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    • 3. 发明授权
    • Magnetic head with air bearing surface protection film
    • 磁头带空气轴承表面保护膜
    • US07286326B2
    • 2007-10-23
    • US11140557
    • 2005-05-27
    • Nobuto YasuiHiroshi InabaShinji SasakiHiroshi Ishizaki
    • Nobuto YasuiHiroshi InabaShinji SasakiHiroshi Ishizaki
    • G11B5/60
    • G11B5/6005G11B5/40G11B5/56G11B5/6082
    • Embodiments of the invention provide an air bearing surface protection film having good corrosive resistance, electrical insulative property and mechanical wear resistance in the state of an extremely thin film. In one embodiment, an air bearing surface protection film having good corrosive resistance, electrical insulative property and mechanical wear resistance in a state of an extremely thin film is obtained by disposing a thin silicon nitride film having high density, high electric resistance, chemical stability and high adhesion with a substrate as a lowermost air bearing surface protection film and disposing a film comprising tetrahedral amorphous carbon and nitrogen as an uppermost air bearing surface protection film.
    • 本发明的实施例提供一种在极薄膜状态下具有良好的耐腐蚀性,电绝缘性和机械耐磨性的空气轴承表面保护膜。 在一个实施方案中,通过设置具有高密度,高电阻,化学稳定性的薄氮化硅膜和具有高密度,高电阻,化学稳定性的薄氮化硅膜,获得在极薄膜状态下具有良好的耐腐蚀性,电绝缘性和机械耐磨性的空气轴承表面保护膜 作为最低空气轴承表面保护膜与基板的高粘合性,并且将包含四面体非晶碳和氮的膜设置为最上面的空气轴承表面保护膜。