供一种在极薄膜状态下具有良好的耐腐蚀性,电绝缘性和机械耐磨性的空气轴承表面保护膜。 在一个实施方案中,通过设置具有高密度,高电阻,化学稳定性的薄氮化硅膜和具有高密度,高电阻,化学稳定性的薄氮化硅膜,获得在极薄膜状态下具有良好的耐腐蚀性,电绝缘性和机械耐磨性的空气轴承表面保护膜 作为最低空气轴承表面保护膜与基板的高粘合性,并且将包含四面体非晶碳和氮的膜设置为最上面的空气轴承表面保护膜。