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    • 1. 发明授权
    • Single exposure of mask levels having a lines and spaces array using alternating phase-shift mask
    • 使用交替的相移掩模对具有线和间隔阵列的掩模级的单次曝光
    • US07413833B2
    • 2008-08-19
    • US10846275
    • 2004-05-14
    • Shahid ButtScott BukofskyRamachandra DivakaruniCarl RadensWayne Ellis
    • Shahid ButtScott BukofskyRamachandra DivakaruniCarl RadensWayne Ellis
    • G03F1/00
    • G03F1/30H01L21/3083H01L21/32139H01L27/0207H01L27/1087H01L27/10882
    • An active area pattern is formed atop a deep trench pattern with a single exposure using an alternative phase-shift mask. To prevent adjacent spaces of opposite phase from intersecting one another at the ends of substantially opaque features of the active area pattern, one or more connectors are used to connect the ends of the substantially opaque patterns. Trench regions of the deep trench pattern are arranged such that the conduction path of the connectors are interrupted and prevent the lines from shorting to one another. Alternatively, a bit line pattern or a word line pattern having a lines and spaces array and a support region are printed with a single exposure using an alternating phase-shift mask. At one end of the array region, lines having a respective phase shift extend into the support region, and lines of the opposite phase shift are terminated. At the opposite end of the array, the lines that have the opposite phase shift extend into the support region, and the lines of having the respective phase shift are terminated.
    • 使用替代的相移掩模,通过单次曝光在深沟槽图案之上形成有源区域图案。 为了防止相对相位的相邻空间在有源区域图案的基本不透明特征的端部彼此相交,使用一个或多个连接器来连接基本不透明图案的端部。 深沟槽图案的沟槽区域布置成使得连接器的传导路径被中断,并且防止线路彼此短路。 或者,使用交替相移掩模以单次曝光印刷具有线和间隔阵列的位线图案或字线图案和支撑区域。 在阵列区域的一端,具有各自的相移的线延伸到支撑区域,并且相反相移的线路终止。 在阵列的相对端,具有相反相移的线延伸到支撑区域中,并且具有相应相移的线路终止。
    • 5. 发明授权
    • Asymmetric gates for high density DRAM
    • 用于高密度DRAM的非对称门
    • US06458646B1
    • 2002-10-01
    • US09608019
    • 2000-06-30
    • Ramachandra DivakaruniWayne EllisJack MandelmanMary Weybright
    • Ramachandra DivakaruniWayne EllisJack MandelmanMary Weybright
    • H01L218242
    • H01L27/10873H01L27/10894H01L27/10897H01L29/4983
    • A memory device structure including an array device region having one or more asymmetric gates formed therein, wherein each asymmetric gate comprises a first edge having a substantially vertical sidewall and a second edge having a polysilicon step segment, and a support device region including one or more patterned gate conductors formed therein, wherein each patterned gate conductor in the support device region includes edges having substantially vertical sidewalls. The structure may further include a circuit device region located between the array device region and the support device region, said core device region including one or more patterned gates, each gate including a polysilicon step segment on each side of the gate.
    • 一种存储器件结构,包括其中形成有一个或多个非对称栅极的阵列器件区域,其中每个非对称栅极包括具有基本上垂直的侧壁的第一边缘和具有多晶硅台阶段的第二边缘,以及包括一个或多个 形成在其中的图案化栅极导体,其中支撑装置区域中的每个图案化栅极导体包括具有基本垂直侧壁的边缘。 该结构还可以包括位于阵列器件区域和支撑器件区域之间的电路器件区域,所述芯部器件区域包括一个或多个图案化栅极,每个栅极包括在栅极的每一侧上的多晶硅阶梯段。
    • 7. 发明申请
    • SRAM VOLTAGE CONTROL FOR IMPROVED OPERATIONAL MARGINS
    • 用于改进操作标准的SRAM电压控制
    • US20070121370A1
    • 2007-05-31
    • US11164556
    • 2005-11-29
    • Wayne EllisRandy MannDavid WagerRobert Wong
    • Wayne EllisRandy MannDavid WagerRobert Wong
    • G11C11/00
    • G11C5/14G11C11/413
    • A static random access memory (“SRAM”) is provided which includes a plurality of SRAM cells arranged in an array. The array includes a plurality of rows and a plurality of columns. The SRAM includes a plurality of voltage control corresponding to respective ones of the plurality of columns of the array. Each of the plurality of voltage control circuits are coupled to an output of a power supply, each voltage control circuit having a function to temporarily reduce a voltage provided to power supply inputs of a plurality of SRAM cells that belong to a selected column of columns of the SRAM. The selected column is selected and the power supply voltage to that column is reduced during a write operation in which a bit is written to one of the SRAM cells belonging to the selected column.
    • 提供了包括以阵列布置的多个SRAM单元的静态随机存取存储器(“SRAM”)。 阵列包括多个行和多个列。 SRAM包括对应于阵列的多个列中的相应列的多个电压控制。 多个电压控制电路中的每一个耦合到电源的输出,每个电压控制电路具有临时降低提供给属于所选列列的多个SRAM单元的电源输入的电压的功能 SRAM。 选择的列被选择,并且在将位写入属于所选列的SRAM单元之一的写操作期间,该列的电源电压减小。