专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20050103266A1 Accelerated plasma clean 有权
标题翻译：加速等离子清洁
公开(公告)号：US20050103266A1
公开(公告)日：2005-05-19
申请号：US10968420
申请日：2004-10-18
申请人： Shankar Chandran , Scott Hendrickson , Gwendolyn Jones , Shankar Venkataraman , Ellie Yieh
发明人： Shankar Chandran , Scott Hendrickson , Gwendolyn Jones , Shankar Venkataraman , Ellie Yieh
IPC分类号： B08B9/08 , C23C16/44 , H01L21/304 , C25F1/00 , C23C16/00
CPC分类号： C23C16/4405 , Y10S134/902 , Y10S438/905
摘要： A method and apparatus that reduces the time required to clean a processing chamber employing a reactive plasma cleaning process. A plasma is formed in an Astron fluorine source generator from a flow of substantially pure inert-source gas. After formation of the plasma, a flow of a fluorine source gas is introduced therein such that the fluorine source flow accelerates at a rate no greater than 1.67 standard cubic centimeters per second2 (scc/s2). In this fashion, the plasma contains a plurality of radicals and dissociated inert-source gas atoms, defining a cleaning mixture. The ratio of inert-source gas to fluorine source is greater than 1:1.
摘要翻译：一种减少使用反应性等离子体清洗工艺清洁处理室所需时间的方法和装置。在基本上纯的惰性气体气体的流中，在Astron氟源发生器中形成等离子体。在形成等离子体之后，引入氟源气体的流动，使得氟源流以不大于1.67标准立方厘米/秒的速度加速（scc / s < 2 ）。以这种方式，等离子体包含多个自由基和解离的惰性气体原子，限定清洁混合物。惰性气体与氟源的比例大于1:1。

2. 发明授权

US06495233B1 Apparatus for distributing gases in a chemical vapor deposition system 有权
标题翻译：用于在化学气相沉积系统中分配气体的装置
公开(公告)号：US06495233B1
公开(公告)日：2002-12-17
申请号：US09609994
申请日：2000-07-05
申请人： Inna Shmurun , Scott Hendrickson , Gwendolyn Jones , Shankar Venkataraman , Son T. Nguyen , I-Chun Eugenia Liu
发明人： Inna Shmurun , Scott Hendrickson , Gwendolyn Jones , Shankar Venkataraman , Son T. Nguyen , I-Chun Eugenia Liu
IPC分类号： B32B302
CPC分类号： C23C16/45565 , C23C16/455 , C23C16/5096 , H01J37/32458 , Y10T428/21 , Y10T428/211 , Y10T428/218
摘要： A lid assembly for a semiconductor processing apparatus having at least two chambers comprises a lid plate having a first side and a second side and a plasma generation source mounted to the first side of the lid plate. Additionally, at least two gas boxes are coupled to the first side of the lid of the lid plate, and a divider is coupled between the plasma generation source and the at least two gas boxes.
摘要翻译：一种用于具有至少两个腔室的半导体处理装置的盖组件，包括具有第一侧和第二侧的盖板和安装在盖板的第一侧上的等离子体产生源。此外，至少两个气体箱耦合到盖板的盖的第一侧，并且分隔器耦合在等离子体产生源和至少两个气体箱之间。

3. 发明申请

US20100033336A1 Natural gas alarm 审中-公开
标题翻译：天然气报警器
公开(公告)号：US20100033336A1
公开(公告)日：2010-02-11
申请号：US11888595
申请日：2008-08-18
申请人： Gwendolyn Jones
发明人： Gwendolyn Jones
IPC分类号： G08B17/10
CPC分类号： G08B21/16
摘要： A combined natural gas and audible alarm device includes a circular-shaped housing. An internal power supply source is positioned in the housing and includes batteries. Threaded fasteners are supplied for mounting the device onto a support surface. The housing further encloses a natural gas detector, an audible alarm unit, and printed circuit board. A battery status light and a pushbutton switch are externally positioned on the front surface of the housing. The battery status light is illuminated whenever the battery level is low, notifying a person that the battery needs to be replaced. The pushbutton switch is depressed to test operation of the device. As natural gas is lighter than air and rises, the device is either wall or ceiling mounted.
摘要翻译：一种组合的天然气和声音报警装置包括一个圆形的壳体。内部电源位于外壳中并包括电池。提供螺纹紧固件用于将设备安装到支撑表面上。外壳还包括天然气检测器，声音报警单元和印刷电路板。电池状态指示灯和按钮开关外部位于外壳的前表面。电池电量不足时，电池状态指示灯亮起，通知人员电池需要更换。按下按钮开关来测试设备的操作。由于天然气比空气轻，上升，装置是墙壁或天花板安装。

4. 外观设计

USD532232S1 Soap dish 有权
公开(公告)号：USD532232S1
公开(公告)日：2006-11-21
申请号：US29218217
申请日：2004-11-29
申请人： Gwendolyn Jones
设计人： Gwendolyn Jones

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式