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1. 发明授权

US06505478B1 Heat exchanger having sloped deflection surface for directing refrigerant 失效
标题翻译：具有用于引导制冷剂的倾斜偏转表面的热交换器
公开(公告)号：US06505478B1
公开(公告)日：2003-01-14
申请号：US09614488
申请日：2000-07-11
申请人： Shawn M. Cousineau , Robert D. Kelso , Robert R. Lopez
发明人： Shawn M. Cousineau , Robert D. Kelso , Robert R. Lopez
IPC分类号： F28D500
CPC分类号： G01R31/2874 , B23Q11/126 , B23Q11/141 , B23Q11/143 , F25B41/04 , F25B41/043 , G01R31/2831 , G01R31/2865 , G01R31/2891 , H01L21/67103 , H01L21/67248
摘要： A heat exchanger such as an evaporator for a temperature control system includes an input port with an orifice through which a refrigerant enters the heat exchanger. The heat exchanger includes a plurality of plates and a tilted deflection surface near the input port. High-pressure refrigerant entering through the input port impinges on the tilted deflection surface and is deflected by the deflection surface onto the plates. The tilt angle of the deflection surface is selected such that the refrigerant is evenly distributed over the plates resulting in even and highly efficient heat transfer. The heat exchanger can be used as the evaporator in a refrigeration system used to control temperature in a workpiece chuck for supporting a flat workpiece such as a semiconductor wafer during processing and testing. In particular, the heat exchanger can be used to control the temperature of a fluid which is circulated through the chuck to control the temperature of the workpiece and/or the chuck itself. In that setting, the temperature control circulating fluid can be circulated through the heat exchanger over the sides of the plates opposite the refrigerant to cool the circulating fluid. Because the refrigerant is evenly distributed over the plates, highly efficient heat transfer, i.e., cooling, is achieved.
摘要翻译：诸如用于温度控制系统的蒸发器的热交换器包括具有孔的输入端口，制冷剂通过该孔口进入热交换器。热交换器包括多个板和在输入端口附近的倾斜偏转表面。通过输入口进入的高压制冷剂撞击倾斜的偏转表面，并被偏转表面偏转到板上。选择偏转表面的倾斜角，使得制冷剂均匀分布在板上，从而产生均匀和高效的热传递。热交换器可用作制冷系统中的蒸发器，用于控制工件卡盘中的温度，用于在加工和测试期间支撑诸如半导体晶片的平坦工件。特别地，热交换器可用于控制循环通过卡盘的流体的温度，以控制工件和/或卡盘本身的温度。在该设定中，温度控制循环流体可以在与制冷剂相对的侧面上通过热交换器循环，以冷却循环流体。由于制冷剂均匀分布在板上，因此实现了高效的热传递，即冷却。

2. 发明授权

US06866094B2 Temperature-controlled chuck with recovery of circulating temperature control fluid 失效
标题翻译：温度控制卡盘回收循环温度控制液
公开(公告)号：US06866094B2
公开(公告)日：2005-03-15
申请号：US09858185
申请日：2001-05-15
申请人： Shawn M. Cousineau , Robert D. Kelso , Douglas S. Olsen , David Stura
发明人： Shawn M. Cousineau , Robert D. Kelso , Douglas S. Olsen , David Stura
IPC分类号： F25D17/02 , B23Q11/12 , B23Q11/14 , F25B9/00 , F25B39/02 , F25B41/00 , F25B41/04 , F28F9/22 , F28F27/00 , F28F27/02 , G01R31/28 , H01L21/00 , H01L21/02 , H01L21/66 , H01L21/683 , H01L21/687 , B23Q3/08 , F25B29/00 , H01L21/68
CPC分类号： H01L21/687 , B23Q11/126 , B23Q11/127 , B23Q11/141 , B23Q11/143 , F25B9/002 , F25B39/028 , F25B41/04 , F28D2021/0077 , F28F9/028 , F28F27/00 , G01R31/2831 , G01R31/2865 , G01R31/2874 , G01R31/2891 , H01L21/67103 , H01L21/67248
摘要： A system and method for controlling temperature in a workpiece chuck are described. A fluid circulation system circulates a temperature control fluid, such as an engineered HFE fluid, through te workpiece chuck. A fluid recovery system coupled to the fluid circulation system recovers a portion of the temperature control fluid from the fluid circulation system by circulating a gas through the fluid circulation system including fluid tubes and fluid passages in the chuck. The gas, which can be air, carries a portion of residual or excess fluid through the fluid circulation system as it is circulated. The residual fluid is carried back to a reservoir such that it can continue to be used to control temperature of the chuck. Where gas and temperature control fluid vapors are displaced from the reservoir, they are routed through a suction line heat exchanger which condenses the vapor. The gas and condensed fluid are separated in a fluid separator. The separated fluid is returned to the reservoir, and the separated air can be vented to the atmosphere.
摘要翻译：描述用于控制工件卡盘中的温度的系统和方法。流体循环系统通过工件卡盘将温度控制流体（例如工程HFE流体）循环。连接到流体循环系统的流体回收系统通过使气体循环通过包括流体管和卡盘中的流体通道的流体循环系统来回收来自流体循环系统的温度控制流体的一部分。当气体循环时，可以是空气的气体携带一部分剩余或过剩的液体通过流体循环系统。剩余流体被运送到储存器，使得其可以继续用于控制卡盘的温度。当气体和温度控制流体蒸气从储存器移位时，它们被引导通过冷凝蒸汽的吸入管线热交换器。气体和冷凝流体在流体分离器中分离。分离的流体返回到储存器，并且分离的空气可以排放到大气中。

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