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    • 1. 发明授权
    • Heat exchanger having sloped deflection surface for directing refrigerant
    • 具有用于引导制冷剂的倾斜偏转表面的热交换器
    • US06505478B1
    • 2003-01-14
    • US09614488
    • 2000-07-11
    • Shawn M. CousineauRobert D. KelsoRobert R. Lopez
    • Shawn M. CousineauRobert D. KelsoRobert R. Lopez
    • F28D500
    • G01R31/2874B23Q11/126B23Q11/141B23Q11/143F25B41/04F25B41/043G01R31/2831G01R31/2865G01R31/2891H01L21/67103H01L21/67248
    • A heat exchanger such as an evaporator for a temperature control system includes an input port with an orifice through which a refrigerant enters the heat exchanger. The heat exchanger includes a plurality of plates and a tilted deflection surface near the input port. High-pressure refrigerant entering through the input port impinges on the tilted deflection surface and is deflected by the deflection surface onto the plates. The tilt angle of the deflection surface is selected such that the refrigerant is evenly distributed over the plates resulting in even and highly efficient heat transfer. The heat exchanger can be used as the evaporator in a refrigeration system used to control temperature in a workpiece chuck for supporting a flat workpiece such as a semiconductor wafer during processing and testing. In particular, the heat exchanger can be used to control the temperature of a fluid which is circulated through the chuck to control the temperature of the workpiece and/or the chuck itself. In that setting, the temperature control circulating fluid can be circulated through the heat exchanger over the sides of the plates opposite the refrigerant to cool the circulating fluid. Because the refrigerant is evenly distributed over the plates, highly efficient heat transfer, i.e., cooling, is achieved.
    • 诸如用于温度控制系统的蒸发器的热交换器包括具有孔的输入端口,制冷剂通过该孔口进入热交换器。 热交换器包括多个板和在输入端口附近的倾斜偏转表面。 通过输入口进入的高压制冷剂撞击倾斜的偏转表面,并被偏转表面偏转到板上。 选择偏转表面的倾斜角,使得制冷剂均匀分布在板上,从而产生均匀和高效的热传递。 热交换器可用作制冷系统中的蒸发器,用于控制工件卡盘中的温度,用于在加工和测试期间支撑诸如半导体晶片的平坦工件。 特别地,热交换器可用于控制循环通过卡盘的流体的温度,以控制工件和/或卡盘本身的温度。 在该设定中,温度控制循环流体可以在与制冷剂相对的侧面上通过热交换器循环,以冷却循环流体。 由于制冷剂均匀分布在板上,因此实现了高效的热传递,即冷却。