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1. 发明授权

US06803534B1 Membrane for micro-electro-mechanical switch, and methods of making and using it 有权
标题翻译：微机电开关薄膜及其制造和使用方法
公开(公告)号：US06803534B1
公开(公告)日：2004-10-12
申请号：US09866205
申请日：2001-05-25
申请人： Shea Chen , Brandon W. Pillans , John C. Ehmke , Zhimin Jamie Yao
发明人： Shea Chen , Brandon W. Pillans , John C. Ehmke , Zhimin Jamie Yao
IPC分类号： B81B300
CPC分类号： B81B3/0008 , B81B2201/016 , H01G5/16 , H01H1/0036 , H01H59/0009 , H01H2001/0084
摘要： A micro-electro-mechanical (MEMS) switch (10, 110) has an electrode (22, 122) covered by a dielectric layer (23, 123), and has a flexible conductive membrane (31, 131) which moves between positions spaced from and engaging the dielectric layer. At least one of the membrane and dielectric layer has a textured surface (138) that engages the other thereof in the actuated position. The textured surface reduces the area of physical contact through which electric charge from the membrane can tunnel into and become trapped within the dielectric layer. This reduces the amount of trapped charge that could act to latch the membrane in its actuated position, which in turn effects a significant increase in the operational lifetime of the switch.
摘要翻译：微机电开关（10,110,120）被称为MEMS，并且包括具有两个间隔开的导电柱（17,18）的基部（13,14,17-18）。导电部分（22 ）被提供在柱之间并被介电层（23）覆盖。膜（31,131,231）在柱之间延伸并且具有间隔开的膨胀部分（41-42,141-142,241-242），其有助于纵向膨胀膜在其中心部分分别与电介质层间隔开并与其接合的位置之间弯曲。一种制造开关的方法包括：提供具有对应于膨胀部分的槽或脊的顶表面的间隔材料（76,171,177,178），将膜沉积在间隔物的顶表面上，然后移除间隔物材料。

2. 发明授权

US06988338B1 Lid with a thermally protected window 有权
标题翻译：盖有热保护的窗户
公开(公告)号：US06988338B1
公开(公告)日：2006-01-24
申请号：US10269893
申请日：2002-10-10
申请人： Shea Chen , Cary C. Kyhl , Donald C. Price , Terry V. Baughn
发明人： Shea Chen , Cary C. Kyhl , Donald C. Price , Terry V. Baughn
IPC分类号： E04B7/00
CPC分类号： G02B7/008
摘要： A lid includes a frame, a window which is transmissive to radiation and has a peripheral edge sealingly coupled to the frame, and thermal insulating structure which thermally insulates the peripheral edge of the window. In one embodiment, the thermal insulating structure includes a ring which is made of a thermal insulating material, and extends around the window. In a different embodiment, the thermal insulating structure includes an annular gap between the window and frame, the gap extending around the window. The lid may be part of a housing with a sealed chamber therein, where the window facilitates travel of radiation between the chamber and a location external to the housing.
摘要翻译：盖子包括一个框架，一个对辐射透射并具有密封地连接到该框架上的周边边缘的窗口，以及将该窗口周边边缘热绝缘的隔热结构。在一个实施例中，绝热结构包括由绝热材料制成并围绕窗户延伸的环。在不同的实施例中，隔热结构包括窗和框架之间的环形间隙，间隙围绕窗口延伸。盖可以是其中具有密封室的壳体的一部分，其中窗口有助于辐射在腔室与壳体外部的位置之间的移动。

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